Special Issue Of The Micromechanics Section Of Sensors And Actuators Based On Contributions Revised From The Technical Digest Of The Fifteenth Ieee International Conference On Micro Electro Mechanics Systems Mems 2002 20 24 January 2002 Las Vegas Nv Usa

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MEMS Mirrors

Author : Huikai Xie (Ed.)
Publisher :
ISBN 13 : 9783038428688
Total Pages : 210 pages
Book Rating : 4.4/5 (286 download)

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Book Synopsis MEMS Mirrors by : Huikai Xie (Ed.)

Download or read book MEMS Mirrors written by Huikai Xie (Ed.) and published by . This book was released on 2018 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS mirrors can steer, modulate and switch light, as well as control the wavefront for focusing or phase modulation. MEMS mirrors have found enormous commercial success in projectors, displays and fiberoptic communications. Micro-spectrometers based on MEMS mirrors are starting to appear in the consumer market. There are also many breakthroughs in applying MEMS mirrors for endoscopic imaging. Equally excitingly, a new wave of opportunities for MEMS mirrors is coming up, for example, micro-LiDAR for autonomous driving and robotics, optical cross connect (OXC) for cloud data centers, and optical scanners for virtual reality/augumented reality, just to name a few. Of course, there are a number of big challenges that researchers and engineers must overcome to fully utiltize MEMS mirrors' potential: modeling and control are inherently complex due to the multiphysics, multi-DOF and nonlinear nature of the microactuators for MEMS mirrors; reliability is always a huge hurdle for commercilization; and the tradeoffs among the speed, aperture, and scan range are often overwhelming. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of MEMS mirrors based on all kinds of actuation mechanisms; and (2) new developments of applying MEMS mirrors of any kind in consumer electronics, optical communications, industry, medicine, agriculture, space, or defense.

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Advanced RF MEMS

Author : Stepan Lucyszyn
Publisher : Cambridge University Press
ISBN 13 : 1139491660
Total Pages : 441 pages
Book Rating : 4.1/5 (394 download)

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Book Synopsis Advanced RF MEMS by : Stepan Lucyszyn

Download or read book Advanced RF MEMS written by Stepan Lucyszyn and published by Cambridge University Press. This book was released on 2010-08-19 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation

Inertial MEMS

Author : Volker Kempe
Publisher : Cambridge University Press
ISBN 13 : 1139494821
Total Pages : 497 pages
Book Rating : 4.1/5 (394 download)

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Book Synopsis Inertial MEMS by : Volker Kempe

Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

CMOS - MEMS

Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 3527616934
Total Pages : 612 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis CMOS - MEMS by : Henry Baltes

Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 612 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

3D Microelectronic Packaging

Author : Yan Li
Publisher : Springer
ISBN 13 : 9783319445847
Total Pages : 560 pages
Book Rating : 4.4/5 (458 download)

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Book Synopsis 3D Microelectronic Packaging by : Yan Li

Download or read book 3D Microelectronic Packaging written by Yan Li and published by Springer. This book was released on 2016-10-29 with total page 560 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides a comprehensive reference for graduate students and professionals in both academia and industry on the fundamentals, processing details, and applications of 3D microelectronic packaging, an industry trend for future microelectronic packages. Chapters written by experts cover the most recent research results and industry progress in the following areas: TSV, die processing, micro bumps, direct bonding, thermal compression bonding, advanced materials, heat dissipation, thermal management, thermal mechanical modeling, quality, reliability, fault isolation, and failure analysis of 3D microelectronic packages. Numerous images, tables, and didactic schematics are included throughout. This essential volume equips readers with an in-depth understanding of all aspects of 3D packaging, including packaging architecture, processing, thermal mechanical and moisture related reliability concerns, common failures, developing areas, and future challenges, providing insights into key areas for future research and development.

Micromixers

Author : Nam-Trung Nguyen
Publisher : William Andrew
ISBN 13 : 1437735215
Total Pages : 369 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Micromixers by : Nam-Trung Nguyen

Download or read book Micromixers written by Nam-Trung Nguyen and published by William Andrew. This book was released on 2011-09-17 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis.The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different backgrounds.Micromixers is uniquely comprehensive, in that it deals not only with the problems that are directly related to fluidics as a discipline (aspects such as mass transport, molecular diffusion, electrokinetic phenomena, flow instabilities, etc.) but also with the practical issues of fabricating micomixers and building them into microsystems and lab-on-chip assemblies.With practical applications to the design of systems vital in modern communications, medicine and industry this book has already established itself as a key reference in an emerging and important field.The 2e includes coverage of a broader range of fabrication techniques, additional examples of fully realized devices for each type of micromixer and a substantially extended section on industrial applications, including recent and emerging applications. - Introduces the design and applications of micromixers for a broad audience across chemical engineering, electronics and the life sciences, and applications as diverse as lab-on-a-chip, ink jet printing, pharmaceutical manufacturing and DNA analysis - Helps engineers and scientists to unlock the potential of micromixers by explaining both the scientific (microfluidics) aspects and the engineering involved in building and using successful microscale systems and devices with micromixers - The author's applied approach combines experience-based discussion of the challenges and pitfalls of using micromixers, with proposals for how to overcome them

More than Moore

Author : Guo Qi Zhang
Publisher : Springer Science & Business Media
ISBN 13 : 0387755934
Total Pages : 338 pages
Book Rating : 4.3/5 (877 download)

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Book Synopsis More than Moore by : Guo Qi Zhang

Download or read book More than Moore written by Guo Qi Zhang and published by Springer Science & Business Media. This book was released on 2010-01-23 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the past decades, the mainstream of microelectronics progression was mainly powered by Moore's law focusing on IC miniaturization down to nano scale. However, there is a fast increasing need for "More than Moore" (MtM) products and technology that are based upon or derived from silicon technologies, but do not simply scale with Moore’s law. This book provides new vision, strategy and guidance for the future technology and business development of micro/nanoelectronics.

MEMS

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Implantable Neural Prostheses 2

Author : David Zhou
Publisher : Springer Science & Business Media
ISBN 13 : 0387981209
Total Pages : 371 pages
Book Rating : 4.3/5 (879 download)

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Book Synopsis Implantable Neural Prostheses 2 by : David Zhou

Download or read book Implantable Neural Prostheses 2 written by David Zhou and published by Springer Science & Business Media. This book was released on 2010-07-10 with total page 371 pages. Available in PDF, EPUB and Kindle. Book excerpt: Signi?cant progress has been made in the development of neural prostheses for restoration of human functions and improvement of the quality of life. Biomedical engineers and neuroscientists around the world are working to improve the design and performance of existing devices and to develop novel devices for arti?cial vision, arti?cial limbs, and brain-machine interfaces. This book, Implantable Neural Prostheses 2: Techniques and Engineering Approaches, is part two of a two-volume sequence that describes state-of-the-art advances in techniques associated with implantable neural prosthetic devices. The techniques covered include biocompatibility and biostability, hermetic packaging, electrochemical techniques for neural stimulation applications, novel electrode materials and testing, thin-?lm ?exible microelectrode arrays, in situ char- terization of microelectrode arrays, chip-size thin-?lm device encapsulation, microchip-embedded capacitors and microelectronics for recording, stimulation, and wireless telemetry. The design process in the development of medical devices is also discussed. Advances in biomedical engineering, microfabrication technology, and neu- science have led to improved medical-device designs and novel functions. However, many challenges remain. This book focuses on the engineering approaches, R&D advances, and technical challenges of medical implants from an engineering p- spective. We are grateful to leading researchers from academic institutes, national laboratories, as well as design engineers and professionals from the medical device industry who have contributed to the book. Part one of this series covers designs of implantable neural prosthetic devices and their clinical applications.

Microfluidic Technologies for Miniaturized Analysis Systems

Author : Steffen Hardt
Publisher : Springer Science & Business Media
ISBN 13 : 0387684247
Total Pages : 630 pages
Book Rating : 4.3/5 (876 download)

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Book Synopsis Microfluidic Technologies for Miniaturized Analysis Systems by : Steffen Hardt

Download or read book Microfluidic Technologies for Miniaturized Analysis Systems written by Steffen Hardt and published by Springer Science & Business Media. This book was released on 2007-09-29 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses Lab-on-a-Chip devices. It focuses on microfluidic technologies that have emerged in the past decade. Coverage presents a comprehensive listing of the most promising microfluidic technologies in the Lab-on-a-Chip field. It also details technologies that can be viewed as toolboxes needed to set up complex Lab-on-a-Chip systems.

Wireless Sensor Networks and Ecological Monitoring

Author : Subhas C. Mukhopadhyay
Publisher : Springer
ISBN 13 : 9783642363641
Total Pages : 0 pages
Book Rating : 4.3/5 (636 download)

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Book Synopsis Wireless Sensor Networks and Ecological Monitoring by : Subhas C. Mukhopadhyay

Download or read book Wireless Sensor Networks and Ecological Monitoring written by Subhas C. Mukhopadhyay and published by Springer. This book was released on 2013-02-20 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the state of the art technologies and solutions to tackle the critical challenges faced by the building and development of the WSN and ecological monitoring system but also potential impact on society at social, medical and technological level. This book is dedicated to Sensing systems for Sensors, Wireless Sensor Networks and Ecological Monitoring. The book aims at Master and PhD degree students, researchers, practitioners, especially WSN engineers involved with ecological monitoring. The book will provide an opportunity of a dedicated and a deep approach in order to improve their knowledge in this specific field.

Surface Energy

Author : Mahmood Aliofkhazraei
Publisher : BoD – Books on Demand
ISBN 13 : 9535122169
Total Pages : 384 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Surface Energy by : Mahmood Aliofkhazraei

Download or read book Surface Energy written by Mahmood Aliofkhazraei and published by BoD – Books on Demand. This book was released on 2015-12-16 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: The words hydro, phobic and philic are derived from Greek and they mean water, fear and adoration respectively. These words are being used to define the interaction of water and other materials. As an example, these words are being used in classification of liquids and solids based on their solubility in water, as well as classification of solid surfaces regarding to their wettability. A lot of surfaces in the nature have Superhydrophobic and self-cleaning properties. For example the wings of a butterfly, leaves of some plants, including cabbage and Indian Cress, have the mentioned properties. The best example is the LOTUS leaf. This book collects new developments in the science of surface energy.

IUTAM-IASS Symposium on Deployable Structures: Theory and Applications

Author : Sergio Pellegrino
Publisher : Springer Science & Business Media
ISBN 13 : 9780792365167
Total Pages : 522 pages
Book Rating : 4.3/5 (651 download)

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Book Synopsis IUTAM-IASS Symposium on Deployable Structures: Theory and Applications by : Sergio Pellegrino

Download or read book IUTAM-IASS Symposium on Deployable Structures: Theory and Applications written by Sergio Pellegrino and published by Springer Science & Business Media. This book was released on 2000-10-31 with total page 522 pages. Available in PDF, EPUB and Kindle. Book excerpt: This collection presents 49 contributions by engineers, architects, biologists, and applied mathematicians interested in deployable structures. Aerospace structures are currently at the leading edge, and this is reflected by a larger number of contributions covering the full spectrum of concepts, simulations, testing, and working systems.

Materials and Failures in MEMS and NEMS

Author : Atul Tiwari
Publisher : John Wiley & Sons
ISBN 13 : 1119083869
Total Pages : 435 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Materials and Failures in MEMS and NEMS by : Atul Tiwari

Download or read book Materials and Failures in MEMS and NEMS written by Atul Tiwari and published by John Wiley & Sons. This book was released on 2015-09-11 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

Sensors for Automotive Applications

Author : Jiri Marek
Publisher : John Wiley & Sons
ISBN 13 : 352760507X
Total Pages : 584 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Sensors for Automotive Applications by : Jiri Marek

Download or read book Sensors for Automotive Applications written by Jiri Marek and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: Taken as a whole, this series covers all major fields of application for commercial sensors, as well as their manufacturing techniques and major types. As such the series does not treat bulk sensors, but rather places strong emphasis on microsensors, microsystems and integrated electronic sensor packages. Each of the individual volumes is tailored to the needs and queries of readers from the relevant branch of industry. An international team of experts from the leading companies in this field gives a detailed picture of existing as well as future applications. They discuss in detail current technologies, design and construction concepts, market considerations and commercial developments. Topics covered include vehicle safety, fuel consumption, air conditioning, emergency control, traffic control systems, and electronic guidance using radar and video.

Smart Sensors and MEMS

Author : S Nihtianov
Publisher : Woodhead Publishing
ISBN 13 : 0081020562
Total Pages : 606 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Smart Sensors and MEMS by : S Nihtianov

Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications