Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

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Author :
Publisher : SPIE Press
ISBN 13 : 9780819423795
Total Pages : 706 pages
Book Rating : 4.4/5 (237 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

The MEMS Handbook

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Publisher : CRC Press
ISBN 13 : 9781420050905
Total Pages : 1386 pages
Book Rating : 4.0/5 (59 download)

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Book Synopsis The MEMS Handbook by : Mohamed Gad-el-Hak

Download or read book The MEMS Handbook written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2001-09-27 with total page 1386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

Micromanufacturing Engineering and Technology

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Author :
Publisher : William Andrew
ISBN 13 : 081551980X
Total Pages : 429 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Micromanufacturing Engineering and Technology by : Yi Qin

Download or read book Micromanufacturing Engineering and Technology written by Yi Qin and published by William Andrew. This book was released on 2010-07-02 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. - Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control - Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication - Outlines system engineering issues pertaining to handling, metrology, testing, integration and software - Explains widely used micro parts in bio / medical industry, information technology and automotive engineering - Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Springer Handbook of Robotics

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Publisher : Springer Science & Business Media
ISBN 13 : 354023957X
Total Pages : 1626 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Springer Handbook of Robotics by : Bruno Siciliano

Download or read book Springer Handbook of Robotics written by Bruno Siciliano and published by Springer Science & Business Media. This book was released on 2008-05-20 with total page 1626 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the science of robotics undergoing a major transformation just now, Springer’s new, authoritative handbook on the subject couldn’t have come at a better time. Having broken free from its origins in industry, robotics has been rapidly expanding into the challenging terrain of unstructured environments. Unlike other handbooks that focus on industrial applications, the Springer Handbook of Robotics incorporates these new developments. Just like all Springer Handbooks, it is utterly comprehensive, edited by internationally renowned experts, and replete with contributions from leading researchers from around the world. The handbook is an ideal resource for robotics experts but also for people new to this expanding field.

Micro-Manufacturing

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Publisher : John Wiley & Sons
ISBN 13 : 1118010566
Total Pages : 490 pages
Book Rating : 4.1/5 (18 download)

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Book Synopsis Micro-Manufacturing by : Muammer Koç

Download or read book Micro-Manufacturing written by Muammer Koç and published by John Wiley & Sons. This book was released on 2011-05-06 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.

Microrobotics and Microassembly

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Publisher :
ISBN 13 :
Total Pages : 350 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Microrobotics and Microassembly by :

Download or read book Microrobotics and Microassembly written by and published by . This book was released on 2001 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Tribology Issues and Opportunities in MEMS

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Publisher : Springer Science & Business Media
ISBN 13 : 9401150508
Total Pages : 652 pages
Book Rating : 4.4/5 (11 download)

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Book Synopsis Tribology Issues and Opportunities in MEMS by : Bharat Bhushan

Download or read book Tribology Issues and Opportunities in MEMS written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

Small-Scale Robotics From Nano-to-Millimeter-Sized Robotic Systems and Applications

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Publisher : Springer
ISBN 13 : 3642551343
Total Pages : 108 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Small-Scale Robotics From Nano-to-Millimeter-Sized Robotic Systems and Applications by : Igor Paprotny

Download or read book Small-Scale Robotics From Nano-to-Millimeter-Sized Robotic Systems and Applications written by Igor Paprotny and published by Springer. This book was released on 2014-05-12 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains selected contributions from some of the most renowned researchers in the field of small-scale robotics, based in large part on invited presentations from the workshop “The Different Sizes of Small-Scale Robotics: from Nano-, to Millimeter-Sized Robotic Systems and Applications,” which was held in conjunction with the conjunction with the International Conference on Robotics and Automation (ICRA 2013), in May 2013 in Karlsruhe, Germany. With many potential applications in areas such as medicine, manufacturing or search and rescue, small-scale robotics represent a new emerging frontier in robotics research. The aim of this book is to provide an insight to ongoing research and future directions in this novel, continuously evolving field, which lies at the intersection of engineering, computer science, material science and biology.

Micro Mechanical Systems

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Publisher : Elsevier
ISBN 13 : 0080536549
Total Pages : 278 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Micro Mechanical Systems by : T. Fukuda

Download or read book Micro Mechanical Systems written by T. Fukuda and published by Elsevier. This book was released on 1998-07-24 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

Frontiers of Engineering

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Publisher : National Academies Press
ISBN 13 : 0309084989
Total Pages : 138 pages
Book Rating : 4.3/5 (9 download)

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Book Synopsis Frontiers of Engineering by : National Academy of Engineering

Download or read book Frontiers of Engineering written by National Academy of Engineering and published by National Academies Press. This book was released on 2002-10-10 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: This collection includes summaries of presentations given at the NAE Symposium in March 2001. Topics include flight at the leading edge, civil systems, wireless communications, and technology and the human body

Micro Electro Mechanical System Design

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Publisher : CRC Press
ISBN 13 : 1420027751
Total Pages : 492 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Micro Electro Mechanical System Design by : James J. Allen

Download or read book Micro Electro Mechanical System Design written by James J. Allen and published by CRC Press. This book was released on 2005-07-08 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,

MEMS

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Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Composite Microstructures, Microactuators and Sensors for Biologically Inspired Micro Air Vehicles

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Publisher :
ISBN 13 :
Total Pages : 398 pages
Book Rating : 4.:/5 (35 download)

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Book Synopsis Composite Microstructures, Microactuators and Sensors for Biologically Inspired Micro Air Vehicles by : Robert John Wood

Download or read book Composite Microstructures, Microactuators and Sensors for Biologically Inspired Micro Air Vehicles written by Robert John Wood and published by . This book was released on 2004 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Applied Mechanics Reviews

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Publisher :
ISBN 13 :
Total Pages : 354 pages
Book Rating : 4.3/5 (243 download)

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Book Synopsis Applied Mechanics Reviews by :

Download or read book Applied Mechanics Reviews written by and published by . This book was released on 1993 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Flying Insects and Robots

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Publisher : Springer Science & Business Media
ISBN 13 : 3540893938
Total Pages : 319 pages
Book Rating : 4.5/5 (48 download)

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Book Synopsis Flying Insects and Robots by : Dario Floreano

Download or read book Flying Insects and Robots written by Dario Floreano and published by Springer Science & Business Media. This book was released on 2009-10-23 with total page 319 pages. Available in PDF, EPUB and Kindle. Book excerpt: Flying insects are intelligent micromachines capable of exquisite maneuvers in unpredictable environments. Understanding these systems advances our knowledge of flight control, sensor suites, and unsteady aerodynamics, which is of crucial interest to engineers developing intelligent flying robots or micro air vehicles (MAVs). The insights we gain when synthesizing bioinspired systems can in turn benefit the fields of neurophysiology, ethology and zoology by providing real-life tests of the proposed models. This book was written by biologists and engineers leading the research in this crossdisciplinary field. It examines all aspects of the mechanics, technology and intelligence of insects and insectoids. After introductory-level overviews of flight control in insects, dedicated chapters focus on the development of autonomous flying systems using biological principles to sense their surroundings and autonomously navigate. A significant part of the book is dedicated to the mechanics and control of flapping wings both in insects and artificial systems. Finally hybrid locomotion, energy harvesting and manufacturing of small flying robots are covered. A particular feature of the book is the depth on realization topics such as control engineering, electronics, mechanics, optics, robotics and manufacturing. This book will be of interest to academic and industrial researchers engaged with theory and engineering in the domains of aerial robotics, artificial intelligence, and entomology.

Development of a Surface Micromachined Electro-thermal Vibromotor

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Author :
Publisher :
ISBN 13 :
Total Pages : 334 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Development of a Surface Micromachined Electro-thermal Vibromotor by : Min-Fan Pai

Download or read book Development of a Surface Micromachined Electro-thermal Vibromotor written by Min-Fan Pai and published by . This book was released on 2001 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Miniaturized Systems with Micro-optics and MEMS

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Publisher :
ISBN 13 :
Total Pages : 442 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Miniaturized Systems with Micro-optics and MEMS by : M. Edward Motamedi

Download or read book Miniaturized Systems with Micro-optics and MEMS written by M. Edward Motamedi and published by . This book was released on 1999 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt: These scientific papers discuss miniaturized systems with micro-optics and microelectromechanical systems (MEMS) from a range of perspectives.