Some Studies Related to Laser Annealing of Ion Implanted Silicon

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ISBN 13 : 9789170322297
Total Pages : 44 pages
Book Rating : 4.3/5 (222 download)

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Book Synopsis Some Studies Related to Laser Annealing of Ion Implanted Silicon by : Göran Alestig

Download or read book Some Studies Related to Laser Annealing of Ion Implanted Silicon written by Göran Alestig and published by . This book was released on 1986 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation

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ISBN 13 :
Total Pages : 36 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation by : J. S. Katzeff

Download or read book Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation written by J. S. Katzeff and published by . This book was released on 1981 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Dynamical Aspects of Pulsed Laser Annealing of Ion-implanted Silicon

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ISBN 13 :
Total Pages : 28 pages
Book Rating : 4.:/5 (246 download)

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Book Synopsis Dynamical Aspects of Pulsed Laser Annealing of Ion-implanted Silicon by : Yoshihiko Kanemitsu

Download or read book Dynamical Aspects of Pulsed Laser Annealing of Ion-implanted Silicon written by Yoshihiko Kanemitsu and published by . This book was released on 1983 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt:

A MELTING MODEL FOR PULSING-LASER ANNEALING OF ION IMPLANTED SILICON SEMICONDUCTOR.

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ISBN 13 :
Total Pages : pages
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Book Synopsis A MELTING MODEL FOR PULSING-LASER ANNEALING OF ION IMPLANTED SILICON SEMICONDUCTOR. by :

Download or read book A MELTING MODEL FOR PULSING-LASER ANNEALING OF ION IMPLANTED SILICON SEMICONDUCTOR. written by and published by . This book was released on 1991 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Laser Annealing of Semiconductors

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Publisher : Elsevier
ISBN 13 : 0323145426
Total Pages : 577 pages
Book Rating : 4.3/5 (231 download)

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Book Synopsis Laser Annealing of Semiconductors by : J Poate

Download or read book Laser Annealing of Semiconductors written by J Poate and published by Elsevier. This book was released on 2012-12-02 with total page 577 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Annealing of Semiconductors deals with the materials science of surfaces that have been subjected to ultrafast heating by intense laser or electron beams. This book is organized into 13 chapters that specifically tackle transient annealing of compound semiconductors. After briefly dealing with an overview of laser annealing, this book goes on discussing the concepts of solidification and crystallization pertinent to the field. These topics are followed by discussions on the main mechanisms of interaction of photon and electron beams with condensed matter; the calculation of thermophysical properties of crystalline materials; and high-speed crystal growth by laser annealing of ion-implanted silicon. The subsequent chapters describe the microstructural and topographical properties of annealed semiconductor layers and the epitaxy of ion-implanted silicon irradiated with a laser or electron beam single pulse. This text also explores the electronic and surface properties and the continuous-wave beam processing of semiconductors. The concluding chapters cover various reactions in metal-semiconductor systems, such as fast and laser-induced melting, solidification, mixing, and quenching. Laser-induced interactions in metal-semiconductor systems and the factors involved in control of the heat treatment process are also discussed in these chapters. Materials scientists and researchers and device engineers will find this book invaluable.

A Study of Laser Annealing Effects in Boron Ion Implanted Polycrystalline Silicon Films

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ISBN 13 :
Total Pages : 200 pages
Book Rating : 4.:/5 (11 download)

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Book Synopsis A Study of Laser Annealing Effects in Boron Ion Implanted Polycrystalline Silicon Films by : Inhak Harry Suh

Download or read book A Study of Laser Annealing Effects in Boron Ion Implanted Polycrystalline Silicon Films written by Inhak Harry Suh and published by . This book was released on 1982 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Laser Annealing of Ion Implanted Silicon for Solar Cell Junction Formation

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ISBN 13 :
Total Pages : 68 pages
Book Rating : 4.:/5 (657 download)

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Book Synopsis Laser Annealing of Ion Implanted Silicon for Solar Cell Junction Formation by : Lockheed Missiles and Space Company

Download or read book Laser Annealing of Ion Implanted Silicon for Solar Cell Junction Formation written by Lockheed Missiles and Space Company and published by . This book was released on 1981 with total page 68 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Laser Annealing Processes in Semiconductor Technology

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Publisher : Woodhead Publishing
ISBN 13 : 0128202564
Total Pages : 426 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Laser Annealing Processes in Semiconductor Technology by : Fuccio Cristiano

Download or read book Laser Annealing Processes in Semiconductor Technology written by Fuccio Cristiano and published by Woodhead Publishing. This book was released on 2021-04-21 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors

Substrate Heating Effects in CO[sub]2 Laser Annealing of Ion-implanted Silicon

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ISBN 13 :
Total Pages : 4 pages
Book Rating : 4.:/5 (577 download)

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Book Synopsis Substrate Heating Effects in CO[sub]2 Laser Annealing of Ion-implanted Silicon by : M. Blomberg

Download or read book Substrate Heating Effects in CO[sub]2 Laser Annealing of Ion-implanted Silicon written by M. Blomberg and published by . This book was released on 1982 with total page 4 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Energy Research Abstracts

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ISBN 13 :
Total Pages : 564 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Energy Research Abstracts by :

Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Scientific and Technical Aerospace Reports

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ISBN 13 :
Total Pages : 836 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation. Quarterly Report

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation. Quarterly Report by :

Download or read book Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation. Quarterly Report written by and published by . This book was released on 1980 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A project to evaluate the merits of large spot size pulsed laser annealing of ion implanted silicon wafers for junction formation on solar cells is described. A Q-switched Nd:Glass laser system is used operating in the 1064 (regular) and 532 (with frequency doubler) nm wavelengths. The laser output is in excess of 30 joules with a 20 to 50 ns pulse duration. Material used in this investigation is 3-inch diameter CZ silicon, P-type 0.014 inches thick, 10.cap omega.-cm resistivity, 100 orientation. Three wafer surface conditions are being evaluated in this pulse annealing investigation: chem-polished, texture etched, and flash etched. Annealing was performed with and without beam homogenization. Both modes showed excellent lattice recovery from the implant-induced damage as analyzed using Rutherford backscattering techniques. Homogenization of the beam was performed using a fused silica rod configured with a 90° bend. The unhomogenized annealing was performed using a plano-concave lens. Fabrication of laser annealed cells using both modes is forthcoming.

Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation by :

Download or read book Laser Annealing of Ion Implanted CZ Silicon for Solar Cell Junction Formation written by and published by . This book was released on 1981 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Results on a contract to evaluate the merits of large spot size pulsed laser annealing of ion implanted silicon wafers for junction formation of solar cells are presented. Three inch diameter cells were fabricated for reference by furnace annealing of the ion implanted wafers. Conversion efficiencies on these cells ranged from 12.3% to 14.3%, with and without a BSF. Scaled-up size cells, from 2 x 2 cm to 2 x 4 cm, were fabricated using a two-step 25% overlap pulsed laser annealing process. Conversion efficiencies up to 15.4% were achieved. Pulsed laser annealing of textured surface wafers proved unacceptable based on the subpar electrical performances of fabricated 2 x 2 cm and 2 x 4 cm cells. Further laser annealing work using textured surfaces has been discontinued. SIMS profiling of 11B and/or 49BF2 ion implanted species for back surface field followed by pulse annealing, both by electron beam and laser, revealed that additional work is required for optimization. The process verification phase of the contract was initiated for small (2 x 2 cm) and large (3 in. dia) cells using the surviving processing candidates showing best promise. A high throughput laser system was conceptualized which will accommodate three (3) inch diameter wafers at a rate of one per second.

Inventory of advanced energy technologies and energy conservation research and development, 1976-1978

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ISBN 13 :
Total Pages : 2238 pages
Book Rating : 4.3/5 (121 download)

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Book Synopsis Inventory of advanced energy technologies and energy conservation research and development, 1976-1978 by : Oak Ridge National Laboratory

Download or read book Inventory of advanced energy technologies and energy conservation research and development, 1976-1978 written by Oak Ridge National Laboratory and published by . This book was released on 1979 with total page 2238 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Directory of Solar Energy Research Activities in the United States

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ISBN 13 :
Total Pages : 464 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Directory of Solar Energy Research Activities in the United States by :

Download or read book Directory of Solar Energy Research Activities in the United States written by and published by . This book was released on 1980 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt:

ERDA Energy Research Abstracts

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ISBN 13 :
Total Pages : 974 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis ERDA Energy Research Abstracts by :

Download or read book ERDA Energy Research Abstracts written by and published by . This book was released on 1983 with total page 974 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Comments on the Plasma Annealing Model to Explain the Dynamics of Pulsed Laser Annealing of Ion-Implanted Silicon

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ISBN 13 :
Total Pages : 2 pages
Book Rating : 4.:/5 (227 download)

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Book Synopsis Comments on the Plasma Annealing Model to Explain the Dynamics of Pulsed Laser Annealing of Ion-Implanted Silicon by : Anjan Bhattacharyya

Download or read book Comments on the Plasma Annealing Model to Explain the Dynamics of Pulsed Laser Annealing of Ion-Implanted Silicon written by Anjan Bhattacharyya and published by . This book was released on 1981 with total page 2 pages. Available in PDF, EPUB and Kindle. Book excerpt: