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Modeling Design And Fabrication Of Mems Filters For Rf Applications
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Book Synopsis Modeling, Design and Fabrication of MEMS Filters for RF Applications by : Siamak Fouladi Azarnaminy
Download or read book Modeling, Design and Fabrication of MEMS Filters for RF Applications written by Siamak Fouladi Azarnaminy and published by . This book was released on 2005 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Currently, micro electro mechanical systems (MEMS) technology has been used in the fabrication and development of several micro devices which cover a broad range of applications. One of these application areas is the telecommunication industry. Current multi-band communication systems depend on off-chip components for frequency selection stages. Since the fabrication of these off-chip components are not compatible with IC fabrication, the electrical connection has to be in the board level, increasing the cost, size and system complexity. Recently MEMS technology has been used in constructing tunable IC components for RF and wireless transceivers, such as resonators, variable capacitors and inductors. These on-chip components can be utilized to implement system on chip (SOC) transceiver architectures with a better performance. This project is focused on modeling, design, and fabrication of band-pass filters for RF applications using MEMS components. The first class of filters is based on MEMS resonators covering a frequency range from 1MHz to 10MHz and the second class of filters use RF MEMS tunable capacitors. The project has two main parts; the first part is dedicated to the behavioral modeling and generating macro models for MEMS resonators that will be used in system level simulation of the final filter, and the second part discusses the design, fabrication, and post processing of both the MEMS resonators and MEMS variable capacitor, besides the experimental results.
Author :Rajendra M. Patrikar Publisher :Institution of Engineering and Technology ISBN 13 :1785618962 Total Pages :439 pages Book Rating :4.7/5 (856 download)
Book Synopsis MEMS Resonator Filters by : Rajendra M. Patrikar
Download or read book MEMS Resonator Filters written by Rajendra M. Patrikar and published by Institution of Engineering and Technology. This book was released on 2020-06-15 with total page 439 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered. This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail. Case studies where resonator MEMS have been used as components have been included to encourage readers to consider the practical applications of this technology. MEMS Resonator Filters is essential reading for the analogue circuit designer community, particularly those who are designing circuits for wireless communications, and CMOS technology researchers and engineers who are involved in the fabrication of circuits. Designers of sensors and interfacing circuits will also be interested since resonators are also being used as sensors.
Book Synopsis Filter Design Solutions for RF systems by : Leonardo Pantoli
Download or read book Filter Design Solutions for RF systems written by Leonardo Pantoli and published by MDPI. This book was released on 2020-11-19 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Special Issue focuses on the state-of-the-art results from the definition and design of filters for low- and high-frequency applications and systems. Different technologies and solutions are commonly adopted for filter definition, from electrical to electromechanical and mechanical solutions, from passive to active devices, and from hybrid to integrated designs. Aspects related to both theoretical and experimental research in filter design, CAD modeling and novel technologies and applications, as well as filter fabrication, characterization and testing, are covered. The proposed research articles deal with different topics as follows: Modeling, design and simulation of filters; Processes and fabrication technologies for filters; Automated characterization and test of filters; Voltage and current mode filters; Integrated and discrete filters; Passive and active filters; Variable filters, characterization and tunability.
Download or read book RF MEMS written by Gabriel M. Rebeiz and published by John Wiley & Sons. This book was released on 2004-02-06 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Book Synopsis Microstrip Filters for RF / Microwave Applications by : Jia-Sheng Hong
Download or read book Microstrip Filters for RF / Microwave Applications written by Jia-Sheng Hong and published by John Wiley & Sons. This book was released on 2011-01-06 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first edition of “Microstrip Filters for RF/Microwave Applications” was published in 2001. Over the years the book has been well received and is used extensively in both academia and industry by microwave researchers and engineers. From its inception as a manuscript the book is almost 8 years old. While the fundamentals of filter circuits have not changed, further innovations in filter realizations and other applications have occurred with changes in the technology and use of new fabrication processes, such as the recent advances in RF MEMS and ferroelectric films for tunable filters; the use of liquid crystal polymer (LCP) substrates for multilayer circuits, as well as the new filters for dual-band, multi-band and ultra wideband (UWB) applications. Although the microstrip filter remains as the main transmission line medium for these new developments, there has been a new trend of using combined planar transmission line structures such as co-planar waveguide (CPW) and slotted ground structures for novel physical implementations beyond the single layer in order to achieve filter miniaturization and better performance. Also, over the years, practitioners have suggested topics that should be added for completeness, or deleted in some cases, as they were not very useful in practice. In view of the above, the authors are proposing a revised version of the “Microstrip Filters for RF/Microwave Applications” text and a slightly changed book title of “Planar Filters for RF/Microwave Applications” to reflect the aforementioned trends in the revised book.
Book Synopsis RF MEMS and Their Applications by : Vijay K. Varadan
Download or read book RF MEMS and Their Applications written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2003-07-25 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.
Book Synopsis MEMS-based Circuits and Systems for Wireless Communication by : Christian C Enz
Download or read book MEMS-based Circuits and Systems for Wireless Communication written by Christian C Enz and published by Springer Science & Business Media. This book was released on 2012-08-21 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS-based Circuits and Systems for Wireless Communications provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead. This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on design of electronic circuits incorporating MEMS. Circuit design techniques specific to MEMS resonators are applied to oscillators and active filters. In Part III contributors discuss how MEMS can advantageously be used in radios to increase their miniaturization and reduce their power consumption. RF systems built around MEMS components such as MEMS-based frequency synthesis including all-digital PLLs, ultra-low power MEMS-based communication systems and a MEMS-based automotive wireless sensor node are described.
Book Synopsis Practical Guide to RF-MEMS by : Jacopo Iannacci
Download or read book Practical Guide to RF-MEMS written by Jacopo Iannacci and published by John Wiley & Sons. This book was released on 2013-08-12 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages. Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.
Book Synopsis Microstrip Filters for RF / Microwave Applications by : Jia-Shen G. Hong
Download or read book Microstrip Filters for RF / Microwave Applications written by Jia-Shen G. Hong and published by John Wiley & Sons. This book was released on 2004-04-07 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced, specialized coverage of microstrip filter design Microstrip Filters for RF/Microwave Applications is the only professional reference focusing solely on microstrip filters. It offers a unique and comprehensive treatment of filters based on the microstrip structure and includes full design methodologies that are also applicable to waveguide and other transmission line filters. The authors include coverage of new configurations with advanced filtering characteristics, new design techniques, and methods for filter miniaturization. The book utilizes numerous design examples to illustrate and emphasize computer analysis and synthesis while also discussing the applications of commercially available software. Other highlights include: Lowpass and bandpass filters Highpass and bandstop filters Full-wave electromagnetic simulation Advanced materials and technologies Coupled resonator circuits Computer-aided design for low-cost/high-volume production Compact filters and filter miniaturization Microstrip Filters for RF/Microwave Applications is not only a valuable design resource for practitioners, but also a handy reference for students and researchers in microwave engineering.
Book Synopsis Acoustic Wave and Electromechanical Resonators by : Humberto Campanella
Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Book Synopsis Advances in Filter Miniaturization and Design/analysis of RF MEMS Tunable Filters by : Vikram Sekar
Download or read book Advances in Filter Miniaturization and Design/analysis of RF MEMS Tunable Filters written by Vikram Sekar and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The main purpose of this dissertation was to address key issues in the design and analysis of RF/microwave filters for wireless applications. Since RF/microwave filters are one of the bulkiest parts of communication systems, their miniaturization is one of the most important technological challenges for the development of compact transceivers. In this work, novel miniaturization techniques were investigated for single-band, dual-band, ultra-wideband and tunable bandpass filters. In single-band filters, the use of cross-shaped fractals in half-mode substrate-integrated-waveguide bandpass filters resulted in a 37 percent size reduction. A compact bandpass filter that occupies an area of 0.315 mm2 is implemented in 90-nm CMOS technology for 20 GHz applications. For dual-band filters, using half-mode substrate-integrated-waveguides resulted in a filter that is six times smaller than its full-mode counterpart. For ultra-wideband filters, using slow-wave capacitively-loaded coplanar-waveguides resulted in a filter with improved stopband performance and frequency notch, while being 25 percent smaller in size. A major part of this work also dealt with the concept of 'hybrid' RF MEMS tunable filters where packaged, off-the-shelf RF MEMS switches were used to implement high-performance tunable filters using substrate-integrated-waveguide technology. These 'hybrid' filters are very easily fabricated compared to current state-of-the-art RF MEMS tunable filters because they do not require a clean-room facility. Both the full-mode and half-mode substrate-integrated waveguide tunable filters reported in this work have the best Q-factors (93 - 132 and 75 - 140, respectively) compared to any 'hybrid' RF MEMS tunable filter reported in current literature. Also, the half-mode substrate-integrated waveguide tunable filter is 2.5 times smaller than its full-mode counterpart while having similar performance. This dissertation also presented detailed analytical and simulation-based studies of nonlinear noise phenomena induced by Brownian motion in all-pole RF MEMS tunable filters. Two independent mathematical methods are proposed to calculate phase noise in RF MEMS tunable filters: (1) pole-perturbation approach, and (2) admittance-approach. These methods are compared to each other and to harmonic balance noise simulations using the CAD-model of the RF MEMS switch. To account for the switch nonlinearity in the mathematical methods, a nonlinear nodal analysis technique for tunable filters is also presented. In summary, it is shown that output signal-to-noise ratio degradation due to Brownian motion is maximum for low fractional bandwidth, high order and high quality factor RF MEMS tunable filters. Finally, a self-sustained microwave platform to detect the dielectric constant of organic liquids is presented in this dissertation. The main idea is to use a voltage- controlled negative-resistance oscillator whose frequency of oscillation varies according to the organic liquid under test. To make the system self-sustained, the oscillator is embedded in a frequency synthesizer system, which is then digitally interfaced to a computer for calculation of dielectric constant. Such a system has potential uses in a variety of applications in medicine, agriculture and pharmaceuticals.
Book Synopsis Design and Realizations of Miniaturized Fractal Microwave and RF Filters by : Pierre Jarry
Download or read book Design and Realizations of Miniaturized Fractal Microwave and RF Filters written by Pierre Jarry and published by John Wiley & Sons. This book was released on 2009-11-09 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: An in-depth survey of the design and REALIZATIONS of miniaturized fractal microwave and RF filters Engineers are continually searching for design methods that can satisfy the ever-increasing demand for miniaturization, accuracy, reliability, and fast development time. Design and Realizations of Miniaturized Fractal RF and Microwave Filters provides RF and microwave engineers and researchers, advanced graduate students, and wireless and telecommunication engineers with the knowledge and skills to design and realize miniaturized fractal microwave and RF filters. This book is an essential resource for the realization of portable and cellular phones, WiFi, 3G and 4G, and satellite networks. The text focuses on the synthesis and fabrication of miniaturized fractal filters with symmetrical and asymmetrical frequency characteristics in the C, X and Ku bands, though applications to other frequency bands are considered. Readers will find helpful guidance on: Miniaturized filters in bilevel fashion Simplified methods for the synthesis of pseudo-elliptic electrical networks Methods for extracting coupling coefficients and external quality factors from simulations of the RF/microwave structure Methods for matching theoretical couplings to couplings of structure Including studies of the real-world performance of fractal resonators and sensitivity analyses of suspended substrate realizations, this is a definitive resource for both practicing engineers and students who need timely insight on fractal resonators for compact and low-power microwave and RF applications.
Book Synopsis System-level Modeling of MEMS by : Oliver Brand
Download or read book System-level Modeling of MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2012-12-20 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.
Book Synopsis Novel RF Microelectromechanical Systems Tunable Filters with Adjustable Spurious Suppression by : Vikram Sekar
Download or read book Novel RF Microelectromechanical Systems Tunable Filters with Adjustable Spurious Suppression written by Vikram Sekar and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis presents the theory and design of fixed and Radio Frequency (RF) Microelectromechanical Systems (MEMS) -based tunable microwave filters for RF and microwave applications. The methodology for the design of coupled resonator filters is explained in detail and is used to design an end-coupled microstrip filter at 1.5 GHz with inductive loading using a stepped microstrip discontinuity to lower the resonance frequency of the half-wavelength microstrip resonator. The fabricated endcoupled filter shows center frequencies of 1.36 GHz and 1.03 GHz in the unloaded and loaded state respectively, with insertion losses between 1.2-1.5 dB and return loss better than 10 dB in both states. The filter response shows spurious passbands at approximately twice the filter center frequencies. To overcome this problem and improve the upper rejection skirt of the filter, microstrip resonators with tapped input/output coupling and mixed inter-resonator coupling are used to suppress the spurious passband by introducing a transmission zero at spurious resonance frequency. Measurement results for the fabricated tapped-resonator filters show an improvement of the upper rejection skirt due to spurious suppression to a level of -40 dB, with insertion loss of 1.2-1.5 dB for the same center frequencies. The concepts developed from fabrication and measurement of fixed-tuned microstrip filters are used to design an inductively-loaded RF MEMS tunable filter with adjustable spurious suppression implemented using packaged metal-contact switches. The two-pole 5% filter has a tuning range of 17% from 1.06 GHz to 1.23 GHz with an insertion loss of 1.56-2.28 dB and return loss better than 13 dB over the tuning range. The inductive loading mechanism is used to tune the open-ended quarter wavelength stub such that a tunable transmission zero supresses the spurious resonance as the filter center frequency is tuned. The spurious passband response in both states is suppressed below -20 dB. The unloaded quality factor (Q) of the filter varies from 127 to 75 as the filter is tuned. The equivalent circuit model for the series metalcontact packaged RF MEMS switch used in the tunable filter is derived from full-wave electromagnetic simulations and used to predict the effect of MEMS switch parasitics on the overall performance of the tunable filter.
Book Synopsis RF MEMS Circuit Design for Wireless Communications by : Héctor J. de los Santos
Download or read book RF MEMS Circuit Design for Wireless Communications written by Héctor J. de los Santos and published by Artech House. This book was released on 2002 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.
Book Synopsis Handbook of Mems for Wireless and Mobile Applications by : Deepak Uttamchandani
Download or read book Handbook of Mems for Wireless and Mobile Applications written by Deepak Uttamchandani and published by Elsevier. This book was released on 2013-08-31 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt: The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS
Book Synopsis Smart Material Systems and MEMS by : Vijay K. Varadan
Download or read book Smart Material Systems and MEMS written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2006-11-02 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.
