Synthesis, Microstructural Characterization and Properties of Thin Film Materials for Applications in High Frequency Bulk Acoustic Wave Devices

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ISBN 13 : 9783861301509
Total Pages : 156 pages
Book Rating : 4.3/5 (15 download)

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Book Synopsis Synthesis, Microstructural Characterization and Properties of Thin Film Materials for Applications in High Frequency Bulk Acoustic Wave Devices by : Christof Metzmacher

Download or read book Synthesis, Microstructural Characterization and Properties of Thin Film Materials for Applications in High Frequency Bulk Acoustic Wave Devices written by Christof Metzmacher and published by . This book was released on 2003 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Thin Film Bulk Acoustic Wave Devices

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ISBN 13 : 9789513877224
Total Pages : pages
Book Rating : 4.8/5 (772 download)

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Book Synopsis Thin Film Bulk Acoustic Wave Devices by : Tuomas Pensala

Download or read book Thin Film Bulk Acoustic Wave Devices written by Tuomas Pensala and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mobile phones for the most demanding filtering applications and complement the surface acoustic wave (SAW) based filters. Their main advantages are small size and high performance at frequencies above 2 GHz. This work concentrates on the characterization, performance optimization, and modelling techniques of thin film BAW devices. Laser interferometric vibration measurements together with plate wave dispersion modeling are used to extract the full set of elastic material parameters for sputter deposited ZnO, demonstrating a method for obtaining material data needed for accurate simulation of the devices. The effectiveness of the acoustic interference reflector used to isolate the vibration from the substrate is studied by 1-D modeling, 2-D finite element method and by electrical and laser interferometric measurements. It is found that the Q-value of reflector-based BAW resonators operating at 2 GHz is limited to approximately 2000 by mechanisms other than leakage through the reflector. Suppression of spurious resonances in ZnO resonators is studied in depth by modeling and measurements. It is verified that the approximate mode orthogonality is behind the suppression in boundary frame type ZnO devices operating in the piston mode, but also another narrow band mode suppression mechanism is found. A plate wave dispersion based 2-D simulation scheme for laterally acoustically coupled BAW resonator filters is developed and employed in designing of experimental devices, which show both good agreement with the model predictions and a remarkable 4.9 % relative bandwidth.

Microstructural Characterization of Materials

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Publisher : John Wiley & Sons
ISBN 13 : 1118681487
Total Pages : 517 pages
Book Rating : 4.1/5 (186 download)

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Book Synopsis Microstructural Characterization of Materials by : David Brandon

Download or read book Microstructural Characterization of Materials written by David Brandon and published by John Wiley & Sons. This book was released on 2013-03-21 with total page 517 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microstructural characterization is usually achieved by allowing some form of probe to interact with a carefully prepared specimen. The most commonly used probes are visible light, X-ray radiation, a high-energy electron beam, or a sharp, flexible needle. These four types of probe form the basis for optical microscopy, X-ray diffraction, electron microscopy, and scanning probe microscopy. Microstructural Characterization of Materials, 2nd Edition is an introduction to the expertise involved in assessing the microstructure of engineering materials and to the experimental methods used for this purpose. Similar to the first edition, this 2nd edition explores the methodology of materials characterization under the three headings of crystal structure, microstructural morphology, and microanalysis. The principal methods of characterization, including diffraction analysis, optical microscopy, electron microscopy, and chemical microanalytical techniques are treated both qualitatively and quantitatively. An additional chapter has been added to the new edition to cover surface probe microscopy, and there are new sections on digital image recording and analysis, orientation imaging microscopy, focused ion-beam instruments, atom-probe microscopy, and 3-D image reconstruction. As well as being fully updated, this second edition also includes revised and expanded examples and exercises, with a solutions manual available at http://develop.wiley.co.uk/microstructural2e/ Microstructural Characterization of Materials, 2nd Edition will appeal to senior undergraduate and graduate students of material science, materials engineering, and materials chemistry, as well as to qualified engineers and more advanced researchers, who will find the book a useful and comprehensive general reference source.

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

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Publisher : Springer Science & Business Media
ISBN 13 : 9401117276
Total Pages : 625 pages
Book Rating : 4.4/5 (11 download)

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Book Synopsis Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices by : O. Auciello

Download or read book Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices written by O. Auciello and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 625 pages. Available in PDF, EPUB and Kindle. Book excerpt: The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices. This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to other recent books on thin films, the distinctive character of this book is the interdisciplinary treatment of the various fields of research related to the different thin film materials mentioned above. The wide range of topics discussed in this book include vacuum-deposition techniques, synthesis-processing, characterization, and devices of multicomponent/multilayered oxide high temperature superconducting, ferroelectric, electro-optic, optical, metallic, silicide, and compound semiconductor thin films. The book presents an unusual intedisciplinary exchange of ideas between researchers with cross-disciplinary backgrounds and it will be useful to established investigators as well as postdoctoral and graduate students.

Multilayer Integrated Film Bulk Acoustic Resonators

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Publisher : Springer Science & Business Media
ISBN 13 : 3642317766
Total Pages : 159 pages
Book Rating : 4.6/5 (423 download)

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Book Synopsis Multilayer Integrated Film Bulk Acoustic Resonators by : Yafei Zhang

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators

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ISBN 13 :
Total Pages : 157 pages
Book Rating : 4.:/5 (638 download)

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Book Synopsis High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators by : Janine Conde

Download or read book High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators written by Janine Conde and published by . This book was released on 2009 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Mechanical Properties and Microstructural Characterization of Polycrystalline Silicon Thin Films

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ISBN 13 :
Total Pages : 170 pages
Book Rating : 4.:/5 (377 download)

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Book Synopsis Mechanical Properties and Microstructural Characterization of Polycrystalline Silicon Thin Films by : Swaminathan Jayaraman

Download or read book Mechanical Properties and Microstructural Characterization of Polycrystalline Silicon Thin Films written by Swaminathan Jayaraman and published by . This book was released on 1997 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Scientific and Technical Aerospace Reports

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ISBN 13 :
Total Pages : 836 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Synthesis and Characterization of Transparent Conducting Indium-iron Oxide Bulk and Thin Film Materials

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ISBN 13 :
Total Pages : 178 pages
Book Rating : 4.:/5 (654 download)

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Book Synopsis Synthesis and Characterization of Transparent Conducting Indium-iron Oxide Bulk and Thin Film Materials by : Charbel T. Fahed

Download or read book Synthesis and Characterization of Transparent Conducting Indium-iron Oxide Bulk and Thin Film Materials written by Charbel T. Fahed and published by . This book was released on 2009 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microstructural Science for Thin Film Metallizations in Electronic Applications

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Publisher : Minerals, Metals, & Materials Society
ISBN 13 :
Total Pages : 208 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Microstructural Science for Thin Film Metallizations in Electronic Applications by : John Sanchez

Download or read book Microstructural Science for Thin Film Metallizations in Electronic Applications written by John Sanchez and published by Minerals, Metals, & Materials Society. This book was released on 1988 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nanoimprinted High-frequency Surface Acoustic Wave Devices

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ISBN 13 : 9789036536288
Total Pages : pages
Book Rating : 4.5/5 (362 download)

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Book Synopsis Nanoimprinted High-frequency Surface Acoustic Wave Devices by : Serkan Büyükköse

Download or read book Nanoimprinted High-frequency Surface Acoustic Wave Devices written by Serkan Büyükköse and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Functional Thin Films and Functional Materials

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Publisher : Springer
ISBN 13 : 9783540001119
Total Pages : 444 pages
Book Rating : 4.0/5 (11 download)

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Book Synopsis Functional Thin Films and Functional Materials by : Donglu Shi

Download or read book Functional Thin Films and Functional Materials written by Donglu Shi and published by Springer. This book was released on 2003-09-26 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: Up-to-date introduction to the field with the focus on the critical areas of novel thin films such as sol gel synthesis of membrane, ferroelectric thin films and devices, functional nanostructured thin films, micromechanical analysis of fiber-reinforced composites, and novel applications. An important aspect of the book lies in its wide coverage of practical applications.

International Aerospace Abstracts

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ISBN 13 :
Total Pages : 1048 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis International Aerospace Abstracts by :

Download or read book International Aerospace Abstracts written by and published by . This book was released on 1999 with total page 1048 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Techniques to Facilitate the Fabrication of ZnO-based Thin Film Bulk Acoustic Wave Devices

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Publisher :
ISBN 13 :
Total Pages : 572 pages
Book Rating : 4.:/5 (53 download)

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Book Synopsis Techniques to Facilitate the Fabrication of ZnO-based Thin Film Bulk Acoustic Wave Devices by : Shawn L. Pinkett

Download or read book Techniques to Facilitate the Fabrication of ZnO-based Thin Film Bulk Acoustic Wave Devices written by Shawn L. Pinkett and published by . This book was released on 2003 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Synthesis and Microstructural Characterization of MetalsMOF-5

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Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (724 download)

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Book Synopsis Synthesis and Microstructural Characterization of MetalsMOF-5 by :

Download or read book Synthesis and Microstructural Characterization of MetalsMOF-5 written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Thin Films, Five-Volume Set

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Publisher : Academic Press
ISBN 13 : 9780125129084
Total Pages : 3451 pages
Book Rating : 4.1/5 (29 download)

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Book Synopsis Handbook of Thin Films, Five-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Thin Films, Five-Volume Set written by Hari Singh Nalwa and published by Academic Press. This book was released on 2001-10-29 with total page 3451 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Fabrication and Characterization of Epitaxial Yba2cu3oy Thin Films on Double-Buffered Silicon Substrates

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ISBN 13 : 9781374711174
Total Pages : pages
Book Rating : 4.7/5 (111 download)

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Book Synopsis Fabrication and Characterization of Epitaxial Yba2cu3oy Thin Films on Double-Buffered Silicon Substrates by : Ho-Yi Eric Wong

Download or read book Fabrication and Characterization of Epitaxial Yba2cu3oy Thin Films on Double-Buffered Silicon Substrates written by Ho-Yi Eric Wong and published by . This book was released on 2017-01-27 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "Fabrication and Characterization of Epitaxial YBa2Cu3Oy Thin Films on Double-buffered Silicon Substrates" by Ho-yi, Eric, Wong, 黃灝頤, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. Abstract: Abstract of thesis entitled FABRICATION AND CHARACTERIZATION OF EPITAXIAL YBa Cu O 2 3 y THIN FILMS ON DOUBLE-BUFFERED SILICON SUBSTRATES submitted by WONG HO YI ERIC for the degree of Master of Philosophy at The University of Hong Kong in August 2003 The discovery of perovskite copper oxide YBa Cu O (YBCO) has aroused a 2 3 y constantly increasing interest in this material due to the potential applications in microelectronics devices, such as microwave elements, multilayer junctions, etc. Suitable substrates with a low dielectric constant, good high frequency properties, large size and low cost are necessary. Silicon substrates are widely used and well developed in the semiconductor industry and microwave device applications. Therefore, successful fabrication of high T YBCO films on silicon is of interest for various applications of hybrid superconductor-semiconductor devices and interconnected circuits. In such applications, the epitaxial growth of YBCO on silicon is extremely important. This thesis presents a systematic investigation of the fabrication and characterization of epitaxial YBCO thin films on silicon substrates with a double buffer of Eu CuO (ECO)/YSZ(Yttria-Stabilized Zirconia). Silicon (001) substrates 2 4 were prepared using a chemical etch by dilute HF acid prior to thin film deposition. The YBCO thin films were grown via an entirely in situ process using an on-axis rf magnetron sputtering method with optimized deposition parameters including the deposition temperature, operating pressure and partial oxygen pressure. The crystallinity, surface morphology, electrical properties, and interface of the obtained YBCO/ECO/YSZ thin films were studied by x-ray diffraction, surface profiler, atomic force microscope, optical microscope, standard dc four-probe measurements and small angle x-ray reflection. The X-ray diffraction patterns showed that all the thin films were highly c-axis oriented. A full width of 0.69 at half maximum of the YBCO(005) peak was obtained. This was smaller than reported in previous studies of YBCO thin films on double buffered silicon or nickel substrates. The atomic force microscopy image showed that the ECO buffer surface was flat and smooth. The average roughness over a wide scanning region of 2000m was less than 25nm. The optical microscope images showed that the surface morphology of the grown YBCO thin films was significantly improved by the ECO buffer layer since ECO had a very stable 214-T' crystal structure and very small lattice mismatch with YBCO. The YBCO/ECO/YSZ multilayers were further characterized by small angle x-ray reflection. The surface roughness of the YBCO layers decreased when an ECO buffer was added. No intermediate layer was found at the YBCO/ECO and ECO/YSZ interfaces. The results suggest that ECO is chemically compatible with YBCO and YSZ. The superconductivity of YBCO films was significantly improved by the ECO/YSZ double buffer. This is indicated by the fact that YBCO thin films on silicon substrates with an ECO/YSZ double buffer showed a higher T than that grown on YSZ/Si without the ECO layer. The advantages of using ECO/YSZ double buffer layers in deposition of YBCO on silicon were clearly demonstrated. It would provide a good basis for the potential applications of YBCO on other semiconductors, metallic or me