Author : E. R. BOWERMAN
Publisher :
ISBN 13 :
Total Pages : 1 pages
Book Rating : 4.:/5 (227 download)
Book Synopsis Thin Films Formed by Electrochemical Reactions by : E. R. BOWERMAN
Download or read book Thin Films Formed by Electrochemical Reactions written by E. R. BOWERMAN and published by . This book was released on 1962 with total page 1 pages. Available in PDF, EPUB and Kindle. Book excerpt: The preparation of several hundred thin-film Ta capacitors confirmed previous findings that the type of glass and the cleaning procedure used were necessary for obtaining high-quality capacitors. With the preparation of a large number of capacitors, data have been obtained on the uniformity of capacitance values. Improvements in both uniformity and electrical characteristics resulted from a reduction of the substrate temperature during tantalum sputtering, from the treatment of the sputtering mask and from spectroscopic monitoring for impurities in the glow discharge. The evaluation of electrical properties was extended to cover a range of frequencies and temperatures. The preparation of thin-film resistors by anodization of sputtered and vacuumevaporated Ta was accomplished. Resistance was reproducible to within 0.3% of the desired value. The films were evaluated for power dissipation, and the temperature coefficient of resistance was determined as a function of sheet resistivity and film thickness. (Author).