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Author :
Publisher :
ISBN 13 :
Total Pages : 31 pages
Book Rating : 4.:/5 (924 download)
Download or read book Scanning Capacitance Microscopy for Semiconductor Characterisation written by and published by . This book was released on 2001 with total page 31 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Octavian Ligor
Publisher :
ISBN 13 :
Total Pages : 190 pages
Book Rating : 4.:/5 (758 download)
Download or read book Reliability of the Scanning Capacitance Microscopy and Spectroscopy for the Nanoscale Characterization of Semiconductors and Dielectrics written by Octavian Ligor and published by . This book was released on 2010 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work was devoted to the experimental study of the scanning capacitance microscopy (SCM) and spectroscopy (SCS) for the mapping of the dopants in the semiconductor structures and for the characterization of thin oxides. SCM has appeared to be a very powerful technique for doping mapping as long as qualitative images are needed, for example in order to check whether fabrication steps like implantations have been correctly operated during the fabrication of devices (presence or absence of doping of a given type in a region where it should be present). When quantitativity is needed, the only way of performing a calibration of SCM images for dopant mapping seems to grow exactly the same oxide on two different samples, one being a calibration sample from which a semi-calibration curve associating doping levels and SCM signal levels will be measured and applied to the unknown sample (semi-calibration). We have shown the capabilities of SCM for dopant mapping using a series of experimental situations and test samples covering almost all frequently encountered structures in the industry of silicon microelectronics : doping staircases of p-type and n-type structures, quantum wells and p-n junctions. Qualitative images have been obtained for a wide range of doping levels between 2.e+15 at.cm-3 to 5.e+19 at.cm-3. SCM is able to detect quantum wells of ~ 7 nm width. SCM is also able to differentiate between dopants of different type (p-type or n-type). All these results confirm the usefulness of SCM as a qualitative imaging technique. We have studied the experimental parameters playing a role in the interpretation and reproducibility of SCM signal: stray light, stray capacitance, the tip-sample contact, the influence of strong electrical fields, the sample's topography, the quality and the properties of the top oxide. We have proposed solutions for eliminating all these parasitic factors and for rendering the SCM measurements reproducible and quantitative.
Author : Sergei V. Kalinin
Publisher : Springer Science & Business Media
ISBN 13 : 0387286683
Total Pages : 1002 pages
Book Rating : 4.3/5 (872 download)
Download or read book Scanning Probe Microscopy written by Sergei V. Kalinin and published by Springer Science & Business Media. This book was released on 2007-04-03 with total page 1002 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume will be devoted to the technical aspects of electrical and electromechanical SPM probes and SPM imaging on the limits of resolution, thus providing technical introduction into the field. This volume will also address the fundamental physical phenomena underpinning the imaging mechanism of SPMs.
Author : Xiaotian Zhou
Publisher :
ISBN 13 : 9789984343143
Total Pages : 127 pages
Book Rating : 4.3/5 (431 download)
Download or read book Scanning Probe Characterization of Novel Semiconductor Materials and Devices written by Xiaotian Zhou and published by . This book was released on 2007 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: As semiconductor devices shrink in size, it becomes more important to characterize and understand electronic properties of the materials and devices at the nanoscale. Scanning probe techniques offers numerous advantages over traditional tools used for semiconductor materials and devices characterization including high spatial resolution, ease of use and multi-functionality for electrical characterization, such as current, potential and capacitance, etc.
Author : Dieter K. Schroder
Publisher : John Wiley & Sons
ISBN 13 : 0471739065
Total Pages : 800 pages
Book Rating : 4.4/5 (717 download)
Download or read book Semiconductor Material and Device Characterization written by Dieter K. Schroder and published by John Wiley & Sons. This book was released on 2015-06-29 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Third Edition updates a landmark text with the latest findings The Third Edition of the internationally lauded Semiconductor Material and Device Characterization brings the text fully up-to-date with the latest developments in the field and includes new pedagogical tools to assist readers. Not only does the Third Edition set forth all the latest measurement techniques, but it also examines new interpretations and new applications of existing techniques. Semiconductor Material and Device Characterization remains the sole text dedicated to characterization techniques for measuring semiconductor materials and devices. Coverage includes the full range of electrical and optical characterization methods, including the more specialized chemical and physical techniques. Readers familiar with the previous two editions will discover a thoroughly revised and updated Third Edition, including: Updated and revised figures and examples reflecting the most current data and information 260 new references offering access to the latest research and discussions in specialized topics New problems and review questions at the end of each chapter to test readers' understanding of the material In addition, readers will find fully updated and revised sections in each chapter. Plus, two new chapters have been added: Charge-Based and Probe Characterization introduces charge-based measurement and Kelvin probes. This chapter also examines probe-based measurements, including scanning capacitance, scanning Kelvin force, scanning spreading resistance, and ballistic electron emission microscopy. Reliability and Failure Analysis examines failure times and distribution functions, and discusses electromigration, hot carriers, gate oxide integrity, negative bias temperature instability, stress-induced leakage current, and electrostatic discharge. Written by an internationally recognized authority in the field, Semiconductor Material and Device Characterization remains essential reading for graduate students as well as for professionals working in the field of semiconductor devices and materials. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.
Author : Paul Arthur Rosenthal
Publisher :
ISBN 13 :
Total Pages : 310 pages
Book Rating : 4.:/5 (318 download)
Download or read book Characterization of Structural and Electronic Properties of Nanoscale Semiconductor Device Structures Using Cross-sectional Scanning Probe Microscopy written by Paul Arthur Rosenthal and published by . This book was released on 2002 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Wolfgang Brezna
Publisher : Sudwestdeutscher Verlag Fur Hochschulschriften AG
ISBN 13 : 9783838102672
Total Pages : 156 pages
Book Rating : 4.1/5 (26 download)
Download or read book Scanning Capacitance Microscopy written by Wolfgang Brezna and published by Sudwestdeutscher Verlag Fur Hochschulschriften AG. This book was released on 2009-01 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this PhD-thesis, Scanning Capacitance Microscopy (SCM) and Scanning Capacitance Spectroscopy (SCS) was applied to investigate various silicon samples. SCM is used to investigate the electrical behaviour of samples with a lateral resolution below 100 nm. The work is divided into 3 major experimental parts: (1) the properties of metal organic chemical vapour deposited zirconium dioxide as dielectric material for SCM was explored. Usage of zirconium dioxide leads to reduced leakage currents and improved signal quality. (2) focussed ion beam induced damage in silicon was investigated with SCM. The beam shape and the range of ion damage inside the sample was investigated. The SCM data were compared with transmission electron microscopy data. (3) a setup for quantitative Scanning Capacitance Spectroscopy with an external capacitance bridge connected to an atomic force microscope was designed. This setup is sensitive enough to resolve the energetic distribution of interface trapped charges and to quantitatively measure the local oxide charge density distribution of zirconium dioxide layers.
Author : Daniel Maria Schaadt
Publisher :
ISBN 13 :
Total Pages : 236 pages
Book Rating : 4.:/5 (318 download)
Download or read book Characterization of the Electronic Properties of Magnetic and Semiconductor Devices Using Scanning Probe Techniques written by Daniel Maria Schaadt and published by . This book was released on 2003 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chiara Manfredotti
Publisher : Elsevier Inc. Chapters
ISBN 13 : 0128083441
Total Pages : 66 pages
Book Rating : 4.1/5 (28 download)
Download or read book Characterization of Semiconductor Heterostructures and Nanostructures written by Chiara Manfredotti and published by Elsevier Inc. Chapters. This book was released on 2013-04-11 with total page 66 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Umberto Celano
Publisher : Springer
ISBN 13 : 3030156125
Total Pages : 408 pages
Book Rating : 4.0/5 (31 download)
Download or read book Electrical Atomic Force Microscopy for Nanoelectronics written by Umberto Celano and published by Springer. This book was released on 2019-08-01 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Author : Paula M. Vilarinho
Publisher : Springer Science & Business Media
ISBN 13 : 1402030193
Total Pages : 503 pages
Book Rating : 4.4/5 (2 download)
Download or read book Scanning Probe Microscopy: Characterization, Nanofabrication and Device Application of Functional Materials written by Paula M. Vilarinho and published by Springer Science & Business Media. This book was released on 2006-06-15 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the characteristic dimensions of electronic devices continue to shrink, the ability to characterize their electronic properties at the nanometer scale has come to be of outstanding importance. In this sense, Scanning Probe Microscopy (SPM) is becoming an indispensable tool, playing a key role in nanoscience and nanotechnology. SPM is opening new opportunities to measure semiconductor electronic properties with unprecedented spatial resolution. SPM is being successfully applied for nanoscale characterization of ferroelectric thin films. In the area of functional molecular materials it is being used as a probe to contact molecular structures in order to characterize their electrical properties, as a manipulator to assemble nanoparticles and nanotubes into simple devices, and as a tool to pattern molecular nanostructures. This book provides in-depth information on new and emerging applications of SPM to the field of materials science, namely in the areas of characterisation, device application and nanofabrication of functional materials. Starting with the general properties of functional materials the authors present an updated overview of the fundamentals of Scanning Probe Techniques and the application of SPM techniques to the characterization of specified functional materials such as piezoelectric and ferroelectric and to the fabrication of some nano electronic devices. Its uniqueness is in the combination of the fundamental nanoscale research with the progress in fabrication of realistic nanodevices. By bringing together the contribution of leading researchers from the materials science and SPM communities, relevant information is conveyed that allows researchers to learn more about the actual developments in SPM applied to functional materials. This book will contribute to the continuous education and development in the field of nanotechnology.
Author : National Institute of Standards and Technology (U.S.)
Publisher :
ISBN 13 :
Total Pages : 146 pages
Book Rating : 4.:/5 (7 download)
Download or read book National Semiconductor Metrology Program written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1995 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Richard Haight
Publisher : World Scientific
ISBN 13 : 9814322849
Total Pages : 346 pages
Book Rating : 4.8/5 (143 download)
Download or read book Handbook of Instrumentation and Techniques for Semiconductor Nanostructure Characterization written by Richard Haight and published by World Scientific. This book was released on 2012 with total page 346 pages. Available in PDF, EPUB and Kindle. Book excerpt: As we delve more deeply into the physics and chemistry of functional materials and processes, we are inexorably driven to the nanoscale. And nowhere is the development of instrumentation and associated techniques more important to scientific progress than in the area of nanoscience. The dramatic expansion of efforts to peer into nanoscale materials and processes has made it critical to capture and summarize the cutting-edge instrumentation and techniques that have become indispensable for scientific investigation in this arena. This Handbook is a key resource developed for scientists, engineers and advanced graduate students in which eminent scientists present the forefront of instrumentation and techniques for the study of structural, optical and electronic properties of semiconductor nanostructures.
Author : A.G. Cullis
Publisher : CRC Press
ISBN 13 : 1351091530
Total Pages : 1135 pages
Book Rating : 4.3/5 (51 download)
Download or read book Microscopy of Semiconducting Materials 2003 written by A.G. Cullis and published by CRC Press. This book was released on 2018-01-10 with total page 1135 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies of devices in this regime can only be carried out with the most advanced forms of microscopy. Accordingly, Microscopy of Semiconducting Materials focuses on international developments in semiconductor studies carried out by all forms of microscopy. It provides an overview of the latest instrumentation, analysis techniques, and state-of-the-art advances in semiconducting materials science for solid state physicists, chemists, and material scientists.
Author : Yaoyao Jiang
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (55 download)
Download or read book Scanning Capacitance Microscopy and Related Technologies for Semiconductor Device Characterizations written by Yaoyao Jiang and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : National Semiconductor Metrology Program (U.S.)
Publisher :
ISBN 13 :
Total Pages : 148 pages
Book Rating : 4.3/5 ( download)
Download or read book National Semiconductor Metrology Program written by National Semiconductor Metrology Program (U.S.) and published by . This book was released on 1999 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher : ASM International
ISBN 13 : 0871707454
Total Pages : 162 pages
Book Rating : 4.8/5 (717 download)
Download or read book Microelectronic Failure Analysis Desk Reference written by and published by ASM International. This book was released on 2001-01-01 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt: Developed by the Electronic Device Failure Analysis Society (EDFAS) Publications Committee.
