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Semiconductor Materials Analysis And Fabrication Process Control
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Book Synopsis Semiconductor Materials Analysis and Fabrication Process Control by : G. M. Crean
Download or read book Semiconductor Materials Analysis and Fabrication Process Control written by G. M. Crean and published by North Holland. This book was released on 1993-01-01 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reviews current research in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Contributions discuss the emergence and evaluation of in situ optical diagnostic techniques, such as photoreflectance and spectroellipsometry.
Book Synopsis Semiconductor Materials Analysis and Fabrication Process Control by : G.M. Crean
Download or read book Semiconductor Materials Analysis and Fabrication Process Control written by G.M. Crean and published by Elsevier. This book was released on 2012-12-02 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: There is a growing awareness that the successful implementation of novel material systems and technology steps in the fabrication of microelectronic and optoelectronic devices, is critically dependent on the understanding and control of the materials, the process steps and their interactions. The contributions in this volume demonstrate that characterisation and analysis techniques are an essential support mechanism for research in these fields. Current major research themes are reviewed both in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Two distinct trends are elucidated: the emergence and evaluation of sophisticated in situ optical diagnostic techniques such as photoreflectance and spectroellipsometry and the industrial application of ultra-high sensitivity chemical analysis techniques for contamination monitoring. The volume will serve as a useful and timely overview of this increasingly important field.
Book Synopsis Fundamentals of Semiconductor Manufacturing and Process Control by : Gary S. May
Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Book Synopsis Run-to-Run Control in Semiconductor Manufacturing by : James Moyne
Download or read book Run-to-Run Control in Semiconductor Manufacturing written by James Moyne and published by CRC Press. This book was released on 2018-10-08 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Book Synopsis Process Engineering Analysis in Semiconductor Device Fabrication by : Stanley Middleman
Download or read book Process Engineering Analysis in Semiconductor Device Fabrication written by Stanley Middleman and published by McGraw-Hill Companies. This book was released on 1993 with total page 802 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written primarily for chemical engineering students, the material included in this new text is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems.
Book Synopsis Ion Beam Processing of Materials and Deposition Processes of Protective Coatings by : P.L.F. Hemment
Download or read book Ion Beam Processing of Materials and Deposition Processes of Protective Coatings written by P.L.F. Hemment and published by Newnes. This book was released on 2012-12-02 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing the proceedings of three symposia in the E-MRS series this book is divided into two parts. Part one is concerned with ion beam processing, a particularly powerful and versatile technology which can be used both to synthesise and modify materials, including metals, semiconductors, ceramics and dielectrics, with great precision and excellent control. Furthermore it also deals with the correlated effects in atomic and cluster ion bombardment and implantation. Part two deals with the deposition techniques, characterization and applications of advanced ceramic, metallic and polymeric coatings or thin films for surface protection against corrosion, erosion, abrasion, diffusion and for lubrication of contracting surfaces in relative motion.
Book Synopsis Selected Topics in Group IV and II-VI Semiconductors by : E.H.C. Parker
Download or read book Selected Topics in Group IV and II-VI Semiconductors written by E.H.C. Parker and published by Newnes. This book was released on 2012-12-02 with total page 465 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains the proceedings of two symposia which brought together crystal growers, chemists and physicists from across the world. The first part is concerned with silicon molecular beam epitaxy and presents an overview of the most research being done in the field. Part two discusses the problems dealing with purification, doping and defects of II-VI materials, mainly of the important semiconductors CdTe and ZnSe. The focus is on materials science issues which are the key for a better understanding of these materials and for any industrial application.
Book Synopsis Porous Silicon: Material, Technology and Devices by : H. Münder
Download or read book Porous Silicon: Material, Technology and Devices written by H. Münder and published by Newnes. This book was released on 1996-07-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: These proceedings represent the most recent progress in the field of porous silicon. Several papers present results in which the influence of the formation parameters on the structural and optical properties has been investigated. Further topics dealt with include: the influence of light during the formation process on the photoluminescence behaviour; fundamental mechanism of the photoluminescence; the electroluminescence of porous silicon; applications based on porous silicon; charge carrier transport.
Book Synopsis Methods of Measurement for Semiconductor Materials, Process Control, and Devices by : United States. National Bureau of Standards
Download or read book Methods of Measurement for Semiconductor Materials, Process Control, and Devices written by United States. National Bureau of Standards and published by . This book was released on 1968-10 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis C, H, N and O in Si and Characterization and Simulation of Materials and Processes by : A. Borghesi
Download or read book C, H, N and O in Si and Characterization and Simulation of Materials and Processes written by A. Borghesi and published by Newnes. This book was released on 2012-12-02 with total page 580 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing over 200 papers, this volume contains the proceedings of two symposia in the E-MRS series. Part I presents a state of the art review of the topic - Carbon, Hydrogen, Nitrogen and Oxygen in Silicon and in Other Elemental Semiconductors. There was strong representation from the industrial laboratories, illustrating that the topic is highly relevant for the semiconductor industry. The second part of the volume deals with a topic which is undergoing a process of convergence with two concerns that are more particularly application oriented. Firstly, the advanced instrumentation which, through the use of atomic force and tunnel microscopies, high resolution electron microscopy and other high precision analysis instruments, now allows for direct access to atomic mechanisms. Secondly, the technological development which in all areas of applications, particularly in the field of microelectronics and microsystems, requires as a result of the miniaturisation race, a precise mastery of the microscopic mechanisms.
Download or read book Laser Ablation written by E. Fogarassy and published by Newnes. This book was released on 2012-12-02 with total page 943 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains the proceedings of the largest conference ever held on this subject. The strong interest in this field is largely due to the fact that both fundamental aspects of laser-surface interaction as well as applied techniques for thin film generation and patterning were treated in detail by experts from around the world.
Book Synopsis Small Scale Structures by : N.F. de Rooij
Download or read book Small Scale Structures written by N.F. de Rooij and published by Elsevier. This book was released on 2012-12-02 with total page 559 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains the proceedings of 3 symposia dealing with various aspects of small scale structures. Symposium A deals with the development of new materials, including ceramics, polymers, metals, etc., their microstructuring as well as their potential for application in microsystems. All kinds of microsystems are considered, e.g. mechanical, magnetic, optical, chemical, biochemical and issues related to assembly and packaging were also covered. Symposium B deals with four topics: synthesis and preparation of nanostructured ceramics and composites with well-controlled geometric order and chemical composition; coupling of these structures to transducers for current and future chemical and biochemical devices based upon microoptics, microelectronics, microionics, microelectrodes or molecular cages; planar thin film structures and the control of covalent thin film/transducer couplings, the control of selective, stable and sensitive recognition centers at the surface, at grain boundaries or in the bulk of selected nanostructured materials with extremely narrow particle size distributions; analysis of these structures and sensor functions by means of techniques utilizing photons, electrons, ions, or atomic particle beam probes. Symposium E examines the structure-property relationships in thin films and multilayers, from the point of view of both fundamental studies and practical applications.
Book Synopsis Production Planning and Control for Semiconductor Wafer Fabrication Facilities by : Lars Mönch
Download or read book Production Planning and Control for Semiconductor Wafer Fabrication Facilities written by Lars Mönch and published by Springer Science & Business Media. This book was released on 2012-09-12 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.
Book Synopsis Polyconjugated Materials by : G. Zerbi
Download or read book Polyconjugated Materials written by G. Zerbi and published by Elsevier. This book was released on 1992-12-04 with total page 454 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the past ten years the science of Polyconjugated Organic Materials has grown rapidly and is now experiencing the uncorrelated explosive development typical of a new science. The transfer of the basic scientific knowledge of these materials to the field of technology and industry is presently the focus of interest in academic and industrial circles. New devices are being developed which are paving the way for future technologies. Organic materials have become the focus of attention in these technologies. The large and very fast nonlinear optical response of organic molecules has generated new theoretical and experimental physics as well as new synthetic chemistry. The advancement of knowledge and the new achievements in this field require the interdisciplinary practice of chemists, physicists and engineers who can talk the same technical language on molecular systems which show specific physical properties. The purpose of this book is to introduce beginners to the field of nonlinear optics in organic materials and to expose specialists in one field to the problems of the other fields. Since organic molecules with a large and very fast nonlinear optical response are being continuously discovered the contributions focus on this class of materials. The volume provides a useful introduction for all those interested in the theoretical and experimental aspects of this expanding field.
Book Synopsis Chemistry for Electronic Materials by : K.F. Jensen
Download or read book Chemistry for Electronic Materials written by K.F. Jensen and published by Elsevier. This book was released on 1993-03-09 with total page 215 pages. Available in PDF, EPUB and Kindle. Book excerpt: The chemical aspects of materials processing used for electronic applications, e.g. Si, III-V compounds, superconductors, metallization materials, are covered in this volume. Significant recent advances have occurred in the development of new volatile precursors for the fabrication of III-V semiconductor and metal [Cu, W] films by OMCVD. Some fundamentally new and wide-ranging applications have been introduced in recent times. Experimental and modeling studies regarding deposition kinetics, operating conditions and transport as well as properties of films produced by PVD, CVD and PECVD are discussed. The thirty papers in this volume report on many other significant topics also. Research workers involved in these aspects of materials technology may find here some new perspectives with which to augment their projects.
Book Synopsis Synthetic Materials for Non-Linear Optics and Electronics by : C. Taliani
Download or read book Synthetic Materials for Non-Linear Optics and Electronics written by C. Taliani and published by Elsevier. This book was released on 1993-04-21 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent progress in organic and LED structures, in photorefractive response in molecular ferromagnetism, as well as the ultrafast and large non-linear optical response in conjugated systems are attracting great interest from the scientific community. The discovery of fullerenes has added further impetus to this field. Two areas bear particular promise for the development of a new electronics based on SEM materials: the integration of organic materials into the planar silicon technology such as, for instance, the advances in "all organic" field-effect transistors (FET) and the new organic light emitting diodes (LED); and secondly the appearance of a totally new electronics in which photons, rather than electrons, carry the information and SEM materials act as switching devices. Both aspects and more are covered in this volume. The quality of the 52 contributions attests to the fact that this subject area has progressed from the level of a scientific curiosity to a mature field of materials science introducing important technological perspectives for electronic applications.
Author :Bernd O. Kolbesen (Chemiker.) Publisher :The Electrochemical Society ISBN 13 :9781566772396 Total Pages :568 pages Book Rating :4.7/5 (723 download)
Book Synopsis Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes by : Bernd O. Kolbesen (Chemiker.)
Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes written by Bernd O. Kolbesen (Chemiker.) and published by The Electrochemical Society. This book was released on 1999 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt:
