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The Deposition Of Aln Thin Films Their Characterization And The Fabrication Of Surface Acoustic Wave Devices
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Book Synopsis The Deposition of AlN Thin Films, Their Characterization and the Fabrication of Surface Acoustic Wave Devices by : Charlee Fansler
Download or read book The Deposition of AlN Thin Films, Their Characterization and the Fabrication of Surface Acoustic Wave Devices written by Charlee Fansler and published by . This book was released on 2007 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices by : Charlee Fansler
Download or read book Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices written by Charlee Fansler and published by . This book was released on 2008 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt: Aluminum Nitride (AlN) thin films can be used for many device applications; for example, Surface Acoustic Wave (SAW) devices, microelectromechanical systems (MEMS) applications, and packaging applications. In this work, AlN is the critical layer in the fabrication process. One challenge is reliable deposition over wafer size substrates. The method of interest for deposition is pulsed DC sputtering. The (002) plane is the desired plane for its piezoelectric properties. The surface roughness of the deposited AlN is low and adheres well to the substrate. An AlN layer was deposited on a UNCD/Si substrate. Al was deposited on the AlN layer to form the IDTs (interdigital transducers) for SAW devices. SAW devices were fabricated on quartz - ST substrate. To verify the SAW devices work, they were tested using a network analyzer. This book discusses these results and parameters for AlN film deposition, film properties and implications for devices. This book would be beneficial for professionals, scientists, engineers, and graduate students in science and engineering working in the areas of wide bandgap semi-conductors, nitrides and piezoelectric materials and various acoustic wave devices.
Book Synopsis Hot-wall Low Pressure Chemical Vapor Deposition Growth and Characterization of GaN and Epitaxial AlN on Si (111) by : Karen Heinselman
Download or read book Hot-wall Low Pressure Chemical Vapor Deposition Growth and Characterization of GaN and Epitaxial AlN on Si (111) written by Karen Heinselman and published by . This book was released on 2016 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: The physical and electronic properties of aluminum nitride (AlN) have made it attractive for a wide variety of applications, including bulk and surface acoustic wave (B/SAW) resonators and thin film dielectric coatings. Due to its wide band gap of 6.2 eV, AlN is a good insulator. The chemical durability of AlN makes it appealing for extreme environmental conditions. Its thermal expansion coefficient is similar to those of other semiconductor materials such as Si and SiC, making it appropriate for use in high temperature applications as well. In this work, we demonstrate the growth of AlN and GaN thin films using hotwall low pressure chemical vapor deposition (LPCVD) in order to obtain epitaxial AlN growth with a parallelizable, inexpensive method (relative to the current epitaxial growth method, molecular beam epitaxy). This dissertation demonstrates the growth of aluminum nitride thin films (between 70 nm and 1 [MICRO SIGN]m in thickness) on Si (111) substrates using hot-wall low pressure chemical vapor deposition (LPCVD) at 1000 ? C and 2 torr. Prior to growth, the substrates were pretreated in situ with dichlorosilane cleaning step, the parameters of which were varied to optimize the c-axis alignment of the grown thin film AlN. In addition, nucleation time for the aluminum precursor, trimethylaluminum (TMAl) was varied and optimized. X-ray diffraction (XRD) was performed on the samples for characterization. With the optimal nucleation time and dichlorosilane pretreatment, the 2[theta]-[omega] FWHM of the resulting AlN film was 1160 arcsec, and the FWHM of the [omega] rocking curve was 1.6? . These optimal parameters exhibited epitaxial AlN peaks aligned with the Si (111) substrate when characterized using a tilted phi scan XRD technique. Transmission electron microscopy (TEM) provides a second epitaxial alignment confirmation. Backside etching of the Si (111) substrate to create freestanding AlN thin film drums is demonstrated. This access to the back side of the AlN thin films allows the fabrication of future bulk acoustic wave (BAW) resonator devices and testing the piezoelectric response of these materials. For alternate applications, GaN was grown on AlN buffer layers on Si (111) substrates using hot-wall LPCVD. The resulting film was c-axis aligned, with an XRD FWHM of 1420 arcsec for the GaN (001) 2[theta]-[omega] peak, and the FWHM of the rocking curve was 3.8? . Capacitance-voltage data on the grown GaN on AlN indicate n-type films with residual electron concentrations of roughly 1017 cm[-]3 .
Book Synopsis Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication by : Jyoti Prakash Kar
Download or read book Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication written by Jyoti Prakash Kar and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Acoustic Waves written by Marco G. Beghi and published by IntechOpen. This book was released on 2011-11-14 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: The concept of acoustic wave is a pervasive one, which emerges in any type of medium, from solids to plasmas, at length and time scales ranging from sub-micrometric layers in microdevices to seismic waves in the Sun's interior. This book presents several aspects of the active research ongoing in this field. Theoretical efforts are leading to a deeper understanding of phenomena, also in complicated environments like the solar surface boundary. Acoustic waves are a flexible probe to investigate the properties of very different systems, from thin inorganic layers to ripening cheese to biological systems. Acoustic waves are also a tool to manipulate matter, from the delicate evaporation of biomolecules to be analysed, to the phase transitions induced by intense shock waves. And a whole class of widespread microdevices, including filters and sensors, is based on the behaviour of acoustic waves propagating in thin layers. The search for better performances is driving to new materials for these devices, and to more refined tools for their analysis.
Book Synopsis Acoustic Wave and Electromechanical Resonators by : Humberto Campanella
Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Book Synopsis Glancing Angle Deposition of Thin Films by : Matthew M. Hawkeye
Download or read book Glancing Angle Deposition of Thin Films written by Matthew M. Hawkeye and published by John Wiley & Sons. This book was released on 2014-07-03 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a highly practical treatment of Glancing Angle Deposition (GLAD), a thin film fabrication technology optimized to produce precise nanostructures from a wide range of materials. GLAD provides an elegant method for fabricating arrays of nanoscale helices, chevrons, columns, and other porous thin film architectures using physical vapour deposition processes such as sputtering or evaporation. The book gathers existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers: Development and description of GLAD techniques for nanostructuring thin films Properties and characterization of nanohelices, nanoposts, and other porous films Design and engineering of optical GLAD films including fabrication and testing, and chiral films Post-deposition processing and integration to optimize film behaviour and structure Deposition systems and requirements for GLAD fabrication A patent survey, extensive relevant literature, and a survey of GLAD's wide range of material properties and diverse applications.
Author :Akhtar Mirfazli Publisher :National Library of Canada = Bibliothèque nationale du Canada ISBN 13 :9780612939431 Total Pages :192 pages Book Rating :4.9/5 (394 download)
Book Synopsis Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform] by : Akhtar Mirfazli
Download or read book Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform] written by Akhtar Mirfazli and published by National Library of Canada = Bibliothèque nationale du Canada. This book was released on 2004 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films by : Agne Zukauskaite
Download or read book Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films written by Agne Zukauskaite and published by Mdpi AG. This book was released on 2023-06-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to overcome the limitations of AlN thin films in various piezoelectric applications while still enabling us to benefit from all of the advantages of the parent material system, such as a high temperature stability, CMOS compatibility, and good mechanical properties. Potential applications include RF filters (bulk acoustic wave (BAW) or surface acoustic wave (SAW) resonators), energy harvesting, sensing applications, and infra-red detectors. The recent progress in MOCVD- and MBE-grown AlScN has led to high-frequency and -power electronics, (high-electron-mobility transistors (HEMTs)). AlScN is the first wurtzite III-nitride where ferroelectric switching was observed, allowing for many new possible applications in semiconductor memories additionally, it enables the additional functionality of switching to applications where piezoelectric materials are already in use. This Special Issue was very successful in covering all of the main aspects of AlScN research, including its growth, the fundamental and application-relevant properties, and device fabrication and characterization. We can see that AlScN technology is mature enough to be utilized in wafer-level material development and complicated devices, but there is still much to discover in terms of deposition process control, anisotropy, and, in particular, ferroelectric behavior.
Book Synopsis Piezoelectricity, Acoustic Waves and Device Applications by : Weiqiu Chen
Download or read book Piezoelectricity, Acoustic Waves and Device Applications written by Weiqiu Chen and published by World Scientific. This book was released on 2007 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.
Book Synopsis Current Research in Pulsed Laser Deposition by : Liviu Duta
Download or read book Current Research in Pulsed Laser Deposition written by Liviu Duta and published by MDPI. This book was released on 2021-08-30 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: Despite its limitation in terms of surface covered area, the PLD technique still gathers interest among researchers by offering endless possibilities for tuning thin film composition and enhancing their properties of interest due to: (i) the easiness of a stoichiometric transfer even for very complex target materials, (ii) high adherence of the deposited structures to the substrate, (iii) controlled degree of phase, crystallinity, and thickness of deposited coatings, (iv) versatility of the experimental set-up which allows for simultaneous ablation of multiple targets resulting in combinatorial maps or consecutive ablation of multiple targets producing multi-layered structures, and (v) adjustment of the number of laser pulses, resulting in either a spread of nanoparticles, islands of materials or a complete covering of a surface. Moreover, a variation of PLD, known as Matrix Assisted Pulsed Laser Evaporation, allows for deposition of organic materials, ranging from polymers to proteins and even living cells, otherwise difficult to transfer unaltered in the form of thin films by other techniques. Furthermore, the use of laser light as transfer agent ensures purity of films and pulse-to-pulse deposition allows for an unprecedented control of film thickness at the nm level. This Special Issue is a collection of state-of-the art research papers and reviews in which the topics of interest are devoted to thin film synthesis by PLD and MAPLE, for numerous research and industry field applications, such as bio-active coatings for medical implants and hard, protective coatings for cutting and drilling tools withstanding high friction and elevated temperatures, sensors, solar cells, lithography, magnetic devices, energy-storage and conversion devices, controlled drug delivery and in situ microstructuring for boosting of surface properties.
Book Synopsis Fabrication and Characterization of Aluminum Nitride Thin Films Deposited by RF Magnetron Sputtering by : William A. Carrington
Download or read book Fabrication and Characterization of Aluminum Nitride Thin Films Deposited by RF Magnetron Sputtering written by William A. Carrington and published by . This book was released on 1991 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Acoustic Waves written by Don Dissanayake and published by BoD – Books on Demand. This book was released on 2010-09-28 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: SAW devices are widely used in multitude of device concepts mainly in MEMS and communication electronics. As such, SAW based micro sensors, actuators and communication electronic devices are well known applications of SAW technology. For example, SAW based passive micro sensors are capable of measuring physical properties such as temperature, pressure, variation in chemical properties, and SAW based communication devices perform a range of signal processing functions, such as delay lines, filters, resonators, pulse compressors, and convolvers. In recent decades, SAW based low-powered actuators and microfluidic devices have significantly added a new dimension to SAW technology. This book consists of 20 exciting chapters composed by researchers and engineers active in the field of SAW technology, biomedical and other related engineering disciplines. The topics range from basic SAW theory, materials and phenomena to advanced applications such as sensors actuators, and communication systems. As such, in addition to theoretical analysis and numerical modelling such as Finite Element Modelling (FEM) and Finite Difference Methods (FDM) of SAW devices, SAW based actuators and micro motors, and SAW based micro sensors are some of the exciting applications presented in this book. This collection of up-to-date information and research outcomes on SAW technology will be of great interest, not only to all those working in SAW based technology, but also to many more who stand to benefit from an insight into the rich opportunities that this technology has to offer, especially to develop advanced, low-powered biomedical implants and passive communication devices.
Download or read book Acoustic Waves written by Marco G. Beghi and published by BoD – Books on Demand. This book was released on 2011-11-14 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: The concept of acoustic wave is a pervasive one, which emerges in any type of medium, from solids to plasmas, at length and time scales ranging from sub-micrometric layers in microdevices to seismic waves in the Sun's interior. This book presents several aspects of the active research ongoing in this field. Theoretical efforts are leading to a deeper understanding of phenomena, also in complicated environments like the solar surface boundary. Acoustic waves are a flexible probe to investigate the properties of very different systems, from thin inorganic layers to ripening cheese to biological systems. Acoustic waves are also a tool to manipulate matter, from the delicate evaporation of biomolecules to be analysed, to the phase transitions induced by intense shock waves. And a whole class of widespread microdevices, including filters and sensors, is based on the behaviour of acoustic waves propagating in thin layers. The search for better performances is driving to new materials for these devices, and to more refined tools for their analysis.
Book Synopsis Inorganic and Organic Thin Films by : Yujun Song
Download or read book Inorganic and Organic Thin Films written by Yujun Song and published by John Wiley & Sons. This book was released on 2021-03-30 with total page 768 pages. Available in PDF, EPUB and Kindle. Book excerpt: Learn more about foundational and advanced topics in polymer thin films and coatings besides species with this powerful two-volume resource The two-volume Inorganic and Organic Thin Films: Fundamentals, Fabrication, and Applications delivers a foundational resource for current researchers and commercial users involved in the design and fabrication of thin films. The book offers newcomers to the field a thorough description of new design theory, fabrication methods, and applications of advanced thin films. Readers will discover the physics and chemistry underlying the manufacture of new thin films and coatings in this leading new resource that promises to become a handbook for future applications of the technology. This one-stop reference brings together all important aspects of inorganic and polymeric thin films and coatings, including construction, assembly, deposition, functionality, patterning, and characterization. Explorations of their applications in industries as diverse as information technology, new energy, biomedical engineering, aerospace, and oceanographic engineering round out this fulsome exploration of one of the most exciting and rapidly developing areas of scientific and industrial research today. Readers will also learn from: A comprehensive introduction to the progress of thin films and coatings as well as fundamentals in functional thin films and coatings An exploration of multi-layered magnetic thin films for electron transport control and signal sensing, including giant magnetoresistance, colossal magnetoresistance, tunneling magnetoresistance, and the quantum anomalous Holzer effect An in time summary of high-quality magneto-optics, nanophotonics, spin waves and spintronics using bismuth-substituted iron garnet thin films as examples A thorough discussion of template-assisted fabrication of nanostructure thin films for ultrasensitive detection of chemicals and biomolecules A treatment of biomass derived functional films and coatings Perfect for materials scientists and inorganic chemists, Inorganic and Organic Thin Films will also earn a place in the libraries of solid state physicists and physical chemists working in private industry, as well as polymer and surface chemists who seek to improve their understanding of thin films and coatings.
Book Synopsis Surface Acoustic Wave Devices in Telecommunications by : Ken-Ya Hashimoto
Download or read book Surface Acoustic Wave Devices in Telecommunications written by Ken-Ya Hashimoto and published by Springer Science & Business Media. This book was released on 2000-06-21 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface acoustic wave (SAW) devices are widely used in mobile communications, a rapidly evolving market. This book gives an overview on the latest SAW technologies with an emphasis on the design and simulation of devices, such as resonator-based devices employing the SH-type leaky SAW.
Book Synopsis Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium by : Ji Wang
Download or read book Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium written by Ji Wang and published by World Scientific. This book was released on 2007-09-27 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.
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