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Author : Sameer H. Jain
Publisher :
ISBN 13 :
Total Pages : 166 pages
Book Rating : 4.F/5 ( download)
Download or read book Novel Methods for Low Resistance Ultra-shallow Junction Formation written by Sameer H. Jain and published by . This book was released on 2005 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772747
Total Pages : 482 pages
Book Rating : 4.7/5 (727 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2000 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 1566775027
Total Pages : 472 pages
Book Rating : 4.5/5 (667 download)
Download or read book Advanced Gate Stack, Source/drain, and Channel Engineering for Si-based CMOS 2 written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2006 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: These proceedings describe processing, materials, and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topics: strained Si/SiGe and Si/SiGe on insulator; high-mobility channels including III-V¿s, etc.; nanowires and carbon nanotubes; high-k dielectrics, metal and FUSI gate electrodes; doping/annealing for ultra-shallow junctions; low-resistivity contacts; advanced deposition (e.g. ALD, CVD, MBE), RTP, UV, plasma and laser-assisted processes.
Author : Cor L. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 9781566773089
Total Pages : 636 pages
Book Rating : 4.7/5 (73 download)
Download or read book ULSI Process Integration II written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 2001 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Cor L. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 1566775728
Total Pages : 509 pages
Book Rating : 4.5/5 (667 download)
Download or read book ULSI Process Integration 5 written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 2007 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.
Author : Ming Yang
Publisher :
ISBN 13 :
Total Pages : 688 pages
Book Rating : 4.:/5 (37 download)
Download or read book Semiconductor Technology (ISTC 2001) written by Ming Yang and published by . This book was released on 2001 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : C. M. Osburn
Publisher :
ISBN 13 :
Total Pages : 804 pages
Book Rating : 4.E/5 ( download)
Download or read book ULSI Science and Technology, 1989 written by C. M. Osburn and published by . This book was released on 1989 with total page 804 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 862 pages
Book Rating : 4.F/5 ( download)
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2006 with total page 862 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : S. Broydo
Publisher :
ISBN 13 :
Total Pages : 874 pages
Book Rating : 4.E/5 ( download)
Download or read book ULSI Science and Technology/1987 written by S. Broydo and published by . This book was released on 1987 with total page 874 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 926 pages
Book Rating : 4.X/5 (3 download)
Download or read book JJAP written by and published by . This book was released on 2007 with total page 926 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : D.F. Downey
Publisher : Elsevier
ISBN 13 : 0444599800
Total Pages : 716 pages
Book Rating : 4.4/5 (445 download)
Download or read book Ion Implantation Technology - 92 written by D.F. Downey and published by Elsevier. This book was released on 2012-12-02 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wide application of ion implantation, as well as exploitation of newly identified opportunities, will require the development of comprehensive implant models. The 141 papers (including 24 invited papers) in this volume address the most recent developments in this field. New structures and possible approaches are described. The implications for ion implantation technology as well as additional observations of needs and opportunities are discussed. The volume will be of value to all those who are interested in acquiring a more complete understanding of the current developments in ion implantation processes and comprehensive implant models.
Author :
Publisher :
ISBN 13 :
Total Pages : 914 pages
Book Rating : 4.:/5 (318 download)
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2007 with total page 914 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : J. Murota
Publisher : The Electrochemical Society
ISBN 13 : 1607688212
Total Pages : 325 pages
Book Rating : 4.6/5 (76 download)
Download or read book Semiconductor Process Integration 10 written by J. Murota and published by The Electrochemical Society. This book was released on with total page 325 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 764 pages
Book Rating : 4.F/5 ( download)
Download or read book Program Solicitation written by and published by . This book was released on 1989 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : P. J. Timans
Publisher : The Electrochemical Society
ISBN 13 : 1566776260
Total Pages : 488 pages
Book Rating : 4.5/5 (667 download)
Download or read book Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment written by P. J. Timans and published by The Electrochemical Society. This book was released on 2008-05 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue describes processing, materials and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topics: strained Si/SiGe and Si/SiGe on insulator; high-mobility channels including III-V¿s, etc.; nanowires and carbon nanotubes; high-k dielectrics, metal and FUSI gate electrodes; doping/annealing for ultra-shallow junctions; low-resistivity contacts; advanced deposition (e.g. ALD, CVD, MBE), RTP, UV, plasma and laser-assisted processes.
Author :
Publisher :
ISBN 13 :
Total Pages : 876 pages
Book Rating : 4.:/5 (318 download)
Download or read book Solid State Technology written by and published by . This book was released on 2001 with total page 876 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Sang-Hyun Oh
Publisher :
ISBN 13 :
Total Pages : 434 pages
Book Rating : 4.F/5 ( download)
Download or read book Physics and Technologies of Vertical Transistors written by Sang-Hyun Oh and published by . This book was released on 2001 with total page 434 pages. Available in PDF, EPUB and Kindle. Book excerpt:
