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Author : Yuan Xiong Li
Publisher :
ISBN 13 :
Total Pages : 244 pages
Book Rating : 4.3/5 (91 download)
Download or read book Plasma Etching for Integrated Silicon Sensor Applications written by Yuan Xiong Li and published by . This book was released on 1995 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Miko Elwenspoek
Publisher : Cambridge University Press
ISBN 13 : 9780521607674
Total Pages : 424 pages
Book Rating : 4.6/5 (76 download)
Download or read book Silicon Micromachining written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Author : Arnaldo D'amico
Publisher : World Scientific
ISBN 13 : 9814549312
Total Pages : 274 pages
Book Rating : 4.8/5 (145 download)
Download or read book Sensors For Domestic Applications - Proceedings Of The 1st European School Of Sensors (Ess '94) written by Arnaldo D'amico and published by World Scientific. This book was released on 1995-05-31 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains 20 papers devoted to the domestic use of sensors. This up-to-date review fills a gap in the literature arising from the recent intense research and development of these sensors and takes an interdisciplinary approach to the operation principles of sensors and the preparation techniques, with particular regard to microelectronics techniques which allow the realization of sensor systems with integrated electronic circuitry.The applications of sensors in the domestic environment are accurately reviewed and the trends of future sensor development are also outlined.
Author :
Publisher :
ISBN 13 :
Total Pages : 692 pages
Book Rating : 4.:/5 (3 download)
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Stephen E. Saddow
Publisher : Elsevier
ISBN 13 : 0323908268
Total Pages : 370 pages
Book Rating : 4.3/5 (239 download)
Download or read book Silicon Carbide Technology for Advanced Human Healthcare Applications written by Stephen E. Saddow and published by Elsevier. This book was released on 2022-07-13 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: After over two decades of focused research and development, silicon carbide (SiC) is now ready for use in the healthcare sector and Silicon Carbide Technology for Advanced Human Healthcare Applications provides an up-to-date assessment of SiC devices for long-term human use. It explores a plethora of applications that SiC is uniquely positioned for in human healthcare, beginning with the three primary areas of technology which are closest to human trials and thus adoption in the healthcare industry: neural implants and spinal cord repair, graphene and biosensors, and finally deep tissue cancer therapy using SiC nanotechnology. Biomedical-inspired engineers, scientists, and healthcare professionals will find this book to be very useful in two ways: (I) as a guide to new ways to design and develop advanced medical devices and (II) as a reference for new developments in the field. The book's intent is to stimulate ideas for further technological enhancements and breakthroughs, which will provide alternative solutions for human healthcare applications. - Discusses the utilization of SiC materials for biomedical applications - Provides a logical pathway to understand why SiC is ideal for several critical applications, in particular for long-term implantable devices, and will serve as a guide to new ways to design and develop advanced medical devices - Serves as a reference for new developments in the field and as a technology resource for medical doctors and practitioners looking to identify and implement advanced engineering solutions to everyday medical challenges that currently lack long-term, cost-effective solutions
Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 081551977X
Total Pages : 314 pages
Book Rating : 4.8/5 (155 download)
Download or read book Microfabrication for Industrial Applications written by Regina Luttge and published by William Andrew. This book was released on 2011-08-31 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. - Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments - Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro - Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) - Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) - Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Author : R.F. Wolffenbuttel
Publisher : Springer Science & Business Media
ISBN 13 : 9780412709708
Total Pages : 344 pages
Book Rating : 4.7/5 (97 download)
Download or read book Silicon Sensors and Circuits written by R.F. Wolffenbuttel and published by Springer Science & Business Media. This book was released on with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Munir H. Nayfeh
Publisher : Elsevier
ISBN 13 : 044318674X
Total Pages : 568 pages
Book Rating : 4.4/5 (431 download)
Download or read book Integrated Silicon-Metal Systems at the Nanoscale written by Munir H. Nayfeh and published by Elsevier. This book was released on 2023-04-12 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated Silicon-Metal Systems at the Nanoscale: Applications in Photonics, Quantum Computing, Networking, and Internet is a comprehensive guide to the interaction, materials and functional integration at the nanoscale of the silicon-metal binary system and a variety of emerging and next-generation advanced device applications, from energy and electronics, to sensing, quantum computing and quantum internet networks. The book guides the readers through advanced techniques and etching processes, combining underlying principles, materials science, design, and operation of metal-Si nanodevices. Each chapter focuses on a specific use of integrated metal-silicon nanostructures, including storage and resistive next-generation nano memory and transistors, photo and molecular sensing, harvest and storage device electrodes, phosphor light converters, and hydrogen fuel cells, as well as future application areas, such as spin transistors, quantum computing, hybrid quantum devices, and quantum engineering, networking, and internet. - Provides detailed coverage of materials, design and operation of metal-Si nanodevices - Offers a step-by-step approach, supported by principles, methods, illustrations and equations - Explores a range of cutting-edge emerging applications across electronics, sensing and quantum computing
Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 0323389287
Total Pages : 280 pages
Book Rating : 4.3/5 (233 download)
Download or read book Nano- and Microfabrication for Industrial and Biomedical Applications written by Regina Luttge and published by William Andrew. This book was released on 2016-06-12 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. - Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D - Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk - Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems
Author : P. K. Choudhury
Publisher : Nova Publishers
ISBN 13 : 9781600210846
Total Pages : 324 pages
Book Rating : 4.2/5 (18 download)
Download or read book Frontiers in Optical Technology written by P. K. Choudhury and published by Nova Publishers. This book was released on 2007 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book maps out the frontiers of optical technology in two major subdisciplines: optical materials and optical devices. The optical materials and material architectures covered include nanostructured silicon, chiral sculptured thin films, magnetic photonic crystals, and switchable materials for efficient lighting and decorative optics. The optical devices addressed include silicon waveguides for integrated circuitry, high-speed electro-optic modulators, laser diodes coupled with fibre-tip lenses, and optical sensors. Reading the ten chapters, either altogether or piecemeal, the reader will receive a virtually up-to-date review of the state of the art.
Author : Nava Setter
Publisher : Springer Science & Business Media
ISBN 13 : 0387233199
Total Pages : 416 pages
Book Rating : 4.3/5 (872 download)
Download or read book Electroceramic-Based MEMS written by Nava Setter and published by Springer Science & Business Media. This book was released on 2006-03-30 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.
Author : Frederic Nabki
Publisher : MDPI
ISBN 13 : 3039288652
Total Pages : 164 pages
Book Rating : 4.0/5 (392 download)
Download or read book MEMS Sensors and Resonators written by Frederic Nabki and published by MDPI. This book was released on 2020-05-27 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) have had a profound impact on a wide range of applications. The degree of miniaturization made possible by MEMS technology has significantly improved the functionalities of many systems, and the performance of MEMS has steadily improved as its uses augment. Notably, MEMS sensors have been prevalent in motion sensing applications for decades, and the sensing mechanisms leveraged by MEMS have been continuously extended to applications spanning the detection of gases, magnetic fields, electromagnetic radiation, and more. In parallel, MEMS resonators have become an emerging field of MEMS and affected subfields such as electronic timing and filtering, and energy harvesting. They have, in addition, enabled a wide range of resonant sensors. For many years now, MEMS have been the basis of various industrial successes, often building on novel academic research. Accordingly, this Special Issue explores many research innovations in MEMS sensors and resonators, from biomedical applications to energy harvesting, gas sensing, resonant sensing, and timing.
Author : William D. Brown
Publisher : The Electrochemical Society
ISBN 13 : 9781566771979
Total Pages : 384 pages
Book Rating : 4.7/5 (719 download)
Download or read book Dielectric Material Integration for Microelectronics written by William D. Brown and published by The Electrochemical Society. This book was released on 1998 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ghenadii Korotcenkov
Publisher : CRC Press
ISBN 13 : 1351056484
Total Pages : 959 pages
Book Rating : 4.3/5 (51 download)
Download or read book Handbook of Humidity Measurement, Volume 3 written by Ghenadii Korotcenkov and published by CRC Press. This book was released on 2020-01-24 with total page 959 pages. Available in PDF, EPUB and Kindle. Book excerpt: Because of unique water properties, humidity affects materials and many living organisms, including humans. Humidity control is important in various fields, from production management to creating a comfortable living environment. The range of materials that can be used in the development of humidity sensors is very broad, and the third volume of the Handbook of Humidity Measurement offers an analysis on various humidity-sensitive materials and sensor technologies used in the fabrication of humidity sensors and methods acceptable for their testing. Additional features include: numerous strategies for the fabrication and characterization of humidity-sensitive materials and sensing structures used in sensor applications, methods and properties to develop smaller, cheaper, more robust, and accurate devices with better sensitivity and stability, a guide to sensor selection and an overview of the humidity sensor market, and new technology solutions for integration, miniaturization, and specificity of the humidity sensor calibration. Handbook of Humidity Measurement, Volume 3: Sensing Materials and Technologies provides valuable information for practicing engineers, measurement experts, laboratory technicians, project managers in industries and national laboratories, and university students and professors interested in solutions to humidity measurement tasks. Despite the fact that this book is devoted to the humidity sensors, it can be used as a basis for understanding fundamentals of any gas sensor operation and development.
Author : M. Elwenspoek
Publisher : Springer Science & Business Media
ISBN 13 : 3662043211
Total Pages : 306 pages
Book Rating : 4.6/5 (62 download)
Download or read book Mechanical Microsensors written by M. Elwenspoek and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Author : John X. J. Zhang
Publisher : Academic Press
ISBN 13 : 0128148632
Total Pages : 606 pages
Book Rating : 4.1/5 (281 download)
Download or read book Molecular Sensors and Nanodevices written by John X. J. Zhang and published by Academic Press. This book was released on 2018-11-19 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering, Second Edition is designed to be used as a foundational text, aimed at graduates, advanced undergraduates, early-career engineers and clinicians. The book presents the essential principles of molecular sensors, including theories, fabrication techniques and reviews. In addition, important devices and recently, highly-cited research outcomes are also cited. This differentiates the book from other titles on the market whose primary focus is more research-oriented and aimed at more of a niche market. - Covers the fundamental principles of device engineering and molecular sensing, sensor theories and applications in biomedical science and engineering - Introduces nano/micro fabrication techniques, including MEMS, bioMEMS, microTAS and nanomaterials science that are essential in the miniaturization of versatile molecular sensors - Explores applications of nanomaterials and biomaterials, including proteins, DNAs, nanoparticles, quantum dots, nanotubes/wires and graphene in biomedicine
Author : Mason Snider
Publisher : Scientific e-Resources
ISBN 13 : 1839472340
Total Pages : 318 pages
Book Rating : 4.8/5 (394 download)
Download or read book Microelectronics written by Mason Snider and published by Scientific e-Resources. This book was released on 2018-06-21 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectronics is the cornerstone of the information technologies that pervade virtually every aspect of contemporary life. It is difficult to imagine any field of science or technology that has had a more profound impact on the latter half of the 20 century than microelectronics. Microelectronics industry has been able to provide transistors, chips and products that are becoming smaller, faster, cheaper and better every year. As transistors become smaller, they become faster, more and more of such transistors can be packed on a chip, and thus chips are able to store and process more information. Digital circuits are made from analog components. The design must assure that the analog nature of the components doesn't dominate the desired digital behaviour. Digital systems must manage noise and timing margins, parasitic inductances and capacitances, and filter power connections. Bad designs have intermittent problems such as "e;glitches"e;, vanishingly-fast pulses that may trigger some logic but not others, "e;runt pulses"e; that do not reach valid "e;threshold"e; voltages, or unexpected ("e;undecoded"e;) combinations of logic states. A digital circuit is often constructed from small electronic circuits called logic gates that can be used to create combinational logic. Each logic gate represents a function of boolean logic. A logic gate is an arrangement of electrically controlled switches, better known as transistors. Each logic symbol is represented by a different shape. This book is designed for advanced undergraduates and graduate students with background knowledge in basic electronics including biasing, modeling, circuit, analysis, and frequency response.
