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Thin Film Sensors
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Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte
Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer. This book was released on 2010-10-29 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte
Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-10-11 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Book Synopsis Thin Film Sensors by : Richard K. Miller
Download or read book Thin Film Sensors written by Richard K. Miller and published by . This book was released on 1989-03-01 with total page 50 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Magnetoresistive Sensors by : S Tumanski
Download or read book Thin Film Magnetoresistive Sensors written by S Tumanski and published by CRC Press. This book was released on 2001-06-08 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Film Magnetoresistive Sensors presents a comprehensive review of thin film magnetoresistive (MR) sensors, including the theory of MR effects as well as the design, fabrication, properties, and applications of MR sensors. With over 1,000 references, the book fully reviews the theory, development, and use of these sensors. It provides essential information about the performance of various kinds of sensors, including permalloy magnetoresistors, spin valve sensors, multilayer sensors, colossal effect sensors, spin dependent tunneling sensors, and magnetoimpedance sensors.
Book Synopsis Thin Film Resistive Sensors, by : Petru Ciureanu
Download or read book Thin Film Resistive Sensors, written by Petru Ciureanu and published by CRC Press. This book was released on 1992 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a complete overview of thin film resistive sensors.devoted to thin-film devices. Each type of input energy is discussed in a separate chapter. Detailed descriptions are given of the materials, properties, structure and principles of operation of the sensors as well as their main applications. Results of the authors' research and comprehensive reviews of the current literature are included. The scope of this book and its accessible style make it a valuable reference work to graduate scientists and engineers in many disciplines. Written for scientists and engineers using or developing thin film sensors.
Book Synopsis Thin Film Colour Sensors by : Daniel Puiu Poenar
Download or read book Thin Film Colour Sensors written by Daniel Puiu Poenar and published by . This book was released on 1996 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film and Flexible Thermoelectric Generators, Devices and Sensors by : Sergey Skipidarov
Download or read book Thin Film and Flexible Thermoelectric Generators, Devices and Sensors written by Sergey Skipidarov and published by Springer Nature. This book was released on 2021-03-13 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents and facilitates new research and development results with hot topics in the thermoelectric generators (TEGs) field. Topics include: novel thin film; multilayer, composite and nanostructured thermoelectric materials; simulation of phenomena related to thermoelectricity; thermoelectric thin film and multilayer materials manufacturing technologies; measurement techniques for characterization; thermoelectric generators; and the simulation, modeling, design, thermal, and mechanical degradation problems. This book helps researchers tackle the challenges that still remain in creating cheap and effective TEGs and presents the latest trends and technologies in development and production of advanced thermoelectric generation devices.
Book Synopsis Optically Addressed Thin Film Sensors by : Ross Neil Gillanders
Download or read book Optically Addressed Thin Film Sensors written by Ross Neil Gillanders and published by . This book was released on 2005 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Functional Thin Films and Nanostructures for Sensors by : Anis Zribi
Download or read book Functional Thin Films and Nanostructures for Sensors written by Anis Zribi and published by Springer Science & Business Media. This book was released on 2009-04-05 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.
Book Synopsis Rolling Contacts by : T. A. Stolarski
Download or read book Rolling Contacts written by T. A. Stolarski and published by . This book was released on 2000 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: Inspired by their many years of research collaboration, Stolarski (mechanical engineering, Brunel U., UK) and Tobe (Ashikaga Institute of Technology, Japan) have created this text with the aim of helping practicing designers, researchers, and postgraduate students (especially of engineering) to better understand, select, and design rolling contacts for mechanical devices and systems. The text presents the fundamentals of rolling friction, emphasizing the important engineering applications of rolling contacts. Applications described include rolling bearings, gears, road-tire and rail-wheel interactions, cam-tappet systems, and roll-forming of materials. Distributed by ASME. Annotation copyrighted by Book News, Inc., Portland, OR
Book Synopsis Thin Film Sensors for Surface Measurements by :
Download or read book Thin Film Sensors for Surface Measurements written by and published by . This book was released on 2001 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Nanophotonics by : Guru Subramanyam
Download or read book Thin Film Nanophotonics written by Guru Subramanyam and published by Elsevier. This book was released on 2021-08-25 with total page 289 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Film Nanophotonics: Conclusions from the Third International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors (TFE3S) provides up-to-date coverage of the properties and photonic applications of nanostructured thin films, including discussions on optical waveguides, photonic lattices for wideband reflectors, polarizers, bandpass filters, meta surfaces, plasmonic resonance sensors, smart windows, optical switches, photovoltaics, and many more. This is an important reference source for materials scientists, engineers and physicists working in the areas of nanomaterials and photonics. New thin film applications such as thin-film topological insulators and 2D materials are gaining attention and growing exponentially, hence this book is an ideal reference on how engineered thin films for various nano-photonics applications present exponential growth in a wide array of areas. Focuses on the interaction of photons with nanostructured thin films, nanocrystals, nanowires, semiconductor nanodots and photonic crystals Offers a comprehensive overview of the latest advances in thin-film nanophotonics Discusses how the properties of thin films make them particularly useful for photonic applications
Book Synopsis High Temperature Dielectrics for Thin Film Sensors by : C. Michael Trottier
Download or read book High Temperature Dielectrics for Thin Film Sensors written by C. Michael Trottier and published by . This book was released on 1993 with total page 230 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte
Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer. This book was released on 2008-11-01 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Author :National Aeronautics and Space Administration (NASA) Publisher :Createspace Independent Publishing Platform ISBN 13 :9781721283651 Total Pages :24 pages Book Rating :4.2/5 (836 download)
Book Synopsis Thin Film Sensors for Surface Measurements by : National Aeronautics and Space Administration (NASA)
Download or read book Thin Film Sensors for Surface Measurements written by National Aeronautics and Space Administration (NASA) and published by Createspace Independent Publishing Platform. This book was released on 2018-06-20 with total page 24 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced thin film sensors that can provide accurate surface temperature, strain, and heat flux measurements have been developed at NASA Glenn Research Center. These sensors provide minimally intrusive characterization of advanced propulsion materials and components in hostile, high-temperature environments as well as validation of propulsion system design codes. The sensors are designed for applications on different material systems and engine components for testing in engine simulation facilities. Thin film thermocouples and strain gauges for the measurement of surface temperature and strain have been demonstrated on metals, ceramics and advanced ceramic-based composites of various component configurations. Test environments have included both air-breathing and space propulsion-based engine and burner rig environments at surface temperatures up to 1100 C and under high gas flow and pressure conditions. The technologies developed for these sensors as well as for a thin film heat flux gauge have been integrated into a single multifunctional gauge for the simultaneous real-time measurement of surface temperature, strain, and heat flux. This is the first step toward the development of smart sensors with integrated signal conditioning and high temperature electronics that would have the capability to provide feedback to the operating system in real-time. A description of the fabrication process for the thin film sensors and multifunctional gauge will be provided. In addition, the material systems on which the sensors have been demonstrated, the test facilities and the results of the tests to-date will be described. Finally, the results will be provided of the current effort to demonstrate the capabilities of the multifunctional gauge. Martin, Lisa C. and Wrbanek, John D. and Fralick, Gustave C. Glenn Research Center NASA/TM-2001-211149, E-13001, NAS 1.15:211149
Book Synopsis Electrical and Electronic Devices, Circuits, and Materials by : Suman Lata Tripathi
Download or read book Electrical and Electronic Devices, Circuits, and Materials written by Suman Lata Tripathi and published by John Wiley & Sons. This book was released on 2021-03-24 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: The increasing demand for electronic devices for private and industrial purposes lead designers and researchers to explore new electronic devices and circuits that can perform several tasks efficiently with low IC area and low power consumption. In addition, the increasing demand for portable devices intensifies the call from industry to design sensor elements, an efficient storage cell, and large capacity memory elements. Several industry-related issues have also forced a redesign of basic electronic components for certain specific applications. The researchers, designers, and students working in the area of electronic devices, circuits, and materials sometimesneed standard examples with certain specifications. This breakthrough work presents this knowledge of standard electronic device and circuit design analysis, including advanced technologies and materials. This outstanding new volume presents the basic concepts and fundamentals behind devices, circuits, and systems. It is a valuable reference for the veteran engineer and a learning tool for the student, the practicing engineer, or an engineer from another field crossing over into electrical engineering. It is a must-have for any library.
Book Synopsis STUDY OF INTEGRATED SEMICONDUC by : Bin Li
Download or read book STUDY OF INTEGRATED SEMICONDUC written by Bin Li and published by Open Dissertation Press. This book was released on 2017-01-27 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "A study of integrated semiconductor thin-film sensors on sio2/si substrate" by Bin, Li, 李斌, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. Abstract: Abstract of thesis entitled A STUDY OF INTERGATED SEMICONDUCTOR THIN-FILM SENSORS ON SiO /Si SUBSTRATE submitted by Bin Li for the degree of Doctor of Philosophy at the University of Hong Kong in April 2001 With the development of the information technology, the need for miniaturized, intelligent and programmable sensors is rapidly increasing. To meet this trend, developing thin-film sensors on silicon substrate is of great importance. In this thesis, two areas are focused on. One is spreading-resistance temperature (SRT) sensor on silicon on insulator (SOI), while the other is the multi-function thin-film microsensor on SiO /Si substrate. Based on the principle of minority-carrier exclusion effect, SRT sensor on bulk Si is intensively studied. Optimizations of structural parameters and processing conditions on thermal characteristics of SRT sensors are carried out. With appropriately small electrode and high substrate doping, bulk SRT sensor can function at temperatures up to 400 C at a low current of 2 mA. ii SRT sensor on SOI is then investigated with emphasis on its resistance versus temperature (R-T), low-temperature and AC characteristics. Moreover, the effect of Si- film thickness on the maximum operating temperature (T ) is simulated and verified by max experiment results. When the silicon film is sufficiently thin, i.e. 0.1 μm, T can be max significantly raised up to 550 C, even at a very low bias current of 1 μA. Measurements under low-temperature or AC condition reveal that SRT sensor behaves like a conventional resistor. A new microsensor consisting of a thin-film resistor and a metal-insulator- semiconductor (MIS) capacitor is developed by depositing perovskite-type thin film on SiO /Si substrate. SrNb Ti O, Ba La TiO and Ba La Nb Ti O chosen as the 2 x 1-x 3 1-x x 3 1-x x y 1-y 3 sensing film present reasonable multi-function sensitivities to light, heat and humidity. Differences in the sensing properties of the films are related to their chemical compositions and grain boundaries. It is hoped that by varying the chemical composition, processing conditions of the film, better performance could be obtained. Finally, the effects of device structure on the sensitivities of perovskite thin-film microsensors are discussed. A new physical model is proposed for humidity-sensitive MIS capacitor with a metal-perovskite-SiO -Si structure. Based on this model, it is deduced that higher sensitivity of thinner film is due to higher porosity of the film. However, thinner film results in lower sensitivity to illumination due to poorer absorption, iii while the film thickness only has minor effects on the thermal sensitivity. The effects of SiO thickness are studied and experimental results demonstrate that an optimal value of 250 A gives rise to good multi-function sensitivities. The dependence of electrical properties of photoresistor on device dimension is investigated. Devices with smaller electrode spacings show reasonably linear I-V characteristics. Moreover, heat treatment in O for an optimal time can increase the photo sensitivity by suppressing dark current. In conclusion, SOI SRT sensors and perovskite-oxide thin-film microsensors are promising candidates for integrated sensor applications.
