Fundamental Principles of Optical Lithography

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Fundamental Principles of Optical Lithography by : Chris Mack

Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Practical Lithography

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Author :
Publisher :
ISBN 13 :
Total Pages : 160 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Practical Lithography by : Alfred Seymour

Download or read book Practical Lithography written by Alfred Seymour and published by . This book was released on 1903 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Practical Printmaking

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Author :
Publisher : A&C Black
ISBN 13 : 0713688092
Total Pages : 161 pages
Book Rating : 4.7/5 (136 download)

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Book Synopsis Practical Printmaking by : Colin Gale

Download or read book Practical Printmaking written by Colin Gale and published by A&C Black. This book was released on 2009-03-01 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive reference guide to a wide range of printmaking techniques.

Practical Lithographic Printmaking

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Author :
Publisher : Dover Publications
ISBN 13 :
Total Pages : 136 pages
Book Rating : 4.X/5 (1 download)

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Book Synopsis Practical Lithographic Printmaking by : Manly Banister

Download or read book Practical Lithographic Printmaking written by Manly Banister and published by Dover Publications. This book was released on 1988 with total page 136 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Stone Lithography

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Author :
Publisher : A & C Black
ISBN 13 :
Total Pages : 168 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Stone Lithography by : Paul Croft

Download or read book Stone Lithography written by Paul Croft and published by A & C Black. This book was released on 2003 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: "In this practical handbook, Paul Croft offers a comprehensive approach to the many aspects of lithography. Through simplified steps the information is presented in a logical and meaningful manner. This lavishly illustrated guide is also teeming with examples of prints from an international group of artists, showing the beautiful work that is being produced around the world today."--BOOK JACKET.Title Summary field provided by Blackwell North America, Inc. All Rights Reserved

The Art of Lithography

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Author :
Publisher :
ISBN 13 :
Total Pages : 376 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis The Art of Lithography by : Henry John Rhodes

Download or read book The Art of Lithography written by Henry John Rhodes and published by . This book was released on 1914 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: "The work is the result of long experience both in the workshop and the technical classroom, and the author has sought to make it comprehensive, thoroughly up-to-date, and, above all, practical." -preface.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

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Author :
Publisher : SPIE Press
ISBN 13 : 9780819423795
Total Pages : 706 pages
Book Rating : 4.4/5 (237 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Plate Lithography

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Publisher : A&C Black
ISBN 13 : 9780713657975
Total Pages : 160 pages
Book Rating : 4.6/5 (579 download)

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Book Synopsis Plate Lithography by : Paul Croft

Download or read book Plate Lithography written by Paul Croft and published by A&C Black. This book was released on 2003 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Printmaking Handbook is a companion volume to Paul Croft's previous book, Stone Lithography. The author guides the reader through all aspects of plate lithography with step-by-step instructions accompanied by clear, colour photographs. The author also includes amazing work by well-known practitioners from around the world. This beautifully illustrated, yet practical guide, is essential for all those interested in lithography.

National Lithographer

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Author :
Publisher :
ISBN 13 :
Total Pages : 554 pages
Book Rating : 4.0/5 (984 download)

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Book Synopsis National Lithographer by :

Download or read book National Lithographer written by and published by . This book was released on 1916 with total page 554 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Books Added

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Publisher :
ISBN 13 :
Total Pages : 718 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Books Added by : Chicago Public Library

Download or read book Books Added written by Chicago Public Library and published by . This book was released on 1916 with total page 718 pages. Available in PDF, EPUB and Kindle. Book excerpt:

EUV Sources for Lithography

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Author :
Publisher : SPIE Press
ISBN 13 : 9780819458452
Total Pages : 1104 pages
Book Rating : 4.4/5 (584 download)

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Book Synopsis EUV Sources for Lithography by : Vivek Bakshi

Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.

Resolution Enhancement Techniques in Optical Lithography

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Author :
Publisher : SPIE Press
ISBN 13 : 9780819439956
Total Pages : 238 pages
Book Rating : 4.4/5 (399 download)

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Book Synopsis Resolution Enhancement Techniques in Optical Lithography by : Alfred Kwok-Kit Wong

Download or read book Resolution Enhancement Techniques in Optical Lithography written by Alfred Kwok-Kit Wong and published by SPIE Press. This book was released on 2001 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers

Practical Mixed-Media Printmaking

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Author :
Publisher : Herbert Press
ISBN 13 : 9781789940084
Total Pages : 144 pages
Book Rating : 4.9/5 (4 download)

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Book Synopsis Practical Mixed-Media Printmaking by : Sarah Riley

Download or read book Practical Mixed-Media Printmaking written by Sarah Riley and published by Herbert Press. This book was released on 2019-06-11 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt: Practical Mixed-Media Printmaking is an essential introduction to printmaking using a wide range of low-cost materials. This practical guide includes easy-to-follow instructions, hints and tips on all of the main printmaking techniques, as well as over 90 examples of works by contemporary printmakers and 19 profiles explaining the artists' methods and inspiration. Mixed-media printmaking allows vast freedom for experimentation and armed with the knowledge inside this book it is possible to adapt and refine the basic techniques to suit your own projects. This beautiful book will be an inspiration for printmakers at all levels.

Quarterly Booklist

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Publisher :
ISBN 13 :
Total Pages : 590 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Quarterly Booklist by : Pratt Institute. Free Library

Download or read book Quarterly Booklist written by Pratt Institute. Free Library and published by . This book was released on 1924 with total page 590 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Inland Printer, American Lithographer

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Author :
Publisher :
ISBN 13 :
Total Pages : 1178 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Inland Printer, American Lithographer by :

Download or read book Inland Printer, American Lithographer written by and published by . This book was released on 1905 with total page 1178 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Books of 1912-

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Publisher :
ISBN 13 :
Total Pages : 446 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Books of 1912- by : Chicago Public Library

Download or read book Books of 1912- written by Chicago Public Library and published by . This book was released on 1912 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Field Guide to Optical Lithography

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Author :
Publisher : Society of Photo Optical
ISBN 13 : 9780819462077
Total Pages : 122 pages
Book Rating : 4.4/5 (62 download)

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Book Synopsis Field Guide to Optical Lithography by : Chris A. Mack

Download or read book Field Guide to Optical Lithography written by Chris A. Mack and published by Society of Photo Optical. This book was released on 2006 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.