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Author : Daniel Arthur Carl
Publisher :
ISBN 13 :
Total Pages : 376 pages
Book Rating : 4.:/5 (33 download)
Download or read book Oxidation of Silicon in an Electron Cyclotron Resonance Plasma written by Daniel Arthur Carl and published by . This book was released on 1991 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 10 pages
Book Rating : 4.:/5 (227 download)
Download or read book Kinetics of Oxidation of Silicon by Electron Cyclotron Resonance Plasmas written by and published by . This book was released on 1992 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt: In-situ ellipsometry, both single wavelength and spectroscopic, has been used to study the electron cyclotron resonance plasma oxidation of Si. Spectroscopic ellipsometry has been used to establish that the best fit optical model for the oxidation is a two layer model where the interface layer forms early and stabilizes and the outer layer is SiO2. The interface layer is modeled well as a mixture of a-Si and oxide. The kinetics of film growth were followed using single wavelength ellipsometry at a temperature insensitive wavelength, and the results were in agreement with the Cabrera-Mott theory.
Author : Vishwas Jaju
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (27 download)
Download or read book Device Quality Low Temperature Gate Oxide Growth Using Electron Cyclotron Resonance Plasma Oxidation of Silicon written by Vishwas Jaju and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : S.A Neustroev
Publisher :
ISBN 13 :
Total Pages : 4 pages
Book Rating : 4.:/5 (819 download)
Download or read book Special Features of the Low-temperature Deposition of Silicon Oxide in the Electron-cyclotron Resonance Plasma of Superhigh Frequency Discharge written by S.A Neustroev and published by . This book was released on 1989 with total page 4 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Changyi Zhao
Publisher :
ISBN 13 :
Total Pages : 388 pages
Book Rating : 4.:/5 (388 download)
Download or read book A Study of Si/SiO2 Interface Roughness Evolution During Microwave Electron Cyclotron Resonance Plasma and Thermal Oxidation Processes written by Changyi Zhao and published by . This book was released on 1997 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : B.E. Deal
Publisher : Springer Science & Business Media
ISBN 13 : 1489915885
Total Pages : 505 pages
Book Rating : 4.4/5 (899 download)
Download or read book The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2 written by B.E. Deal and published by Springer Science & Business Media. This book was released on 2013-11-09 with total page 505 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first international symposium on the subject "The Physics and Chemistry of Si02 and the Si-Si02 Interface," organized in association with the Electrochemical Society, Inc. , was held in Atlanta, Georgia on May 15- 20, 1988. This symposium contained sixty papers and was so successful that the sponsoring divisions decided to schedule it on a regular basis every four years. Thus, the second symposium on "The Physics and Chemistry of Si02 and the Si02 Interface was held May 18-21, 1992 in St. Louis, Missouri, again sponsored by the Electronics and Dielectrics Science and Technology Divisions of The Electrochemical Society. This volume contains manuscripts of most of the fifty nine papers presented at the 1992 symposium, and is divided into eight chapters - approximating the organization of the symposium. Each chapter is preceded with an introduction by the session organizers. It is appropriate to provide a general assessment of the current status and understanding of the physics and chemistry of Si02 and the Si02 interface before proceeding with a brief overview of the individual chapters. Semiconductor devices have continued to scale down in both horizontal and vertical dimensions. This has resulted in thinner gate and field oxides as well as much closer spacing of individual device features. As a result, surface condition, native oxide composition, and cleaning and impurity effects now provide a much more significant contribution to the properties of oxides and their interfaces.
Author : Riyaz Rashid
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (894 download)
Download or read book Low Temperature Electron Cyclotron Resonance Plasma Deposition of Silicon Dioxide written by Riyaz Rashid and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Hewlett-Packard Laboratories
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (123 download)
Download or read book On the Role of Ions in Electron Cyclotron Resonance Plasma-enhanced Chemical Vapor Deposition of Silicon Dioxide written by Hewlett-Packard Laboratories and published by . This book was released on 1994 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kuo-Tung Sung
Publisher :
ISBN 13 :
Total Pages : 354 pages
Book Rating : 4.3/5 (91 download)
Download or read book Dry Etching and Oxidation of Si Devices Using a Multipolar Electron Cyclotron Resonance Source written by Kuo-Tung Sung and published by . This book was released on 1994 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 836 pages
Book Rating : 4.:/5 (31 download)
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Søsætningen af Diesel-Motorskibet "Kronprins Olav" written by and published by . This book was released on 1937 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 716 pages
Book Rating : 4.0/5 ( download)
Download or read book Official Gazette of the United States Patent and Trademark Office written by and published by . This book was released on 1994 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Karen A. Reinhardt
Publisher : John Wiley & Sons
ISBN 13 : 1118099516
Total Pages : 596 pages
Book Rating : 4.1/5 (18 download)
Download or read book Handbook for Cleaning for Semiconductor Manufacturing written by Karen A. Reinhardt and published by John Wiley & Sons. This book was released on 2011-04-12 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides an In-depth discussion of surface conditioning for semiconductor applications The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications provides an in-depth discussion of surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet processing is reviewed as well as surface and colloidal aspects of cleaning and etching. Topics covered in this new reference include: Front end line (FEOL) and back end of line (BEOL) cleaning applications such as high-k/metal gate post-etch cleaning and pore sealing, high-dose implant stripping and cleaning, and germanium, and silicon passivation Formulation development practices, methodology and a new directions are presented including chemicals used for preventing corrosion of copper lines, cleaning aluminium lines, reclaiming wafers, and water bonding, as well as the filtering and recirculating of chemicals including reuse and recycling Wetting, cleaning, and drying of features, such as high aspect ratio features and hydrophilic surface states, especially how to dry without watermarks, the abilities to wet hydrophobic surfaces and to remove liquid from deep features The chemical reactions and mechanisms of silicon dioxide etching with hydrofluoric acid, particle removal with ammonium hydroxide/hydrogen peroxide mixture, and metal removal with hydrochloric acid The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications is a valuable resource for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industries that assures cleanliness of chemicals, material, and equipment in the manufacturing area will also find this handbook an indispensible reference.
Author : Yue Kuo
Publisher : Springer Science & Business Media
ISBN 13 : 9781402075063
Total Pages : 528 pages
Book Rating : 4.0/5 (75 download)
Download or read book Thin Film Transistors: Polycrystalline silicon thin film transistors written by Yue Kuo and published by Springer Science & Business Media. This book was released on 2004 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Author : Hisham Z. Massoud
Publisher :
ISBN 13 :
Total Pages : 562 pages
Book Rating : 4.3/5 (91 download)
Download or read book The Physics and Chemistry of SiO2 and the Si-SiO2 Interface--4, 2000 written by Hisham Z. Massoud and published by . This book was released on 2000 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Hari Singh Nalwa
Publisher : Academic Press
ISBN 13 : 0080533647
Total Pages : 3593 pages
Book Rating : 4.0/5 (85 download)
Download or read book Handbook of Nanostructured Materials and Nanotechnology, Five-Volume Set written by Hari Singh Nalwa and published by Academic Press. This book was released on 1999-10-29 with total page 3593 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanostructured materials is one of the hottest and fastest growing areas in today's materials science field, along with the related field of solid state physics. Nanostructured materials and their based technologies have opened up exciting new possibilites for future applications in a number of areas including aerospace, automotive, x-ray technology, batteries, sensors, color imaging, printing, computer chips, medical implants, pharmacy, and cosmetics. The ability to change properties on the atomic level promises a revolution in many realms of science and technology. Thus, this book details the high level of activity and significant findings are available for those involved in research and development in the field. It also covers industrial findings and corporate support. This five-volume set summarizes fundamentals of nano-science in a comprehensive way. The contributors enlisted by the editor are at elite institutions worldwide. Key Features * Provides comprehensive coverage of the dominant technology of the 21st century * Written by 127 authors from 16 countries, making this truly international * First and only reference to cover all aspects of nanostructured materials and nanotechnology
Author : C.K Maiti
Publisher : CRC Press
ISBN 13 : 1420034693
Total Pages : 402 pages
Book Rating : 4.4/5 (2 download)
Download or read book Applications of Silicon-Germanium Heterostructure Devices written by C.K Maiti and published by CRC Press. This book was released on 2001-07-20 with total page 402 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book to deal with the design and optimization of transistors made from strained layers, Applications of Silicon-Germanium Heterostructure Devices combines three distinct topics-technology, device design and simulation, and applications-in a comprehensive way. Important aspects of the book include key technology issues for the growth of st
