Handbook of Silicon Based MEMS Materials and Technologies

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Author :
Publisher : Elsevier
ISBN 13 : 0815519885
Total Pages : 670 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Properties and devices

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Author :
Publisher :
ISBN 13 : 9780125139199
Total Pages : 290 pages
Book Rating : 4.1/5 (391 download)

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Book Synopsis Properties and devices by : Hari Singh Nalwa

Download or read book Properties and devices written by Hari Singh Nalwa and published by . This book was released on 2001 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers a broad spectrum of the silicon-based materials and their device applications. This book provides a broad coverage of the silicon-based materials including different kinds of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications. This two-volume set offers a selection of timely topics on silicon materials namely those that have been extensively used for applications in electronic and photonic technologies. The extensive reference provides broad coverage of silicon-based materials, including different types.

Silicon-Based Polymers and Materials

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Author :
Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3110643677
Total Pages : 428 pages
Book Rating : 4.1/5 (16 download)

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Book Synopsis Silicon-Based Polymers and Materials by : Jerzy J. Chruściel

Download or read book Silicon-Based Polymers and Materials written by Jerzy J. Chruściel and published by Walter de Gruyter GmbH & Co KG. This book was released on 2022-03-07 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon based materials and polymers are made of silicon containing polymers, mainly macromolecular siloxanes (silicones). This book covers the different kinds of siliconbased polymers: silicones, silsesquioxanes (POSS), and silicon-based copolymers. Other silicon containig polymers: polycarbosilanes, polysilazanes, siloxane-organic copolymers, silicon derived high-tech ceramics: silicon carbide and oxycarbide, silicon nitride, etc. have also a very important practical meaning and a hudge number of practical applications. These materials make up products in a variety of industries and products, including technical and medical applicatons. Polycrystalline silicon is the basic material for large scale photovoltaic (PV) applications as solar cells. Technical applications of crystalline (c-Si) and amorphous (a-Si) silicon (fully inorganic materials), silicon nanowires are still quickly growing, especially in the fi eld of microelectronics, optoelectronics, photonics. and photovoltaics, catalysts, and different electronic devices (e.g. sensors, thermoelectric devices). This book is ideal for researchers and as such covers the industrial perspective of using each class of silicon based materials. Discusses silanes, silane coupling agents (SCA), silica, silicates, silane modified fillers, silsesquioxanes, silicones, and other silicon polymers and copolymers for practical applications as polymeric materials and very useful ingredients in materials science.

Silicon-Based Material and Devices, Two-Volume Set

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Author :
Publisher : Academic Press
ISBN 13 : 0080541232
Total Pages : 646 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Silicon-Based Material and Devices, Two-Volume Set by : Hari Singh Nalwa

Download or read book Silicon-Based Material and Devices, Two-Volume Set written by Hari Singh Nalwa and published by Academic Press. This book was released on 2001-06-13 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers a broad spectrum of the silicon-based materials and their device applications. This book provides a broad coverage of the silicon-based materials including different kinds of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications. This two-volume set offers a selection of timely topics on silicon materials namely those that have been extensively used for applications in electronic and photonic technologies. The extensive reference provides broad coverage of silicon-based materials, including different types of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications. Fourteen chapters review the state of the art research on silicon-based materials and their applications to devices. This reference contains a subset of articles published in AP's recently released Handbook of Advanced Electronic and Photonic Materials and Devices ( 2000, ISBN 012-5137451, ten volumes) by Dr. Hari Nalwa. This two-volume work strives to present a highly coherent coverage of silicon-based material uses in the vastly dynamic arena of silicon chip research and technology. Key Features * Covers silicon-based materials and devices * Include types of materials, their processing, fabrication, physical properties and device applications * Role of silicon-based materials in electronic and photonic technology * A very special topic presented in a timely manner and in a format

Electrical Characterization of Silicon-on-Insulator Materials and Devices

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 9780792395485
Total Pages : 414 pages
Book Rating : 4.3/5 (954 download)

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Book Synopsis Electrical Characterization of Silicon-on-Insulator Materials and Devices by : Sorin Cristoloveanu

Download or read book Electrical Characterization of Silicon-on-Insulator Materials and Devices written by Sorin Cristoloveanu and published by Springer Science & Business Media. This book was released on 1995-06-30 with total page 414 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon on Insulator is more than a technology, more than a job, and more than a venture in microelectronics; it is something different and refreshing in device physics. This book recalls the activity and enthu siasm of our SOl groups. Many contributing students have since then disappeared from the SOl horizon. Some of them believed that SOl was the great love of their scientific lives; others just considered SOl as a fantastic LEGO game for adults. We thank them all for kindly letting us imagine that we were guiding them. This book was very necessary to many people. SOl engineers will certainly be happy: indeed, if the performance of their SOl components is not always outstanding, they can now safely incriminate the relations given in the book rather than their process. Martine, Gunter, and Y. S. Chang can contemplate at last the amount of work they did with the figures. Our SOl accomplices already know how much we borrowed from their expertise and would find it indecent to have their detailed contri butions listed. Jean-Pierre and Dimitris incited the book, while sharing their experience in the reliability of floating bodies. Our families and friends now realize the SOl capability of dielectrically isolating us for about two years in a BOX. Our kids encouraged us to start writing. Our wives definitely gave us the courage to stop writing. They had a hard time fighting the symptoms of a rapidly developing SOl allergy.

Plasma Deposition of Amorphous Silicon-Based Materials

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Publisher : Elsevier
ISBN 13 : 0080539106
Total Pages : 339 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Plasma Deposition of Amorphous Silicon-Based Materials by : Pio Capezzuto

Download or read book Plasma Deposition of Amorphous Silicon-Based Materials written by Pio Capezzuto and published by Elsevier. This book was released on 1995-10-10 with total page 339 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. - Focuses on the plasma chemistry of amorphous silicon-based materials - Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced - Features an international group of contributors - Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices

Silicon Carbide Biotechnology

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Publisher : Elsevier
ISBN 13 : 0123859077
Total Pages : 496 pages
Book Rating : 4.1/5 (238 download)

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Book Synopsis Silicon Carbide Biotechnology by : Stephen E. Saddow

Download or read book Silicon Carbide Biotechnology written by Stephen E. Saddow and published by Elsevier. This book was released on 2011-11-14 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide (SiC) is a wide-band-gap semiconductor biocompatible material that has the potential to advance advanced biomedical applications. SiC devices offer higher power densities and lower energy losses, enabling lighter, more compact and higher efficiency products for biocompatible and long-term in vivo applications ranging from heart stent coatings and bone implant scaffolds to neurological implants and sensors. The main problem facing the medical community today is the lack of biocompatible materials that are also capable of electronic operation. Such devices are currently implemented using silicon technology, which either has to be hermetically sealed so it cannot interact with the body or the material is only stable in vivo for short periods of time. For long term use (permanent implanted devices such as glucose sensors, brain-machine-interface devices, smart bone and organ implants) a more robust material that the body does not recognize and reject as a foreign (i.e., not organic) material is needed. Silicon Carbide has been proven to be just such a material and will open up a whole new host of fields by allowing the development of advanced biomedical devices never before possible for long-term use in vivo. This book not only provides the materials and biomedical engineering communities with a seminal reference book on SiC that they can use to further develop the technology, it also provides a technology resource for medical doctors and practitioners who are hungry to identify and implement advanced engineering solutions to their everyday medical problems that currently lack long term, cost effective solutions. - Discusses Silicon Carbide biomedical materials and technology in terms of their properties, processing, characterization, and application, in one book, from leading professionals and scientists - Critical assesses existing literature, patents and FDA approvals for clinical trials, enabling the rapid assimilation of important data from the current disparate sources and promoting the transition from technology research and development to clinical trials - Explores long-term use and applications in vivo in devices and applications with advanced sensing and semiconducting properties, pointing to new product devekipment particularly within brain trauma, bone implants, sub-cutaneous sensors and advanced kidney dialysis devices

III-V Compound Semiconductors

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Publisher : CRC Press
ISBN 13 : 1439815232
Total Pages : 588 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis III-V Compound Semiconductors by : Tingkai Li

Download or read book III-V Compound Semiconductors written by Tingkai Li and published by CRC Press. This book was released on 2016-04-19 with total page 588 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon-based microelectronics has steadily improved in various performance-to-cost metrics. But after decades of processor scaling, fundamental limitations and considerable new challenges have emerged. The integration of compound semiconductors is the leading candidate to address many of these issues and to continue the relentless pursuit of more

Silicon Germanium Materials and Devices - A Market and Technology Overview to 2006

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Author :
Publisher : Elsevier
ISBN 13 : 0080541216
Total Pages : 419 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Silicon Germanium Materials and Devices - A Market and Technology Overview to 2006 by : R. Szweda

Download or read book Silicon Germanium Materials and Devices - A Market and Technology Overview to 2006 written by R. Szweda and published by Elsevier. This book was released on 2002-11-26 with total page 419 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first edition of Silicon Germanium Materials & Devices - A Market & Technology Overview to 2006 examines the development of the silicon germanium business over a six-year period 2001 to 2006. It analyses the trends in markets, technologies and industry structure and profiles all the major players. It is specifically aimed at users and manufacturers of substrates, epiwafers, equipment and devices. The analysis includes a competitive assessment of the market of silicon germanium vs. gallium arsenide, indium phosphide vs. other forms of silicon. Silicon Germanium Materials & Devices - A Market & Technology Overview to 2006 is designed to assist with business plans, R&D and manufacturing strategies. It will be an indispensable aid for managers responsible for business development, technology assessment and market research. The report examines the rapid development of silicon germanium from an R&D curiosity to production status. An extensive treatment from materials through processes to devices and applications it encapsulates the entire silicon germanium business of today and assesses future directions. For a PDF version of the report please call Tina Enright on +44 (0) 1865 843008 for price details.

Silicon-Based Hybrid Nanoparticles

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Publisher : Elsevier
ISBN 13 : 012824254X
Total Pages : 391 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Silicon-Based Hybrid Nanoparticles by : Sabu Thomas

Download or read book Silicon-Based Hybrid Nanoparticles written by Sabu Thomas and published by Elsevier. This book was released on 2021-09-24 with total page 391 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon-Based Hybrid Nanoparticles: Fundamentals, Properties, and Applications focuses on the fundamental principles and promising applications of silicon-based hybrid nanoparticles in nanoelectronics, energy storage/conversion, catalysis, sensors, biomedicine, environment and imaging. This book is an important reference source for materials scientists and engineers who are seeking to understand more about the major properties and applications of silicon-based hybrid nanoparticles. As the hybridization of silicon nanoparticles with other semiconductors or metal oxides nanoparticles may exhibit superior features, when compared to lone, individual nanoparticles, this book provides the latest insights. In addition, the silicon/iron oxide hybrid nanoparticles also possess excellent fluorescence, super-paramagnetism, and biocompatibility that can be effectively used for the diagnostic imaging system in vivo. Similarly, gold-silicon nanohybrids could be used as highly efficient near-infrared hyperthermia agents for cancer cell destruction. - Outlines the major thermal, electrical, optical, magnetic and toxic properties of silicon-based hybrid nanoparticles - Describes major applications in energy, environmental science and catalysis - Assesses the major challenges to manufacturing silicon-based nanostructured materials on an industrial scale

Silicon Quantum Integrated Circuits

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Publisher : Springer Science & Business Media
ISBN 13 : 3540263829
Total Pages : 367 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Silicon Quantum Integrated Circuits by : E. Kasper

Download or read book Silicon Quantum Integrated Circuits written by E. Kasper and published by Springer Science & Business Media. This book was released on 2005-12-11 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: Quantum size effects are becoming increasingly important in microelectronics, as the dimensions of the structures shrink laterally towards 100 nm and vertically towards 10 nm. Advanced device concepts will exploit these effects for integrated circuits with novel or improved properties. Keeping in mind the trend towards systems on chip, this book deals with silicon-based quantum devices and focuses on room-temperature operation. The basic physical principles, materials, technological aspects, and fundamental device operation are discussed in an interdisciplinary manner. It is shown that silicon-germanium (SiGe) heterostructure devices will play a key role in realizing silicon-based quantum electronics.

Technology and Applications of Amorphous Silicon

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Publisher : Springer Science & Business Media
ISBN 13 : 3662041413
Total Pages : 429 pages
Book Rating : 4.6/5 (62 download)

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Book Synopsis Technology and Applications of Amorphous Silicon by : Robert A. Street

Download or read book Technology and Applications of Amorphous Silicon written by Robert A. Street and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gives the first systematic and complete survey of technology and application of amorphous silicon, a material with a huge potential in electronic applications. The book features contributions by world-wide leading researchers in this field.

Silicon Based Polymers

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Publisher : Springer Science & Business Media
ISBN 13 : 1402085281
Total Pages : 285 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Silicon Based Polymers by : François Ganachaud

Download or read book Silicon Based Polymers written by François Ganachaud and published by Springer Science & Business Media. This book was released on 2008-08-09 with total page 285 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Based Polymers presents highlights in advanced research and technological innovations using macromolecular organosilicon compounds and systems, as presented in the 2007 ISPO congress. Silicon-containing materials and polymers are used all over the world and in a variety of industries, domestic products and high technology applications. Among them, silicones are certainly the most well–known, however there are still new properties discovered and preparative processes developed all the time, therefore adding to their potential. Less known, but in preparation for the future, are other silicon containing-polymers which are now close to maturity and in fact some are already available like polysilsesquioxanes and polysilanes. All these silicon based materials can adopt very different structures like chains, dendrimers, hyperbranched and networks, physical and chemical gels. The result is a vast array of materials with applications in various areas such as optics, electronics, ionic electrolytes, liquid crystals, biomaterials, ceramics and concrete, paints and coatings ... all needed to face the environmental, energetical and technological issues of today. Some industrial aspects of the applications of these materials will also be presented.

Silicon-on-Insulator Technology: Materials to VLSI

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 9781402077739
Total Pages : 392 pages
Book Rating : 4.0/5 (777 download)

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Book Synopsis Silicon-on-Insulator Technology: Materials to VLSI by : J.-P. Colinge

Download or read book Silicon-on-Insulator Technology: Materials to VLSI written by J.-P. Colinge and published by Springer Science & Business Media. This book was released on 2004-02-29 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon-on-Insulator Technology: Materials to VLSI, Third Edition, retraces the evolution of SOI materials, devices and circuits over a period of roughly twenty years. Twenty years of progress, research and development during which SOI material fabrication techniques have been born and abandoned, devices have been invented and forgotten, but, most importantly, twenty years during which SOI Technology has little by little proven it could outperform bulk silicon in every possible way. The turn of the century turned out to be a milestone for the semiconductor industry, as high-quality SOI wafers suddenly became available in large quantities. From then on, it took only a few years to witness the use of SOI technology in a wealth of applications ranging from audio amplifiers and wristwatches to 64-bit microprocessors. This book presents a complete and state-of-the-art review of SOI materials, devices and circuits. SOI fabrication and characterization techniques, SOI CMOS processing, and the physics of the SOI MOSFET receive an in-depth analysis. Silicon-on-Insulator Technology: Materials to VLSI, Third Edition, also describes the properties of other SOI devices, such as multiple gate MOSFETs, dynamic threshold devices and power MOSFETs. The advantages and performance of SOI circuits used in both niche and mainstream applications are discussed in detail. The SOI specialist will find this book invaluable as a source of compiled references covering the different aspects of SOI technology. For the non-specialist, the book serves an excellent introduction to the topic with detailed, yet simple and clear explanations. Silicon-on-Insulator Technology: Materials to VLSI, Third Edition is recommended for use as a textbook for classes on semiconductor device processing and physics at the graduate level.

Strained Silicon Heterostructures

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Author :
Publisher : IET
ISBN 13 : 9780852967782
Total Pages : 520 pages
Book Rating : 4.9/5 (677 download)

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Book Synopsis Strained Silicon Heterostructures by : C. K. Maiti

Download or read book Strained Silicon Heterostructures written by C. K. Maiti and published by IET. This book was released on 2001 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively covers the areas of materials growth, characterisation and descriptions for the new devices in siliconheterostructure material systems. In recent years, the development of powerful epitaxial growth techniques such as molecular beam epitaxy (MBE), ultra-high vacuum chemical vapour deposition (UHVCVD) and other low temperature epitaxy techniques has given rise to a new area of research of bandgap engineering in silicon-based materials. This has paved the way not only for heterojunction bipolar and field effect transistors, but also for other fascinating novel quantum devices. This book provides an excellent introduction and valuable references for postgraduate students and research scientists.

Silicon Photonics Design

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Publisher : Cambridge University Press
ISBN 13 : 1107085454
Total Pages : 439 pages
Book Rating : 4.1/5 (7 download)

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Book Synopsis Silicon Photonics Design by : Lukas Chrostowski

Download or read book Silicon Photonics Design written by Lukas Chrostowski and published by Cambridge University Press. This book was released on 2015-03-12 with total page 439 pages. Available in PDF, EPUB and Kindle. Book excerpt: This hands-on introduction to silicon photonics engineering equips students with everything they need to begin creating foundry-ready designs.

Fundamentals of Silicon Carbide Technology

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Publisher : John Wiley & Sons
ISBN 13 : 1118313526
Total Pages : 565 pages
Book Rating : 4.1/5 (183 download)

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Book Synopsis Fundamentals of Silicon Carbide Technology by : Tsunenobu Kimoto

Download or read book Fundamentals of Silicon Carbide Technology written by Tsunenobu Kimoto and published by John Wiley & Sons. This book was released on 2014-11-24 with total page 565 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive introduction and up-to-date reference to SiC power semiconductor devices covering topics from material properties to applications Based on a number of breakthroughs in SiC material science and fabrication technology in the 1980s and 1990s, the first SiC Schottky barrier diodes (SBDs) were released as commercial products in 2001. The SiC SBD market has grown significantly since that time, and SBDs are now used in a variety of power systems, particularly switch-mode power supplies and motor controls. SiC power MOSFETs entered commercial production in 2011, providing rugged, high-efficiency switches for high-frequency power systems. In this wide-ranging book, the authors draw on their considerable experience to present both an introduction to SiC materials, devices, and applications and an in-depth reference for scientists and engineers working in this fast-moving field. Fundamentals of Silicon Carbide Technology covers basic properties of SiC materials, processing technology, theory and analysis of practical devices, and an overview of the most important systems applications. Specifically included are: A complete discussion of SiC material properties, bulk crystal growth, epitaxial growth, device fabrication technology, and characterization techniques. Device physics and operating equations for Schottky diodes, pin diodes, JBS/MPS diodes, JFETs, MOSFETs, BJTs, IGBTs, and thyristors. A survey of power electronics applications, including switch-mode power supplies, motor drives, power converters for electric vehicles, and converters for renewable energy sources. Coverage of special applications, including microwave devices, high-temperature electronics, and rugged sensors. Fully illustrated throughout, the text is written by recognized experts with over 45 years of combined experience in SiC research and development. This book is intended for graduate students and researchers in crystal growth, material science, and semiconductor device technology. The book is also useful for design engineers, application engineers, and product managers in areas such as power supplies, converter and inverter design, electric vehicle technology, high-temperature electronics, sensors, and smart grid technology.