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Nanofabrication And Its Application In Developing High Aspect Ratio Har And Edge Atomic Force Microscopy Afm Probes
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Book Synopsis Nanofabrication and Its Application in Developing High Aspect Ratio (HAR) and Edge Atomic Force Microscopy (AFM) Probes by : Chenxu Zhu
Download or read book Nanofabrication and Its Application in Developing High Aspect Ratio (HAR) and Edge Atomic Force Microscopy (AFM) Probes written by Chenxu Zhu and published by . This book was released on 2018 with total page 56 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis focuses on nanofabrication and its applications which are related to producing atomic force microscope (AFM) probes. This thesis is divided into four chapters. The first chapter brings a preliminary introduction to nanofabrication. The second chapter reviews the history of AFM and fabrication process of AFM probe. Equipping with the basic knowledge, Chapter 3, the main chapter, goes to our work on the batch fabrication of high aspect ratio (HAR) AFM tips. Last but not least, Chapter 4 focuses on another work, batch fabrication of edge probes. In order to obtain a more accurate image of surfaces, high aspect ratio tips are needed to reach the bottom of very deep and narrow trenches. However, currently all commercial HAR tips are produced in a slow, high-cost (~5-20x that of regular AFM tips) way. We have developed a new method to batch fabricate HAR tips. In this fabrication, two kinds of hard masks were deposited at a specific angle followed by two etching processes (dry etching and wet etching respectively). As a result, a small piece of hard mask was formed just on the apex of pyramid tip, which would be the protection layer in the following RIE step. The batch and lithography-free process makes it an efficient and low-cost method. The controllable profile, radius of curvature and aspect ratio of tips can be easily obtained by adjusting gas ratio and etching time in RIE. All the parameters and results were demonstrated clearly assisted by images and schematics. For edge probes, our method to batch fabricate tips on the edge is introduced step by step as well. The objective of every step is presented in detail assisted with schematics and tables.
Book Synopsis Nanofabrication and Its Application in Atomic Force Microscopy (AFM) by : Ripon Dey
Download or read book Nanofabrication and Its Application in Atomic Force Microscopy (AFM) written by Ripon Dey and published by . This book was released on 2015 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis is focused on nanofabrication and its application in atomic force microscopy (AFM). The contribution of this thesis is thus the development, investigation and characterization of novel nanofabrication technique (Part I); and application of nanofabrication in manufacturing the high aspect ratio AFM tips (Part II). In the first part of the thesis, firstly, unlike optical and mechanical lithography such as nanoimprint lithography, the throughput of EBL is very low, which demands for highly sensitive resists. We studied the dependency of e-beam exposure properties on molecular weight of the negative EBL resist polystyrene, and very high sensitivity of 1 [mu]C/cm2 was obtained for 900 kg/mol when exposed with electron beam of 2 keV. We also demonstrated that the exposure property of high PDI (polydispersity index) polystyrene resembles that of a monodisperse (PDI 1.06) polystyrene with similar number averaged molecular weight ("Mn" )́−, which indicates that it is ("Mn" )− rather than ("Mw" )− (weight averaged molecular weight) that dominates the exposure properties of polystyrene resist. Secondly, lift-off using negative resist is very challenging because the resist profile is typically positively tapered due to electron forward scattering, and upon exposure negative resist is cross-linked and thus insoluble in solvents. Here we demonstrated that low energy exposure could circumvent both issues simultaneously, and we achieved liftoff of Cr with polystyrene resist using a solvent xylene. Lastly, since low energy electrons are mostly stopped inside the resist layer, radiation damage to the sub-layer is greatly reduced. Thirdly, an electron beam resist is usually coated by conventional coating methods such as spin-coating, but this cannot be reliably applied on irregular surfaces. We here reported a monolayer resist can be grafted on nonflat surface. As a proof of concept of patterning on irregular surfaces, we chose PMMA mono-layer "brush" and grafted it on irregular surfaces by thermal treatment which accelerates a chemical reaction between PMMA molecules and hydroxyl group on substrate. We achieved nanofabrication of 30 nm resolution on an AFM cantilever. Fourthly, due to the lack of feedback, conventional electron beam lithography (EBL) is a “blind” open-loop process where the exposed pattern is examined only after ex-situ resist development, which is too late for any improvement. We reported that self-developing resist nitrocellulose, for which pattern shows up right after exposure without ex-situ development, can be used as in-situ feedback on the e-beam distortion and enlargement. Once the beam was optimized using nitrocellulose resist, under the same optimal beam condition, we exposed in the common resist PMMA. We achieved ~80 nm resolution across the entire large writing field of 1 mm2, as compared to 210 nm without the beam optimization process. We also reported that self-developing resist can provide in-situ feedback for writing field alignment accuracy, which in turn can be used to optimize the alignment. In the second part of the thesis, we demonstrated the batch fabrication of high aspect ratio (HAR) AFM tips. In order to obtain high quality and faithful images in AFM, very high aspect ratio tips are required in order to reach to the bottom of narrow and deep trenches/holes. But these HAR tips are extremely difficult to make and consequently very expensive. Currently all the commercially available HAR AFM tips are fabricated in a slow, costly (~5-20 that of regular AFM tips) and serial manner (one by one). We here developed a method to batch fabricate HAR AFM tips by forming a hard metal etching mask just on the apex of the pyramid tip followed by silicon dry etching to achieve the HAR pillar right below the metal island mask. Since it is a batch and lithography-free process, it has much higher throughput and much lower manufacturing cost per tip. This technique was first successfully applied on large-area pyramid arrays and then transferred to the commercial regular AFM tips, and has demonstrated the uniformity, reproducibility and yield of those HAR tips. The tip apex diameter and tip pillar height are controllable by tuning metal thickness and silicon dry etching time respectively. Finally, we demonstrated that the HAR tips fabricated using our technique gave a better imaging quality than the commercial regular tips.
Book Synopsis Fabrication of High Aspect Ratio (HAR) Atomic Force Microscopy (AFM) Probes by One Step E-beam Lithography and AFM Cantilever Patterning Using Grafted Monolayer Brushes by : Ferhat Aydinoglu
Download or read book Fabrication of High Aspect Ratio (HAR) Atomic Force Microscopy (AFM) Probes by One Step E-beam Lithography and AFM Cantilever Patterning Using Grafted Monolayer Brushes written by Ferhat Aydinoglu and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic force microscopy (AFM) allows imaging individual atoms where a very sharp tip touches and feels the substrate. Although a regular AFM tip can achieve atomic resolution, it produces false images on substrates with tall and dense features because of the shape and dimensions of the tip. To solve this problem, high aspect ratio (HAR) AFM tips have emerged. However, the HAR AFM tips are often fabricated individually with the need for expensive instruments such as focused ion beam causing low throughput and high cost. In this thesis, several processes are developed for the batch fabrication of HAR AFM tips to reduce the cost and increase the throughput where HAR tips with tip apex diameter down to 9 nm without oxidation sharpening have been obtained by our methods. Moreover, there are cantilever-based devices demanded in a wide range of applications such as tip-enhanced Raman spectroscopy. Our one-step e-beam lithography technique is capable of forming arbitrary patterns for a variety of applications. Alternatively, a process based on grafting polystyrene monolayer brush has been developed to pattern irregular substrates like cantilevers with e-beam lithography where both negative and positive tone behaviors are obtained under different development conditions. That is, the process enables the fabrication of both recessed and protruded features on both nonflat and very small surfaces. As a result, an AFM cantilever is patterned with high resolution on both top and sidewalls at the same time.
Book Synopsis Tip-Based Nanofabrication by : Ampere A. Tseng
Download or read book Tip-Based Nanofabrication written by Ampere A. Tseng and published by Springer Science & Business Media. This book was released on 2011-07-25 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanofabrication is critical to the realization of potential benefits in the field of electronics, bioengineering and material science. One enabling technology in nanofabrication is Tip-Based Nanofabrication, which makes use of functionalized micro-cantilevers with nanoscale tips. Tip-Based Nanofabrication: Fundamentals and Applications discusses the development of cantilevered nanotips and how they evolved from scanning probe microscopy and are able to manipulate environments at nanoscale on substrates generating different nanoscale patterns and structures. Also covered are the advantages of ultra-high resolution capability, how to use tip based nanofabrication technology as a tool in the manufacturing of nanoscale structures, single-probe tip technologies, multiple-probe tip methodology, 3-D modeling using tip based nanofabrication and the latest in imaging technology.
Book Synopsis Nanofabrication by : Ampere A. Tseng
Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.
Book Synopsis Atomic Force Microscopy in Nanobiology by : Kunio Takeyasu
Download or read book Atomic Force Microscopy in Nanobiology written by Kunio Takeyasu and published by CRC Press. This book was released on 2016-04-19 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent developments in atomic force microscopy (AFM) have been accomplished through various technical and instrumental innovations, including high-resolution and recognition imaging technology under physiological conditions, fast-scanning AFM, and general methods for cantilever modification and force measurement. All these techniques are now highly
Download or read book Nanofabrication written by Zheng Cui and published by Springer Science & Business Media. This book was released on 2009-01-01 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.
Book Synopsis Nanofabrication of Direct Positioning Atomic Force Microscope (AFM) Probes and a Novel Method to Attain Controllable Lift-off by : Shuo Zheng
Download or read book Nanofabrication of Direct Positioning Atomic Force Microscope (AFM) Probes and a Novel Method to Attain Controllable Lift-off written by Shuo Zheng and published by . This book was released on 2017 with total page 62 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis focuses on nanofabrication and its applications in the area related to atomic force microscope (AFM) probes and a novel way of constructing the bi-layer system for liftoff. The contribution of this thesis is therefore the introduction and characterization of nanotechnologies and their applications in fabricating the AFM probes (Part 1). Moreover, an introduction of the liftoff and the exhibition of the experimental results of our technique will be provided (Part 2). The first part of this thesis consists of four chapters. The first chapter brings a brief introduction and an overview of nanotechnologies and nanofabrication to give a big picture of what they are. The second chapter introduces three major nanofabrication techniques that are crucial in manufacturing the AFM tip. Those are evaporation, wet etch and dry etch. The basic concepts, working mechanism and important parameters of these three techniques are discussed. The third chapter presents detail of the AFM probe with its history, principle of operation, fabrication method and carbon nanotube tips. After equipping the knowledge provided in the first three chapters, fabricating a particular direct positioning AFM probe will be discussed next. Therefore, chapter 4 introduces the details of our method to batch fabricate the direct positioning AFM probe step-by-step. Parameters and goals of each step are presented with schematics and SEM images from our results. The second part of this thesis consists of four chapters as well. The first chapter introduces the essentials of a liftoff process and current popular methods to create moderate undercuts. The second chapter describes the experimental process of our technique to acquire controllable undercut by tuning the ratio of ZEP/PMMA mixture. The third part exhibits the results of contrast curves for various mixtures, undercut profiles and Chromium line arrays produced by our liftoff process.
Book Synopsis Micro and Nanomanufacturing Volume II by : Mark J. Jackson
Download or read book Micro and Nanomanufacturing Volume II written by Mark J. Jackson and published by Springer. This book was released on 2017-10-28 with total page 566 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.
Book Synopsis Scanning Probe Microscopy in Nanoscience and Nanotechnology 2 by : Bharat Bhushan
Download or read book Scanning Probe Microscopy in Nanoscience and Nanotechnology 2 written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2010-12-17 with total page 823 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the physical and technical foundation of the state of the art in applied scanning probe techniques. It constitutes a timely and comprehensive overview of SPM applications. The chapters in this volume relate to scanning probe microscopy techniques, characterization of various materials and structures and typical industrial applications, including topographic and dynamical surface studies of thin-film semiconductors, polymers, paper, ceramics, and magnetic and biological materials. The chapters are written by leading researchers and application scientists from all over the world and from various industries to provide a broader perspective.
Book Synopsis Atomic Force Microscopy, Scanning Nearfield Optical Microscopy and Nanoscratching by : Gerd Kaupp
Download or read book Atomic Force Microscopy, Scanning Nearfield Optical Microscopy and Nanoscratching written by Gerd Kaupp and published by Springer Science & Business Media. This book was released on 2006-10-24 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: Making a clear distinction is made between nano- and micro-mechanical testing for physical reasons, this monograph describes the basics and applications of the supermicroscopies AFM and SNOM, and of the nanomechanical testing on rough and technical natural surfaces in the submicron range down to a lateral resolution of a few nm. New or improved instrumentation, new physical laws and unforeseen new applications in all branches of natural sciences (around physics, chemistry, mineralogy, materials science, biology and medicine) and nanotechnology are covered as well as the sources for pitfalls and errors. It outlines the handling of natural and technical samples in relation to those of flat standard samples and emphasizes new special features. Pitfalls and sources of errors are clearly demonstrated as well as their efficient remedy when going from molecularly flat to rough surfaces. The academic or industrial scientist learns how to apply the principles for tackling their scientific or manufacturing tasks that include roughness far away from standard samples.
Book Synopsis Conductive Atomic Force Microscopy by : Mario Lanza
Download or read book Conductive Atomic Force Microscopy written by Mario Lanza and published by John Wiley & Sons. This book was released on 2017-08-07 with total page 385 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book to summarize the applications of CAFM as the most important method in the study of electronic properties of materials and devices at the nanoscale. To provide a global perspective, the chapters are written by leading researchers and application scientists from all over the world and cover novel strategies, configurations and setups where new information will be obtained with the help of CAFM. With its substantial content and logical structure, this is a valuable reference for researchers working with CAFM or planning to use it in their own fields of research.
Book Synopsis Atomic Force Microscopy for Energy Research by : Cai Shen
Download or read book Atomic Force Microscopy for Energy Research written by Cai Shen and published by CRC Press. This book was released on 2022-04-26 with total page 457 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic force microscopy (AFM) can be used to analyze and measure the physical properties of all kinds of materials at nanoscale in the atmosphere, liquid phase, and ultra-high vacuum environment. It has become an important tool for nanoscience research. In this book, the basic principles of functional AFM techniques and their applications in energy materials—such as lithium-ion batteries, solar cells, and other energy-related materials—are addressed. FEATURES First book to focus on application of AFM for energy research Details the use of advanced AFM and addresses many types of functional AFM tools Enables readers to operate an AFM instrument successfully and to understand the data obtained Covers new achievements in AFM instruments, including electrochemical strain microscopy, and how AFM is being combined with other new methods such as infrared (IR) spectroscopy With its substantial content and logical structure, Atomic Force Microscopy for Energy Research is a valuable reference for researchers in materials science, chemistry, and physics who are working with AFM or planning to use it in their own fields of research, especially energy research.
Book Synopsis Atomic Force Microscopy Based Nanorobotics by : Hui Xie
Download or read book Atomic Force Microscopy Based Nanorobotics written by Hui Xie and published by Springer. This book was released on 2011-09-25 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: The atomic force microscope (AFM) has been successfully used to perform nanorobotic manipulation operations on nanoscale entities such as particles, nanotubes, nanowires, nanocrystals, and DNA since 1990s. There have been many progress on modeling, imaging, teleoperated or automated control, human-machine interfacing, instrumentation, and applications of AFM based nanorobotic manipulation systems in literature. This book aims to include all of such state-of-the-art progress in an organized, structured, and detailed manner as a reference book and also potentially a textbook in nanorobotics and any other nanoscale dynamics, systems and controls related research and education. Clearly written and well-organized, this text introduces designs and prototypes of the nanorobotic systems in detail with innovative principles of three-dimensional manipulation force microscopy and parallel imaging/manipulation force microscopy.
Book Synopsis Scanning Probe Microscopy¿in Industrial Applications by : Dalia G. Yablon
Download or read book Scanning Probe Microscopy¿in Industrial Applications written by Dalia G. Yablon and published by John Wiley & Sons. This book was released on 2013-10-24 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: Describes new state-of-the-science tools and their contribution to industrial R&D With contributions from leading international experts in the field, this book explains how scanning probe microscopy is used in industry, resulting in improved product formulation, enhanced processes, better quality control and assurance, and new business opportunities. Readers will learn about the use of scanning probe microscopy to support R&D efforts in the semiconductor, chemical, personal care product, biomaterial, pharmaceutical, and food science industries, among others. Scanning Probe Microscopy in Industrial Applications emphasizes nanomechanical characterization using scanning probe microscopy. The first half of the book is dedicated to a general overview of nanomechanical characterization methods, offering a complete practical tutorial for readers who are new to the topic. Several chapters include worked examples of useful calculations such as using Hertz mechanics with and without adhesion to model a contact, step-by-step instructions for simulations to guide cantilever selection for an experiment, and data analysis procedures for dynamic contact experiments. The second half of the book describes applications of nanomechanical characterization in industry, including: New formulation development for pharmaceuticals Measurement of critical dimensions and thin dielectric films in the semiconductor industry Effect of humidity and temperature on biomaterials Characterization of polymer blends to guide product formulation in the chemicals sector Unraveling links between food structure and function in the food industry Contributions are based on the authors' thorough review of the current literature as well as their own firsthand experience applying scanning probe microscopy to solve industrial R&D problems. By explaining the fundamentals before advancing to applications, Scanning Probe Microscopy in Industrial Applications offers a complete treatise that is accessible to both novices and professionals. All readers will discover how to apply scanning probe microscopy to build and enhance their R&D efforts.
Book Synopsis Life at the Nanoscale by : Yves Dufrene
Download or read book Life at the Nanoscale written by Yves Dufrene and published by Pan Stanford Publishing. This book was released on 2011-08-29 with total page 454 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive overview of the use of atomic force microscopy (AFM) and related scanning probe microscopies for cell surface analysis, going from the basics to the applications side. It covers all cell types, going from viruses and protoplasts to bacteria and animal cells and to discuss a range of advanced AFM modalities, including high-resolution imaging, nanoindentation measurements, recognition imaging, and single-molecule and single-cell force spectroscopy. The book covers methodologies for preparing and analyzing cells and membranes of all kinds and highlights recent examples to illustrate the power of AFM techniques in life sciences and nanomedicine.
Book Synopsis Microfabrication and Nanomanufacturing by : Mark J. Jackson
Download or read book Microfabrication and Nanomanufacturing written by Mark J. Jackson and published by CRC Press. This book was released on 2005-11-10 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
