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Realisation Et Caracterisation De Transistors Mos A Base De Nanofils Verticaux En Silicium
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Book Synopsis Réalisation et caractérisation de transistors MOS à base de nanofils verticaux en silicium by : Youssouf Guerfi
Download or read book Réalisation et caractérisation de transistors MOS à base de nanofils verticaux en silicium written by Youssouf Guerfi and published by . This book was released on 2015 with total page 165 pages. Available in PDF, EPUB and Kindle. Book excerpt: Afin de poursuivre la réduction d'échelle des transistors MOS, l'industrie des semiconducteurs a su anticiper les limitations de la miniaturisation par l'introduction de nouveaux matériaux ou de nouvelles architectures. L'avènement des structures à triples grilles (FinFET) a permis de maitriser les effets canaux courts et poursuivre les efforts de miniaturisation (nœud technologique 14 nm en 2014). Le cas ultime pour le contrôle électrostatique de la grille sur le canal est donné par une grille entourant totalement le canal du dispositif. A cet effet, un transistor à nanofil à grille entourante est considéré comme la structure la plus adaptée pour les nœuds technologiques en dessous de 7 nm. Au cours de cette thèse, un procédé de réalisation large échelle de transistors MOSFET miniaturisés à base de nanofils verticaux en silicium a été développé. Tout d'abord, les nanofils verticaux ont été réalisés par une approche descendante via le transfert par gravure d'un masque de résine en Hydrogène Silsesquioxane (HSQ), réalisé par lithographie électronique à basse tension d'accélération. Une stratégie de dessin inédite dite "en étoile " a été développée pour définir des nanofils parfaitement circulaires. Les nanofils en Si sont obtenus par gravure plasma puis amincis par oxydation humide sacrificielle. Ce procédé permet d'obtenir des nanofils verticaux en Si avec des parois parfaitement anisotropes, une parfaite reproductibilité et un rendement maximal. L'implémentation des MOSFETs sur les réseaux nanofils a été effectuée par l'ingénierie successive de couches minces nanométriques (conductrices et diélectriques). Dans ce cadre, un procédé innovant de réalisation de couches d'isolations en HSQ par gravure chimique contrôlée a démontré une excellente planéité associée à une rugosité de surface inférieure à 2 nm. Enfin, un procédé utilisant la photolithographie UV conventionnelle a été développé pour réaliser le transistor de longueur de grille nanométrique. Ces dispositifs ont démontré d'excellentes performances électriques avec des courants de conduction supérieurs à 600 μA/μm et une excellente maîtrise des effets de canaux courts (pente sous le seuil de 95 mV/dec et DIBL à 25 mV/V) malgré l'extrême miniaturisation de la longueur de grille (15 nm). Enfin, nous présentons une première preuve de concept d'un inverseur CMOS à base de cette technologie à nanofils verticaux.
Book Synopsis Réalisation et caractérisation de dispositifs MOSFET nanométriques à base de réseaux denses de nanofils verticaux en silicium by : Xiang-Lei Han
Download or read book Réalisation et caractérisation de dispositifs MOSFET nanométriques à base de réseaux denses de nanofils verticaux en silicium written by Xiang-Lei Han and published by . This book was released on 2011 with total page 173 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dans cette thèse, un procédé innovant de transistor implémenté sur des réseaux denses de nanofils (NFs) verticaux est proposée comme une solution potentielle pour des composants très avancés.Dans une première partie, des masques de résine formant des réseaux des nanopiliers verticaux sont fabriqués par lithographie électronique sur une résine inorganique. Ces masques sont transférés dans le substrat de Si par gravure ionique réactive avec des conditions optimisées pour réaliser des réseaux ultradense de NFs verticaux avec un diamètre decananométrique et une excellente anisotropie. Enfin, le phénomène d’effondrement des nanostructures induit par les forces de capillarité a été précisément étudié.Dans une deuxième partie, les phénomènes d’oxydation et de siliciuration de nanostructures sont observés et analysés systématiquement. En utilisant l’autolimitation de l’oxydation thermique, des NFs avec un diamètre ultrafin sont réalisés tout en améliorant l’anisotropie des profils de NFs et en réduisant la rugosité de surface.Une troisième partie débute par la réalisation et caractérisation de nanocontacts implémentés sur des structures à 2 terminaux à base de réseaux de NFs verticaux où une parfaite reproductibilité des caractéristiques IV est démontrée quand un grand nombre de NFs sont considérés par rapport à un NF unique. De plus, l’impact de la surface sur la conduction dans le NF est discuté. Enfin, des transistors à base de réseaux denses de NFs verticaux avec une grille entourante sont réalisés et démontre qu’ils sont une structure efficace pour lutter contre les effets canaux courts.
Book Synopsis Semiconductor Physical Electronics by : Sheng S. Li
Download or read book Semiconductor Physical Electronics written by Sheng S. Li and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: The purpose of this book is to provide the reader with a self-contained treatment of fundamen tal solid state and semiconductor device physics. The material presented in the text is based upon the lecture notes of a one-year graduate course sequence taught by this author for many years in the ·Department of Electrical Engineering of the University of Florida. It is intended as an introductory textbook for graduate students in electrical engineering. However, many students from other disciplines and backgrounds such as chemical engineering, materials science, and physics have also taken this course sequence, and will be interested in the material presented herein. This book may also serve as a general reference for device engineers in the semiconductor industry. The present volume covers a wide variety of topics on basic solid state physics and physical principles of various semiconductor devices. The main subjects covered include crystal structures, lattice dynamics, semiconductor statistics, energy band theory, excess carrier phenomena and recombination mechanisms, carrier transport and scattering mechanisms, optical properties, photoelectric effects, metal-semiconductor devices, the p--n junction diode, bipolar junction transistor, MOS devices, photonic devices, quantum effect devices, and high speed III-V semiconductor devices. The text presents a unified and balanced treatment of the physics of semiconductor materials and devices. It is intended to provide physicists and mat erials scientists with more device backgrounds, and device engineers with a broader knowledge of fundamental solid state physics.
Book Synopsis Advanced Power MOSFET Concepts by : B. Jayant Baliga
Download or read book Advanced Power MOSFET Concepts written by B. Jayant Baliga and published by Springer Science & Business Media. This book was released on 2010-06-26 with total page 573 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the last decade many new concepts have been proposed for improving the performance of power MOSFETs. The results of this research are dispersed in the technical literature among journal articles and abstracts of conferences. Consequently, the information is not readily available to researchers and practicing engineers in the power device community. There is no cohesive treatment of the ideas to provide an assessment of the relative merits of the ideas. "Advanced Power MOSFET Concepts" provides an in-depth treatment of the physics of operation of advanced power MOSFETs. Analytical models for explaining the operation of all the advanced power MOSFETs will be developed. The results of numerical simulations will be provided to give additional insight into the device physics and validate the analytical models. The results of two-dimensional simulations will be provided to corroborate the analytical models and give greater insight into the device operation.
Book Synopsis The Dopant Density and Temperature Dependence of Electron Mobility and Resistivity in N-type Silicon by : Sheng S. Li
Download or read book The Dopant Density and Temperature Dependence of Electron Mobility and Resistivity in N-type Silicon written by Sheng S. Li and published by . This book was released on 1977 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Modern Surface Organometallic Chemistry by : Jean-Marie Basset
Download or read book Modern Surface Organometallic Chemistry written by Jean-Marie Basset and published by John Wiley & Sons. This book was released on 2009-07-10 with total page 725 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering everything from the basics to recent applications, this monograph represents an advanced overview of the field. Edited by internationally acclaimed experts respected throughout the community, the book is clearly divided into sections on fundamental and applied surface organometallic chemistry. Backed by numerous examples from the recent literature, this is a key reference for all chemists.
Download or read book ZnO Thin Films written by Paolo Mele and published by . This book was released on 2019 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Zinc oxide (ZnO) is an n-type semiconductor with versatile applications such as optical devices in ultraviolet region, piezoelectric transducers, transparent electrode for solar cells and gas sensors. This book "ZnO Thin Films: Properties, Performance and Applications" gives a deep insight in the intriguing science of zinc oxide thin films. It is devoted to cover the most recent advances and reviews the state of the art of ZnO thin films applications involving energy harvesting, microelectronics, magnetic devices, photocatalysis, photovoltaics, optics, thermoelectricity, piezoelectricity, electrochemistry, temperature sensing. It serves as a fundamental information source on the techniques and methodologies involved in zinc oxide thin films growth, characterization, post-deposition plasma treatments and device processing. This book will be invaluable to the experts to consolidate their knowledge and provide insight and inspiration to beginners wishing to learn about zinc oxide thin films.
Book Synopsis Graphite Intercalation Compounds II by : Hartmut Zabel
Download or read book Graphite Intercalation Compounds II written by Hartmut Zabel and published by Springer Science & Business Media. This book was released on 2013-03-07 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt: The research on graphite intercalation compounds often acts as a forerunner for research in other sciences. For instance, the concept of staging, which is fundamental to graphite intercalation compounds, is also relevant to surface science in connection with adsorbates on metal surfaces and to high-temperature superconducting oxide layer materials. Phonon-folding and mode-splitting effects are not only basic to graphite intercalation compounds but also to polytypical systems such as supercon ductors, superlattices, and metal and semiconductor superlattices. Charge transfer effects playa tremendously important role in many areas, and they can be most easily and fundamentally studied with intercalated graphite. This list could be augmented with many more examples. The important message, however, is that graphite inter calation compounds represent a class of materials that not only can be used for testing a variety of condensed-matter concepts, but also stimulates new ideas and approaches. This volume is the second of a two-volume set. The first volume addressed the structural and dynamical aspects of graphite intercalation compounds, together with the chemistry and intercalation of new compounds. This second volume provides an up-to-date status report from expert researchers on the transport, magnetic, elec tronic and optical properties ofthis unique class of materials. The band-structure cal culations of the various donor and acceptor compounds are discussed in depth, and detailed reviews are provided ofthe experimental verification ofthe electronic struc ture in terms of their photoemission spectra and optical properties.
Book Synopsis International Humanitarian Law and Terrorism by : Andrea Bianchi
Download or read book International Humanitarian Law and Terrorism written by Andrea Bianchi and published by Hart Publishing. This book was released on 2011-07-01 with total page 407 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book carefully and thoroughly analyses the legal questions raised by the phenomenon of terrorism, and past and recent efforts to fight it, from the perspective of international humanitarian law (IHL). The objective is to substantially contribute to a better understanding of the issues surrounding the content and applicability of IHL as it applies to terrorism as well as to analyse and contextualise the current debates on these controversial and critically important questions. While due heed is paid to doctrinal debates, particular emphasis is placed on the practice of social actors, particularly, although not exclusively, States. The analysis of their actual conduct as well as their expectations about the interpretation and application of the law is crucial to establishing an interpretive consensus on when and how IHL is relevant to regulate acts of terrorism. The approach of the book is analytical and discursive, rather than prescriptive. Thus the reader will find the relevant rules of IHL and other legal regimes as regards terrorism, but also the debates over their application, the contradictions in State practice and the impact these may have upon IHL's evolution and implementation. The aim is to provide legal practitioners, as well as those in military, political and academic circles, with a useful reference point. Hopefully the book will also prove useful to other readers who will find its content and easy-to-read style an encouragement to getting acquainted with a topical subject, traditionally thought to be reserved for legal specialists. This book was cited with approval by the US Court of Appeals in Salim Ahmed Hamdan v United States of America, 16th October 2012
Book Synopsis Cosmology of the Early Universe by : Lizhi Fang
Download or read book Cosmology of the Early Universe written by Lizhi Fang and published by . This book was released on 1984 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Manual of Forensic Quotations by : Leon Mead
Download or read book Manual of Forensic Quotations written by Leon Mead and published by . This book was released on 1903 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Model Family Code by : Ingeborg H. Schwenzer
Download or read book Model Family Code written by Ingeborg H. Schwenzer and published by . This book was released on 2006 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Model Family Code aims at contributing to future discussion on the harmonization, and hopefully even unification of family law. The Model Family Code has attempted to address all aspects of Partnerships and of Parents and Children, which constitute the core areas of any family law. It is elaborated from a global, rather than a European perspective
Author :Thierry J.-L. Courvoisier Publisher :Springer Science & Business Media ISBN 13 :3642309690 Total Pages :333 pages Book Rating :4.6/5 (423 download)
Book Synopsis High Energy Astrophysics by : Thierry J.-L. Courvoisier
Download or read book High Energy Astrophysics written by Thierry J.-L. Courvoisier and published by Springer Science & Business Media. This book was released on 2012-10-03 with total page 333 pages. Available in PDF, EPUB and Kindle. Book excerpt: High-energy astrophysics has unveiled a Universe very different from that only known from optical observations. It has revealed many types of objects in which typical variability timescales are as short as years, months, days, and hours (in quasars, X-ray binaries, etc), and even down to milli-seconds in gamma ray bursts. The sources of energy that are encountered are only very seldom nuclear fusion, and most of the time gravitation, a paradox when one thinks that gravitation is, by many orders of magnitude, the weakest of the fundamental interactions. The understanding of these objects' physical conditions and the processes revealed by high-energy astrophysics in the last decades is nowadays part of astrophysicists' culture, even of those active in other domains of astronomy. This book evolved from lectures given to master and PhD students at the University of Geneva since the early 1990s. It aims at providing astronomers and physicists intending to be active in high-energy astrophysics a broad basis on which they should be able to build the more specific knowledge they will need. While in the first part of the book the physical processes are described and derived in detail, the second part studies astrophysical objects in which high-energy astrophysics processes are crucial. This two-pronged approach will help students recognise physical processes by their observational signatures in contexts that may differ widely from those presented here.
Book Synopsis The Spoken Language Translator by : Manny Rayner
Download or read book The Spoken Language Translator written by Manny Rayner and published by Cambridge University Press. This book was released on 2000-08-28 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the Spoken Language Translator (SLT), one of the first major projects in the area of automatic speech translation.