Silicon Carbide Microsystems For Harsh Environments

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Silicon Carbide Microsystems for Harsh Environments

Author : Muthu Wijesundara
Publisher : Springer Science & Business Media
ISBN 13 : 1441971211
Total Pages : 247 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Silicon Carbide Microsystems for Harsh Environments by : Muthu Wijesundara

Download or read book Silicon Carbide Microsystems for Harsh Environments written by Muthu Wijesundara and published by Springer Science & Business Media. This book was released on 2011-05-17 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

Silicon Carbide Micro Electromechanical Systems for Harsh Environments

Author : Rebecca Cheung
Publisher : Imperial College Press
ISBN 13 : 1860949096
Total Pages : 193 pages
Book Rating : 4.8/5 (69 download)

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Book Synopsis Silicon Carbide Micro Electromechanical Systems for Harsh Environments by : Rebecca Cheung

Download or read book Silicon Carbide Micro Electromechanical Systems for Harsh Environments written by Rebecca Cheung and published by Imperial College Press. This book was released on 2006 with total page 193 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996OCo2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research."

Silicon Carbide Micro Electromechanical Systems for Harsh Environments

Author :
Publisher :
ISBN 13 :
Total Pages : 181 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Silicon Carbide Micro Electromechanical Systems for Harsh Environments by :

Download or read book Silicon Carbide Micro Electromechanical Systems for Harsh Environments written by and published by . This book was released on 2006 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Silicon Carbide MEMS Devices for Harsh Environments

Author : Andrew Ryan Atwell
Publisher :
ISBN 13 :
Total Pages : 372 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Silicon Carbide MEMS Devices for Harsh Environments by : Andrew Ryan Atwell

Download or read book Silicon Carbide MEMS Devices for Harsh Environments written by Andrew Ryan Atwell and published by . This book was released on 2002 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Sensor Systems Simulations

Author : Willem Dirk van Driel
Publisher : Springer
ISBN 13 : 3030165779
Total Pages : 457 pages
Book Rating : 4.0/5 (31 download)

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Book Synopsis Sensor Systems Simulations by : Willem Dirk van Driel

Download or read book Sensor Systems Simulations written by Willem Dirk van Driel and published by Springer. This book was released on 2019-06-18 with total page 457 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes for readers various technical outcomes from the EU-project IoSense. The authors discuss sensor integration, including LEDs, dust sensors, LIDAR for automotive driving and 8 more, demonstrating their use in simulations for the design and fabrication of sensor systems. Readers will benefit from the coverage of topics such as sensor technologies for both discrete and integrated innovative sensor devices, suitable for high volume production, electrical, mechanical, security and software resources for integration of sensor system components into IoT systems and IoT-enabling systems, and IoT sensor system reliability. Describes from component to system level simulation, how to use the available simulation techniques for reaching a proper design with good performance; Explains how to use simulation techniques such as Finite Elements, Multi-body, Dynamic, stochastics and many more in the virtual design of sensor systems; Demonstrates the integration of several sensor solutions (thermal, dust, occupancy, distance, awareness and more) into large-scale system solutions in several industrial domains (Lighting, automotive, transport and more); Includes state-of-the-art simulation techniques, both multi-scale and multi-physics, for use in the electronic industry.

Advanced Silicon Carbide Devices and Processing

Author : Stephen Saddow
Publisher : BoD – Books on Demand
ISBN 13 : 9535121685
Total Pages : 260 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Advanced Silicon Carbide Devices and Processing by : Stephen Saddow

Download or read book Advanced Silicon Carbide Devices and Processing written by Stephen Saddow and published by BoD – Books on Demand. This book was released on 2015-09-17 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the production of the first commercially available blue LED in the late 1980s, silicon carbide technology has grown into a billion-dollar industry world-wide in the area of solid-state lighting and power electronics. With this in mind we organized this book to bring to the attention of those well versed in SiC technology some new developments in the field with a particular emphasis on particularly promising technologies such as SiC-based solar cells and optoelectronics. We have balanced this with the more traditional subjects such as power electronics and some new developments in the improvement of the MOS system for SiC MOSFETS. Given the importance of advanced microsystems and sensors based on SiC, we also included a review on 3C-SiC for both microsystem and electronic applications.

Piezoresistive Effect of p-Type Single Crystalline 3C-SiC

Author : Hoang-Phuong Phan
Publisher : Springer
ISBN 13 : 3319555448
Total Pages : 156 pages
Book Rating : 4.3/5 (195 download)

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Book Synopsis Piezoresistive Effect of p-Type Single Crystalline 3C-SiC by : Hoang-Phuong Phan

Download or read book Piezoresistive Effect of p-Type Single Crystalline 3C-SiC written by Hoang-Phuong Phan and published by Springer. This book was released on 2017-04-06 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline SiC, along with the temperature dependence of the piezoresistive effect in p-type 3C-SiC are also discussed. Silicon carbide (SiC) is an excellent material for electronic devices operating at high temperatures, thanks to its large energy band gap, superior mechanical properties and extreme chemical inertness. Among the numerous polytypes of SiC, the cubic single crystal, which is also well known as 3C-SiC, is the most promising platform for microelectromechanical (MEMS) applications, as it can be epitaxially grown on an Si substrate with diameters of up to several hundred millimeters. This feature makes 3C-SiC compatible with the conventional Si-based micro/nano processing and also cuts down the cost of SiC wafers. The investigation into the piezoresistive effect in 3C-SiC is of significant interest for the development of mechanical transducers such as pressure sensors and strain sensors used for controlling combustion and deep well drilling. Although a number of studies have focused on the piezoresistive effect in n-type 3C-SiC, 4H-SiC and 6H-SiC, comparatively little attention has been paid to piezoresistance in p-type 3C-SiC. In addition, the book investigates the piezoresistive effect of top-down fabricated SiC nanowires, revealing a high degree of sensitivity in nanowires employing an innovative nano strain-amplifier. The large gauge factors of the p-type 3C-SiC at both room temperature and high temperatures found here indicate that this polytype could be suitable for the development of mechanical sensing devices operating in harsh environments with high temperatures.

Handbook of Silicon Based MEMS Materials and Technologies

Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

SiC based Miniaturized Devices

Author : Stephen Edward Saddow
Publisher : MDPI
ISBN 13 : 3039360108
Total Pages : 170 pages
Book Rating : 4.0/5 (393 download)

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Book Synopsis SiC based Miniaturized Devices by : Stephen Edward Saddow

Download or read book SiC based Miniaturized Devices written by Stephen Edward Saddow and published by MDPI. This book was released on 2020-06-18 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS devices are found in many of today’s electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc. Increasingly, the reduction in dimensions has led to nanometer-scale devices, called NEMS. The plethora of applications on the commercial market speaks for itself, and especially for the highly precise manufacturing of silicon-based MEMS and NEMS. While this is a tremendous achievement, silicon as a material has some drawbacks, mainly in the area of mechanical fatigue and thermal properties. Silicon carbide (SiC), a well-known wide-bandgap semiconductor whose adoption in commercial products is experiening exponential growth, especially in the power electronics arena. While SiC MEMS have been around for decades, in this Special Issue we seek to capture both an overview of the devices that have been demonstrated to date, as well as bring new technologies and progress in the MEMS processing area to the forefront. Thus, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of SiC MEMS and NEMS based on all kinds of actuation mechanisms; and (2) new developments in applying SiC MEMS and NEMS in consumer electronics, optical communications, industry, medicine, agriculture, space, and defense.

Modern Sensing Technologies

Author : Subhas Chandra Mukhopadhyay
Publisher : Springer
ISBN 13 : 3319995405
Total Pages : 421 pages
Book Rating : 4.3/5 (199 download)

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Book Synopsis Modern Sensing Technologies by : Subhas Chandra Mukhopadhyay

Download or read book Modern Sensing Technologies written by Subhas Chandra Mukhopadhyay and published by Springer. This book was released on 2018-08-24 with total page 421 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of modern sensing technologies and reflects the remarkable advances that have been made in the field of intelligent and smart sensors, environmental monitoring, health monitoring, and many other sensing and monitoring contexts in today’s world. It addresses a broad range of aspects, from human health monitoring to the monitoring of environmental conditions, from wireless sensor networks and the Internet of Things to structural health monitoring. Given its breadth of scope, the book will benefit researchers, practitioners, technologists and graduate students involved in the monitoring of systems within the human body, functions and activities, healthcare technologies and services, the environment, etc.

Silicon Carbide Microelectromechanical Systems for Harsh Environments

Author : Rebecca Cheung
Publisher : World Scientific
ISBN 13 : 1783260025
Total Pages : 192 pages
Book Rating : 4.7/5 (832 download)

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Book Synopsis Silicon Carbide Microelectromechanical Systems for Harsh Environments by : Rebecca Cheung

Download or read book Silicon Carbide Microelectromechanical Systems for Harsh Environments written by Rebecca Cheung and published by World Scientific. This book was released on 2006-06-29 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Contents:Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung)Deposition Techniques for SiC MEMS (C A Zorman et al.)Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996–2002 (L M Porter & F A Mohammad)Dry Etching of SiC (S J Pearton)Design, Performance and Applications of SiC MEMS (S Zappe) Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research. Key Features:Includes contributions from technical and academic experts in the field of SiCUp-to-date information from scientific papers with relevant referencesIndispensible volume for academic researchers and industrial engineers working in MEMS and particularly SiC MEMSKeywords:Silicon Carbide;Microelectromechanical Systems (MEMS);Harsh Environments;Growth Etching;Microfabrication;Sensors

Semiconductor Devices in Harsh Conditions

Author : Kirsten Weide-Zaage
Publisher : CRC Press
ISBN 13 : 149874382X
Total Pages : 257 pages
Book Rating : 4.4/5 (987 download)

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Book Synopsis Semiconductor Devices in Harsh Conditions by : Kirsten Weide-Zaage

Download or read book Semiconductor Devices in Harsh Conditions written by Kirsten Weide-Zaage and published by CRC Press. This book was released on 2016-11-25 with total page 257 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the reader to a number of challenges for the operation of electronic devices in various harsh environmental conditions. While some chapters focus on measuring and understanding the effects of these environments on electronic components, many also propose design solutions, whether in choice of material, innovative structures, or strategies for amelioration and repair. Many applications need electronics designed to operate in harsh environments. Readers will find, in this collection of topics, tools and ideas useful in their own pursuits and of interest to their intellectual curiosity. With a focus on radiation, operating conditions, sensor systems, package, and system design, the book is divided into three parts. The first part deals with sensing devices designed for operating in the presence of radiation, commercials of the shelf (COTS) products for space computing, and influences of single event upset. The second covers system and package design for harsh operating conditions. The third presents devices for biomedical applications under moisture and temperature loads in the frame of sensor systems and operating conditions.

Research & Technology 2002

Author :
Publisher : DIANE Publishing
ISBN 13 : 1428918205
Total Pages : 274 pages
Book Rating : 4.4/5 (289 download)

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Book Synopsis Research & Technology 2002 by :

Download or read book Research & Technology 2002 written by and published by DIANE Publishing. This book was released on with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Electrochemical Materials in Energy Conversion and Storage

Author : Junbo Hou
Publisher : CRC Press
ISBN 13 : 1000544885
Total Pages : 432 pages
Book Rating : 4.0/5 (5 download)

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Book Synopsis Advanced Electrochemical Materials in Energy Conversion and Storage by : Junbo Hou

Download or read book Advanced Electrochemical Materials in Energy Conversion and Storage written by Junbo Hou and published by CRC Press. This book was released on 2022-03-31 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced Electrochemical Materials in Energy Conversion and Storage focuses on novel electrochemical materials particularly designed for specific energy applications. It presents the relationship of materials properties, state-of-the-art processing, and device performance and sheds light on the research, development, and deployment (RD&D) trend of emerging materials and technologies in this field. Emphasizes electrochemical materials applied in PEM fuel cells and water splitting Summarizes anode, cathode, electrolyte, and additive materials developed for lithium-ion batteries and reviews other batteries, including lithium air, lithium sulfur, sodium and potassium, and multivalent ion batteries Discusses advanced carbon materials for supercapacitors Highlights catalyst design and development for CO2RR and fundamentals of proton facilitated reduction reactions With a cross-disciplinary approach, this work will be of interest to scientists and engineers across chemical engineering, mechanical engineering, materials science, chemistry, physics, and other disciplines working to advance electrochemical energy conversion and storage capabilities and applications.

Chemical Sensors 7 -and- MEMS/NEMS 7

Author : Peter J. Hesketh
Publisher : The Electrochemical Society
ISBN 13 : 1566775108
Total Pages : 517 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis Chemical Sensors 7 -and- MEMS/NEMS 7 by : Peter J. Hesketh

Download or read book Chemical Sensors 7 -and- MEMS/NEMS 7 written by Peter J. Hesketh and published by The Electrochemical Society. This book was released on 2006 with total page 517 pages. Available in PDF, EPUB and Kindle. Book excerpt: The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.

Research & Technology 2000

Author :
Publisher : DIANE Publishing
ISBN 13 : 1428918221
Total Pages : 211 pages
Book Rating : 4.4/5 (289 download)

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Book Synopsis Research & Technology 2000 by :

Download or read book Research & Technology 2000 written by and published by DIANE Publishing. This book was released on with total page 211 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Lateral Power Transistors in Integrated Circuits

Author : Tobias Erlbacher
Publisher : Springer
ISBN 13 : 3319005006
Total Pages : 235 pages
Book Rating : 4.3/5 (19 download)

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Book Synopsis Lateral Power Transistors in Integrated Circuits by : Tobias Erlbacher

Download or read book Lateral Power Transistors in Integrated Circuits written by Tobias Erlbacher and published by Springer. This book was released on 2014-10-08 with total page 235 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book summarizes and compares recent advancements in the development of novel lateral power transistors (LDMOS devices) for integrated circuits in power electronic applications. In its first part, the book motivates the necessity for lateral power transistors by a top-down approach: First, it presents typical energy conversion applications in modern industrial, automotive and consumer electronics. Next, it introduces common circuit topologies suitable for these applications, and discusses the feasibility for monolithic integration. Finally, the combination of power and logic functionality on a single chip is motivated and the requirements and limitations for the power semiconductor devices are deduced. The second part describes the evolution of lateral power transistors over the past decades from the simple pin-type concept to double-acting RESURF topologies. It describes the principle of operation for these LDMOS devices and discusses limitations of lateral power devices. Moreover, figures-of-merit are presented which can be used to evaluate the performance of the novel lateral power transistors described in this book with respect to the LDMOS devices. In the last part, [..] the fundamental physical concepts including charge compensation and trench gate topologies are discussed. Also, the status of research in LDMOS devices on silicon carbide is presented. Advantages and drawbacks for each of these integration approaches are summarized, and the feasibility with respect to power electronic applications is evaluated.