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Rf Mems Capacitive Switches With High Reliability
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Book Synopsis RF-MEMS Capacitive Switches with High Reliability by :
Download or read book RF-MEMS Capacitive Switches with High Reliability written by and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.
Book Synopsis High Power Metal-Contact and Capacitive Switches with Stress Resilient Designs by : Hosein Zareie
Download or read book High Power Metal-Contact and Capacitive Switches with Stress Resilient Designs written by Hosein Zareie and published by . This book was released on 2013 with total page 105 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation presents the design, fabrication and measurements of stress tolerant RF MEMS switches with high power handling and reliability. RF MEMS switched capacitors are developed that are capable of handling >10 W of RF power under hot switching conditions. A capacitance ratio of 5-7 has been achieved with high reliability and minimal dielectric charging. Also the Q of these devices was measured to be > 80 at 10 GHz in the maximum capacitance state. SPST (single-pole single-throw) and SP4T (single-pole four-throw) RF MEMS metal-contact switches with high power handling and reliability have also been developed. The design is based on circular cantilevers that are anchored at the center and are attached together using a radial arc. This provides a compact SPST switch with multiple contact points and can easily be transformed to SPNT by dividing the membrane into several cantilevers each with its own actuation electrode. A power handling of > 10 W and > 2 W with high reliability has been measured for the SPST and SP4T switches, and with high reliability. Furthermore the design of temperature resilient RF MEMS capacitive switches with the capacitance ratio of >30 have been achieved using the Raytheon process. The switch is used as a building block of different circuit configurations such as SPST, SPDT and a 2-bit X-band phase shifter with good performance.
Book Synopsis High Performance RF MEMS Metal-Contact Switches and Capacitive Switches by : Chenhui Niu
Download or read book High Performance RF MEMS Metal-Contact Switches and Capacitive Switches written by Chenhui Niu and published by . This book was released on 2016 with total page 109 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation presents designs, fabrication processes and measurements of a series of high performance RF MEMS switches. Chapter 2 presents a miniature RF MEMS metal contact switch based on a tethered-cantilever structure. The miniature size and the use of tethers result in an excellent biaxial residual stress and stress gradient tolerance. The switch is built using thin metal process with a large biaxial stress and a high stress gradient (50 MPa and -105 MPa/um), and works well under these conditions. In the up-state, the switch capacitance is 9.4 fF and results in an isolation of 20 dB at 20 GHz. In the down-state, the switch resistance is 3.6 ohm for a gold-gold contact under 30 V actuation voltage. The switch is compatible with CMOS back-end processing. With its miniature size, the switch could be placed in arrays to achieve lower contact resistance and higher power handling. Chapter 3 presents a multi-contact mN-force RF MEMS metal-contact switch with a pull-down voltage (Vp) of 45 V-50 V and an operation voltage of 60V-65V. The switch gets a contact force of s 2.0 mN under 65 V actuation voltage and a release force of s 1.2 mN (simulated). The switch gets an on-state resistance of s 1.8 with Ru-Au contact and an off-state capacitance of 13.5 fF, which results in a figure of merit of 24 fs. In the temperature stability measurement, the switch shows a change of 4V in pull-down voltage and a change of 2V in release voltage from 25 C to 125 C. In the high power handling measurement, the switch demonstrates a reliability of > 10 million cold switching cycles with 5 W RF power. Chapter 4 first presents a high capacitance ratio (Cr) capacitive switch with continuous tuning capability after pull-down. The measured up-state capacitance is 74 fF. The pull-down voltage of the switch is 30V -32V and there is an 8.4% linear tuning range from 33V to 40V actuation voltage. The measured down-state capacitance is 1296 fF under 40V actuation voltage, resulting in a Cr of 17.5. Next, a back-to-back switch using the high Cr switch is designed to improve IP2 without extra power supply. The back-to-back switch shows an up-state capacitance of 31fF, a Cr of 19.7 and a 6.8% continuous tuning range from 34V to 40V. The back-to-back switch shows a 14 dB higher OIP2 than the single switch does.
Download or read book RF MEMS written by Gabriel M. Rebeiz and published by John Wiley & Sons. This book was released on 2004-02-06 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Book Synopsis Robust, Reliable, Radio Frequency (RF) Microelectromechanical Systems (MEMS) Capacitive Switches by :
Download or read book Robust, Reliable, Radio Frequency (RF) Microelectromechanical Systems (MEMS) Capacitive Switches written by and published by . This book was released on 2005 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt: Wafer-level micro-encapsulation is an innovative, low-cost, wafer-level packaging method for encapsulating RF MEMS switches. This zero-level packaging technique has demonstrated
Book Synopsis Advanced RF MEMS by : Stepan Lucyszyn
Download or read book Advanced RF MEMS written by Stepan Lucyszyn and published by Cambridge University Press. This book was released on 2010-08-19 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
Book Synopsis Long Life MEM Switch Technology by :
Download or read book Long Life MEM Switch Technology written by and published by . This book was released on 2006 with total page 24 pages. Available in PDF, EPUB and Kindle. Book excerpt: Report developed under contract FA8718-04-C-0029. Microelectromechanical (MEM) switches have already been developed that demonstrate exceptional RF performance but have been plagued by poor reliability. In this work, two new MEM switches were developed with the goal of increasing reliability. The first is a miniature switched capacitor that is 150-300 times smaller than typical RF MEMS switches. The bridges on these switches are 21 micrometers long by 8 micrometers wide and have a switching time of less than 250 ns. Reliability of over 20 billion cycles of 0.5 W of RF power at 13 GHz was demonstrated. The second design is a switched capacitor that is a cantilever type of device. The switch showed a Q of more than 250 at X to Ku-band frequencies, and a reliability of more than 11 billion cycles at 1 W of RF power at 8 GHz. Finally, a tunable filter covering 5.1 and 5.7 GHz (two states) was designed, fabricated and tested. The loss was 1.4dB, the bandwidth was 5%, and the tunable Q was over 150. These novel designs will be very useful for high reliability RF MEM switches and circuits in the coming years for commercial and defense applications.
Book Synopsis High On/off Capacitance Ratio RF MEMS Capacitive Switches by :
Download or read book High On/off Capacitance Ratio RF MEMS Capacitive Switches written by and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis MEMS Reliability by : Allyson L. Hartzell
Download or read book MEMS Reliability written by Allyson L. Hartzell and published by Springer Science & Business Media. This book was released on 2010-11-02 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
Book Synopsis High Performance RF MEMS Metal-contact Switches and Switching Networks by : Chirag D. Patel
Download or read book High Performance RF MEMS Metal-contact Switches and Switching Networks written by Chirag D. Patel and published by . This book was released on 2012 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation presents the design and measurement of high performance RF MEMS metal contact switches capable of achieving mN-level contact and release forces. The switches are designed and demonstrated to be tolerant to a wide range stress effect and temperature. Chapter 2 presents an electrostatic RF MEMS metal contact switch based on a tethered cantilever topology. The use of tethers results in a design that has low sensitivity to stress gradients, biaxial stresses, and temperature. A switch with a footprint of 160x190 [mu]m2 and based on a surface-micromachined 8-[mu]m thick gold cantilever with a Au/Ru contact is implemented on a high-resistivity silicon substrate and results in a total contact force of 0.8-1.2 mN at 80-90 V, a restoring force of 0.5 mN, a pull-in voltage of 61 V, an up-state capacitance of 24 fF, and an actuation time of 6.4 [mu]s. The device achieves a switch resistance of 2.4±1.4 Ohms to 1.8±0.6 Ohms at 90-100 V in open laboratory environments (unpackaged). Chapter 3 presents a temperature stable metal-contact RF MEMS switch capable of handling>5W of RF power (a second generation of the tethered cantilever topology). The device achieves 0.7 - 1.5 mN of contact force for actuation voltages of 80 - 90 V, with a restoring force of 0.63 mN. Furthermore, the device is insensitive to stress effects and temperature. Temperature measurements showed excellent thermal stability - no deflection in the beam, and a change in pull-in voltage of only 4 V from 25-125°C. The switch was tested under prolonged (>24 hrs) high-power RF conditions with excellent reliability. Chapter 4 presents a compact RF MEMS metal-contact switch based on a tethered cantilever topology and orthogonal anchors. The switch is a "medium-force" design capable of achieving 0.38-0.72 mN of contact force for actuation voltages of 90-100 V and a restoring force of 0.46 mN (simulated) in a 120160 um^2 area. The pull-in and release voltages are 75 V and 70 V, respectively. In the down-state, the switch resistance is 1-2 with a Au/Ru hybrid contact. In the up-state, the capacitance is 16 fF, resulting in an isolation of 20 dB at 10 GHz and 9 dB at 40 GHz for an SPST configuration. Furthermore, the switch demonstrated a reliability of>10 million cycles (1 W, cold switching) and a power handling of>5 W. For a series/shunt configuration, the switch achieves an isolation of 55 dB at 10 GHz and 35 dB at 40 GHz. Compact SP4T and SP6T switching networks are also implemented. The SP4T is 850x530 [mu]m2 (850x650 [mu]m2 with bias pads); the SP6T is 850x730 [mu]m2 (850x855 [mu]m2 with bias pads). Both designs achieve an isolation ~36 dB and insertion loss 0.3 dB at 3 GHz. Chapter 5 presents a mN-level contact and restoring force RF MEMS metal-contact switch exhibiting high reliability, high linearity, and high power handing for DC-40 GHz applications. The device, which is insensitive to stress and temperature effects, achieves 1.2-1.5 mN of contact force (per contact) from 80-90 V and 1.0 mN of restoring force (per contact). The up-state capacitance is 8 fF, resulting in an isolation of -46, -31, and -14 dB at 1, 6, and 40 GHz, respectively. Measured results show switch resistances of 1-2 Ohms and a reliability of100 million cycles at 2-5Wunder cold-switching at 100 mW under hot-switching conditions, in an unpackaged and standard laboratory environment. Furthermore, the device was tested under prolonged hold-down conditions and demonstrated excellent RF power handling (>10 W) and DC current handling (>1 A) capability. Finally, SP4T and SP6T switching networks implemented with the metal-contact switch are demonstrated.
Book Synopsis MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications by : A. R. Jha
Download or read book MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications written by A. R. Jha and published by CRC Press. This book was released on 2008-04-08 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applicat
Book Synopsis Insulator Charging in RF MEMS Capacitive Switches by : Jay F. Kucko
Download or read book Insulator Charging in RF MEMS Capacitive Switches written by Jay F. Kucko and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advanced Microwave and Millimeter Wave Technologies by : Moumita Mukherjee
Download or read book Advanced Microwave and Millimeter Wave Technologies written by Moumita Mukherjee and published by BoD – Books on Demand. This book was released on 2010-03-01 with total page 656 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is planned to publish with an objective to provide a state-of-the-art reference book in the areas of advanced microwave, MM-Wave and THz devices, antennas and systemtechnologies for microwave communication engineers, Scientists and post-graduate students of electrical and electronics engineering, applied physicists. This reference book is a collection of 30 Chapters characterized in 3 parts: Advanced Microwave and MM-wave devices, integrated microwave and MM-wave circuits and Antennas and advanced microwave computer techniques, focusing on simulation, theories and applications. This book provides a comprehensive overview of the components and devices used in microwave and MM-Wave circuits, including microwave transmission lines, resonators, filters, ferrite devices, solid state devices, transistor oscillators and amplifiers, directional couplers, microstripeline components, microwave detectors, mixers, converters and harmonic generators, and microwave solid-state switches, phase shifters and attenuators. Several applications area also discusses here, like consumer, industrial, biomedical, and chemical applications of microwave technology. It also covers microwave instrumentation and measurement, thermodynamics, and applications in navigation and radio communication.
Book Synopsis Advanced Millimeter-wave Technologies by : Duixian Liu
Download or read book Advanced Millimeter-wave Technologies written by Duixian Liu and published by John Wiley & Sons. This book was released on 2009-03-03 with total page 850 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explains one of the hottest topics in wireless and electronic devices community, namely the wireless communication at mmWave frequencies, especially at the 60 GHz ISM band. It provides the reader with knowledge and techniques for mmWave antenna design, evaluation, antenna and chip packaging. Addresses practical engineering issues such as RF material evaluation and selection, antenna and packaging requirements, manufacturing tolerances, antenna and system interconnections, and antenna One of the first books to discuss the emerging research and application areas, particularly chip packages with integrated antennas, wafer scale mmWave phased arrays and imaging Contains a good number of case studies to aid understanding Provides the antenna and packaging technologies for the latest and emerging applications with the emphases on antenna integrations for practical applications such as wireless USB, wireless video, phase array, automobile collision avoidance radar, and imaging
Book Synopsis Fundamental Research in Electrical Engineering by : Shahram Montaser Kouhsari
Download or read book Fundamental Research in Electrical Engineering written by Shahram Montaser Kouhsari and published by Springer. This book was released on 2018-07-25 with total page 1017 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume presents the selected papers of the First International Conference on Fundamental Research in Electrical Engineering, held at Khwarazmi University, Tehran, Iran in July, 2017. The selected papers cover the whole spectrum of the main four fields of Electrical Engineering (Electronic, Telecommunications, Control, and Power Engineering).
Book Synopsis Lifetime Characterization of Capacitive Power RF MEMS Switches by :
Download or read book Lifetime Characterization of Capacitive Power RF MEMS Switches written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: RF MEMS switches provide a low-cost, high performance solution to many RF/microwaveapplications and these switches will be importantbuilding blocks for designing phase shifters, switchedfilters and reflector array antennas for military andcommercial markets. In this paper, progress in characterizing of THALEScapacitive MEMS devices under high RF power ispresented. The design, fabrication and testing ofcapacitive RF MEMS switches for microwave/mm- waveapplications on high-resistivity silicon substrate ispresented .The switches tested demonstrated powerhandling capabilities of 1W (30 dbm) for continuous RFpower. The reliability of these switches was tested atvarious power levels indicating that under continuousRF power. In addition a description of the powerfailures and their associated operating conditions ispresentedThe PC-based test stations to cycle switches and measurelifetime under DC and RF loads have been developed. Best-case lifetimes of 1010 cycles have been achieved inseveral switches from different lots under 30 dbm RFpower.
Book Synopsis Handbook of RF, Microwave, and Millimeter-wave Components by : Leonid A. Belov
Download or read book Handbook of RF, Microwave, and Millimeter-wave Components written by Leonid A. Belov and published by Artech House. This book was released on 2012 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique and comprehensive resource offers you a detailed treatment of the operations principles, key parameters, and specific characteristics of active and passive RF, microwave, and millimeter-wave components. The book covers both linear and nonlinear components that are used in a wide range of application areas, from communications and information sciences, to avionics, space, and military engineering. This practical book presents descriptions and clear examples and of the best materials and products used in the field, including laminates, prepregs, substrates; microstrip, coaxial and waveguide transmission lines; fixed and rotating connectors; matching and adjusting elements; frequency filters; phase shifters; and ferrite gates and circulators. Moreover, the book offers you in-depth discussions on microwave switches and matrices, including MEMS technology, solid state and vacuum amplifiers, mixers, modulators and demodulators, and oscillation sources. You also find coverage of the stable frequency synthesizer structure and sources of modulated or noisy signals. Greatly adding to the usefulness of this volume is the inclusion of more than 700 Internet addresses of manufacturers from across the globe.
