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Silicon Micromachining
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Book Synopsis Silicon Micromachining by : Miko Elwenspoek
Download or read book Silicon Micromachining written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Book Synopsis Silicon Wet Bulk Micromachining for MEMS by : Prem Pal
Download or read book Silicon Wet Bulk Micromachining for MEMS written by Prem Pal and published by CRC Press. This book was released on 2017-04-07 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Book Synopsis Silicon Wet Bulk Micromachining for MEMS by : Prem Pal
Download or read book Silicon Wet Bulk Micromachining for MEMS written by Prem Pal and published by CRC Press. This book was released on 2017-04-07 with total page 425 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains useful process details, recipes, tables, charts and includes numerous device applications.
Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Book Synopsis Three-dimensional Single Crystal Silicon Micromachining by : Wolfgang Maximilian Josef Hofmann
Download or read book Three-dimensional Single Crystal Silicon Micromachining written by Wolfgang Maximilian Josef Hofmann and published by . This book was released on 1999 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Three Dimensional Integration and Packaging Using Silicon Micromachining by : Alexandros D. Margomenos
Download or read book Three Dimensional Integration and Packaging Using Silicon Micromachining written by Alexandros D. Margomenos and published by . This book was released on 2003 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-07-19 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt: 3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Book Synopsis W-band Three-dimensional Integrated Circuits Utilizing Silicon Micromachining by : Katherine Juliet Herrick
Download or read book W-band Three-dimensional Integrated Circuits Utilizing Silicon Micromachining written by Katherine Juliet Herrick and published by . This book was released on 2000 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis RF MEMS and Their Applications by : Vijay K. Varadan
Download or read book RF MEMS and Their Applications written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2003-07-25 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.
Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte
Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-10-11 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Download or read book Hybrid Machining written by Xichun Luo and published by Academic Press. This book was released on 2018-06-27 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: Hybrid Machining: Theory, Methods, and Case Studies covers the scientific fundamentals, techniques, applications and real-world descriptions of emerging hybrid machining technology. This field is advancing rapidly in industrial and academic contexts, creating a great need for the fundamental and technical guidance that this book provides. The book includes discussions of basic concepts, process design principles, standard hybrid machining processes, multi-scale modeling approaches, design, on-machine metrology and work handling systems. Readers interested in manufacturing systems, product design or machining technology will find this one-stop guide to hybrid machining the ideal reference. Includes tables of recommended processing parameters for key engineering materials/products for each hybrid machining process Provides case studies covering real industrial applications Explains how to use multiscale modeling for hybrid machining
Book Synopsis Cellular Robotics And Micro Robotic Systems by : Toshio Fukuda
Download or read book Cellular Robotics And Micro Robotic Systems written by Toshio Fukuda and published by World Scientific. This book was released on 1994-07-20 with total page 289 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces interesting topics, from concepts to the latest research, on cellular and micro robotic systems. The cellular robotic system is a self-organizing robotic system composed of a large number of autonomous robotic units, named cells. This idea came from the organic structure of a living body. Several attractive topics in this area are covered, such as swarm intelligence, communications, and robotic mechanisms. The micro robotic system is currently the most fascinating technology. Micro mechanisms, control and intelligence, with respect to this system are treated here. The combination of both technologies will prepare the way for a new paradigm in the field of engineering.
Book Synopsis Micromachining by : Zdravko Stanimirović
Download or read book Micromachining written by Zdravko Stanimirović and published by BoD – Books on Demand. This book was released on 2019-11-20 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic.
Book Synopsis Porous Silicon: From Formation to Application: Biomedical and Sensor Applications, Volume Two by : Ghenadii Korotcenkov
Download or read book Porous Silicon: From Formation to Application: Biomedical and Sensor Applications, Volume Two written by Ghenadii Korotcenkov and published by CRC Press. This book was released on 2016-01-05 with total page 410 pages. Available in PDF, EPUB and Kindle. Book excerpt: Porous silicon is rapidly attracting increasing interest from various fields, including optoelectronics, microelectronics, photonics, medicine, chemistry, and biosensing. This nanostructured and biodegradable material has a range of unique properties that make it ideal for many applications. For example, the pores and surface chemistry of the material can be manipulated to change the rate of drug release from hours to months. Porous Silicon: Biomedical and Sensor Applications, Volume Two is part of the three-book series Porous Silicon: From Formation to Application. It discusses applications of porous silicon in bioengineering and in various sensors, including gas sensors, biosensors, pressure sensors, mechanical sensors, optical sensors, and many other types. It also thoroughly reviews the fabrication, parameters, and applications of devices that use porous silicon. Drawing upon a vast amount of recently published literature, the book guides readers through practical implementations that span environmental control, chemistry, spectroscopy, gas chromatography, microelectronics, micromachining, microfluidics, medicine, biotechnology, and the car industry. It is divided into three sections that focus on: Types of sensors that use porous silicon Auxiliary devices that use porous silicon Biomedical applications such as drug delivery, tissue engineering, and in vivo imaging Representing the most recent progress in applications of porous silicon to biomedical and sensory technology, this reference is indispensable for those involved in the research, development, and application of porous silicon in several scientific disciplines. It also serves as a starting point for the interested but unfamiliar reader to gain a thorough understanding of the unusual properties of porous silicon, other porous materials, and possible areas for current and future applications.
Book Synopsis Handbook of Chemical and Biological Sensors by : R.F Taylor
Download or read book Handbook of Chemical and Biological Sensors written by R.F Taylor and published by CRC Press. This book was released on 1996-01-01 with total page 1248 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Chemical and Biological Sensors focuses on the development of sensors to recognize substances rather than physical quantities. This fully inclusive book examines devices that use a biological sensing element to detect and measure chemical and biological species as well as those that use a synthetic element to achieve a similar result. A first port of call for anyone with a specific interest, question, or problem relating to this area, this comprehensive source of reference serves as a guide for practicing scientists and as a text for many graduate courses. It presents relevant physics to chemists, chemistry to materials scientists, materials science to electronic engineers, and fabrication technology to all of the above. In addition, the handbook is useful both to newcomers and to experienced researchers who wish to broaden their knowledge of the constituent disciplines of this wide-ranging field.
Book Synopsis Encyclopedia of Microfluidics and Nanofluidics by : Dongqing Li
Download or read book Encyclopedia of Microfluidics and Nanofluidics written by Dongqing Li and published by Springer Science & Business Media. This book was released on 2008-08-06 with total page 2242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering all aspects of transport phenomena on the nano- and micro-scale, this encyclopedia features over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Coverage includes electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.
