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Author : Felix Holzner
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (84 download)
Download or read book Thermal Scanning Probe Lithography Using Polyphthalaldehyde written by Felix Holzner and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher : Elsevier
ISBN 13 : 0081003587
Total Pages : 636 pages
Book Rating : 4.0/5 (81 download)
Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place
Author : Yu Kyoung Ryu
Publisher : CRC Press
ISBN 13 : 1000804860
Total Pages : 145 pages
Book Rating : 4.0/5 (8 download)
Download or read book Scanning Probe Lithography written by Yu Kyoung Ryu and published by CRC Press. This book was released on 2022-12-22 with total page 145 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. • Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.
Author : Hyongsok T. Soh
Publisher : Springer Science & Business Media
ISBN 13 : 1475733313
Total Pages : 212 pages
Book Rating : 4.4/5 (757 download)
Download or read book Scanning Probe Lithography written by Hyongsok T. Soh and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.
Author : Samuel Tobias Zimmermann
Publisher :
ISBN 13 :
Total Pages : 134 pages
Book Rating : 4.:/5 (18 download)
Download or read book Nanoscale Lithography and Thermometry with Thermal Scanning Probes written by Samuel Tobias Zimmermann and published by . This book was released on 2018 with total page 134 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mots-clés de l'auteur: Thermal Scanning Probes ; Grayscale Lithography ; Supramolecular Polymer ; Silk Fibroin ; Nanoscale Thermometry ; Nitrogen Vacancy Center ; Nanodiamonds.
Author : Christie R. K. Marrian
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 440 pages
Book Rating : 4.F/5 ( download)
Download or read book Technology of Proximal Probe Lithography written by Christie R. K. Marrian and published by SPIE-International Society for Optical Engineering. This book was released on 1993 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Hyongsok T. Soh
Publisher :
ISBN 13 :
Total Pages : 242 pages
Book Rating : 4.:/5 (839 download)
Download or read book Advancements in Scanning Probe Lithography and Nanostructure Fabrication written by Hyongsok T. Soh and published by . This book was released on 1999 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Horng-Chyau Day
Publisher :
ISBN 13 :
Total Pages : 246 pages
Book Rating : 4.:/5 (41 download)
Download or read book Scanning Probe Lithography and Nanofabrication written by Horng-Chyau Day and published by . This book was released on 1998 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Zheng Cui (author)
Publisher : Springer Nature
ISBN 13 : 3031625463
Total Pages : 418 pages
Book Rating : 4.0/5 (316 download)
Download or read book Nanofabrication written by Zheng Cui (author) and published by Springer Nature. This book was released on with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Umberto Celano
Publisher : Springer
ISBN 13 : 3030156125
Total Pages : 408 pages
Book Rating : 4.0/5 (31 download)
Download or read book Electrical Atomic Force Microscopy for Nanoelectronics written by Umberto Celano and published by Springer. This book was released on 2019-08-01 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Author : Challa S.S.R. Kumar
Publisher : Springer
ISBN 13 : 3662445514
Total Pages : 653 pages
Book Rating : 4.6/5 (624 download)
Download or read book Surface Science Tools for Nanomaterials Characterization written by Challa S.S.R. Kumar and published by Springer. This book was released on 2015-03-10 with total page 653 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fourth volume of a 40volume series on nano science and nanotechnology, edited by the renowned scientist Challa S.S.R. Kumar. This handbook gives a comprehensive overview about Surface Science Tools for Nanomaterials Characterization. Modern applications and state-of-the-art techniques are covered and make this volume an essential reading for research scientists in academia and industry.
Author : Navid Hussain
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (138 download)
Download or read book Liquid Metal Printing with Scanning Probe Lithography for Printed Electronics written by Navid Hussain and published by . This book was released on 2023* with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 55 pages
Book Rating : 4.:/5 (227 download)
Download or read book Scanning Probe Lithography. 4. Effect of Scanning Tunneling Microscope Tip Parameters on Lithographic Patterns in Self-Assembling Monolayers written by and published by . This book was released on 1996 with total page 55 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here we examine the effect of an STM tip on a Au-confined n-octadecyl mercaptan, HS(CH2)17CH3, SAM in air. We have determined that STM-induced lithography is controlled by a complex combination of parameters defined by both the instrument and the chemical and physical properties of materials in the vicinity of the tip. We have identified conditions that permit accurate control of the tip position during patterning, so we are able to prevent large tip excursions that lead to mixed patterning mechanisms. We propose a multi-step model in which the n-octadecyl mercaptan monolayer is: (1) disrupted by the tip, (2) electrochemically desorbed, and (3) removed by the scanning action of the tip. Once the passivating SAM is removed, additional patterning etches the exposed Au substrate. In addition to the primary pattern, we observe an irregularly shaped region of the surface that is disordered for 1 ->500 nm beyond the primary pattern. This disordered region represents an early stage of the patterning and indicates that the resolution of this technique is limited by the electrochemical nature of the patterning process. In some cases it is possible to form secondary patterns from protrusions on the tip. Patterns on n-octadecyl mercaptan coated-Au(111) defined in this manner are dimensionally stable for several days. The results provide further insight into this alternative approach to conventional lithography.
Author :
Publisher :
ISBN 13 :
Total Pages : 27 pages
Book Rating : 4.:/5 (227 download)
Download or read book Scanning Probe Lithography. 1. Scanning Tunneling Microscope-Induced Lithography of Self-Assembled N-Alkanethiol Monolayer Resists written by and published by . This book was released on 1993 with total page 27 pages. Available in PDF, EPUB and Kindle. Book excerpt: The tip of a scanning tunneling microscope was used to fabricate geometrically well structures within organized, self-assembled monolayer resist that have critical dimensions ranging from 60 nm to 5 micrometers. To achieve nanometer-scale lithography, a Au(111) substrate was coated with a self- assembled monolayer of HS(CH2)17CH3, which functions as an ultrathin (approx. 2. 5 nm) resist, and then the resist was etched by an STM tip. This treatment results in window-like features that penetrate the organic monolayer. Nanolithographically defined features have been characterized by scanning tunneling microscopy, scanning electron microscopy, and electrochemical methods. For example, since mass and electron transfer to the conductive Au substrate are blocked by the monolayer everywhere except in the STM-etched regions, the windows serve as ultramicroelectrodes. The limiting current that results from radial diffusion of a bulk-phase redox species to the etched window is in close agreement with that predicted by theory.
Author :
Publisher :
ISBN 13 : 9781510610682
Total Pages : pages
Book Rating : 4.6/5 (16 download)
Download or read book Technology of Proximal Probe Lithography written by and published by . This book was released on 1993 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Roman Boulatov
Publisher : Springer
ISBN 13 : 3319228250
Total Pages : 443 pages
Book Rating : 4.3/5 (192 download)
Download or read book Polymer Mechanochemistry written by Roman Boulatov and published by Springer. This book was released on 2015-10-17 with total page 443 pages. Available in PDF, EPUB and Kindle. Book excerpt: The series Topics in Current Chemistry presents critical reviews of the present and future trends in modern chemical research. The scope of coverage is all areas of chemical science including the interfaces with related disciplines such as biology, medicine and materials science. The goal of each thematic volume is to give the non-specialist reader, whether in academia or industry, a comprehensive insight into an area where new research is emerging which is of interest to a larger scientific audience. Each review within the volume critically surveys one aspect of that topic and places it within the context of the volume as a whole. The most significant developments of the last 5 to 10 years are presented using selected examples to illustrate the principles discussed. The coverage is not intended to be an exhaustive summary of the field or include large quantities of data, but should rather be conceptual, concentrating on the methodological thinking that will allow the non-specialist reader to understand the information presented. Contributions also offer an outlook on potential future developments in the field. Review articles for the individual volumes are invited by the volume editors. Readership: research chemists at universities or in industry, graduate students.
Author : John A. Rogers
Publisher : John Wiley & Sons
ISBN 13 : 3527338314
Total Pages : 368 pages
Book Rating : 4.5/5 (273 download)
Download or read book Silicon Nanomembranes written by John A. Rogers and published by John Wiley & Sons. This book was released on 2016-08-08 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Edited by the leaders in the fi eld, with chapters from highly renowned international researchers, this is the fi rst coherent overview of the latest in silicon nanomembrane research. As such, it focuses on the fundamental and applied aspects of silicon nanomembranes, ranging from synthesis and manipulation to manufacturing, device integration and system level applications, including uses in bio-integrated electronics, three-dimensional integrated photonics, solar cells, and transient electronics. The first part describes in detail the fundamental physics and materials science involved, as well as synthetic approaches and assembly and manufacturing strategies, while the second covers the wide range of device applications and system level demonstrators already achieved, with examples taken from electronics and photonics and from biomedicine and energy.
