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Download or read book Optimization of X-ray Sources for Proximity Lithography Produced by a High Average Power Nd:glass Laser. Revision 1 written by and published by . This book was released on 1995 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optimization of X-ray Sources for Proximity Lithography Produced by a High Average Power Nd:glass Laser. Revision 1 written by and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: We measured the conversion efficiency of laser pulse energy into keV x-rays from a variety of solid planar targets and a Xe gas puff target irradiated using a high average power Nd:glass slab laser capable of delivering 13 ns FWHM pulses at up to 20 J at 1.053[mu]m and 12 J at 0.53[mu]m. Targets where chosen to optimize emission in the l0--15[angstrom] wavelength band, including L-shell emission from materials with atomic numbers in the range Z=24-30 and M-shell emission from Xe (Z=54). With 1.053[mu]m a maximum conversion of 11% into 2[pi] sr was measured from solid Xe targets. At 0.527[mu]m efficiencies of 12--18%/(2[pi]sr) were measured for all of the solid targets in the same wavelength band. The x-ray conversion efficiency from the Xe gas puff target was considerably lower, at about 3%/(2[pi]sr) when irradiated with 1.053[mu]m.
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ISBN 13 :
Total Pages : 11 pages
Book Rating : 4.:/5 (925 download)
Download or read book Optimization of X-ray Sources from a High-average-power ND written by and published by . This book was released on 1996 with total page 11 pages. Available in PDF, EPUB and Kindle. Book excerpt: The concept of a laser-based proximity lithography system for electronic microcircuit production has advanced to the point where a detailed design of a prototype system capable of exposing wafers at 40 wafer levels per hr is technically feasible with high-average-power laser technology. In proximity x-ray lithography, a photoresist composed of polymethyl- methacrylate (PMMA) or similar material is exposed to x rays transmitted through a mask placed near the photoresist, a procedure which is similar to making a photographic contact print. The mask contains a pattern of opaque metal features, with line widths as small as 0.12 [mu]m, placed on a thin (1-[mu]m thick) Si membrane. During the exposure, the shadow of the mask projected onto the resist produces in the physical and chemical properties of the resist a pattern of variation with the same size and shape as the features contained in the metal mask. This pattern can be further processed to produce microscopic structures in the Si substrate. The main application envisioned for this technology is the production of electronic microcircuits with spatial features significantly smaller than currently achievable with conventional optical lithographic techniques (0.12 {micro}m vs 0.25 {micro}m). This article describes work on optimizing a laser-produced plasma x-ray source intended for microcircuit production by proximity lithography.
Author : Koch, Frieder Johannes
Publisher : KIT Scientific Publishing
ISBN 13 : 3731506793
Total Pages : 168 pages
Book Rating : 4.7/5 (315 download)
Download or read book X-ray optics made by X-ray lithography: Process optimization and quality control written by Koch, Frieder Johannes and published by KIT Scientific Publishing. This book was released on 2017-10-16 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Author : Arnaud Brignon
Publisher : John Wiley & Sons
ISBN 13 : 9780471439578
Total Pages : 434 pages
Book Rating : 4.4/5 (395 download)
Download or read book Phase Conjugate Laser Optics written by Arnaud Brignon and published by John Wiley & Sons. This book was released on 2003-12 with total page 434 pages. Available in PDF, EPUB and Kindle. Book excerpt: A complete review of the state of the art of phase conjugate lasers, including laser demonstrations, performances, technology and selection of the most important class of nonlinear media. * Emphasizes the basic aspects of phase conjugation. * Chapter authors have all made major contributions to their subjects.
Author : Ralf Menzel
Publisher : Springer Science & Business Media
ISBN 13 : 3662045214
Total Pages : 895 pages
Book Rating : 4.6/5 (62 download)
Download or read book Photonics written by Ralf Menzel and published by Springer Science & Business Media. This book was released on 2013-04-18 with total page 895 pages. Available in PDF, EPUB and Kindle. Book excerpt: Deals with the fundamental properties of photon and light beams, both experimentally and theoretically. It covers the essentials of linear interactions and most of the nonlinear interactions between light and matter in both the transparent and absorbing cases. About 4000 references open access to original literature.
Author : George A. Kyrala
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 370 pages
Book Rating : 4.3/5 (91 download)
Download or read book Laser-generated, Synchrotron, and Other Laboratory X-ray and EUV Sources, Optics, and Applications II written by George A. Kyrala and published by SPIE-International Society for Optical Engineering. This book was released on 2005 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
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ISBN 13 :
Total Pages : 450 pages
Book Rating : 4.F/5 ( download)
Download or read book Emerging Lithographic Technologies written by and published by . This book was released on 1999 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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ISBN 13 :
Total Pages : 1120 pages
Book Rating : 4.3/5 (91 download)
Download or read book Applied Science & Technology Index written by and published by . This book was released on 1996 with total page 1120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Frieder Johannes Koch
Publisher :
ISBN 13 : 9781013280580
Total Pages : 158 pages
Book Rating : 4.2/5 (85 download)
Download or read book X-ray Optics Made by X-ray Lithography written by Frieder Johannes Koch and published by . This book was released on 2020-10-09 with total page 158 pages. Available in PDF, EPUB and Kindle. Book excerpt: Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work. This work was published by Saint Philip Street Press pursuant to a Creative Commons license permitting commercial use. All rights not granted by the work's license are retained by the author or authors.
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ISBN 13 :
Total Pages : 342 pages
Book Rating : 4.3/5 (91 download)
Download or read book Applications of X Rays Generated from Lasers and Other Bright Sources written by and published by . This book was released on 1997 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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ISBN 13 :
Total Pages : 80 pages
Book Rating : 4.3/5 (126 download)
Download or read book Inertial Confinement Fusion written by and published by . This book was released on 1995-04 with total page 80 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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ISBN 13 :
Total Pages : 1028 pages
Book Rating : 4.:/5 (31 download)
Download or read book Energy Research Abstracts written by and published by . This book was released on 1995 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiannual, with semiannual and annual indexes. References to all scientific and technical literature coming from DOE, its laboratories, energy centers, and contractors. Includes all works deriving from DOE, other related government-sponsored information, and foreign nonnuclear information. Arranged under 39 categories, e.g., Biomedical sciences, basic studies; Biomedical sciences, applied studies; Health and safety; and Fusion energy. Entry gives bibliographical information and abstract. Corporate, author, subject, report number indexes.
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ISBN 13 :
Total Pages : 814 pages
Book Rating : 4.E/5 ( download)
Download or read book Government Reports Announcements & Index written by and published by . This book was released on 1996 with total page 814 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Richard F. Haglund
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 172 pages
Book Rating : 4.3/5 (91 download)
Download or read book Laser Plasma Generation and Diagnostics written by Richard F. Haglund and published by SPIE-International Society for Optical Engineering. This book was released on 2000 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Krzysztof M. Abramski
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 828 pages
Book Rating : 4.F/5 ( download)
Download or read book Fourteenth International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers written by Krzysztof M. Abramski and published by SPIE-International Society for Optical Engineering. This book was released on 2003 with total page 828 pages. Available in PDF, EPUB and Kindle. Book excerpt: Earlier conferences called: International Symposium on Gas Flow and Chemical Lasers.
Author : Wiesław Woliński
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 382 pages
Book Rating : 4.3/5 (91 download)
Download or read book Laser Technology VII. written by Wiesław Woliński and published by SPIE-International Society for Optical Engineering. This book was released on 2003 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
