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Preparation And Analysis Of Platinum Thin Films For High Temperature Sensor Applications
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Book Synopsis Preparation and Analysis of Platinum Thin Films for High Temperature Sensor Applications by : John D. Wrbanek
Download or read book Preparation and Analysis of Platinum Thin Films for High Temperature Sensor Applications written by John D. Wrbanek and published by BiblioGov. This book was released on 2013-07 with total page 30 pages. Available in PDF, EPUB and Kindle. Book excerpt: A study has been made of platinum thin films for application as high temperature resistive sensors. To support NASA Glenn Research Center s high temperature thin film sensor effort, a magnetron sputtering system was installed recently in the GRC Microsystems Fabrication Clean Room Facility. Several samples of platinum films were prepared using various system parameters to establish run conditions. These films were characterized with the intended application of being used as resistive sensing elements, either for temperature or strain measurement. The resistances of several patterned sensors were monitored to document the effect of changes in parameters of deposition and annealing. The parameters were optimized for uniformity and intrinsic strain. The evaporation of platinum via oxidation during annealing over 900 C was documented, and a model for the process developed. The film adhesion was explored on films annealed to 1000 C with various bondcoats on fused quartz and alumina. From this compiled data, a list of optimal parameters and characteristics determined for patterned platinum thin films is given.
Book Synopsis Preparation of Thin Films by : Joy George
Download or read book Preparation of Thin Films written by Joy George and published by CRC Press. This book was released on 1992-02-26 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Preparation of Thin Films provides a comprehensive account of various deposition techniques for the preparation of thin films of elements, compounds, alloys, ceramics, and semiconductors - emphasizing inorganic compound thin films and discussing high vacuum and chemical deposition methods used for preparing high temperature superconducting oxide thin films. "
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Preparation and Characterization of Thin Films on Surfaces with Application to Chemical Sensors and Semiconductor Devices by : Indira Shyamali Adhihetty
Download or read book Preparation and Characterization of Thin Films on Surfaces with Application to Chemical Sensors and Semiconductor Devices written by Indira Shyamali Adhihetty and published by . This book was released on 1990 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Mechatronics and Automation Technology by : J. Xu
Download or read book Mechatronics and Automation Technology written by J. Xu and published by IOS Press. This book was released on 2023-01-04 with total page 730 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the development of science and technology, mechatronics and automation have changed the face of the traditional machinery manufacturing industry and become an important aspect of information technology and modern industrial production, with a huge impact in many diverse fields such as manufacturing, robotics, automation, the automobile industry and biomedicine. This book contains the proceedings of ICMAT 2022, the 2022 International Conference on Mechatronics and Automation Technology, held as a virtual event due to restrictions related to the COVID-19 pandemic, and hosted in Wuhan, China on 29 and 30 October 2022. The ICMAT conference is an ideal platform for bringing together researchers, practitioners, scholars, academics and engineers from all around the world to exchange the latest research results and stimulate scientific innovations. The conference received a total of 117 submissions, of which 82 papers were accepted for presentation and publication after a rigorous process of peer-review. The topics covered include mechanical manufacturing and equipment, robotics, information technology, automation technology, automotive systems, biomedicine and other related fields. The book provides an overview of technologies and applications in mechatronics and automation technology, as well as current research and development, and will be of interest to researchers, engineers, and educators working in the field.
Book Synopsis Fabrication Te and TeO2 Thin Films for Gas Sensors by : Sinan S. Hamdi Alhakeem
Download or read book Fabrication Te and TeO2 Thin Films for Gas Sensors written by Sinan S. Hamdi Alhakeem and published by LAP Lambert Academic Publishing. This book was released on 2014-06-13 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book is presented the preparation of Tellurium and Tellurium oxide thin films by cold spray process on different substrates at different deposition angles using helium gas as cold spray process and powder carrier gas without employing any catalyst. Characterization of the prepared thin films by X- ray diffraction analysis (XRD), and Scanning Electron Microscopy (SEM) in addition to Atomic Force Microscopy (AFM). The thin films exhibited a high transmission rate, which allows the products to have potential applications in transparent devices. Thus, the thin films demonstrated their potential application in low power consumption device for Ammonia gas sensor.
Book Synopsis Small Scale Structures by : N.F. de Rooij
Download or read book Small Scale Structures written by N.F. de Rooij and published by Elsevier. This book was released on 2012-12-02 with total page 559 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains the proceedings of 3 symposia dealing with various aspects of small scale structures. Symposium A deals with the development of new materials, including ceramics, polymers, metals, etc., their microstructuring as well as their potential for application in microsystems. All kinds of microsystems are considered, e.g. mechanical, magnetic, optical, chemical, biochemical and issues related to assembly and packaging were also covered. Symposium B deals with four topics: synthesis and preparation of nanostructured ceramics and composites with well-controlled geometric order and chemical composition; coupling of these structures to transducers for current and future chemical and biochemical devices based upon microoptics, microelectronics, microionics, microelectrodes or molecular cages; planar thin film structures and the control of covalent thin film/transducer couplings, the control of selective, stable and sensitive recognition centers at the surface, at grain boundaries or in the bulk of selected nanostructured materials with extremely narrow particle size distributions; analysis of these structures and sensor functions by means of techniques utilizing photons, electrons, ions, or atomic particle beam probes. Symposium E examines the structure-property relationships in thin films and multilayers, from the point of view of both fundamental studies and practical applications.
Book Synopsis Ultra-thin Platinum by : Hyo Jin Kim
Download or read book Ultra-thin Platinum written by Hyo Jin Kim and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The ability to deposit thin, conformal films is very important given the down-scaling of devices. Pt, in particular, has attracted considerable attention for thin film applications in micro and nano-electronic devices due to its chemical inertness, high work function, and excellent electrical properties, including a linear temperature coefficient of resistance (TCR), over a wide temperature range. However, the use of Pt in devices has been somewhat limited, both because of material cost and limitations caused by the directionality of conventional Pt deposition techniques. In this work, thin Pt films as thin as 3.7 nm were deposited using Plasma Enhanced Atomic Layer Deposition (PEALD), and electrical properties of thin Pt films were measured. In addition, some potential application areas for thin Pt films were explored. Chapters 3 and 4 of this dissertation discuss lowering the thickness limit of current Pt films, and how these films' electrical properties change according to thickness. Here in this work, by changing the nucleation layer to TiO2 from Al2O3, the non-ideal nucleation behavior of Pt was mitigated. With this change, the previous thickness limit of electrical continuous Pt, reported to be 8 nm, was pushed to 4 nm. The electrical properties of these thin Pt films, electrical conductivity and Temperature Coefficient of Resistance (TCR), were measured. While Pt films down to 5.7 nm followed the theoretical models very well, Pt films thinner than 5.7 nm deviated from the theory due to incomplete coverage. Nonetheless, Pt film with a thickness of 3.7 nm was deposited on TiO2 and showed good electrical conductivity and electrical stability; the results show that Pt films could be used for Resistance Temperature Detectors (RTDs) for next-generation micro/nano-electromechanical devices. Two potential application areas of thin Pt are discussed in the last two chapters of this dissertation: wearable and flow sensing applications. In chapter 5, thin Pt films' ability to be used as a flexible electrode was studied for wearable application. Pt deposited on flexible substrates had a similar electrical property and TCR as Pt deposited on rigid substrates, and also demonstrated remarkable stability during a bending test, showing within 1% drift in electrical conductivity after 1000 cyclic bending tests. In chapter 6, fabrication and testing of the first thinnest PEALD Pt anemometer is discussed. In addition, with U-Trench technique, novel corrugated beam design and its effect on anemometer performance is discussed. For 20 nm thick Pt sensing element, wind velocities between 1.5 - 18 m/s could be sensed by using as little as 3 mW with the response time of 3.74 ms. Moreover, when the sensing element was wide as 20 um, adding corrugation to the sensing element heated the sensing element more than the sensing element with no corrugation, thereby increasing the anemometer performance significantly. In summary, Pt showed remarkable performances for both applications, proving its potential importance for next-generation micro/nano-electromechanical devices.
Download or read book Japanese Technical Abstracts written by and published by . This book was released on 1988 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Japanese Science and Technology by :
Download or read book Japanese Science and Technology written by and published by . This book was released on 1986 with total page 724 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Handbook of Nanosensors by : Gomaa A. M. Ali
Download or read book Handbook of Nanosensors written by Gomaa A. M. Ali and published by Springer Nature. This book was released on with total page 1769 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :United States. National Aeronautics and Space Administration Scientific and Technical Information Division Publisher : ISBN 13 : Total Pages :1152 pages Book Rating :4.F/5 ( download)
Book Synopsis NASA Scientific and Technical Reports by : United States. National Aeronautics and Space Administration Scientific and Technical Information Division
Download or read book NASA Scientific and Technical Reports written by United States. National Aeronautics and Space Administration Scientific and Technical Information Division and published by . This book was released on 1965 with total page 1152 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :United States. National Aeronautics and Space Administration. Scientific and Technical Information Division Publisher : ISBN 13 : Total Pages :1156 pages Book Rating :4.E/5 ( download)
Book Synopsis A Selected Listing of NASA Scientific and Technical Reports for ... by : United States. National Aeronautics and Space Administration. Scientific and Technical Information Division
Download or read book A Selected Listing of NASA Scientific and Technical Reports for ... written by United States. National Aeronautics and Space Administration. Scientific and Technical Information Division and published by . This book was released on 1964 with total page 1156 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Biennial State-of-the-Art Sensors Technology in Australia 2019-2020 by : Edith Chow
Download or read book Biennial State-of-the-Art Sensors Technology in Australia 2019-2020 written by Edith Chow and published by MDPI. This book was released on 2021-04-27 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent developments in novel materials, sensing principles and signal processing are paving the way for new types of analytical sensors, offering improved sensing performance and practicality. Such advancements will provide accurate and real-time analytical information in the environmental, food, and healthcare sectors to better guide decision-making. For sensors to be commercially viable, the miniaturisation and integration of components for rapid, automated, in-field detection and diagnosis need to be considered. This book highlights state-of-the-art sensors technology in Australia through original contributions and reviews.
Book Synopsis Electroactive Polymers for Robotic Applications by : Kwang J. Kim
Download or read book Electroactive Polymers for Robotic Applications written by Kwang J. Kim and published by Springer Science & Business Media. This book was released on 2007-01-17 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the fundamental properties, modeling, and demonstration of Electroactive polymers in robotic applications. It particularly details artificial muscles and sensors. In addition, the book discusses the properties and uses in robotics applications of ionic polymer–metal composite actuators and dielectric elastomers.
Book Synopsis Electrical & Electronics Abstracts by :
Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 1948 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 1248 pages. Available in PDF, EPUB and Kindle. Book excerpt:
