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Stress Tolerant And Temperature Stable Rf Mems Capacitive Switches And Tunable Filters
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Book Synopsis Stress-tolerant and Temperature-stable RF MEMS Capacitive Switches and Tunable Filters by : Isak C. Reines
Download or read book Stress-tolerant and Temperature-stable RF MEMS Capacitive Switches and Tunable Filters written by Isak C. Reines and published by . This book was released on 2010 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation presents RF MEMS capacitive switches which are based on a thin-film aluminum circular beam geometry that exhibit reduced sensitivity to both initial residual stress and stress-changes versus ambient temperature. The device symmetry also facilitates low-series-inductance compact device arrays for high-value capacitances. These switches are built in the Raytheon RF MEMS process and show an 8-10x improvement in temperature stability over the standard fixed-fixed beam designs. Also, cascadable RF MEMS switched capacitors are demonstrated that are suitable for VHF and UHF tunable filters and reconfigurable matching networks. These devices are fabricated in the UCSD and Raytheon RF MEMS processes and result in a near ideal capacitor impedance over a 30:1 frequency range. The circular geometry is then used to demonstrate an RF MEMS switched capacitor with 10 W power handling at 10 GHz under hot-switching conditions that maintains a relatively-low (
Book Synopsis High Performance RF MEMS Metal-Contact Switches and Capacitive Switches by : Chenhui Niu
Download or read book High Performance RF MEMS Metal-Contact Switches and Capacitive Switches written by Chenhui Niu and published by . This book was released on 2016 with total page 109 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation presents designs, fabrication processes and measurements of a series of high performance RF MEMS switches. Chapter 2 presents a miniature RF MEMS metal contact switch based on a tethered-cantilever structure. The miniature size and the use of tethers result in an excellent biaxial residual stress and stress gradient tolerance. The switch is built using thin metal process with a large biaxial stress and a high stress gradient (50 MPa and -105 MPa/um), and works well under these conditions. In the up-state, the switch capacitance is 9.4 fF and results in an isolation of 20 dB at 20 GHz. In the down-state, the switch resistance is 3.6 ohm for a gold-gold contact under 30 V actuation voltage. The switch is compatible with CMOS back-end processing. With its miniature size, the switch could be placed in arrays to achieve lower contact resistance and higher power handling. Chapter 3 presents a multi-contact mN-force RF MEMS metal-contact switch with a pull-down voltage (Vp) of 45 V-50 V and an operation voltage of 60V-65V. The switch gets a contact force of s 2.0 mN under 65 V actuation voltage and a release force of s 1.2 mN (simulated). The switch gets an on-state resistance of s 1.8 with Ru-Au contact and an off-state capacitance of 13.5 fF, which results in a figure of merit of 24 fs. In the temperature stability measurement, the switch shows a change of 4V in pull-down voltage and a change of 2V in release voltage from 25 C to 125 C. In the high power handling measurement, the switch demonstrates a reliability of > 10 million cold switching cycles with 5 W RF power. Chapter 4 first presents a high capacitance ratio (Cr) capacitive switch with continuous tuning capability after pull-down. The measured up-state capacitance is 74 fF. The pull-down voltage of the switch is 30V -32V and there is an 8.4% linear tuning range from 33V to 40V actuation voltage. The measured down-state capacitance is 1296 fF under 40V actuation voltage, resulting in a Cr of 17.5. Next, a back-to-back switch using the high Cr switch is designed to improve IP2 without extra power supply. The back-to-back switch shows an up-state capacitance of 31fF, a Cr of 19.7 and a 6.8% continuous tuning range from 34V to 40V. The back-to-back switch shows a 14 dB higher OIP2 than the single switch does.
Book Synopsis Advanced RF MEMS by : Stepan Lucyszyn
Download or read book Advanced RF MEMS written by Stepan Lucyszyn and published by Cambridge University Press. This book was released on 2010-08-19 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
Download or read book RF MEMS written by Gabriel M. Rebeiz and published by John Wiley & Sons. This book was released on 2004-02-06 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Book Synopsis High Performance RF MEMS Metal-contact Switches and Switching Networks by : Chirag D. Patel
Download or read book High Performance RF MEMS Metal-contact Switches and Switching Networks written by Chirag D. Patel and published by . This book was released on 2012 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation presents the design and measurement of high performance RF MEMS metal contact switches capable of achieving mN-level contact and release forces. The switches are designed and demonstrated to be tolerant to a wide range stress effect and temperature. Chapter 2 presents an electrostatic RF MEMS metal contact switch based on a tethered cantilever topology. The use of tethers results in a design that has low sensitivity to stress gradients, biaxial stresses, and temperature. A switch with a footprint of 160x190 [mu]m2 and based on a surface-micromachined 8-[mu]m thick gold cantilever with a Au/Ru contact is implemented on a high-resistivity silicon substrate and results in a total contact force of 0.8-1.2 mN at 80-90 V, a restoring force of 0.5 mN, a pull-in voltage of 61 V, an up-state capacitance of 24 fF, and an actuation time of 6.4 [mu]s. The device achieves a switch resistance of 2.4±1.4 Ohms to 1.8±0.6 Ohms at 90-100 V in open laboratory environments (unpackaged). Chapter 3 presents a temperature stable metal-contact RF MEMS switch capable of handling>5W of RF power (a second generation of the tethered cantilever topology). The device achieves 0.7 - 1.5 mN of contact force for actuation voltages of 80 - 90 V, with a restoring force of 0.63 mN. Furthermore, the device is insensitive to stress effects and temperature. Temperature measurements showed excellent thermal stability - no deflection in the beam, and a change in pull-in voltage of only 4 V from 25-125°C. The switch was tested under prolonged (>24 hrs) high-power RF conditions with excellent reliability. Chapter 4 presents a compact RF MEMS metal-contact switch based on a tethered cantilever topology and orthogonal anchors. The switch is a "medium-force" design capable of achieving 0.38-0.72 mN of contact force for actuation voltages of 90-100 V and a restoring force of 0.46 mN (simulated) in a 120160 um^2 area. The pull-in and release voltages are 75 V and 70 V, respectively. In the down-state, the switch resistance is 1-2 with a Au/Ru hybrid contact. In the up-state, the capacitance is 16 fF, resulting in an isolation of 20 dB at 10 GHz and 9 dB at 40 GHz for an SPST configuration. Furthermore, the switch demonstrated a reliability of>10 million cycles (1 W, cold switching) and a power handling of>5 W. For a series/shunt configuration, the switch achieves an isolation of 55 dB at 10 GHz and 35 dB at 40 GHz. Compact SP4T and SP6T switching networks are also implemented. The SP4T is 850x530 [mu]m2 (850x650 [mu]m2 with bias pads); the SP6T is 850x730 [mu]m2 (850x855 [mu]m2 with bias pads). Both designs achieve an isolation ~36 dB and insertion loss 0.3 dB at 3 GHz. Chapter 5 presents a mN-level contact and restoring force RF MEMS metal-contact switch exhibiting high reliability, high linearity, and high power handing for DC-40 GHz applications. The device, which is insensitive to stress and temperature effects, achieves 1.2-1.5 mN of contact force (per contact) from 80-90 V and 1.0 mN of restoring force (per contact). The up-state capacitance is 8 fF, resulting in an isolation of -46, -31, and -14 dB at 1, 6, and 40 GHz, respectively. Measured results show switch resistances of 1-2 Ohms and a reliability of100 million cycles at 2-5Wunder cold-switching at 100 mW under hot-switching conditions, in an unpackaged and standard laboratory environment. Furthermore, the device was tested under prolonged hold-down conditions and demonstrated excellent RF power handling (>10 W) and DC current handling (>1 A) capability. Finally, SP4T and SP6T switching networks implemented with the metal-contact switch are demonstrated.
Book Synopsis Low Temperature Superconducting RF MEMS Devices by : Sara Sharifian Attar
Download or read book Low Temperature Superconducting RF MEMS Devices written by Sara Sharifian Attar and published by . This book was released on 2014 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract Superconducting microelectronics technology (SME) has the potential of realizing high speed digital receivers capable of performing direct digitization of radio frequency signals with very low power consumption. An SME receiver is implemented on a single chip using low-temperature superconducting (LTS) Josephson junctions (JJs). The technology provides ultrafast digital switches and logic circuits along with high linearity analog-to-digital converters (ADCs). However, SME technology offers limited choices for realizing reconfigurable analog front-ends. While a tunable inductor using a string of JJs or superconducting quantum interference devices (SQUIDs) can be realized using the SME technology, the main problems with these tuning inductor elements are poor linearity performance and low power handling. RF MEMS technology has the capability to offer highly linear and high power handling tuning elements such as switches and varactors. To integrate a receiver with radio frequency (RF) front-end on a single chip, MEMS devices need to be fabricated using the same fabrication process as SME technology. In this study, a post-processing technique is developed and optimized to release the MEMS parts of the SME chip while keeping the SME electronics intact. Another challenge is to design MEMS structures that can handle extreme low-temperature working environments. For the first time, superconducting niobium-based RF MEMS dc-contact switches, capacitive-contact switches and varactors are developed employing the SME technology, operating at 4K. The loss in all of the devices is extremely low and the quality factor is quite high when niobium superconducts. The mechanical performance of the MEMS structures are investigated at liquid nitrogen and liquid helium temperatures of 77k and 4K, respectively. The deformation of the MEMS structures and material stiffness at cryogenic temperature are also investigated. Additionally, more advanced tunable RF circuits are developed, fabricated and characterized, implementing the primary devices. Two types of MEMS capacitor banks are designed, post-processed and characterized using the dc-contact and capacitive-contact RF MEMS switches. The capacitor banks show a very high quality factor at 4K. As well, a single-port-double-throw switch is developed and measured as the building block for switch matrices, showing extremely low insertion loss, and tunable resonators are presented that implement both varactors and dc-contact RF MEMS switches as the tuning elements. The resonators are extremely miniaturized, with a size of [lambda]o/1600, and tunable filters are developed and characterized using these resonators. While niobium-based RF MEMS can be integrated within the niobium-layers of the SME technology, designers often do not have the flexibility to select the thickness of the MEMS structural layers. Also, since the fabrication process of SME technology is not specifically designed for MEMS technology, there are limitations in designing more reliable RF MEMS devices. A novel niobium-based micro-fabrication process is developed to integrate gold-based MEMS structures with niobium-based RF circuits. This method benefits from the very low-loss characteristic of superconducting metal niobium while implementing a more matured technology for MEMS structures. An 8-mask fabrication process is developed that allows the monolithic integration of superconducting niobium-based RF circuits with gold-based MEMS structures. By developing this fabrication method, many low-loss and high quality factor tunable RF devices can be achieved. The challenge is to maintain the quality of the niobium metal layer so that there is no degradation in the critical temperature of the niobium after going through all of the 8-mask process steps. Niobium RF devices integrated with gold-based dc-contact and capacitive-contact RF MEMS switches are fabricated and characterized on alumina substrates using the proposed fabrication process. All devices demonstrate insertion loss reduction due to the superconducting nature of niobium. The measurements of coplanar waveguide transmission lines and low-pass filters demonstrate that the critical temperature of the niobium metal layer is not degraded during the process steps. A capacitor bank is designed, fabricated and characterized showing a very high quality factor. Finally, two types of niobium tunable bandpass filters are presented that employ gold-based dc-contact RF MEMS switches as the tuning elements.
Book Synopsis High Power Metal-Contact and Capacitive Switches with Stress Resilient Designs by : Hosein Zareie
Download or read book High Power Metal-Contact and Capacitive Switches with Stress Resilient Designs written by Hosein Zareie and published by . This book was released on 2013 with total page 105 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation presents the design, fabrication and measurements of stress tolerant RF MEMS switches with high power handling and reliability. RF MEMS switched capacitors are developed that are capable of handling >10 W of RF power under hot switching conditions. A capacitance ratio of 5-7 has been achieved with high reliability and minimal dielectric charging. Also the Q of these devices was measured to be > 80 at 10 GHz in the maximum capacitance state. SPST (single-pole single-throw) and SP4T (single-pole four-throw) RF MEMS metal-contact switches with high power handling and reliability have also been developed. The design is based on circular cantilevers that are anchored at the center and are attached together using a radial arc. This provides a compact SPST switch with multiple contact points and can easily be transformed to SPNT by dividing the membrane into several cantilevers each with its own actuation electrode. A power handling of > 10 W and > 2 W with high reliability has been measured for the SPST and SP4T switches, and with high reliability. Furthermore the design of temperature resilient RF MEMS capacitive switches with the capacitance ratio of >30 have been achieved using the Raytheon process. The switch is used as a building block of different circuit configurations such as SPST, SPDT and a 2-bit X-band phase shifter with good performance.
Book Synopsis Development of High Performance 6-18 GHz Tunable/switchable RF MEMS Filters and Their System Implications by : Kamran Entesari
Download or read book Development of High Performance 6-18 GHz Tunable/switchable RF MEMS Filters and Their System Implications written by Kamran Entesari and published by . This book was released on 2006 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends by : Guoan Wang
Download or read book RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends written by Guoan Wang and published by . This book was released on 2006 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: The third project presents an RF MEMS switch developed on a low cost, flexible liquid crystal polymer (LCP) substrate. Its very low water absorption (0.04%), low dielectric loss and multi-layer circuit capability make it very appealing for RF Systems-On-a-Package (SOP). In chapter IV, a capacitive RF MEMS capacitive switch on an LCP substrate and its characterization and properties up to 40 GHz is presented for the first time.
Book Synopsis RF MEMS Switches for Wide-band (5-40 GHz), Tuneable Filters and DMTL Phase Shifters by : Montserrat Fernández-Bolaños Badia
Download or read book RF MEMS Switches for Wide-band (5-40 GHz), Tuneable Filters and DMTL Phase Shifters written by Montserrat Fernández-Bolaños Badia and published by . This book was released on 2010 with total page 197 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis RF MEMS Switches for Wide-band (5 - 40 GHz), Tuneable Filters and DMTL Phase Shifters by : Montserrat Fernández-Bolaños Badía (Nachrichtentechnikerin)
Download or read book RF MEMS Switches for Wide-band (5 - 40 GHz), Tuneable Filters and DMTL Phase Shifters written by Montserrat Fernández-Bolaños Badía (Nachrichtentechnikerin) and published by . This book was released on 2010 with total page 197 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Tunable Filters and RF MEMS Variable Capacitors with Closed Loop Control by : Nino Zahirovic
Download or read book Tunable Filters and RF MEMS Variable Capacitors with Closed Loop Control written by Nino Zahirovic and published by . This book was released on 2011 with total page 137 pages. Available in PDF, EPUB and Kindle. Book excerpt: Multi-band and multi-mode radios are becoming prevalent and necessary in order to provide optimal data rates across a network with a diverse and spotty landscape of coverage areas (3G, HSPA, LTE, etc.). As the number of required bands and modes increases, the aggregate cost of discrete RF signal chains justifies the adoption of tunable solutions. Tunable filters are one of the pieces crucial to signal chain amalgamation. The main requirements for a tunable filter are high unloaded quality factor, wide tuning range, high tuning speed, high linearity, and small size. MEMS technology is the most promising in terms of tuning range, quality factor, linearity and size. In addition, a filter that maintains a constant passband bandwidth as the center frequency is tuned is preferred since the analog baseband processing circuitry tends to be tailored for a particular signal bandwidth. In this work, a novel design technique for tunable fi lters with controlled and predictable bandwidth variation is presented. The design technique is presented alongside an analysis and modeling method for predicting the final filter response during design optimization.
Book Synopsis Pll Performance, Simulation and Design by : Dean Banerjee
Download or read book Pll Performance, Simulation and Design written by Dean Banerjee and published by Dog Ear Publishing. This book was released on 2006-08 with total page 346 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is intended for the reader who wishes to gain a solid understanding of Phase Locked Loop architectures and their applications. It provides a unique balance between both theoretical perspectives and practical design trade-offs. Engineers faced with real world design problems will find this book to be a valuable reference providing example implementations, the underlying equations that describe synthesizer behavior, and measured results that will improve confidence that the equations are a reliable predictor of system behavior. New material in the Fourth Edition includes partially integrated loop filter implementations, voltage controlled oscillators, and modulation using the PLL.
Book Synopsis Tuneable Film Bulk Acoustic Wave Resonators by : Spartak Gevorgian
Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-01 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high.a Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc.Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis.The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices."
Book Synopsis Foundations for Microstrip Circuit Design by : Terry C. Edwards
Download or read book Foundations for Microstrip Circuit Design written by Terry C. Edwards and published by John Wiley & Sons. This book was released on 2016-02-01 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt: Building on the success of the previous three editions, Foundations for Microstrip Circuit Design offers extensive new, updated and revised material based upon the latest research. Strongly design-oriented, this fourth edition provides the reader with a fundamental understanding of this fast expanding field making it a definitive source for professional engineers and researchers and an indispensable reference for senior students in electronic engineering. Topics new to this edition: microwave substrates, multilayer transmission line structures, modern EM tools and techniques, microstrip and planar transmision line design, transmission line theory, substrates for planar transmission lines, Vias, wirebonds, 3D integrated interposer structures, computer-aided design, microstrip and power-dependent effects, circuit models, microwave network analysis, microstrip passive elements, and slotline design fundamentals.
Book Synopsis Mems for Biomedical Applications by : Shekhar Bhansali
Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy
Book Synopsis MEMS Reliability by : Allyson L. Hartzell
Download or read book MEMS Reliability written by Allyson L. Hartzell and published by Springer Science & Business Media. This book was released on 2010-11-02 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
