Advances In The Reduction And Compensation Of Film Stress In High Reflectance Multilayer Coatings For Extreme Ultraviolet Lithography Applications

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Short Wavelength Laboratory Sources

Author : Alan Michette
Publisher : Royal Society of Chemistry
ISBN 13 : 1849734569
Total Pages : 468 pages
Book Rating : 4.8/5 (497 download)

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Book Synopsis Short Wavelength Laboratory Sources by : Alan Michette

Download or read book Short Wavelength Laboratory Sources written by Alan Michette and published by Royal Society of Chemistry. This book was released on 2014-12-15 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Our ability to manipulate short wavelength radiation (0.01-100nm, equivalent to 120keV-12eV) has increased significantly over the last three decades. This has lead to major advances in applications in a wide range of disciplines such as: the life and medical sciences, including cancer-related studies; environmental science, including studies of pollution and its effects; archaeology and other cultural heritage disciplines; and materials science. Although expansion in application areas is due largely to modern synchrotron sources, many applications will not become widespread, and therefore routinely available as analytical tools, if they are confined to synchrotrons. This is because synchrotrons require enormous capital and infrastructure costs and are often, of necessity, national or international facilities. This seriously limits their scope for applications in research and analysis, in both academia and industry. How many universities, research institutes or even industrial laboratories would have electron microscopes if electron sources cost ú100M or more Hence the need to develop bright but small and (relatively) cheap x-ray sources, not to replace synchrotrons but to complement them. Written by a distinguished team of international authors this exemplary new handbook is based on the COST Action MP0601: Short Wavelength Laboratory Sources. The contents are divided into five main sections. The introductory section provides a comprehensive introduction to the fundamentals of radiation, generation mechanisms and short wavelength laboratory sources. The middle sections focus on modelling and simulation, source development: improvement and characterisation and integrated systems: sources, optics and detectors. The final section looks at recent applications.

Microlithography

Author : Bruce W. Smith
Publisher : CRC Press
ISBN 13 : 1351643444
Total Pages : 913 pages
Book Rating : 4.3/5 (516 download)

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Book Synopsis Microlithography by : Bruce W. Smith

Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 2020-05-01 with total page 913 pages. Available in PDF, EPUB and Kindle. Book excerpt: The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world’s leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved. New in the Third Edition In addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography. The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.

Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications

Author : Ali M. Khounsary
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819450661
Total Pages : 240 pages
Book Rating : 4.4/5 (56 download)

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Book Synopsis Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications by : Ali M. Khounsary

Download or read book Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications written by Ali M. Khounsary and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Emerging Lithographic Technologies

Author :
Publisher :
ISBN 13 :
Total Pages : 854 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Emerging Lithographic Technologies by :

Download or read book Emerging Lithographic Technologies written by and published by . This book was released on 2001 with total page 854 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Soft X-ray and EUV Imaging Systems

Author :
Publisher :
ISBN 13 :
Total Pages : 194 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Soft X-ray and EUV Imaging Systems by :

Download or read book Soft X-ray and EUV Imaging Systems written by and published by . This book was released on 2001 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Optical Engineering

Author :
Publisher :
ISBN 13 :
Total Pages : 538 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Optical Engineering by :

Download or read book Optical Engineering written by and published by . This book was released on 1999 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.

International Aerospace Abstracts

Author :
Publisher :
ISBN 13 :
Total Pages : 1044 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis International Aerospace Abstracts by :

Download or read book International Aerospace Abstracts written by and published by . This book was released on 1999 with total page 1044 pages. Available in PDF, EPUB and Kindle. Book excerpt:

EUV Lithography

Author : Vivek Bakshi
Publisher : SPIE Press
ISBN 13 : 0819469645
Total Pages : 704 pages
Book Rating : 4.8/5 (194 download)

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Book Synopsis EUV Lithography by : Vivek Bakshi

Download or read book EUV Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2009 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.

Advances in Thin Films, Nanostructured Materials, and Coatings

Author : Alexander D. Pogrebnjak
Publisher : Springer
ISBN 13 : 9811361339
Total Pages : 380 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis Advances in Thin Films, Nanostructured Materials, and Coatings by : Alexander D. Pogrebnjak

Download or read book Advances in Thin Films, Nanostructured Materials, and Coatings written by Alexander D. Pogrebnjak and published by Springer. This book was released on 2019-02-08 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book highlights the latest advances in chemical and physical methods for thin-film deposition and surface engineering, including ion- and plasma-assisted processes, focusing on explaining the synthesis/processing–structure–properties relationship for a variety of thin-film systems. It covers topics such as advances in thin-film synthesis; new thin-film materials: diamond-like films, granular alloys, high-entropy alloys, oxynitrides, and intermetallic compounds; ultra-hard, wear- and oxidation-resistant and multifunctional coatings; superconducting, magnetic, semiconducting, and dielectric films; electrochemical and electroless depositions; thin-film characterization and instrumentation; and industrial applications.

Coatings Technology Handbook

Author : Arthur A. Tracton
Publisher : CRC Press
ISBN 13 : 1420027328
Total Pages : 930 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Coatings Technology Handbook by : Arthur A. Tracton

Download or read book Coatings Technology Handbook written by Arthur A. Tracton and published by CRC Press. This book was released on 2005-07-28 with total page 930 pages. Available in PDF, EPUB and Kindle. Book excerpt: Serving as an all-in-one guide to the entire field of coatings technology, this encyclopedic reference covers a diverse range of topics-including basic concepts, coating types, materials, processes, testing and applications-summarizing both the latest developments and standard coatings methods. Take advantage of the insights and experience of over

Thin Film Analysis by X-Ray Scattering

Author : Mario Birkholz
Publisher : John Wiley & Sons
ISBN 13 : 3527607048
Total Pages : 378 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Thin Film Analysis by X-Ray Scattering by : Mario Birkholz

Download or read book Thin Film Analysis by X-Ray Scattering written by Mario Birkholz and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films. Very much an interdisciplinary field, chemists, biochemists, materials scientists, physicists and engineers all have a common interest in thin films and their manifold uses and applications. Grain size, porosity, density, preferred orientation and other properties are important to know: whether thin films fulfill their intended function depends crucially on their structure and morphology once a chemical composition has been chosen. Although their backgrounds differ greatly, all the involved specialists a profound understanding of how structural properties may be determined in order to perform their respective tasks in search of new and modern materials, coatings and functions. The author undertakes this in-depth introduction to the field of thin film X-ray characterization in a clear and precise manner.

Advanced Techniques for Surface Engineering

Author : W. Gissler
Publisher : Springer Science & Business Media
ISBN 13 : 9780792320067
Total Pages : 416 pages
Book Rating : 4.3/5 (2 download)

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Book Synopsis Advanced Techniques for Surface Engineering by : W. Gissler

Download or read book Advanced Techniques for Surface Engineering written by W. Gissler and published by Springer Science & Business Media. This book was released on 1992-10-31 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The hardest requirements on a material are in general imposed at the surface: it has to be wear resistant for tools and bearings; corrosion resistant for turbine blades; antireflecting for solar cells; and it must combine several of these properties in other applications. `Surface engineering' is the general term that incorporates all the techniques by which a surface modification can be accomplished. These techniques include both the more traditional methods, such as nitriding, boriding and carburizing, and the newer ones, such as ion implantation, laser beam melting and, in particular, coating. This book comprises and compares in a unique way all these techniques of surface engineering. It is a compilation of lectures which were held by renowned scientists and engineers in the frame of the well known `EuroCourses' of the Joint Research Centre of the Commission of the European Communities. The book is principally addressed to material and surface scientists, physicists and chemists, engineers and technicians of industries and institutes where surface engineering problems arise.

Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II

Author : Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (964 download)

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Book Synopsis Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II by : Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation

Download or read book Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II written by Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation and published by . This book was released on 2016 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Wafer Bonding

Author : Marin Alexe
Publisher : Springer Science & Business Media
ISBN 13 : 9783540210498
Total Pages : 524 pages
Book Rating : 4.2/5 (14 download)

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Book Synopsis Wafer Bonding by : Marin Alexe

Download or read book Wafer Bonding written by Marin Alexe and published by Springer Science & Business Media. This book was released on 2004-05-14 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Handbook of Modern Sensors

Author : Jacob Fraden
Publisher : Springer Science & Business Media
ISBN 13 : 0387216049
Total Pages : 596 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Handbook of Modern Sensors by : Jacob Fraden

Download or read book Handbook of Modern Sensors written by Jacob Fraden and published by Springer Science & Business Media. This book was released on 2006-04-29 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Seven years have passed since the publication of the previous edition of this book. During that time, sensor technologies have made a remarkable leap forward. The sensitivity of the sensors became higher, the dimensions became smaller, the sel- tivity became better, and the prices became lower. What have not changed are the fundamental principles of the sensor design. They are still governed by the laws of Nature. Arguably one of the greatest geniuses who ever lived, Leonardo Da Vinci, had his own peculiar way of praying. He was saying, “Oh Lord, thanks for Thou do not violate your own laws. ” It is comforting indeed that the laws of Nature do not change as time goes by; it is just our appreciation of them that is being re?ned. Thus, this new edition examines the same good old laws of Nature that are employed in the designs of various sensors. This has not changed much since the previous edition. Yet, the sections that describe the practical designs are revised substantially. Recent ideas and developments have been added, and less important and nonessential designs were dropped. Probably the most dramatic recent progress in the sensor technologies relates to wide use of MEMS and MEOMS (micro-electro-mechanical systems and micro-electro-opto-mechanical systems). These are examined in this new edition with greater detail. This book is about devices commonly called sensors. The invention of a - croprocessor has brought highly sophisticated instruments into our everyday lives.

Lithography Process Control

Author : Harry J. Levinson
Publisher : SPIE Press
ISBN 13 : 9780819430526
Total Pages : 210 pages
Book Rating : 4.4/5 (35 download)

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Book Synopsis Lithography Process Control by : Harry J. Levinson

Download or read book Lithography Process Control written by Harry J. Levinson and published by SPIE Press. This book was released on 1999 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.

UV Coatings

Author : Reinhold Schwalm
Publisher : Elsevier
ISBN 13 : 0080466893
Total Pages : 323 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis UV Coatings by : Reinhold Schwalm

Download or read book UV Coatings written by Reinhold Schwalm and published by Elsevier. This book was released on 2006-12-21 with total page 323 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since UV curing (light induced polymerisation of multifunctional oligomers) is a very ecoefficient and energy saving curing method, the growth rates of UV curable coatings are in the range of 10% per year. The typical UV coatings are solvent free (100% solids), thus helping the industry and the environment to reduce significantly VOC (volatile organic compounds). Recently, the automotive industry has discovered that UV cured coatings are very scratch resistant, which stimulated very extensive work into the development of UV coatings for automotive applications. Since UV curing is very universal, also other systems besides the 100% solid (typical) UV coatings are developed, like waterbased UV- , UV powder and Dual cure (UV and thermal) systems.UV Coatings contains an overview of the technology, the curing process including the equipment necessary, the raw materials (resins, diluents, photoinitiators) used, the advantages and drawbacks of this fast emerging technology, as well as proposed technical solutions to tackle the disadvantages. Structure-property relationships will be given, especially regarding the mechanical properties of coatings as well as scratch resistance, mainly dealing with automotive performance criteria. The main part of the book will deal with new developments, like water-based UV coatings, UV powder coatings and dual cure systems, cured by UV and thermal energy, which have been developed to cure the coating on three dimensional substrates in shadow areas. The main applications of UV Coatings will be described, starting with the classical ones on temperature sensitive substrates, like wood, paper and plastics, where the UV curable coatings are already well established.* Looking at UV curing as a key to scratch resistant automotive clear coats* Ecoefficiency of UV Coatings* Comprehensive overview of the technology, materials and markets