Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 9780387288420
Total Pages : 316 pages
Book Rating : 4.2/5 (884 download)

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Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte

Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-04-11 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.

Functional Thin Films and Nanostructures for Sensors

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 0387686096
Total Pages : 224 pages
Book Rating : 4.3/5 (876 download)

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Book Synopsis Functional Thin Films and Nanostructures for Sensors by : Anis Zribi

Download or read book Functional Thin Films and Nanostructures for Sensors written by Anis Zribi and published by Springer Science & Business Media. This book was released on 2009-04-05 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.

Thin Film Magnetoresistive Sensors

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Author :
Publisher : CRC Press
ISBN 13 : 1420033247
Total Pages : 446 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Thin Film Magnetoresistive Sensors by : S Tumanski

Download or read book Thin Film Magnetoresistive Sensors written by S Tumanski and published by CRC Press. This book was released on 2001-06-08 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Film Magnetoresistive Sensors presents a comprehensive review of thin film magnetoresistive (MR) sensors, including the theory of MR effects as well as the design, fabrication, properties, and applications of MR sensors. With over 1,000 references, the book fully reviews the theory, development, and use of these sensors. It provides essential information about the performance of various kinds of sensors, including permalloy magnetoresistors, spin valve sensors, multilayer sensors, colossal effect sensors, spin dependent tunneling sensors, and magnetoimpedance sensors.

Thin Film and Flexible Thermoelectric Generators, Devices and Sensors

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Author :
Publisher : Springer Nature
ISBN 13 : 3030458628
Total Pages : 306 pages
Book Rating : 4.0/5 (34 download)

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Book Synopsis Thin Film and Flexible Thermoelectric Generators, Devices and Sensors by : Sergey Skipidarov

Download or read book Thin Film and Flexible Thermoelectric Generators, Devices and Sensors written by Sergey Skipidarov and published by Springer Nature. This book was released on 2021-03-13 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents and facilitates new research and development results with hot topics in the thermoelectric generators (TEGs) field. Topics include: novel thin film; multilayer, composite and nanostructured thermoelectric materials; simulation of phenomena related to thermoelectricity; thermoelectric thin film and multilayer materials manufacturing technologies; measurement techniques for characterization; thermoelectric generators; and the simulation, modeling, design, thermal, and mechanical degradation problems. This book helps researchers tackle the challenges that still remain in creating cheap and effective TEGs and presents the latest trends and technologies in development and production of advanced thermoelectric generation devices.

Polymer Films in Sensor Applications

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Author :
Publisher : Routledge
ISBN 13 : 1351423568
Total Pages : 464 pages
Book Rating : 4.3/5 (514 download)

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Book Synopsis Polymer Films in Sensor Applications by : Gabor Harsanyi

Download or read book Polymer Films in Sensor Applications written by Gabor Harsanyi and published by Routledge. This book was released on 2017-10-19 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polymer films now play an essential and growing role in sensors. Recent advances in polymer science and film preparation have made polymer films useful, practical and economical in a wide range of sensor designs and applications. Further, the continuing miniaturization of microelectronics favors the use of polymer thin films in sensors. This new book is the first comprehensive presentation of this technology. It covers both scientific fundamentals and practical engineering aspects. Included is an extensive survey of all types of sensors and applications. The very detailed table of contents in the next pages provides full information on content. More than 200 schematics illustrate a wide variety of sensor structures and their function.

Chemical Sensor Technology

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Author :
Publisher : Elsevier
ISBN 13 : 1483291782
Total Pages : 267 pages
Book Rating : 4.4/5 (832 download)

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Book Synopsis Chemical Sensor Technology by : Tetsuro Seiyama

Download or read book Chemical Sensor Technology written by Tetsuro Seiyama and published by Elsevier. This book was released on 2013-10-22 with total page 267 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Sensor Technology is a series of annual reviews reporting the latest progress being made in research and technology, both basic and applied, regarding chemical sensors. Chemical sensors continue to grow rapidly in importance encompassing a broad spectrum of technologies covering safety, pollution, fuel economy, medical engineering and industrial processes. Various types of chemical sensors have been devised for detection and monitoring of chemical substances in gases, solutions and organisms, and much work is being done to produce sensitive, selective, reliable and inexpensive sensors. The series aims at contributing to the progress of research and development of chemical sensors. Contributors to the individual volumes are carefully selected by an international editorial board who ensure that as many innovative studies as possible are included. Each article describes a specific topic and is the original work of an expert working in the front lines of chemical sensor research. Contributors are encouraged to describe not only the academic or technological essence of the subject, but also the background and philosophy, evaluation and achievements and future problems. In this way, each topic is described in sufficient depth so as to be useful and stimulating to readers.

Rolling Contacts

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Publisher :
ISBN 13 :
Total Pages : 472 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Rolling Contacts by : T. A. Stolarski

Download or read book Rolling Contacts written by T. A. Stolarski and published by . This book was released on 2000 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: Inspired by their many years of research collaboration, Stolarski (mechanical engineering, Brunel U., UK) and Tobe (Ashikaga Institute of Technology, Japan) have created this text with the aim of helping practicing designers, researchers, and postgraduate students (especially of engineering) to better understand, select, and design rolling contacts for mechanical devices and systems. The text presents the fundamentals of rolling friction, emphasizing the important engineering applications of rolling contacts. Applications described include rolling bearings, gears, road-tire and rail-wheel interactions, cam-tappet systems, and roll-forming of materials. Distributed by ASME. Annotation copyrighted by Book News, Inc., Portland, OR

Fundamentals of Nanoparticles

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Author :
Publisher : William Andrew
ISBN 13 : 0128135174
Total Pages : 668 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Fundamentals of Nanoparticles by : Abdel Salam Hamdy Makhlouf

Download or read book Fundamentals of Nanoparticles written by Abdel Salam Hamdy Makhlouf and published by William Andrew. This book was released on 2018-08-09 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamentals of Nanoparticles: Classifications, Synthesis Methods, Properties and Characterization explores the nanoparticles and architecture of nanostructured materials being used today in a comprehensive, detailed manner. This book focuses primarily on the characterization, properties and synthesis of nanoscale materials, and is divided into three major parts. This is a valuable reference for materials scientists, and chemical and mechanical engineers working in R&D and academia, who want to learn more about how nanoparticles and nanomaterials are characterized and engineered. Part one covers nanoparticles formation, self-assembly in the architecture nanostructures, types and classifications of nanoparticles, and signature physical and chemical properties, toxicity and regulations. Part two presents different ways to form nanometer particles, including bottom-up and top-down approaches, the classical and non-classical theories of nanoparticles formation and self-assembly, surface functionalization and other surface treatments to allow practical use. Part three covers characterization of nanoparticles and nanostructured materials, including the determination of size and shape, in addition to atomic and electronic structures and other important properties. - Includes new physical and chemical techniques for the synthesis of nanoparticles and architecture nanostructures - Features an in-depth treatment of nanoparticles and nanostructures, including their characterization and chemical and physical properties - Explores the unusual properties of materials that are developed by modifying their shape and composition and by manipulating the arrangement of atoms and molecules - Explains important techniques for the synthesis, fabrication and the characterization of complex nano-architectures

Handbook of Thin Films, Five-Volume Set

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Author :
Publisher : Academic Press
ISBN 13 : 0125129084
Total Pages : 661 pages
Book Rating : 4.1/5 (251 download)

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Book Synopsis Handbook of Thin Films, Five-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Thin Films, Five-Volume Set written by Hari Singh Nalwa and published by Academic Press. This book was released on 2001-10-29 with total page 661 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Sensors and Microsystems

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Author :
Publisher : Springer Nature
ISBN 13 : 3030375587
Total Pages : 411 pages
Book Rating : 4.0/5 (33 download)

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Book Synopsis Sensors and Microsystems by : G. Di Francia

Download or read book Sensors and Microsystems written by G. Di Francia and published by Springer Nature. This book was released on 2020-02-21 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book showcases the state of the art in the field of sensors and microsystems, revealing the impressive potential of novel methodologies and technologies. It covers a broad range of aspects, including: bio-, physical and chemical sensors; actuators; micro- and nano-structured materials; mechanisms of interaction and signal transduction; polymers and biomaterials; sensor electronics and instrumentation; analytical microsystems, recognition systems and signal analysis; and sensor networks, as well as manufacturing technologies, environmental, food and biomedical applications. The book gathers a selection of papers presented at the 20th AISEM National Conference on Sensors and Microsystems, held in Naples, Italy in February 2019, the event brought together researchers, end users, technology teams and policy makers.

Pulsed Laser Deposition of Thin Films

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 0470052112
Total Pages : 754 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Pulsed Laser Deposition of Thin Films by : Robert Eason

Download or read book Pulsed Laser Deposition of Thin Films written by Robert Eason and published by John Wiley & Sons. This book was released on 2007-12-14 with total page 754 pages. Available in PDF, EPUB and Kindle. Book excerpt: Edited by major contributors to the field, this text summarizes current or newly emerging pulsed laser deposition application areas. It spans the field of optical devices, electronic materials, sensors and actuators, biomaterials, and organic polymers. Every scientist, technologist and development engineer who has a need to grow and pattern, to apply and use thin film materials will regard this book as a must-have resource.

Recent Advances in Thin Films

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Publisher : Springer Nature
ISBN 13 : 9811561168
Total Pages : 721 pages
Book Rating : 4.8/5 (115 download)

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Book Synopsis Recent Advances in Thin Films by : Sushil Kumar

Download or read book Recent Advances in Thin Films written by Sushil Kumar and published by Springer Nature. This book was released on 2020-08-27 with total page 721 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume comprises the expert contributions from the invited speakers at the 17th International Conference on Thin Films (ICTF 2017), held at CSIR-NPL, New Delhi, India. Thin film research has become increasingly important over the last few decades owing to the applications in latest technologies and devices. The book focuses on current advances in thin film deposition processes and characterization including thin film measurements. The chapters cover different types of thin films like metal, dielectric, organic and inorganic, and their diverse applications across transistors, resistors, capacitors, memory elements for computers, optical filters and mirrors, sensors, solar cells, LED's, transparent conducting coatings for liquid crystal display, printed circuit board, and automobile headlamp covers. This book can be a useful reference for students, researchers as well as industry professionals by providing an up-to-date knowledge on thin films and coatings.

Electrical and Electronic Devices, Circuits, and Materials

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 1119755085
Total Pages : 608 pages
Book Rating : 4.1/5 (197 download)

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Book Synopsis Electrical and Electronic Devices, Circuits, and Materials by : Suman Lata Tripathi

Download or read book Electrical and Electronic Devices, Circuits, and Materials written by Suman Lata Tripathi and published by John Wiley & Sons. This book was released on 2021-03-24 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: The increasing demand for electronic devices for private and industrial purposes lead designers and researchers to explore new electronic devices and circuits that can perform several tasks efficiently with low IC area and low power consumption. In addition, the increasing demand for portable devices intensifies the call from industry to design sensor elements, an efficient storage cell, and large capacity memory elements. Several industry-related issues have also forced a redesign of basic electronic components for certain specific applications. The researchers, designers, and students working in the area of electronic devices, circuits, and materials sometimesneed standard examples with certain specifications. This breakthrough work presents this knowledge of standard electronic device and circuit design analysis, including advanced technologies and materials. This outstanding new volume presents the basic concepts and fundamentals behind devices, circuits, and systems. It is a valuable reference for the veteran engineer and a learning tool for the student, the practicing engineer, or an engineer from another field crossing over into electrical engineering. It is a must-have for any library.

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 0387288430
Total Pages : 293 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte

Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-10-11 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.

Organic Thin Film Transistor Integration

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 3527634452
Total Pages : 258 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Organic Thin Film Transistor Integration by : Flora Li

Download or read book Organic Thin Film Transistor Integration written by Flora Li and published by John Wiley & Sons. This book was released on 2011-03-21 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: Research on organic electronics (or plastic electronics) is driven by the need to create systems that are lightweight, unbreakable, and mechanically flexible. With the remarkable improvement in the performance of organic semiconductor materials during the past few decades, organic electronics appeal to innovative, practical, and broad-impact applications requiring large-area coverage, mechanical flexibility, low-temperature processing, and low cost. Thus, organic electronics appeal to a broad range of electronic devices and products including transistors, diodes, sensors, solar cells, lighting, displays, and electronic identification and tracking devices A number of commercial opportunities have been identified for organic thin film transistors (OTFTs), ranging from flexible displays, electronic paper, radio-frequency identification (RFID) tags, smart cards, to low-cost disposable electronic products, and more are continually being invented as the technology matures. The potential applications for "plastic electronics" are huge but several technological hurdles must be overcome. In many of these applications, transistor serves as a fundamental building block to implement the necessary electronic functionality. Hence, research in organic thin film transistors (OTFTs) or organic field effect transistors (OFETs) is eminently pertinent to the development and realization of organic electronics. This book presents a comprehensive investigation of the production and application of a variety of polymer based transistor devices and circuits. It begins with a detailed overview of Organic Thin Film Transistors (OTFTs) and discusses the various possible fabrication methods reported so far. This is followed by two major sections on the choice, optimization and implementation of the gate dielectric material to be used. Details of the effects of processing on the efficiency of the contacts are then provided. The book concludes with a chapter on the integration of such devices to produce a variety of OTFT based circuits and systems. The key objective is to examine strategies to exploit existing materials and techniques to advance OTFT technology in device performance, device manufacture, and device integration. Finally, the collective knowledge from these investigations facilitates the integration of OTFTs into organic circuits, which is expected to contribute to the development of new generation of all-organic displays for communication devices and other pertinent applications. Overall, a major outcome of this work is that it provides an economical means for organic transistor and circuit integration, by enabling the use of a well-established PECVD infrastructure, while not compromising the performance of electronics. The techniques established here are not limited to use in OTFTs only; the organic semiconductor and SiNx combination can be used in other device structures (e.g., sensors, diodes, photovoltaics). Furthermore, the approach and strategy used for interface optimization can be extended to the development of other materials systems.

Thin Film Physics And Devices: Fundamental Mechanism, Materials And Applications For Thin Films

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Author :
Publisher : World Scientific
ISBN 13 : 9811224005
Total Pages : 706 pages
Book Rating : 4.8/5 (112 download)

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Book Synopsis Thin Film Physics And Devices: Fundamental Mechanism, Materials And Applications For Thin Films by : Jianguo Zhu

Download or read book Thin Film Physics And Devices: Fundamental Mechanism, Materials And Applications For Thin Films written by Jianguo Zhu and published by World Scientific. This book was released on 2021-06-18 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin films have an extremely broad range of applications from electronics and optics to new materials and devices. Collaborative and multidisciplinary efforts from physicists, materials scientists, engineers and others have established and advanced a field with key pillars constituting (i) the synthesis and processing of thin films, (ii) the understanding of physical properties in relation to the nanometer scale, (iii) the design and fabrication of nano-devices or devices with thin film materials as building blocks, and (iv) the design and construction of novel tools for characterization of thin films.Against the backdrop of the increasingly interdisciplinary field, this book sets off to inform the basics of thin film physics and thin film devices. Readers are systematically introduced to the synthesis, processing and application of thin films; they will also study the formation of thin films, their structure and defects, and their various properties — mechanical, electrical, semiconducting, magnetic, and superconducting. With a primary focus on inorganic thin film materials, the book also ventures on organic materials such as self-assembled monolayers and Langmuir-Blodgett films.This book will be effective as a teaching or reference material in the various disciplines, ranging from Materials Science and Engineering, Electronic Science and Engineering, Electronic Materials and Components, Semiconductor Physics and Devices, to Applied Physics and more. The original Chinese publication has been instrumental in this purpose across many Chinese universities and colleges.

Thin Film Processes

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Author :
Publisher : BoD – Books on Demand
ISBN 13 : 9535130676
Total Pages : 222 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Thin Film Processes by : Jagannathan Thirumalai

Download or read book Thin Film Processes written by Jagannathan Thirumalai and published by BoD – Books on Demand. This book was released on 2017-04-12 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets presents topics on global advancements in theoretical and experimental facts, instrumentation and practical applications of thin-film material perspectives and its applications. The aspect of this book is associated with the thin-film physics, the methods of deposition, optimization parameters and its wide technological applications. This book is divided into three main sections: Thin Film Deposition Methods: A Synthesis Perspective; Optimization Parameters in the Thin Film Science and Application of Thin Films: A Synergistic Outlook. Collected chapters provide applicable knowledge for a wide range of readers: common men, students and researchers. It was constructed by experts in diverse fields of thin-film science and technology from over 15 research institutes across the globe.