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Author : Pon-ung Ku
Publisher :
ISBN 13 :
Total Pages : 198 pages
Book Rating : 4.:/5 (89 download)
Download or read book Negative Ion Study Electron Cyclotron Resonance Etching Plasmas written by Pon-ung Ku and published by . This book was released on 1999 with total page 198 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Søsætningen af Diesel-Motorskibet "Kronprins Olav" written by and published by . This book was released on 1937 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gerhard Franz
Publisher : Springer Science & Business Media
ISBN 13 : 3540858490
Total Pages : 743 pages
Book Rating : 4.5/5 (48 download)
Download or read book Low Pressure Plasmas and Microstructuring Technology written by Gerhard Franz and published by Springer Science & Business Media. This book was released on 2009-04-09 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the semiconductor industry is inconceivable wi- outthegiantprogressintheplasmatechnology.Moore’slawisnotcarvedinto 1 stone, and not only the ITRS map is subject to change every ?ve years but also new branches develop and others mingle together. Moreover, the quality of conventional materials can be improved by plasma treatment:Cottonbecomesmorecrease-resistant,leathermoredurable,andthe shrinking of wool ?bers during the washing process can be signi?cantly reduced. To cut a long story short: More than 150 years after the discovery of the sputtering e?ect by Grove, plasma-based processes are about to spread out into new ?elds of research and application [1]—no wonder that the market for etching machines kept growing by an annual rate of 17 % up to the burst of the internet bubble, and it took only some years of recovery to continue the voyage [2].
Author : Lambertus C. de Kock
Publisher :
ISBN 13 :
Total Pages : 91 pages
Book Rating : 4.:/5 (258 download)
Download or read book Experimental Study of Ion Heating by Wave Mixing in an Electron-cyclotron-resonance Plasma written by Lambertus C. de Kock and published by . This book was released on 1973 with total page 91 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Mubarak A. Mujawar
Publisher :
ISBN 13 :
Total Pages : 143 pages
Book Rating : 4.:/5 (87 download)
Download or read book Studies on Constricted Hollow Anode Plasma Source for Negative Ion Production written by Mubarak A. Mujawar and published by . This book was released on 2013 with total page 143 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electronegative plasmas have a wide ranging applications following its primary role in the production of energetic neutral beams of hydrogen used for plasma heating in fusion devices. In technological plasma applications electronegative gases are used for plasma etching which readily form stable negative ions. Significant population of negative ions in a discharge can greatly influence the discharge properties by reducing electron density while modifying the sheath structures adjacent to the substrates. Formation of negative ions is a complex process. They are primarily formed in the bulk phase by the dissociative attachment of low energy electron to an excited molecule. However intermediate excitation of the neutral molecules requires the presence of energetic electrons in the discharge. An efficient mechanism of negative ion production is via interaction with a low work function material such as Caesium coated surface as used in the negative ion source for neutral beam extraction. However, caesium migration between the acceleration grids can be a major concern for the failure of ion source during long pulse operation. Therefore suitably tailoring the plasma properties of the source can help in improving the efficiency of negative ion production in the bulk phase rather than surface production. The thesis deals with the study of oxygen negative ion formation in the anodic glow plasma. The anodic glow is characterized by a double layer having a steep gradient in Te and electron density. This region provides a natural favourable condition for the production of negative ions. The anodic glow is created via D.C discharge between a hollow tubular-anode in conjunction with parallel plate cathodes. The results show significant fraction of negative oxygen ions near the anodic glow. Theoretical estimates of negative ions at each spatial location are obtained by providing electron density and temperature measured using plasma diagnostic probes. The results show reasonable agreement with the experimental data suggesting that anodic glow can provide a suitable breeding ground for the production of negative ions. A qualitative model is presented for observing the oscillation in the discharge current due to ionization instability at the anode sheath.
Author :
Publisher :
ISBN 13 :
Total Pages : 692 pages
Book Rating : 4.:/5 (3 download)
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Mathis A. Smith
Publisher :
ISBN 13 :
Total Pages : 212 pages
Book Rating : 4.:/5 (195 download)
Download or read book Electron Cyclotron Resonance Microwave Plasma Etching written by Mathis A. Smith and published by . This book was released on 1988 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Vadim Dudnikov
Publisher : Springer Nature
ISBN 13 : 3030284379
Total Pages : 346 pages
Book Rating : 4.0/5 (32 download)
Download or read book Development and Applications of Negative Ion Sources written by Vadim Dudnikov and published by Springer Nature. This book was released on 2019-10-18 with total page 346 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the development of sources of negative ions and their application in science and industry. It describes the physical foundations and implementation of the key methods of negative ion production and control, such as charge exchange, thermionic emission, secondary emission (sputtering) and surface-plasma sources, as well as the history of their development. Following on from this essential foundational material, the book goes on to explore transport of negative ion beams, and beam-plasma instabilities. With exposition accessible at the graduate level, and a comprehensive bibliography, this book will appeal to all students and researchers whose work concerns ion sources and their applications to accelerators, beam physics, storage rings, cyclotrons, and plasma traps.
Author : Fan Cheung Sze
Publisher :
ISBN 13 :
Total Pages : 574 pages
Book Rating : 4.3/5 (129 download)
Download or read book Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source written by Fan Cheung Sze and published by . This book was released on 1993 with total page 574 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Lambertus Cornelis J.M. de Kock
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (92 download)
Download or read book Experimental Study of Ion Heating by Wave Mixing in an Electron-cyclotron Resonance Plasma: Proefschrift written by Lambertus Cornelis J.M. de Kock and published by . This book was released on 1973 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : James Benedict Friedmann
Publisher :
ISBN 13 :
Total Pages : 692 pages
Book Rating : 4.:/5 (89 download)
Download or read book Plasma-parameter Dependence of Thin-oxide Charging Damage to Microelectronic Test Structures in an Electron-cyclotron-resonance Plasma written by James Benedict Friedmann and published by . This book was released on 1995 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Aseem Kumar Srivastava
Publisher :
ISBN 13 :
Total Pages : 384 pages
Book Rating : 4.3/5 (129 download)
Download or read book Properties of Electron Cyclotron Resonance Plasma Sources written by Aseem Kumar Srivastava and published by . This book was released on 1995 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : de Kock (L. C. J. M.)
Publisher :
ISBN 13 :
Total Pages : 89 pages
Book Rating : 4.:/5 (989 download)
Download or read book Experimental Study of Ion Heating by Wave Mixing in an Electron-cyclotron-resonance Plasma written by de Kock (L. C. J. M.) and published by . This book was released on 1973 with total page 89 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gareth Guest
Publisher : John Wiley & Sons
ISBN 13 : 9783527627899
Total Pages : 264 pages
Book Rating : 4.6/5 (278 download)
Download or read book Electron Cyclotron Heating of Plasmas written by Gareth Guest and published by John Wiley & Sons. This book was released on 2009-11-04 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: Authored by a highly regarded plasma scientist, this book fills the gap for a topical reference and source with a professional audience in mind. While the use of this critical method at the international fusion reactor, ITER, is covered in detail, the monograph also includes planetary magnetospheres and plasma sources for commercial applications. With exercises and solutions for additional use as course reading.
Author : Viswas Purohit
Publisher : University of Pune, PhD Dissertation
ISBN 13 :
Total Pages : 204 pages
Book Rating : 4./5 ( download)
Download or read book To Study the ECR Plasma Assisted Growth of III-V Nitride (such as GaN) and Nanostructures written by Viswas Purohit and published by University of Pune, PhD Dissertation. This book was released on with total page 204 pages. Available in PDF, EPUB and Kindle. Book excerpt: RESEARCH THESIS by Viswas Purohit PhD, Plasma Physics University of Pune, MAH, India “To study the ECR assisted Growth of III-V nitride (such as GaN) and nanostructures”. • The aim of the work carried out was to design and develop a permanent magnet based Electron Cyclotron Resonance (ECR) plasma system as well as to study the plasma assisted material synthesis and modifications with the ECR plasma. Overall the aims were, a) Development of an ECR plasma system b) Carrying out plasma diagnostics using Langmuir double probe and Retarding field analyzer. c) Use of hollow cathode discharge for synthesizing metallic nanomaterials, which spawned two more projects in our department. d) Depositing GaN by MOCVD within an ECR plasma reactor.
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309045975
Total Pages : 88 pages
Book Rating : 4.3/5 (9 download)
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Author : Panel on Plasma Processing of Materials
Publisher :
ISBN 13 :
Total Pages : 92 pages
Book Rating : 4.1/5 (49 download)
Download or read book Plasma Processing of Materials written by Panel on Plasma Processing of Materials and published by . This book was released on 1991-02 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
