Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

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Publisher : The Electrochemical Society
ISBN 13 : 9781566771368
Total Pages : 366 pages
Book Rating : 4.7/5 (713 download)

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Book Synopsis Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing by : M. Meyyappan

Download or read book Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing written by M. Meyyappan and published by The Electrochemical Society. This book was released on 1997 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Publisher : The Electrochemical Society
ISBN 13 : 9781566771887
Total Pages : 668 pages
Book Rating : 4.7/5 (718 download)

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Book Synopsis Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing by : Jerzy Rużyłło

Download or read book Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing written by Jerzy Rużyłło and published by The Electrochemical Society. This book was released on 1998 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Publisher : The Electrochemical Society
ISBN 13 : 9781566771153
Total Pages : 642 pages
Book Rating : 4.7/5 (711 download)

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Book Synopsis Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing by : Richard E. Novak

Download or read book Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing written by Richard E. Novak and published by The Electrochemical Society. This book was released on 1996 with total page 642 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Cleaning Technology in Semiconductor Device Manufacturing VIII

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Publisher : The Electrochemical Society
ISBN 13 : 9781566774116
Total Pages : 452 pages
Book Rating : 4.7/5 (741 download)

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Book Synopsis Cleaning Technology in Semiconductor Device Manufacturing VIII by : Jerzy Rużyłło

Download or read book Cleaning Technology in Semiconductor Device Manufacturing VIII written by Jerzy Rużyłło and published by The Electrochemical Society. This book was released on 2004 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the Second International Symposium on Ultra-Clean Processing of Silicon Surfaces

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Publisher :
ISBN 13 :
Total Pages : 388 pages
Book Rating : 4.:/5 (42 download)

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Book Synopsis Proceedings of the Second International Symposium on Ultra-Clean Processing of Silicon Surfaces by : Marc Heyns

Download or read book Proceedings of the Second International Symposium on Ultra-Clean Processing of Silicon Surfaces written by Marc Heyns and published by . This book was released on 1994 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Silicon Wafer Cleaning Technology

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Author :
Publisher : William Andrew
ISBN 13 : 032351085X
Total Pages : 794 pages
Book Rating : 4.3/5 (235 download)

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Book Synopsis Handbook of Silicon Wafer Cleaning Technology by : Karen Reinhardt

Download or read book Handbook of Silicon Wafer Cleaning Technology written by Karen Reinhardt and published by William Andrew. This book was released on 2018-03-16 with total page 794 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal aspects. This revised edition includes the developments of the last ten years to accommodate a continually involving industry, addressing new technologies and materials, such as germanium and III-V compound semiconductors, and reviewing the various techniques and methods for cleaning and surface conditioning. Chapters include numerous examples of cleaning technique and their results. The book helps the reader understand the process they are using for their cleaning application and why the selected process works. For example, discussion of the mechanism and physics of contamination, metal, particle and organic includes information on particle removal, metal passivation, hydrogen-terminated silicon and other processes that engineers experience in their working environment. In addition, the handbook assists the reader in understanding analytical methods for evaluating contamination. The book is arranged in an order that segments the various cleaning techniques, aqueous and dry processing. Sections include theory, chemistry and physics first, then go into detail for the various methods of cleaning, specifically particle removal and metal removal, amongst others. - Focuses on cleaning techniques including wet, plasma and other surface conditioning techniques used to manufacture integrated circuits - Reliable reference for anyone that manufactures integrated circuits or supplies the semiconductor and microelectronics industries - Covers processes and equipment, as well as new materials and changes required for the surface conditioning process

Proceedings of the Third International Symposium on Defects in Silicon

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Publisher : The Electrochemical Society
ISBN 13 : 9781566772235
Total Pages : 548 pages
Book Rating : 4.7/5 (722 download)

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Book Synopsis Proceedings of the Third International Symposium on Defects in Silicon by : Takao Abe

Download or read book Proceedings of the Third International Symposium on Defects in Silicon written by Takao Abe and published by The Electrochemical Society. This book was released on 1999 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Cleaning Technology in Semiconductor Device Manufacturing ...

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Publisher :
ISBN 13 :
Total Pages : 458 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Cleaning Technology in Semiconductor Device Manufacturing ... by :

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Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III

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Publisher : The Electrochemical Society
ISBN 13 : 9781566770415
Total Pages : 454 pages
Book Rating : 4.7/5 (74 download)

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Book Synopsis Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III by : Dennis N. Schmidt

Download or read book Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III written by Dennis N. Schmidt and published by The Electrochemical Society. This book was released on 1994 with total page 454 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Semiconductor Manufacturing Technology

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Publisher : CRC Press
ISBN 13 : 1420017667
Total Pages : 1720 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Handbook of Semiconductor Manufacturing Technology by : Yoshio Nishi

Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 1720 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: Applications in Electronics

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Publisher : The Electrochemical Society
ISBN 13 : 9781566771719
Total Pages : 312 pages
Book Rating : 4.7/5 (717 download)

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Book Synopsis Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: Applications in Electronics by : Madhav Datta

Download or read book Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: Applications in Electronics written by Madhav Datta and published by The Electrochemical Society. This book was released on 1997 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt:

The National Science Foundation Fiscal Year 2001 Budget Authorization Request, Parts I-III

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Publisher :
ISBN 13 :
Total Pages : 392 pages
Book Rating : 4.0/5 ( download)

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Book Synopsis The National Science Foundation Fiscal Year 2001 Budget Authorization Request, Parts I-III by : United States. Congress. House. Committee on Science. Subcommittee on Basic Research

Download or read book The National Science Foundation Fiscal Year 2001 Budget Authorization Request, Parts I-III written by United States. Congress. House. Committee on Science. Subcommittee on Basic Research and published by . This book was released on 2000 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nanomanufacturing Handbook

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Publisher : CRC Press
ISBN 13 : 1420004921
Total Pages : 432 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Nanomanufacturing Handbook by : Ahmed Busnaina

Download or read book Nanomanufacturing Handbook written by Ahmed Busnaina and published by CRC Press. This book was released on 2017-12-19 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Breakthroughs in nanotechnology have been coming at a rapid pace over the past few years. This was fueled by significant worldwide investments by governments and industry. But if these promising young technologies cannot begin to show commercial viability soon, that funding is in danger of disappearing as investors lose their appetites and the economic and scientific promise of nanotechnology may not be realized. Scrutinizing the barriers to commercial scale-up of nanotechnologies, the Nanomanufacturing Handbook presents a broad survey of the research being done to bring nanotechnology out of the laboratory and into the factory. Current research into nanotechnology focuses on the underlying science, but as this forward-looking handbook points out, the immediate need is for research into scale-up, process robustness, and system integration issues. Taking that message to heart, this book collects cutting-edge research from top experts who examine such topics as surface-programmed assembly, fabrication and applications of single-walled carbon nanotubes (SWNTs) including nanoelectronics, manufacturing nanoelectrical contacts, room-temperature nanoimprint and nanocontact technologies, nanocontacts and switch reliability, defects and surface preparation, and other innovative, application-driven initiatives. In addition to these technical issues, the author provides a survey of the current state of nanomanufacturing in the United States—the first of its kind—and coverage also reaches into patenting nanotechnologies as well as regulatory and societal issues. With timely, authoritative coverage accompanied by numerous illustrations, the Nanomanufacturing Handbook clarifies the current challenges facing industrial-scale nanotechnologies and outlines advanced tools and strategies that will help overcome them.

Crystalline Defects and Contamination

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Publisher : The Electrochemical Society
ISBN 13 : 9781566773638
Total Pages : 380 pages
Book Rating : 4.7/5 (736 download)

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Book Synopsis Crystalline Defects and Contamination by : Bernd O. Kolbesen

Download or read book Crystalline Defects and Contamination written by Bernd O. Kolbesen and published by The Electrochemical Society. This book was released on 2001 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes

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Publisher : The Electrochemical Society
ISBN 13 : 9781566772396
Total Pages : 568 pages
Book Rating : 4.7/5 (723 download)

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Book Synopsis Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes by : Bernd O. Kolbesen (Chemiker.)

Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes written by Bernd O. Kolbesen (Chemiker.) and published by The Electrochemical Society. This book was released on 1999 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Contamination-Free Manufacturing for Semiconductors and Other Precision Products

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Publisher : CRC Press
ISBN 13 : 1482289997
Total Pages : 460 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Contamination-Free Manufacturing for Semiconductors and Other Precision Products by : Robert P. Donovan

Download or read book Contamination-Free Manufacturing for Semiconductors and Other Precision Products written by Robert P. Donovan and published by CRC Press. This book was released on 2018-10-08 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and insights along with experimental and theoretical developments. Ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS)! Summarizing up-to-date control practices in the industry, Contamination-Free Manufacturing for Semiconductors and Other Precision Products: Details the physics and chemistry behind the mechanisms leading to contamination-induced failures Considers particles and molecular contaminants, including the entire spectrum of mass-based contaminants Outlines primary contamination problems and target control levels Reveals and offers solutions to inadequate areas of measurement capability and control technology Clarifies significant problems and decisions facing the industry by analyzing NTRS standards and contamination mechanisms Containing over 700 literature references, drawings, photographs, equations, and tables, Contamination-Free Manufacturing for Semiconductors and Other Precision Products is an essential reference for electrical and electronics, instrumentation, process, manufacturing, development, contamination control and quality engineers; physicists; and upper-level undergraduate and graduate students in these disciplines.

Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 9781566772013
Total Pages : 290 pages
Book Rating : 4.7/5 (72 download)

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Book Synopsis Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing by : Robert Leon Opila

Download or read book Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing written by Robert Leon Opila and published by The Electrochemical Society. This book was released on 1998 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt: