Alternative Lithography

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Alternative Lithography

Author : Clivia M. Sotomayor Torres
Publisher : Springer Science & Business Media
ISBN 13 : 1441992049
Total Pages : 343 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Alternative Lithography by : Clivia M. Sotomayor Torres

Download or read book Alternative Lithography written by Clivia M. Sotomayor Torres and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 343 pages. Available in PDF, EPUB and Kindle. Book excerpt: Good old Gutenberg could not have imagined that his revolutionary printing concept which so greatly contributed to dissemination of knowledge and thus today 's wealth, would have been a source of inspiration five hundred years later. Now, it seems intuitive that a simple way to produce a large number of replicates is using a mold to emboss pattern you need, but at the nanoscale nothing is simple: the devil is in the detail. And this book is about the "devil". In the following 17 chapters, the authors-all of them well recognized and active actors in this emerging field-describe the state-of-the-art, today 's technological bottlenecks and the prospects for micro-contact printing and nanoimprint lithography. Many results of this book originate from projects funded by the European Com mission through its "Nanotechnology Information Devices" (NID) initiative. NID was launched with the objective to develop nanoscale devices for the time when the red brick scenario of the ITRS roadmap would be reached. It became soon clear however, that there was no point to investigate only alternative devices to CMOS, but what was really needed was an integrated approach that took into account more facets of this difficult undertaking. Technologically speaking , this meant to have a coherent strategy to develop novel devices, nanofabrication tools and circuit & system architectures at the same time.

Alternative Lithography

Author : Clivia M Sotomayor Torres
Publisher :
ISBN 13 : 9781441992055
Total Pages : 360 pages
Book Rating : 4.9/5 (92 download)

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Book Synopsis Alternative Lithography by : Clivia M Sotomayor Torres

Download or read book Alternative Lithography written by Clivia M Sotomayor Torres and published by . This book was released on 2003-12-01 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Principles of Lithography

Author : Harry J. Levinson
Publisher : SPIE Press
ISBN 13 : 9780819456601
Total Pages : 446 pages
Book Rating : 4.4/5 (566 download)

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Book Synopsis Principles of Lithography by : Harry J. Levinson

Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Optical and EUV Lithography

Author : Andreas Erdmann
Publisher :
ISBN 13 : 9781510639010
Total Pages : pages
Book Rating : 4.6/5 (39 download)

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Book Synopsis Optical and EUV Lithography by : Andreas Erdmann

Download or read book Optical and EUV Lithography written by Andreas Erdmann and published by . This book was released on 2021-02 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Materials and Processes for Next Generation Lithography

Author :
Publisher : Elsevier
ISBN 13 : 0081003587
Total Pages : 636 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Materials and Processes for Next Generation Lithography by :

Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. - Assembles up-to-date information from the world's premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation - Includes information on processing and metrology techniques - Brings together multiple approaches to litho pattern recording from academia and industry in one place

Alternative Lithography Strategies for Flexible Electronics

Author : Pieter Frederik Moonen
Publisher :
ISBN 13 : 9789036533713
Total Pages : 175 pages
Book Rating : 4.5/5 (337 download)

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Book Synopsis Alternative Lithography Strategies for Flexible Electronics by : Pieter Frederik Moonen

Download or read book Alternative Lithography Strategies for Flexible Electronics written by Pieter Frederik Moonen and published by . This book was released on 2012 with total page 175 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Fundamentals of Terahertz Devices and Applications

Author : Dimitris Pavlidis
Publisher : John Wiley & Sons
ISBN 13 : 1119460735
Total Pages : 576 pages
Book Rating : 4.1/5 (194 download)

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Book Synopsis Fundamentals of Terahertz Devices and Applications by : Dimitris Pavlidis

Download or read book Fundamentals of Terahertz Devices and Applications written by Dimitris Pavlidis and published by John Wiley & Sons. This book was released on 2021-07-19 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: An authoritative and comprehensive guide to the devices and applications of Terahertz technology Terahertz (THz) technology relates to applications that span in frequency from a few hundred GHz to more than 1000 GHz. Fundamentals of Terahertz Devices and Applications offers a comprehensive review of the devices and applications of Terahertz technology. With contributions from a range of experts on the topic, this book contains in a single volume an inclusive review of THz devices for signal generation, detection and treatment. Fundamentals of Terahertz Devices and Applications offers an exploration and addresses key categories and aspects of Terahertz Technology such as: sources, detectors, transmission, electronic considerations and applications, optical (photonic) considerations and applications. Worked examples—based on the contributors' extensive experience— highlight the chapter material presented. The text is designed for use by novices and professionals who want a better understanding of device operation and use, and is suitable for instructional purposes This important book: Offers the most relevant up-to-date research information and insight into the future developments in the technology Addresses a wide-range of categories and aspects of Terahertz technology Includes material to support courses on Terahertz Technology and more Contains illustrative worked examples Written for researchers, students, and professional engineers, Fundamentals of Terahertz Devices and Applications offers an in-depth exploration of the topic that is designed for both novices and professionals and can be adopted for instructional purposes.

Integrated Nanodevice and Nanosystem Fabrication

Author : Simon Deleonibus
Publisher : CRC Press
ISBN 13 : 135172178X
Total Pages : 306 pages
Book Rating : 4.3/5 (517 download)

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Book Synopsis Integrated Nanodevice and Nanosystem Fabrication by : Simon Deleonibus

Download or read book Integrated Nanodevice and Nanosystem Fabrication written by Simon Deleonibus and published by CRC Press. This book was released on 2017-11-22 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since its invention, the integrated circuit has necessitated new process modules and numerous architectural changes to improve application performances, power consumption, and cost reduction. Silicon CMOS is now well established to offer the integration of several tens of billions of devices on a chip or in a system. At present, there are important challenges in the introduction of heterogeneous co-integration of materials and devices with the silicon CMOS 2D- and 3D-based platforms. New fabrication techniques allowing strong energy and variability efficiency come in as possible players to improve the various figures of merit of fabrication technology. Integrated Nanodevice and Nanosystem Fabrication: Breakthroughs and Alternatives is the second volume in the Pan Stanford Series on Intelligent Nanosystems. The book contains 8 chapters and is divided into two parts, the first of which reports breakthrough materials and techniques such as single ion implantation in silicon and diamond, graphene and 2D materials, nanofabrication using scanning probe microscopes, while the second tackles the scaling and architectural aspects of silicon devices through HiK scaling for nanoCMOS, nanoscale epitaxial growth of group IV semiconductors, design for variability co-optimization in SOI FinFETs, and nanowires for CMOS and diversifications.

Unconventional Nanopatterning Techniques and Applications

Author : John A. Rogers
Publisher : John Wiley & Sons
ISBN 13 : 0470405775
Total Pages : 616 pages
Book Rating : 4.4/5 (74 download)

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Book Synopsis Unconventional Nanopatterning Techniques and Applications by : John A. Rogers

Download or read book Unconventional Nanopatterning Techniques and Applications written by John A. Rogers and published by John Wiley & Sons. This book was released on 2008-11-13 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Patterning or lithography is at the core of modern science and technology and cuts across all disciplines. With the emergence of nanotechnology, conventional methods based on electron beam lithography and extreme ultraviolet photolithography have become prohibitively expensive. As a result, a number of simple and unconventional methods have been introduced, beginning first with research demonstrations in the mid 1990s. This book focuses on these unconventional patterning techniques and their applications to optics, organic devices, electronic devices, biological devices, and fluidics.

Fundamentals and Applications of Nanomaterials

Author : Zhen Guo
Publisher : Artech House
ISBN 13 : 1596932635
Total Pages : 268 pages
Book Rating : 4.5/5 (969 download)

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Book Synopsis Fundamentals and Applications of Nanomaterials by : Zhen Guo

Download or read book Fundamentals and Applications of Nanomaterials written by Zhen Guo and published by Artech House. This book was released on 2009 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: Supported by over 90 illustrations, this timely resource offers you a broad introduction to nanomaterials, covering basic principles, technology, and cutting-edge applications. From quantum mechanics, band structure, surface chemistry, thermodynamics, and kinetics of nanomaterials, to nanomaterial characterization, nanoparticle synthesis, nanoelectronics, NEMS, and Nano-Bio materials, this groundbreaking volume offers you a solid understanding of a wide range of fundamental topics and brings you up-to-date with the latest developments in the field.

Self-Cleaning of Surfaces and Water Droplet Mobility

Author : Bekir Sami Yilbas
Publisher : Elsevier
ISBN 13 : 0128147776
Total Pages : 456 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Self-Cleaning of Surfaces and Water Droplet Mobility by : Bekir Sami Yilbas

Download or read book Self-Cleaning of Surfaces and Water Droplet Mobility written by Bekir Sami Yilbas and published by Elsevier. This book was released on 2019-04-25 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Self-Cleaning of Surfaces and Water Droplet Mobility deals with the self-cleaning of hydrophobic surfaces. Chapters cover the basics of wetting states of fluids and surface characteristics in terms of texture topology and free energy. The self-cleaning aspects of surfaces, such as various synthesizing and fabrication processes are then introduced and discussed, along with environmental dust properties, including elemental compositions, particle sizes and shapes, and their chemo-mechanics characteristics. In addition, mud formation in humid air, as well as ambient and dry mud adhesion on optically transparent surfaces is explored, as is water droplet dynamics on hydrophilic and hydrophobic surfaces, amongst other topics. The book fills the gap between the physical fundamentals of surface energy and texture characteristics for practical applications of surface cleaning and provides a basic understanding of the self-cleaning of surfaces that will be idea for academics, researchers and students. - Showcases the fundamental aspects of the self-cleaning of surfaces - Includes practical applications in energy and other sectors - Contains a review of the characterization of environmental dust on hydrophilic and hydrophobic surfaces - Discusses the fabrication and optimization of surfaces towards self-cleaning - Presents practical applications of the self-cleaning of surfaces via water droplet mobility

Integrated Circuit Fabrication

Author : Shubham Kumar
Publisher : CRC Press
ISBN 13 : 1000396401
Total Pages : 353 pages
Book Rating : 4.0/5 (3 download)

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Book Synopsis Integrated Circuit Fabrication by : Shubham Kumar

Download or read book Integrated Circuit Fabrication written by Shubham Kumar and published by CRC Press. This book was released on 2021-04-28 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length course on integrated circuit fabrication. This text can also serve as a reference for practicing engineer and scientist in the semiconductor industry. IC Fabrication are ever demanding of technology in rapidly growing industry growth opportunities are numerous. A recent survey shows that integrated circuit currently outnumber humans in UK, USA, India and China. The spectacular advances in the development and application of integrated circuit technology have led to the emergence of microelectronic process engineering as an independent discipline. Integrated circuit fabrication text books typically divide the fabrication sequence into a number of unit processes that are repeated to form the integrated circuit. The effect is to give the book an analysis flavor: a number of loosely related topics each with its own background material. Note: T& F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka.

Handbook of Semiconductor Manufacturing Technology

Author : Yoshio Nishi
Publisher : CRC Press
ISBN 13 : 1351829823
Total Pages : 3276 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Handbook of Semiconductor Manufacturing Technology by : Yoshio Nishi

Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 3276 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Solutions for Lithographic Printers

Author : United States. Environmental Protection Agency. Prevention, Pesticides, and Toxic Substances
Publisher :
ISBN 13 :
Total Pages : 36 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Solutions for Lithographic Printers by : United States. Environmental Protection Agency. Prevention, Pesticides, and Toxic Substances

Download or read book Solutions for Lithographic Printers written by United States. Environmental Protection Agency. Prevention, Pesticides, and Toxic Substances and published by . This book was released on 1997 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Thin Films, Five-Volume Set

Author : Hari Singh Nalwa
Publisher : Academic Press
ISBN 13 : 0125129084
Total Pages : 661 pages
Book Rating : 4.1/5 (251 download)

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Book Synopsis Handbook of Thin Films, Five-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Thin Films, Five-Volume Set written by Hari Singh Nalwa and published by Academic Press. This book was released on 2001-10-29 with total page 661 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1351990616
Total Pages : 3654 pages
Book Rating : 4.3/5 (519 download)

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Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou

Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 3654 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Nanoscience

Author : Claire Dupas
Publisher : Springer Science & Business Media
ISBN 13 : 3540286179
Total Pages : 840 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Nanoscience by : Claire Dupas

Download or read book Nanoscience written by Claire Dupas and published by Springer Science & Business Media. This book was released on 2007-02-13 with total page 840 pages. Available in PDF, EPUB and Kindle. Book excerpt: This practically-oriented overview of nanotechnologies and nanosciences is designed to provide students and researchers with essential information on both the tools of manufacture and specific features of the nanometric scale. Specific applications and techniques covered include nanolithography, STM and AFM, nanowires and supramolecules, molecular electronics, pptronics, and simulation. Each section devotes space to industrial applications and prospective developments. The book provides the only pedagogical review on major nanosciences topics at this level.