Lecture Notes on Principles of Plasma Processing

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Publisher : Springer Science & Business Media
ISBN 13 : 1461501814
Total Pages : 213 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Lecture Notes on Principles of Plasma Processing by : Francis F. Chen

Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Collisions of Electrons with Atoms and Molecules

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Publisher : Springer Science & Business Media
ISBN 13 : 1461317797
Total Pages : 252 pages
Book Rating : 4.4/5 (613 download)

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Book Synopsis Collisions of Electrons with Atoms and Molecules by : G.F. Drukarev

Download or read book Collisions of Electrons with Atoms and Molecules written by G.F. Drukarev and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a short outline of the present state of the theory of electron collisions with atomic particles - atoms, molecules and ions. It is addressed to those who by nature of their work need detailed information about the cross sections of various processes of electron collisions with atomic particles: experimentalists working in plasma physics, optics, quantum electronics, atmospheric and space physics, 'etc. Some of the cross sections have been measured. But in many important cases the only source of information is theoretical calcu lation. The numerous theoretical papers dealing with electronic collision processes contain various approximations. The inter relation between them and the level of their accuracy is often diffi cult to understand without a systematic study of the theory of atomic collisions, not to mention that theoretical considerations are necessary for the consistent interpretation of experimental results. The main constituents of the book are: 1. General theory with special emphasis on the topics most impor tant for understanding and discussing electron collisions with atomic particles.

R-Matrix Theory of Atomic Collisions

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Publisher : Springer Science & Business Media
ISBN 13 : 3642159311
Total Pages : 750 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis R-Matrix Theory of Atomic Collisions by : Philip George Burke

Download or read book R-Matrix Theory of Atomic Collisions written by Philip George Burke and published by Springer Science & Business Media. This book was released on 2011-03-28 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt: Commencing with a self-contained overview of atomic collision theory, this monograph presents recent developments of R-matrix theory and its applications to a wide-range of atomic molecular and optical processes. These developments include the electron and photon collisions with atoms, ions and molecules which are required in the analysis of laboratory and astrophysical plasmas, multiphoton processes required in the analysis of superintense laser interactions with atoms and molecules and positron collisions with atoms and molecules required in antimatter studies of scientific and technologial importance. Basic mathematical results and general and widely used R-matrix computer programs are summarized in the appendices.

Fundamental Processes in Atomic Collision Physics

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Publisher : Springer Science & Business Media
ISBN 13 : 1461321255
Total Pages : 783 pages
Book Rating : 4.4/5 (613 download)

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Book Synopsis Fundamental Processes in Atomic Collision Physics by : H. Kleinpoppen

Download or read book Fundamental Processes in Atomic Collision Physics written by H. Kleinpoppen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 783 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Proceedings of the Advanced study Institute on Fundamental Processes in Atomic Collision Physics (Santa Flavia, Italy, September 10-21, 1984) are dedicated to the memory of Sir Harrie r-1assey, whose scientific achievements and life are reviewed herein by Sir David Bates. At the first School on the above topic (Maratea, September 1983, Volume 103 in this series), Harrie Massey presented the introductory lectures, summarized the entire lecture program, and presented an outlook on future developments in atomic collision physics. In an after-dinner speech, Massey recalled personal reminiscences and historical events with regard to atomic collision physics, to which he had contributed by initiating pioneering work and by stimulating and surveying this branch of physics over a period of almost six decades. Participants in the Maratea School will always remember Harrie Massey as a charming and wonderful person who was most pleased to discuss with everyone--students, postdoctorals, and senior scientists--any topic in atomic collision physics. Harrie Massey was a member of the Scientific Advisory Committee of the 1984 Santa Flavia School. Before his death he expressed his interest in attending this second School devoted to the presentation of recent developments and highlights in atomic collision physics. It is the desire of all authors to honor Harrie Massey with their contributions in these Proceedings.

Molecular Processes in Plasmas

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Publisher : Springer Science & Business Media
ISBN 13 : 3540725806
Total Pages : 199 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Molecular Processes in Plasmas by : Yukikazu Itikawa

Download or read book Molecular Processes in Plasmas written by Yukikazu Itikawa and published by Springer Science & Business Media. This book was released on 2007-07-19 with total page 199 pages. Available in PDF, EPUB and Kindle. Book excerpt: A variety of plasmas include molecules rather than only ions or atoms. Examples are ionospheres of the Earth and other planets, stellar atmospheres, gaseous discharges for use in various devices and processes, and fusion plasmas in the edge region. This book describes the role of molecules in those plasmas by showing elementary collision processes involving those molecules.

Case studies in atomic collision physics

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Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Case studies in atomic collision physics by : [Anonymus AC02857898]

Download or read book Case studies in atomic collision physics written by [Anonymus AC02857898] and published by . This book was released on 1969 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

An Introduction to the Atomic and Radiation Physics of Plasmas

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Publisher : Cambridge University Press
ISBN 13 : 1108318010
Total Pages : 313 pages
Book Rating : 4.1/5 (83 download)

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Book Synopsis An Introduction to the Atomic and Radiation Physics of Plasmas by : G. J. Tallents

Download or read book An Introduction to the Atomic and Radiation Physics of Plasmas written by G. J. Tallents and published by Cambridge University Press. This book was released on 2018-02-22 with total page 313 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasmas comprise more than 99% of the observable universe. They are important in many technologies and are key potential sources for fusion power. Atomic and radiation physics is critical for the diagnosis, observation and simulation of astrophysical and laboratory plasmas, and plasma physicists working in a range of areas from astrophysics, magnetic fusion, and inertial fusion utilise atomic and radiation physics to interpret measurements. This text develops the physics of emission, absorption and interaction of light in astrophysics and in laboratory plasmas from first principles using the physics of various fields of study including quantum mechanics, electricity and magnetism, and statistical physics. Linking undergraduate level atomic and radiation physics with the advanced material required for postgraduate study and research, this text adopts a highly pedagogical approach and includes numerous exercises within each chapter for students to reinforce their understanding of the key concepts.

Collision Processes and Excitation of UV Emission from Planetary Atmospheric Gases

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Publisher : Routledge
ISBN 13 : 1351459864
Total Pages : 390 pages
Book Rating : 4.3/5 (514 download)

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Book Synopsis Collision Processes and Excitation of UV Emission from Planetary Atmospheric Gases by : SV Avakyan

Download or read book Collision Processes and Excitation of UV Emission from Planetary Atmospheric Gases written by SV Avakyan and published by Routledge. This book was released on 2022-03-11 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the past few decades, the excitation and ionization of atmospheric gases has become an area of intense research. A large amount of data have been accumulated concerning the various elementary processes which occur when photons, electrons and ions collide with atoms and molecules. This scattered information has now been collected in a handbook for the first time, and the authors give a critical analysis of relevant data. This book is a comprehensive and detailed study of the available information and is distinguished by the following outstanding features: the consideration of a large number of atmospheric constituents, including H^O2, H, N^O2, N, O^O2, O, CO, CO^O2, H^O2O, HCl and some hydrocarbons the maximum number of space particles, including magnetospheric particles, are considered as projectiles: photons, electrons, hydrogen atoms, protons and helium ionsthe energy range under study corresponds to the real spectrum of cosmic fluxes, from threshold values for elementary processes up to several thousand keV the recommended values of cross sections, obtained from analysis of the available experimental data, are given in the handbook and their accuracy is estimated. These features make the handbook particularly valuable to specialists in the aeronomy of planets, comets and active perturbations, as well as to experimentalists and theoreticians working in the fields of plasma physics, atomic and molecular physics, physics of the upper atmosphere, chemical physics, optics and spectroscopy.

Atom - Molecule Collision Theory

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Publisher : Springer Science & Business Media
ISBN 13 : 1461329132
Total Pages : 785 pages
Book Rating : 4.4/5 (613 download)

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Book Synopsis Atom - Molecule Collision Theory by : Richard Barry Bernstein

Download or read book Atom - Molecule Collision Theory written by Richard Barry Bernstein and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 785 pages. Available in PDF, EPUB and Kindle. Book excerpt: The broad field of molecular collisions is one of considerable current interest, one in which there is a great deal of research activity, both experi mental and theoretical. This is probably because elastic, inelastic, and reactive intermolecular collisions are of central importance in many of the fundamental processes of chemistry and physics. One small area of this field, namely atom-molecule collisions, is now beginning to be "understood" from first principles. Although the more general subject of the collisions of polyatomic molecules is of great im portance and intrinsic interest, it is still too complex from the viewpoint of theoretical understanding. However, for atoms and simple molecules the essential theory is well developed, and computational methods are sufficiently advanced that calculations can now be favorably compared with experimental results. This "coming together" of the subject (and, incidentally, of physicists and chemists !), though still in an early stage, signals that the time is ripe for an appraisal and review of the theoretical basis of atom-molecule collisions. It is especially important for the experimentalist in the field to have a working knowledge of the theory and computational methods required to describe the experimentally observable behavior of the system. By now many of the alternative theoretical approaches and computational procedures have been tested and intercompared. More-or-Iess optimal methods for dealing with each aspect are emerging. In many cases working equations, even schematic algorithms, have been developed, with assumptions and caveats delineated.

Introduction to the Theory of Collisions of Electrons with Atoms and Molecules

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Publisher : Springer Science & Business Media
ISBN 13 : 1461506115
Total Pages : 362 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Introduction to the Theory of Collisions of Electrons with Atoms and Molecules by : S.P. Khare

Download or read book Introduction to the Theory of Collisions of Electrons with Atoms and Molecules written by S.P. Khare and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: An understanding of the collisions between micro particles is of great importance for the number of fields belonging to physics, chemistry, astrophysics, biophysics etc. The present book, a theory for electron-atom and molecule collisions is developed using non-relativistic quantum mechanics in a systematic and lucid manner. The scattering theory is an essential part of the quantum mechanics course of all universities. During the last 30 years, the author has lectured on the topics presented in this book (collisions physics, photon-atom collisions, electron-atom and electron-molecule collisions, "electron-photon delayed coincidence technique", etc.) at many institutions including Wayne State University, Detroit, MI, The University of Western Ontario, Canada, and The Meerut University, India. The present book is the outcome of those lectures and is written to serve as a textbook for post-graduate and pre-PhD students and as a reference book for researchers.

Fundamental Processes in Energetic Atomic Collisions

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Publisher : Springer Science & Business Media
ISBN 13 : 146133781X
Total Pages : 675 pages
Book Rating : 4.4/5 (613 download)

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Book Synopsis Fundamental Processes in Energetic Atomic Collisions by : H.O. Lutz

Download or read book Fundamental Processes in Energetic Atomic Collisions written by H.O. Lutz and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 675 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years, the impact of new experimental techniques (e.g., nuclear physics methods, availability of high-intensity light sources) as well as an increasing demand for atomic collision data in other fields of physics (e.g., plasma physics, astrophysics, laser physics, surface physics, etc.) have stimulated a renewed, strong interest in atomic collision research. Due to the explosive development of the various fields, scientists often even have dif ficulty in keeping up with their own area of research; as a result, the overlap between different fields tends to remain rather limited. Instead of having access to the full knowledge accumulated in other fields, one uses only the small fraction which at the moment seems to be of immediate importance to one's own area of interest. Clearly, many fruitful and stimulating ideas are lost in this way, causing progress to be made much more slowly than it could be. Atomic col lision physics is no exception to this rule. Although it is of basic interest to many other areas, it is mostly regarded merely as a (nonetheless important) tool by which to gain additional information.

Theory of Electron—Atom Collisions

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Publisher : Springer Science & Business Media
ISBN 13 : 1489915672
Total Pages : 264 pages
Book Rating : 4.4/5 (899 download)

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Book Synopsis Theory of Electron—Atom Collisions by : Philip G. Burke

Download or read book Theory of Electron—Atom Collisions written by Philip G. Burke and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: The authors aim to hone the theory of electron-atom and electron-ion collisions by developing mathematical equations and comparing their results to the wealth of recent experimental data. This first of three parts focuses on potential scattering, and will serve as an introduction to many of the concepts covered in Parts II and III. As these processes occur in so many of the physical sciences, researchers in astrophysics, atmospheric physics, plasma physics, and laser physics will all benefit from the monograph.

Atomic Collision Processes

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Publisher :
ISBN 13 :
Total Pages : 1206 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Atomic Collision Processes by : M. R. C. McDowell

Download or read book Atomic Collision Processes written by M. R. C. McDowell and published by . This book was released on 1964 with total page 1206 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Cohesive Sediments in Open Channels

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Publisher : Butterworth-Heinemann
ISBN 13 : 0080877974
Total Pages : 375 pages
Book Rating : 4.0/5 (88 download)

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Book Synopsis Cohesive Sediments in Open Channels by : Emmanuel Partheniades

Download or read book Cohesive Sediments in Open Channels written by Emmanuel Partheniades and published by Butterworth-Heinemann. This book was released on 2009-04-23 with total page 375 pages. Available in PDF, EPUB and Kindle. Book excerpt: Control the impact of cohesive sediments on open channels by managing the effects of silt, clay and other sediments in harbors, estuaries and reservoirs. Cohesive Sediments in Open Channels provides you with a practical framework for understanding how cohesive sediments are transported, deposited and eroded. One of the first books to approach the subject from an engineering's perspective, this book supplies insight into applying hydraulic design as well as understanding the behavior of cohesive sediments in a flow field. - Properties and of the nature and the origin of the interparticle physicochemical forces - The forces between clay particles and the process of flocculation - Processes and dynamics of flocculation and the hydrodynamic behavior of cohesive sediments - Transport processes of sediments by flowing water and related equations are first presented and explained - Deposition and resuspension of beds deposited from suspension from flowing waters - Engineering applications of the hydraulics of cohesive sediments

Theory of Slow Atomic Collisions

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Publisher : Springer Science & Business Media
ISBN 13 : 364282045X
Total Pages : 445 pages
Book Rating : 4.6/5 (428 download)

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Book Synopsis Theory of Slow Atomic Collisions by : E.E. Nikitin

Download or read book Theory of Slow Atomic Collisions written by E.E. Nikitin and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 445 pages. Available in PDF, EPUB and Kindle. Book excerpt: The theory of atom-molecule collisions is one of the basic fields in chemi cal physics. Its most challenging part - the dynamics of chemical reactions - is as yet unresolved, but is developing very quickly. It is here a great help to have an analysis of those parts of collision theory which are already complete, a good example being the theory of atomic collisions in process es specific to chemical physics. It has long been observed that many notions of this theory can also be applied successfully to reactive and unreactive molecular collisions. More over, atomic collisions often represent a touchstone in testing approaches proposed for the solution of more complicated problems. Research on the theory of slow atomic collisions carried out at the Moscow Institute of Chemical Physics has been based on just these ideas. A general viewpoint concerning the setting up and representation of the theory came out of these studies, and appeared to be useful in studying complicated systems as well. It underlies the representation of the theory of slow atomic colli sions in this book.

Polarization and Correlation Phenomena in Atomic Collisions

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Publisher : Springer Science & Business Media
ISBN 13 : 9780306462665
Total Pages : 258 pages
Book Rating : 4.4/5 (626 download)

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Book Synopsis Polarization and Correlation Phenomena in Atomic Collisions by : Vsevolod V. Balashov

Download or read book Polarization and Correlation Phenomena in Atomic Collisions written by Vsevolod V. Balashov and published by Springer Science & Business Media. This book was released on 2000-04-30 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: "The book provides a concise description of the density matrix and statistical tensor formalism and presents a general approach to the description of angular correlation and polarization phenomena. It illustrate an application of the angular momentum technique to a broad variety of atomic processes.".

Fast Ion-atom and Ion-molecule Collisions

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Publisher : World Scientific
ISBN 13 : 9814407135
Total Pages : 335 pages
Book Rating : 4.8/5 (144 download)

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Book Synopsis Fast Ion-atom and Ion-molecule Collisions by : Dzevad Belkic

Download or read book Fast Ion-atom and Ion-molecule Collisions written by Dzevad Belkic and published by World Scientific. This book was released on 2013 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: The principal goal of this book is to provide state-of-the-art coverage of the non-relativistic three- and four-body theories at intermediate and high energy ion-atom and ion-molecule collisions. The focus is on the most frequently studied processes: electron capture, ionization, transfer excitation and transfer ionization. The content is suitable both for graduate students and experienced researchers. For these collisions, the literature has seen enormous renewal of activity in the development and applications of quantum-mechanical theories. This subject is of relevance in several branches of science and technology, like accelerator-based physics, the search for new sources of energy and high temperature fusion of light ions. Other important applications are in life sciences via medicine, where high-energy ion beams are used in radiotherapy for which a number of storage ring accelerators are in full operation, under construction or planned to be built worldwide. Therefore, it is necessary to review this field for its most recent advances with an emphasis on the prospects for multidisciplinary applications.This book is accompanied by Interdisciplinary Research on Particle Collisions and Quantitative Spectroscopy Volume 2 - Fast Collisions of Light Ions with Matter: Charge Exchange and Ionization.