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Realization And Characterization Of Microcrystalline Silicon Thin Film Transistors
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Book Synopsis Realization and Characterization of Microcrystalline Silicon Thin-film Transistors by : Kah Yoong Chan
Download or read book Realization and Characterization of Microcrystalline Silicon Thin-film Transistors written by Kah Yoong Chan and published by . This book was released on 2008 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin-film transistors (TFTs) are the key element in the low cost large area electronics such as flat panel displays and sensor arrays. TFTs based on amorphous and polycrystalline silicon are the current industrial standard. However, amorphous silicon transistors are limited by the low charge carrier mobility and device stability, whereas polycrystalline silicon transistors are still relatively expensive due to the needs for additional annealing and/or crystallization steps. Microcrystalline silicon transistors have recently emerged to combine the distinctive advantages of both technologies with the exclusion of their disadvantages. In this thesis, transistors with distinctively high charge carrier mobilities exceeding 50 cm2/Vs were realized, which are more than 50 times higher than amorphous silicon transistors. Several aspects were investigated following the realization of transistors with high charge carrier mobility. These include the correlation of the material properties with the device properties, the influence of contact effects and post-fabrication thermal annealing on the transistor performances. In addition to these, inverter circuits based on microcrystalline silicon transistors were realized and the influence of the transistor parameters on the performance of the inverters were investigated.
Book Synopsis Experimental Characterization and Parameter Extraction for Amorphous Silicon Thin-film Transistors by : Arokia Nathan
Download or read book Experimental Characterization and Parameter Extraction for Amorphous Silicon Thin-film Transistors written by Arokia Nathan and published by . This book was released on 2002 with total page 74 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Modeling and Characterization of Amorphous Silicon Thin Film Transistors by : Shantanu A. Bhalerao
Download or read book Modeling and Characterization of Amorphous Silicon Thin Film Transistors written by Shantanu A. Bhalerao and published by . This book was released on 2008 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Amorphous and Microcrystalline Silicon Technology - 1997: Volume 467 by : Michael Hack
Download or read book Amorphous and Microcrystalline Silicon Technology - 1997: Volume 467 written by Michael Hack and published by Materials Research Society. This book was released on 1997-12-03 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: While the original focus of this long-standing series from the Materials Research Society was on hydrogenated amorphous silicon, the symposia have now expanded to incorporate microcrystalline silicon. The two, in fact, are very closely connected since the latter material can be grown by making comparatively small changes to the deposition conditions for amorphous silicon. This book offers an interesting variety of papers on deposition techniques, materials properties, characterization methods and devices - nearly all focused on thin-film forms of hydrogenated silicon. Topics include: Staebler-Wronski and fundamental defect studies in amorphous silicon; the story of hydrogen in amorphous silicon; photoelectric properties of amorphous silicon; deposition and properties of microcrystalline silicon; deposition studies for amorphous silicon and related materials; solar cells; thin-film transistors and sensors and novel device concepts.
Book Synopsis Advanced Processes and Characterization of Amorphous Silicon Thin Film Transistors by : Tong Li
Download or read book Advanced Processes and Characterization of Amorphous Silicon Thin Film Transistors written by Tong Li and published by . This book was released on 2000 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis A Study on Device Characterization of Polycrystalline-silicon Thin-film Transistors by : 裕幸·池田
Download or read book A Study on Device Characterization of Polycrystalline-silicon Thin-film Transistors written by 裕幸·池田 and published by . This book was released on 2010 with total page 187 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Device and Material Characterization and Analytic Modeling of Amorphous Silicon Thin Film Transistors by : Holly C. Slade
Download or read book Device and Material Characterization and Analytic Modeling of Amorphous Silicon Thin Film Transistors written by Holly C. Slade and published by . This book was released on 1997 with total page 466 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Nanocrystalline and Amorphous Silicon Thin Film Transistors Deposited by Microwave Plasma Electron Cyclotron Resonance Chemical Vapor Deposition by : Lihong Teng
Download or read book Nanocrystalline and Amorphous Silicon Thin Film Transistors Deposited by Microwave Plasma Electron Cyclotron Resonance Chemical Vapor Deposition written by Lihong Teng and published by . This book was released on 2003 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fabrication and Characterization of Low Temperature Polycrystalline Silicon Thin Film Transistors by : Anand T. Krishnan
Download or read book Fabrication and Characterization of Low Temperature Polycrystalline Silicon Thin Film Transistors written by Anand T. Krishnan and published by . This book was released on 2000 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Characterization and Modeling of Short Channel Effects in Polycrystalline Silicon Thin-film Transistors by :
Download or read book Characterization and Modeling of Short Channel Effects in Polycrystalline Silicon Thin-film Transistors written by and published by . This book was released on 2003 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fabrication and Characterization of Small-grain Silicon-based Thin-film Transistors by : Meng Zhang
Download or read book Fabrication and Characterization of Small-grain Silicon-based Thin-film Transistors written by Meng Zhang and published by . This book was released on 2016 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis The Characterization and Simulation of Polysilicon Thin Film Transistors by : Yang Mo
Download or read book The Characterization and Simulation of Polysilicon Thin Film Transistors written by Yang Mo and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Transistors: Polycrystalline silicon thin film transistors by : Yue Kuo
Download or read book Thin Film Transistors: Polycrystalline silicon thin film transistors written by Yue Kuo and published by Kluwer Academic Pub. This book was released on 2004 with total page 505 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Book Synopsis Microcrystalline Silicon Thin Film Transistors Made by Plasma Enhanced Chemical Vapour Deposition by : M. W. D. Froggatt
Download or read book Microcrystalline Silicon Thin Film Transistors Made by Plasma Enhanced Chemical Vapour Deposition written by M. W. D. Froggatt and published by . This book was released on 1998 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Characterization and Modeling of Short Channel Polysilicon Thin Film Transistors by : Mark D. Jacunski
Download or read book Characterization and Modeling of Short Channel Polysilicon Thin Film Transistors written by Mark D. Jacunski and published by . This book was released on 1997 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fabrication and Analysis of Bottom Gate Nanocrystalline Silicon Thin Film Transistors by : Kyung-Wook Shin
Download or read book Fabrication and Analysis of Bottom Gate Nanocrystalline Silicon Thin Film Transistors written by Kyung-Wook Shin and published by . This book was released on 2008 with total page 71 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film transistors (TFTs) have brought prominent growth in both variety and utility of large area electronics market over the past few decades. Nanocrystalline silicon (nc-Si:H) TFTs have attracted attention recently, due to high-performance and low-cost, as an alternative of amorphous silicon (a-Si:H) and polycrystalline silicon (poly-Si) TFTs. The nc-Si:H TFTs has higher carrier mobility and better device stability than a-Si:H TFTs while lower manufacturing cost than poly-Si TFTs. However, current nc-Si:TFTs have several challenging issues on materials and devices, on which this thesis focuses. In the material study, the gate quality silicon nitride (a-SiNx) films and doped nc-Si:H contacts based on conventional plasma enhanced chemical vapor deposition (PECVD) are investigated. The feasibility of a-SiNx on TFT application is discussed with current-voltage (I-V)/capacitance-voltage(C-V) measurement and Fourier Transform Infrared Spectroscopy (FTIR) results which demonstrate 4.3 MV/cm, relative permittivity of 6.15 and nitrogen rich composition. The doped nc-Si:H for contact layer of TFTs is characterized with Raman Spectroscopy and I-V measurements to reveal 56 % of crystalinity and 0.42 S/cm of dark conductivity. Inverted staggered TFT structure is fabricated for nc-Si:H TFT device research using fully wet etch fabrication process which requires five lithography steps. The process steps are described in detail as well as adaptation of the fabrication process to a backplane fabrication for direct conversion X-ray imagers. The modification of TFT process for backplane fabrication involves two more lithography steps for mushroom electrode formation while other pixel components is incorporated into the five lithography step TFT process. The TFTs are electrically characterized demonstrating 7.22 V of threshold voltage, 0.63 S/decade of subthreshold slope, 0.07 cm2/V-s of field effect mobility, and 106 of on/off ratio. The transfer characteristics of TFTs reveal a severe effect of parasitic resistance which is induced from channel layer itself, a contact between channel layer and doped nc-Si:H contact layer, the resistance of doped nc-Si:H contact layer, and a contact between the doped nc-Si:H layer and source/drain metal electrodes. The parasitic resistance effect is investigated using numerical simulation method by various parasitic resistances, channel length of the TFT, and intrinsic properties of nc-Si:H channel layer. It reveals the parasitic resistance effect become severe when the channel is short and has better quality, therefore, several further research topics on improving contact nc-Si:H quality and process adjustment are required.
Book Synopsis Physics, Technology and Characterization of Polysilicon Thin Film Transistors with Low Leakage Current Performance by : Su-Heng Lin
Download or read book Physics, Technology and Characterization of Polysilicon Thin Film Transistors with Low Leakage Current Performance written by Su-Heng Lin and published by . This book was released on 1995 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt:
