Precision Nanometrology

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Precision Nanometrology

Author : Wei Gao
Publisher : Springer Science & Business Media
ISBN 13 : 1849962545
Total Pages : 358 pages
Book Rating : 4.8/5 (499 download)

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Book Synopsis Precision Nanometrology by : Wei Gao

Download or read book Precision Nanometrology written by Wei Gao and published by Springer Science & Business Media. This book was released on 2010-06-14 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

Surface Metrology for Micro- and Nanofabrication

Author : Wei Gao
Publisher : Elsevier
ISBN 13 : 0128178515
Total Pages : 452 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Surface Metrology for Micro- and Nanofabrication by : Wei Gao

Download or read book Surface Metrology for Micro- and Nanofabrication written by Wei Gao and published by Elsevier. This book was released on 2020-10-30 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Fundamental Principles of Engineering Nanometrology

Author : Richard Leach
Publisher : Elsevier
ISBN 13 : 1455777501
Total Pages : 384 pages
Book Rating : 4.4/5 (557 download)

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Book Synopsis Fundamental Principles of Engineering Nanometrology by : Richard Leach

Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by Elsevier. This book was released on 2014-05-17 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations

Fundamental Principles of Engineering Nanometrology

Author : Richard Leach
Publisher : William Andrew
ISBN 13 : 1437778321
Total Pages : 349 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Fundamental Principles of Engineering Nanometrology by : Richard Leach

Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by William Andrew. This book was released on 2009-09-03 with total page 349 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Precision Dimensional Measurements

Author : Kuang-Chao Fan
Publisher : MDPI
ISBN 13 : 3039217127
Total Pages : 596 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis Precision Dimensional Measurements by : Kuang-Chao Fan

Download or read book Precision Dimensional Measurements written by Kuang-Chao Fan and published by MDPI. This book was released on 2019-10-21 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: This collection represents successful invited submissions from the papers presented at the 8th Annual Conference of Energy Economics and Management held in Beijing, China, 22–24 September 2017. With over 500 participants, the conference was co-hosted by the Management Science Department of National Natural Science Foundation of China, the Chinese Society of Energy Economics and Management, and Renmin University of China on the subject area of “Energy Transition of China: Opportunities and Challenges”. The major strategies to transform the energy system of China to a sustainable model include energy/economic structure adjustment, resource conservation, and technology innovation. Accordingly, the conference and its associated publications encourage research to address the major issues faced in supporting the energy transition of China. Papers published in this collection cover the broad spectrum of energy economics issues, including building energy efficiency, industrial energy demand, public policies to promote new energy technologies, power system control technology, emission reduction policies in energy-intensive industries, emission measurements of cities, energy price movement, and the impact of new energy vehicle.

Handbook of Surface and Nanometrology

Author : David J. Whitehouse
Publisher : CRC Press
ISBN 13 : 1420082027
Total Pages : 982 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Handbook of Surface and Nanometrology by : David J. Whitehouse

Download or read book Handbook of Surface and Nanometrology written by David J. Whitehouse and published by CRC Press. This book was released on 2010-12-20 with total page 982 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications.Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines h

Initiatives of Precision Engineering at the Beginning of a Millennium

Author : Ichiro Inasaki
Publisher : Springer Science & Business Media
ISBN 13 : 0306470004
Total Pages : 996 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Initiatives of Precision Engineering at the Beginning of a Millennium by : Ichiro Inasaki

Download or read book Initiatives of Precision Engineering at the Beginning of a Millennium written by Ichiro Inasaki and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 996 pages. Available in PDF, EPUB and Kindle. Book excerpt: Faced with ever-increasing market demands, manufacturing industry is forced to seek innovation and technological breakthrough. This state-of-the-art text aims to integrate broad aspects of precision and production engineering to cope with rapid changes in market needs and technological developments as we enter the 21st century. It addresses basic theory, extensive research in advanced topics, industrial applications, and relevant surveys in related fields. Major subjects covered by this book include: Advanced manufacturing systems; Ultra-precision machining and micro machining; Nanotechnology for fabrication and measurement; Chemo-mechanical processes; Rapid prototyping technology; New materials and advanced processes; Computer-aided production engineering; Manufacturing process control; Planning. This volume contains the proceedings of the 10th International Conference on Precision Engineering (ICPE), which was held in July 2001, in Yokohama, Japan. ICPE is a well-established conference in the field of production and precision engineering, covering a wide range of topics for future-oriented manufacturing systems and processes; it is organized by the Japan Society for Precision Engineering (JSPE). This book can be used as a reference for graduate and undergraduate courses in precision and production engineering, and also for researchers and industrial engineers to capture current trends in this field.

Measurement Technology for Micro-Nanometer Devices

Author : Wendong Zhang
Publisher : John Wiley & Sons
ISBN 13 : 1118717961
Total Pages : 341 pages
Book Rating : 4.1/5 (187 download)

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Book Synopsis Measurement Technology for Micro-Nanometer Devices by : Wendong Zhang

Download or read book Measurement Technology for Micro-Nanometer Devices written by Wendong Zhang and published by John Wiley & Sons. This book was released on 2017-01-17 with total page 341 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Optical Metrology for Precision Engineering

Author : Wei Gao
Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3110542366
Total Pages : 655 pages
Book Rating : 4.1/5 (15 download)

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Book Synopsis Optical Metrology for Precision Engineering by : Wei Gao

Download or read book Optical Metrology for Precision Engineering written by Wei Gao and published by Walter de Gruyter GmbH & Co KG. This book was released on 2021-11-22 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way

Challenges in Nanometrology: High Precision Measurement of Position and Size

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (94 download)

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Book Synopsis Challenges in Nanometrology: High Precision Measurement of Position and Size by :

Download or read book Challenges in Nanometrology: High Precision Measurement of Position and Size written by and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Measurement Technology and Intelligent Instruments VI

Author : Yongsheng Gao
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038130222
Total Pages : 800 pages
Book Rating : 4.0/5 (381 download)

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Book Synopsis Measurement Technology and Intelligent Instruments VI by : Yongsheng Gao

Download or read book Measurement Technology and Intelligent Instruments VI written by Yongsheng Gao and published by Trans Tech Publications Ltd. This book was released on 2005-10-15 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt: The requirements of high precision and of high-quality components and devices in meeting the needs of modern industry and society in disciplines such as semiconductors, optics, nanotechnology, MEMS, manufacturing, biomedical and environmental engineering, make measurement technology and intelligent instruments (which sense, measure and report), more important than ever, and essential for the rapid development of information technology. Following the lead of the previous five publications (1989, 1993, 1996, 1998, 2001) in the series, Measurement Technology and Intelligent Instruments, this book presents the most recent advances in this important field. In all, 123 papers were contributed from many regions of the world; including China, Taiwan (China), Japan, Russia, Hong Kong (China), Germany, Australia, Austria, Canada, Korea, Poland, Slovakia and the UK and US.

Nanoscale Standards by Metrological AFM and Other Instruments

Author : Ichiko Misumi
Publisher : IOP Publishing Limited
ISBN 13 : 9780750331890
Total Pages : 120 pages
Book Rating : 4.3/5 (318 download)

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Book Synopsis Nanoscale Standards by Metrological AFM and Other Instruments by : Ichiko Misumi

Download or read book Nanoscale Standards by Metrological AFM and Other Instruments written by Ichiko Misumi and published by IOP Publishing Limited. This book was released on 2021-05-20 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt: The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications. Key features Practical guide for users and practitioners Puts nanoscale standards in a practical context. Covers a range of measurement modalities. 2D and 3D measurements.

Quantitative Data Processing in Scanning Probe Microscopy

Author : Petr Klapetek
Publisher : William Andrew
ISBN 13 : 1455730599
Total Pages : 335 pages
Book Rating : 4.4/5 (557 download)

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Book Synopsis Quantitative Data Processing in Scanning Probe Microscopy by : Petr Klapetek

Download or read book Quantitative Data Processing in Scanning Probe Microscopy written by Petr Klapetek and published by William Andrew. This book was released on 2012-12-31 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: Accurate measurement at the nano-scale – nanometrology – is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture of a specimen by scanning with a physical probe; unrestrained by the wavelength of light or electrons, the resolution obtainable with this technique can resolve atoms. SPM instruments include the Atomic Force Microscope (AFM) and Scanning Tunneling Microscope (STM). Despite tremendous advances in Scanning Probe Microscopy (SPM) over the last twenty years, its potential as a quantitative measurement tool have not been fully realized, due to challenges such as the complexity of tip/sample interaction. In this book, Petr Klapetek uses the latest research to unlock SPM as a toolkit for nanometrology in fields as diverse as nanotechnology, surface physics, materials engineering, thin film optics, and life sciences. Klapetek's considerable experience of Quantitive Data Processing, using software tools, enables him to not only explain the microscopy techniques, but also to demystify the analysis and interpretation of the data collected. In addition to the essential principles and theory of SPM metrology, Klapetek provides readers with a number of worked examples to demonstrate typical ways of solving problems in SPM analysis. Source data for the examples as well as most of the described open source software tools are available on a companion website. Unlocks the use of Scanning Probe Microscopy (SPM) for nanometrology applications in engineering, physics, life science and earth science settings Provides practical guidance regarding areas of difficulty such as tip/sample interaction and calibration – making metrology applications achievable Gives guidance on data collection and interpretation, including the use of software-based modeling (using applications that are mostly freely available)

Introduction to Focused Ion Beam Nanometrology

Author : David C. Cox
Publisher : Morgan & Claypool Publishers
ISBN 13 : 1681740842
Total Pages : 83 pages
Book Rating : 4.6/5 (817 download)

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Book Synopsis Introduction to Focused Ion Beam Nanometrology by : David C. Cox

Download or read book Introduction to Focused Ion Beam Nanometrology written by David C. Cox and published by Morgan & Claypool Publishers. This book was released on 2015-10-01 with total page 83 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.

Functional Nanomaterials and Devices for Electronics, Sensors and Energy Harvesting

Author : Alexei Nazarov
Publisher : Springer
ISBN 13 : 3319088041
Total Pages : 464 pages
Book Rating : 4.3/5 (19 download)

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Book Synopsis Functional Nanomaterials and Devices for Electronics, Sensors and Energy Harvesting by : Alexei Nazarov

Download or read book Functional Nanomaterials and Devices for Electronics, Sensors and Energy Harvesting written by Alexei Nazarov and published by Springer. This book was released on 2014-08-28 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains reviews of recent experimental and theoretical results related to nanomaterials. It focuses on novel functional materials and nanostructures in combination with silicon on insulator (SOI) devices, as well as on the physics of new devices and sensors, nanostructured materials and nano scaled device characterization. Special attention is paid to fabrication and properties of modern low-power, high-performance, miniaturized, portable sensors in a wide range of applications such as telecommunications, radiation control, biomedical instrumentation and chemical analysis. In this book, new approaches exploiting nanotechnologies (such as UTBB FD SOI, Fin FETs, nanowires, graphene or carbon nanotubes on dielectric) to pave a way between “More Moore” and “More than Moore” are considered, in order to create different kinds of sensors and devices which will consume less electrical power, be more portable and totally compatible with modern microelectronics products.

Metrology

Author : Wei Gao
Publisher : Springer
ISBN 13 : 9789811049378
Total Pages : 0 pages
Book Rating : 4.0/5 (493 download)

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Book Synopsis Metrology by : Wei Gao

Download or read book Metrology written by Wei Gao and published by Springer. This book was released on 2019-08-30 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this handbook is to provide a comprehensive summary of sensing and measurement in precision manufacturing, which is essential for process and quality control. The importance of precision sensing and measurements lies not only in the ability to distinguish whether the manufactured part meets the assigned tolerances through inspection but also, in many cases, reduce the deviation of the manufactured part from the designed values through improvement of the process or compensation manufacturing based on the sensing and measurement results. The information provided in the book will be of interest to industrial practitioners and researchers in the field of precision manufacturing sensing and measurements. This volume is part of a multi-volume handbook series that covers a comprehensive range of scientific and technological matters in ‘Precision Manufacturing’, for more information please view this link- https://www.springer.com/series/15575.

Emerging Technologies in Manufacturing

Author : Matthew N. O. Sadiku
Publisher : Springer Nature
ISBN 13 : 3031231562
Total Pages : 297 pages
Book Rating : 4.0/5 (312 download)

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Book Synopsis Emerging Technologies in Manufacturing by : Matthew N. O. Sadiku

Download or read book Emerging Technologies in Manufacturing written by Matthew N. O. Sadiku and published by Springer Nature. This book was released on 2023-03-15 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: The manufacturing industry is a cornerstone of national economy and people’s livelihood. It is the way of transforming resources into products or goods which are required to cater to the needs of the society. Traditional manufacturing companies currently face several challenges such as rapid technological changes, inventory problem, shortened innovation, short product life cycles, volatile demand, low prices, highly customized products, and ability to compete in the global markets. Modern manufacturing is highly competitive due to globalization and fast changes in the global market. This book reviews emerging technologies in manufacturing. These technologies include artificial intelligence, smart manufacturing, lean manufacturing, robotics, automation, 3D printing, nanotechnology, industrial Internet of things, and augmented reality. The use of these technologies will have a profound impact on the manufacturing industry. The book consists of 19 chapters. Each chapter addresses a single emerging technology in depth and describes how manufacturing organizations are adopting the technology. The book fills an important niche for manufacturing. It is a comprehensive, jargon-free introductory text on the issues, ideas, theories, and problems on emerging technologies in manufacturing. It is a must-read book for beginners or anyone who wants to be updated about emerging technologies.