Semiconductor Micromachining Techniques And Industrial Applications

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Semiconductor Micromachining, Techniques and Industrial Applications

Author : S. A. Campbell
Publisher : Wiley-Blackwell
ISBN 13 :
Total Pages : 416 pages
Book Rating : 4.X/5 (4 download)

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Book Synopsis Semiconductor Micromachining, Techniques and Industrial Applications by : S. A. Campbell

Download or read book Semiconductor Micromachining, Techniques and Industrial Applications written by S. A. Campbell and published by Wiley-Blackwell. This book was released on 1998-05-08 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor Micromachining - Fundamentals and Technology - is a two volume work in which, for the first time, the various disciplines associated with the theory and practice of device fabrication are brought together in one comprehensive reference source. Volume 1 contains a detailed coverage of semiconductor electrochemistry and physics whilst Volume 2 describes the wide range of microengineering technologies with details of practical applications. The authors for each chapter have been carefully selected for their expertise and are acknowledged leaders in their respective fields. The purpose of this book is to enable workers in the area of semiconductor micromachining to have ready access to the basic literature, essential to provide a solid basis for the many different aspects of physics, chemistry, electronics and engineering involved with this technology. The main focus of the book is on structures based on silicon, the most common and versatile of the current range of commercially available semiconductors, but other materials such as III-V semiconductors are also considered. Together these two volumes provide an indispensable reference text for this fast growing area of applied science. It will be of value to a wide range of academic and industrial scientists, technologists and engineers who wish to expand their knowledge in this area of science and for whom thus far, there has been no convenient reference work. Volume 1: Fundamental Electrochemistry and Physics

Microfabrication and Nanomanufacturing

Author : Mark J. Jackson
Publisher : CRC Press
ISBN 13 : 1420028278
Total Pages : 416 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Microfabrication and Nanomanufacturing by : Mark J. Jackson

Download or read book Microfabrication and Nanomanufacturing written by Mark J. Jackson and published by CRC Press. This book was released on 2005-11-10 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.

Microelectromechanical Systems

Author : Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Publisher : National Academies Press
ISBN 13 : 0309591511
Total Pages : 76 pages
Book Rating : 4.3/5 (95 download)

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Book Synopsis Microelectromechanical Systems by : Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems

Download or read book Microelectromechanical Systems written by Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems and published by National Academies Press. This book was released on 1997-12-15 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.

Semiconductor Micromachining, Fundamental Electrochemistry and Physics

Author : S. A. Campbell
Publisher : Wiley-Blackwell
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.X/5 (4 download)

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Book Synopsis Semiconductor Micromachining, Fundamental Electrochemistry and Physics by : S. A. Campbell

Download or read book Semiconductor Micromachining, Fundamental Electrochemistry and Physics written by S. A. Campbell and published by Wiley-Blackwell. This book was released on 1998-05-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor Micromachining - Fundamentals and Technology - is a two volume work in which, for the first time, the various disciplines associated with the theory and practice of device fabrication are brought together in one comprehensive reference source. Volume 1 contains a detailed coverage of semiconductor electrochemistry and physics whilst Volume 2 describes the wide range of microengineering technologies with details of practical applications. The authors for each chapter have been carefully selected for their expertise and are acknowledged leaders in their respective fields. The purpose of this book is to enable workers in the area of semiconductor micromachining to have ready access to the basic literature, essential to provide a solid basis for the many different aspects of physics, chemistry, electronics and engineering involved with this technology. The main focus of the book is on structures based on silicon, the most common and versatile of the current range of commercially available semiconductors, but other materials such as III V semiconductors are also considered. Together these two volumes provide an indispensable reference text for this fast growing area of applied science. It will be of value to a wide range of academic and industrial scientists, technologists and engineers who wish to expand their knowledge in this area of science and for whom thus far, there has been no convenient reference work. Volume 2: Techniques and Industrial Applications

Semiconductor Micromachining, Set

Author : S. A. Campbell
Publisher : Wiley
ISBN 13 : 9780471980841
Total Pages : 0 pages
Book Rating : 4.9/5 (88 download)

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Book Synopsis Semiconductor Micromachining, Set by : S. A. Campbell

Download or read book Semiconductor Micromachining, Set written by S. A. Campbell and published by Wiley. This book was released on 2003-06-13 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A one-stop reference for semiconductor principles and construction Semiconductor Micromachining is a two-volume set that coordinates the multidisciplinary nature of the field into a single comprehensive reference. Volume 1: Fundamental Electrochemistry and Physics builds a robust foundation of semiconductor concepts, and Volume 2: Techniques and Industrial Applications provides in-depth guidance on the practical aspects of the technology. Appropriate for graduate studies or scientists in academia and industry, this book provides a convenient reference for those who wish to expand their understanding of semiconductor technology.

Photons in Natural and Life Sciences

Author : Hans-Joachim Lewerenz
Publisher : Springer
ISBN 13 : 3642237495
Total Pages : 301 pages
Book Rating : 4.6/5 (422 download)

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Book Synopsis Photons in Natural and Life Sciences by : Hans-Joachim Lewerenz

Download or read book Photons in Natural and Life Sciences written by Hans-Joachim Lewerenz and published by Springer. This book was released on 2013-01-22 with total page 301 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book describes first the principle photon generation processes from nuclear reactions, electron motion and from discrete quantum transitions. It then focuses on the use of photons in various selected fields of modern natural and life sciences. It bridges disciplines such as physics, chemistry, earth- and materials science, proteomics, information technology, photoelectrochemistry, photosynthesis and spintronics. Advanced light sources and their use in natural and life sciences are emphasized and the effects related to the quantum nature of photons (quantum computing, teleportation) are described. The content encompasses among many other examples the role of photons on the origin of life and on homochirality in biology, femtosecond laser slicing, photothermal cancer therapy, the use of gamma rays in materials science, photoelectrochemical surface conditioning, quantum information aspects and photo-spintronics. The book is written for scientists and graduate students from all related disciplines who are interested in the science beyond their immediate research field. It is meant to encourage interdisciplinary research and development in an age where nanoscience results in a convergence of formerly more disparate science.

Modern Sensors Handbook

Author : Pavel Ripka
Publisher : John Wiley & Sons
ISBN 13 : 111861478X
Total Pages : 382 pages
Book Rating : 4.1/5 (186 download)

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Book Synopsis Modern Sensors Handbook by : Pavel Ripka

Download or read book Modern Sensors Handbook written by Pavel Ripka and published by John Wiley & Sons. This book was released on 2013-03-01 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern sensors working on new principles and/or using new materials and technologies are more precise, faster, smaller, use less power and are cheaper. Given these advantages, it is vitally important for system developers, system integrators and decision makers to be familiar with the principles and properties of the new sensor types in order to make a qualified decision about which sensor type to use in which system and what behavior may be expected. This type of information is very difficult to acquire from existing sources, a situation this book aims to address by providing detailed coverage on this topic. In keeping with its practical theme, the discussion concentrates on sensor types used or having potential to be used in industrial applications.

Sensors in Biomedical Applications

Author : Gabor Harsanyi
Publisher : CRC Press
ISBN 13 : 1420012916
Total Pages : 362 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Sensors in Biomedical Applications by : Gabor Harsanyi

Download or read book Sensors in Biomedical Applications written by Gabor Harsanyi and published by CRC Press. This book was released on 2000-05-01 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: While most books contain some information on related sensors topics, they are limited in their scope on biomedical sensors. Sensors in Biomedical Applications: Fundamentals, Design, Technology and Applications is the first systematized book to concentrate on all available and potential sensor devices of biomedical applications! Sensors in Bi

Microfabrication for Industrial Applications

Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 0815515820
Total Pages : 314 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Microfabrication for Industrial Applications by : Regina Luttge

Download or read book Microfabrication for Industrial Applications written by Regina Luttge and published by William Andrew. This book was released on 2011-09-14 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Manufacturing Techniques for Microfabrication and Nanotechnology

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1420055194
Total Pages : 672 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Manufacturing Techniques for Microfabrication and Nanotechnology by : Marc J. Madou

Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Micro-Manufacturing

Author : Muammer Koç
Publisher : John Wiley & Sons
ISBN 13 : 1118010566
Total Pages : 490 pages
Book Rating : 4.1/5 (18 download)

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Book Synopsis Micro-Manufacturing by : Muammer Koç

Download or read book Micro-Manufacturing written by Muammer Koç and published by John Wiley & Sons. This book was released on 2011-05-06 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.

Non-Crystalline Films for Device Structures

Author :
Publisher : Elsevier
ISBN 13 : 9780080542959
Total Pages : 265 pages
Book Rating : 4.5/5 (429 download)

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Book Synopsis Non-Crystalline Films for Device Structures by :

Download or read book Non-Crystalline Films for Device Structures written by and published by Elsevier. This book was released on 2001-12-11 with total page 265 pages. Available in PDF, EPUB and Kindle. Book excerpt: Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical and their technological aspects. Volume 29 consists of chapters pulled from Hari Singh Nalwa's forthcoming Handbook of Thin Film Materials (ISBN: 0-12-512908-4). The chapters were selected because they deal exclusively with amorphous film structures and because they have a common relevance to semiconductor, or electronic, devices and circuits. These are subjects not yet stressed in the Thin Films series.

4M 2005 - First International Conference on Multi-Material Micro Manufacture

Author : Stefan Dimov
Publisher : Elsevier
ISBN 13 : 0080462553
Total Pages : 537 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis 4M 2005 - First International Conference on Multi-Material Micro Manufacture by : Stefan Dimov

Download or read book 4M 2005 - First International Conference on Multi-Material Micro Manufacture written by Stefan Dimov and published by Elsevier. This book was released on 2005-12-07 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: 4M 2005 - First International Conference on Multi-Material Micro Manufacture

Handbook of Thin Films, Five-Volume Set

Author : Hari Singh Nalwa
Publisher : Elsevier
ISBN 13 : 0080533248
Total Pages : 3451 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Handbook of Thin Films, Five-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Thin Films, Five-Volume Set written by Hari Singh Nalwa and published by Elsevier. This book was released on 2001-11-17 with total page 3451 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

AMST'05 Advanced Manufacturing Systems and Technology

Author : Elso Kuljanic
Publisher : Springer Science & Business Media
ISBN 13 : 3211380531
Total Pages : 791 pages
Book Rating : 4.2/5 (113 download)

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Book Synopsis AMST'05 Advanced Manufacturing Systems and Technology by : Elso Kuljanic

Download or read book AMST'05 Advanced Manufacturing Systems and Technology written by Elso Kuljanic and published by Springer Science & Business Media. This book was released on 2007-03-23 with total page 791 pages. Available in PDF, EPUB and Kindle. Book excerpt: Manufacturing a product is not difficult, the difficulty consists in manufacturing a product of high quality, at a low cost and rapidly. Drastic technological advances are changing global markets very rapidly. In such conditions the ability to compete successfully must be based on innovative ideas and new products which has to be of high quality yet low in price. One way to achieve these objecti ves would be through massive investments in research of computer based technology and by applying the approaches presented in this book. The First International Conference on Advanced Manufacturing Systems and Technology AMST87 was held in Opatija (Croatia) in October 1987. The Second International Conference on Advanced Manufacturing Systems and Technology AMSV90 was held in Trento (Italy) in lune 1990. The Third, Fourth, Fifth and Sixth Conferences on Advanced Manufacturing Systems and Technology were all held in Udine (Italy) as follows: AMST93 in April 1993, AMST96 in September 1996, AMST99 in June 1999 and AMST02 in June 2002.

Modern Machining Technology

Author : Bijoy Bhattacharyya
Publisher : Academic Press
ISBN 13 : 012812895X
Total Pages : 782 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Modern Machining Technology by : Bijoy Bhattacharyya

Download or read book Modern Machining Technology written by Bijoy Bhattacharyya and published by Academic Press. This book was released on 2019-09-17 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern Machining Technology: Advanced, Hybrid, Micro Machining and Super Finishing Technology explores complex and precise components with challenging shapes that are increasing in demand in industry. As the first book to cover all major technologies in this field, readers will find the latest technical developments and research in one place, allowing for easy comparison of specifications. Technologies covered include mechanical, thermal, chemical, micro and hybrid machining processes, as well as the latest advanced finishing technologies. Each topic is accompanied by a basic overview, examples of typical applications and studies of performance criteria. In addition, readers will find comparative advantages, model questions and solutions. Addresses a broad range of modern machining techniques, providing specifications for easy comparison Includes descriptions of the main applications for each method, along with the materials or products needed Provides the very latest research in processes, including hybrid machining

Micro Electronic and Mechanical Systems

Author : Kenichi Takahata
Publisher : BoD – Books on Demand
ISBN 13 : 9533070277
Total Pages : 528 pages
Book Rating : 4.5/5 (33 download)

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Book Synopsis Micro Electronic and Mechanical Systems by : Kenichi Takahata

Download or read book Micro Electronic and Mechanical Systems written by Kenichi Takahata and published by BoD – Books on Demand. This book was released on 2009-12-01 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.