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Author : John Stuart Kleine
Publisher :
ISBN 13 :
Total Pages : 122 pages
Book Rating : 4.:/5 (721 download)
Download or read book Rapid Thermal Annealing of Silicon Implanted Gallium Arsenide written by John Stuart Kleine and published by . This book was released on 1986 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Mark R. Wilson
Publisher :
ISBN 13 :
Total Pages : 442 pages
Book Rating : 4.:/5 (143 download)
Download or read book Rapid Thermal Annealing of Ion Implanted Layers in Gallium Arsenide written by Mark R. Wilson and published by . This book was released on 1986 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : LeNore Louise Lehman
Publisher :
ISBN 13 :
Total Pages : 168 pages
Book Rating : 4.:/5 (192 download)
Download or read book The Effects of Rapid Thermal Annealing on Gallium Arsenide Grown by MOCVD on Silicon Substrates written by LeNore Louise Lehman and published by . This book was released on 1988 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Victor E. Borisenko
Publisher : Springer Science & Business Media
ISBN 13 : 1489918043
Total Pages : 374 pages
Book Rating : 4.4/5 (899 download)
Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-11-22 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Author : Alison Schary
Publisher :
ISBN 13 :
Total Pages : 654 pages
Book Rating : 4.E/5 ( download)
Download or read book A Comparison of Epitaxial Layers and Undoped Semi-insulating Substrates for Use in Silicon Implantation Into Gallium Arsenide written by Alison Schary and published by . This book was released on 1988 with total page 654 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Walter George Opyd
Publisher :
ISBN 13 :
Total Pages : 164 pages
Book Rating : 4.:/5 (386 download)
Download or read book The Annealing and Solid Phase Epitaxy of Ion-implanted Gallium Arsenide by Rapid Thermal Processing written by Walter George Opyd and published by . This book was released on 1989 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chi-Chien Ho
Publisher :
ISBN 13 :
Total Pages : 186 pages
Book Rating : 4.:/5 (145 download)
Download or read book Rapid thermal Annealing of ion implanted silicon written by Chi-Chien Ho and published by . This book was released on 1986 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : David Hodul
Publisher :
ISBN 13 :
Total Pages : 544 pages
Book Rating : 4.:/5 (2 download)
Download or read book Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing: Volume 146 written by David Hodul and published by . This book was released on 1989-11-03 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author : Judy Lynn Hoyt
Publisher :
ISBN 13 :
Total Pages : 225 pages
Book Rating : 4.:/5 (386 download)
Download or read book The Application of Rapid Thermal Annealing to Arsenic Implanted Single-crystal and Polycrystalline Silicon written by Judy Lynn Hoyt and published by . This book was released on 1987 with total page 225 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Samuel C. Ling
Publisher :
ISBN 13 :
Total Pages : 15 pages
Book Rating : 4.:/5 (227 download)
Download or read book Radiation Damage and Annealing Effects Studies of Silicon-Implanted Gallium Arsenide written by Samuel C. Ling and published by . This book was released on 1982 with total page 15 pages. Available in PDF, EPUB and Kindle. Book excerpt: Radiation damage and low temperature (200 degrees-600 degrees C) annealing behavior of 120 keV silicon and selenium ion implants into gallium arsenide have been investigated by Rutherford Backscattering-Channeling and Transmission Electron Microscopy techniques. Lattice location studies of Si implants after high temperature annealing (850 degrees and 950 degrees C) have been conducted using Proton Induced X-Ray Emission method. (Author).
Author : P. Kordoš
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3035739706
Total Pages : 376 pages
Book Rating : 4.0/5 (357 download)
Download or read book Gallium Arsenide III written by P. Kordoš and published by Trans Tech Publications Ltd. This book was released on 1989-01-01 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the 3rd International Conference on Physics & Technology of GaAs and other III-V Semiconductors, Lomnica, CSFR, December 1988
Author : O. W. Holland
Publisher :
ISBN 13 :
Total Pages : 26 pages
Book Rating : 4.:/5 (177 download)
Download or read book Characteristics of Rapid Thermal Annealing in Ion Implanted Silicon written by O. W. Holland and published by . This book was released on 1984 with total page 26 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book อนุสรณ์เกษียณอายุราชการนายมงคล ศรีไพรวรรณ รองปลัดกระทรวงศึกษาธิการ written by and published by . This book was released on 1990 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Rapid Thermal Annealing of Si Implanted GaAs in Arsenic Overpressure written by and published by . This book was released on 1904 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A new method of rapid thermal annealing (RTA) in arsenic overpressure using a high thermal mass reactor and a very low thermal mass substrate holder has been developed. Efficient activation of Si implantation has been obtained only with proper As overpressure. The design of the substrate holder allowed a very uniform activation of the implanted layers as well as a negligible formation of dislocation slips. This method of rapid thermal annealing was successfully applied to the fabrication of broadband 4-8 GHz MMIC amplifiers.
Author : Richard Morton
Publisher :
ISBN 13 :
Total Pages : 432 pages
Book Rating : 4.:/5 (318 download)
Download or read book Gallium Arsenide Integrated Circuit Technology written by Richard Morton and published by . This book was released on 2000 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kuang-yao Lo
Publisher :
ISBN 13 :
Total Pages : 16 pages
Book Rating : 4.:/5 (422 download)
Download or read book Study on the Rapid Thermal Annealing Process of Low-energy Arsenic and Phosphorous Ion-implanted Silicon by Reflective Second Harmonic Generation written by Kuang-yao Lo and published by . This book was released on 2005 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : R. Bensalem
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (597 download)
Download or read book Rapid Thermal Annealing of Donor Implants in Galium Arsenide written by R. Bensalem and published by . This book was released on 1986 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
