Rapid Thermal Processing of III-V Compound Semiconductors with Application to the Fabrication of Microwave Devices

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ISBN 13 :
Total Pages : 52 pages
Book Rating : 4.:/5 (227 download)

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Book Synopsis Rapid Thermal Processing of III-V Compound Semiconductors with Application to the Fabrication of Microwave Devices by : James F. Gibbons

Download or read book Rapid Thermal Processing of III-V Compound Semiconductors with Application to the Fabrication of Microwave Devices written by James F. Gibbons and published by . This book was released on 1988 with total page 52 pages. Available in PDF, EPUB and Kindle. Book excerpt: This research was focused on establishing better techniques for surface doping of III-V semiconductors. The GaAs doping techniques investigated in this work include Si surface diffusions using a solid source, ion implantation following by rapid thermal annealing, and both solid source and vapor phase Zn diffusions. New models for Si diffusion/electrical activation, and Zn diffusion have been developed and implementated in computer simulations. Using these rapid thermal diffusion techniques, it was possible to demonstrate that shallow n+ and p+ layers can be produced reliably while retaining excellent surface morphology. In addition, an improved understanding of the annealing of defects and electrical activation of dopants in ion implanted, amorphized GaAs has been achieved. Keywords: Thermal processing; Semiconductors; Compound semiconductors; Surface doping; Microwave devices; Silicon diffusion; Zinc diffusion; Gallium arsenide. (jhd).

Rapid Thermal Processing for Future Semiconductor Devices

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Publisher : Elsevier
ISBN 13 : 0080540260
Total Pages : 161 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Rapid Thermal Processing for Future Semiconductor Devices by : H. Fukuda

Download or read book Rapid Thermal Processing for Future Semiconductor Devices written by H. Fukuda and published by Elsevier. This book was released on 2003-04-02 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.

Ion Implantation and Laser Processing of III-V Compound Semiconductors with Applications to the Fabrication of Microwave Devices

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ISBN 13 :
Total Pages : 25 pages
Book Rating : 4.:/5 (227 download)

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Book Synopsis Ion Implantation and Laser Processing of III-V Compound Semiconductors with Applications to the Fabrication of Microwave Devices by : J. F. Gibbons

Download or read book Ion Implantation and Laser Processing of III-V Compound Semiconductors with Applications to the Fabrication of Microwave Devices written by J. F. Gibbons and published by . This book was released on 1984 with total page 25 pages. Available in PDF, EPUB and Kindle. Book excerpt: An exploration of alternate doping sources has been carried out with a particular interest in ultra thin film techniques such as would be expected to be of significance in integrated circuit applications of GaAs. Two major studies have been conducted, one pertaining to silicon diffusion in GaAs using a rapid thermal processing cycle, and another concerned with the monolayer surface doping of GaAs that can be obtained from plated zinc sources. This report contains the results of these studies.

Research in Progress

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ISBN 13 :
Total Pages : 604 pages
Book Rating : 4.:/5 (334 download)

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Book Synopsis Research in Progress by :

Download or read book Research in Progress written by and published by . This book was released on 1984 with total page 604 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advances in Rapid Thermal and Integrated Processing

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Publisher : Springer Science & Business Media
ISBN 13 : 9401587116
Total Pages : 568 pages
Book Rating : 4.4/5 (15 download)

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Book Synopsis Advances in Rapid Thermal and Integrated Processing by : F. Roozeboom

Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.

Demand Bibliography

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ISBN 13 :
Total Pages : 44 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Demand Bibliography by :

Download or read book Demand Bibliography written by and published by . This book was released on 1989 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Scientific and Technical Aerospace Reports

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Publisher :
ISBN 13 :
Total Pages : 702 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 702 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Compound Semiconductor Devices

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Publisher : John Wiley & Sons
ISBN 13 : 3527611770
Total Pages : 188 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Compound Semiconductor Devices by : Kenneth A. Jackson

Download or read book Compound Semiconductor Devices written by Kenneth A. Jackson and published by John Wiley & Sons. This book was released on 2008-11-21 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt: Compound Semiconductor Devices provides a comprehensive insight into today ́s standard technologies, covering the vast range of semiconductor products and their possible applications. The materials covered runs from the basics of conventional semiconductor technology through standard,power and opto semiconductors, to highly complex memories and microcontrollers and the special devices and modules for smartcards, automotive electronics, consumer electronics and telecommunications. Some chapters are devoted to the production of semiconductor components and their use in electronic systems as well as to quality management. The book offers students and users a unique overview of technology, architecture and areas of application of semiconductor products.

Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

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Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038131733
Total Pages : 448 pages
Book Rating : 4.0/5 (381 download)

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Book Synopsis Rapid Thermal Processing and beyond: Applications in Semiconductor Processing by : Wielfried Lerch

Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch and published by Trans Tech Publications Ltd. This book was released on 2008-03-24 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

Rapid Thermal Processing

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Publisher : Elsevier Science
ISBN 13 : 9780080436128
Total Pages : 0 pages
Book Rating : 4.4/5 (361 download)

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Book Synopsis Rapid Thermal Processing by : A. Slaoui

Download or read book Rapid Thermal Processing written by A. Slaoui and published by Elsevier Science. This book was released on 1999-03-17 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. The biggest advantage of RTP is that it eliminates the long-ramp-up and ramp-down times associated with furnaces, enabling a significant reduction in the thermal budget. Today, RTP is in production use for source/drain implant annealing, contact alloying, formation of refractory nitrides and silicides and thin gate dielectric (oxide) formation. The aim of Symposium I was to provide an overview of the latest information on research and development in the different topics cited above. The potential applications of RTP in new areas like large area devices such as flat planel displays and solar cells has to be investigated. About 30 papers were presented in this symposium. The contributions of most interest involved modelling and control, junctions formation and thermal oxidation, deposition and recrystallisation and silicide formations. However, the range of topics and the intent to focus on underlying, fundamental issues like dopant diffusion in silicon from solid sources, strain relaxation and photonic effects, nucleation as well as applications to magnetic films and solar cells devices.

Circuits and Applications Using Silicon Heterostructure Devices

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Publisher : CRC Press
ISBN 13 : 1351834754
Total Pages : 391 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Circuits and Applications Using Silicon Heterostructure Devices by : John D. Cressler

Download or read book Circuits and Applications Using Silicon Heterostructure Devices written by John D. Cressler and published by CRC Press. This book was released on 2018-10-03 with total page 391 pages. Available in PDF, EPUB and Kindle. Book excerpt: No matter how you slice it, semiconductor devices power the communications revolution. Skeptical? Imagine for a moment that you could flip a switch and instantly remove all the integrated circuits from planet Earth. A moment’s reflection would convince you that there is not a single field of human endeavor that would not come to a grinding halt, be it commerce, agriculture, education, medicine, or entertainment. Life, as we have come to expect it, would simply cease to exist. Drawn from the comprehensive and well-reviewed Silicon Heterostructure Handbook, this volume covers SiGe circuit applications in the real world. Edited by John D. Cressler, with contributions from leading experts in the field, this book presents a broad overview of the merits of SiGe for emerging communications systems. Coverage spans new techniques for improved LNA design, RF to millimeter-wave IC design, SiGe MMICs, SiGe Millimeter-Wave ICs, and wireless building blocks using SiGe HBTs. The book provides a glimpse into the future, as envisioned by industry leaders.

III–V Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 3642676111
Total Pages : 171 pages
Book Rating : 4.6/5 (426 download)

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Book Synopsis III–V Semiconductors by : Herbert C. Freyhardt

Download or read book III–V Semiconductors written by Herbert C. Freyhardt and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 171 pages. Available in PDF, EPUB and Kindle. Book excerpt: Springer-Verlag, Berlin Heidelberg, in conjunction with Springer-Verlag New York, is pleased to announce a new series: CRYSTALS Growth, Properties, and Applications The series presents critical reviews of recent developments in the field of crystal growth, properties, and applications. A substantial portion of the new series will be devoted to the theory, mechanisms, and techniques of crystal growth. Occasionally, clear, concise, complete, and tested instructions for growing crystals will be published, particularly in the case of methods and procedures that promise to have general applicability. Responding to the ever-increasing need for crystal substances in research and industry, appropriate space will be devoted to methods of crystal characterization and analysis in the broadest sense, even though reproducible results may be expected only when structures, microstructures, and composition are really known. Relations among procedures, properties, and the morphology of crystals will also be treated with reference to specific aspects of their practical application. In this way the series will bridge the gaps between the needs of research and industry, the pos sibilities and limitations of crystal growth, and the properties of crystals. Reports on the broad spectrum of new applications - in electronics, laser tech nology, and nonlinear optics, to name only a few - will be of interest not only to industry and technology, but to wider areas of applied physics as well and to solid state physics in particular. In response to the growing interest in and importance of organic crystals and polymers, they will also be treated.

Journal of Research of the National Bureau of Standards

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Publisher :
ISBN 13 :
Total Pages : 784 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Journal of Research of the National Bureau of Standards by : United States. National Bureau of Standards

Download or read book Journal of Research of the National Bureau of Standards written by United States. National Bureau of Standards and published by . This book was released on 1988 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Fabrication of SiGe HBT BiCMOS Technology

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Publisher : CRC Press
ISBN 13 : 1351834789
Total Pages : 321 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Fabrication of SiGe HBT BiCMOS Technology by : John D. Cressler

Download or read book Fabrication of SiGe HBT BiCMOS Technology written by John D. Cressler and published by CRC Press. This book was released on 2018-10-03 with total page 321 pages. Available in PDF, EPUB and Kindle. Book excerpt: SiGe HBT BiCMOS technology is the obvious groundbreaker of the Si heterostructures application space. To date virtually every major player in the communications electronics market either has SiGe up and running in-house or is using someone else’s SiGe fab as foundry for their designers. Key to this success lies in successful integration of the SiGe HBT and Si CMOS, with no loss of performance from either device. Filled with contributions from leading experts, Fabrication of SiGe HBT BiCMOS Technologies brings together a complete discussion of these topics into a single resource. Drawn from the comprehensive and well-reviewed Silicon Heterostructure Handbook, this volume examines the design, fabrication, and application of silicon heterostructure transistors. A novel aspect of this book the inclusion of numerous snapshot views of the industrial state-of-the-art for SiGe HBT BiCMOS technology. It has been carefully designed to provide a useful basis of comparison for the current status and future course of the global industry. In addition to the copious technical material and the numerous references contained in each chapter, the book includes easy-to-reference appendices on the properties of Si and Ge, the generalized Moll-Ross relations, integral charge-control relations, and sample SiGe HBT compact model parameters.

Government Reports Annual Index

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Publisher :
ISBN 13 :
Total Pages : 1428 pages
Book Rating : 4.:/5 (89 download)

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Book Synopsis Government Reports Annual Index by :

Download or read book Government Reports Annual Index written by and published by . This book was released on 1988 with total page 1428 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Short-time Thermal Processing for Si-based CMOS Devices

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Publisher : The Electrochemical Society
ISBN 13 : 9781566773966
Total Pages : 488 pages
Book Rating : 4.7/5 (739 download)

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Book Synopsis Advanced Short-time Thermal Processing for Si-based CMOS Devices by : Fred Roozeboom

Download or read book Advanced Short-time Thermal Processing for Si-based CMOS Devices written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2003 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Rapid Thermal and Other Short-time Processing Technologies III

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Publisher : The Electrochemical Society
ISBN 13 : 9781566773348
Total Pages : 500 pages
Book Rating : 4.7/5 (733 download)

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Book Synopsis Rapid Thermal and Other Short-time Processing Technologies III by : Paul J. Timans

Download or read book Rapid Thermal and Other Short-time Processing Technologies III written by Paul J. Timans and published by The Electrochemical Society. This book was released on 2002 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt: