Micromechanics and MEMS

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Publisher : Wiley-IEEE Press
ISBN 13 :
Total Pages : 728 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Micromechanics and MEMS by : William S. Trimmer

Download or read book Micromechanics and MEMS written by William S. Trimmer and published by Wiley-IEEE Press. This book was released on 1997-01-29 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

Micromechanics and Nanoscale Effects

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Publisher : Springer Science & Business Media
ISBN 13 : 9400710135
Total Pages : 251 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Micromechanics and Nanoscale Effects by : Vasyl Michael Harik

Download or read book Micromechanics and Nanoscale Effects written by Vasyl Michael Harik and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 251 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume consists of the state-of-the-art reports on new developments in micromechanics and the modeling of nanoscale effects, and is a companion book to the recent Kluwer volume on nanomechanics and mul- scale modeling (it is entitled Trends in Nanoscale Mechanics). The two volumes grew out of a series of discussions held at NASA Langley Research Center (LaRC), lectures and other events shared by many researchers from the national research laboratories and academia. The key events include the 2001 Summer Series of Round-Table Discussions on Nanotechnology at ICASE Institute (NASA LaRC) organized by Drs. V. M. Harik and M. D. Salas and the 2002 NASA LaRC Workshop on Multi-scale Modeling. The goal of these interactions was to foster collaborations between academic researchers and the ICASE Institute (NASA LaRC), a universi- based institute, which has pioneered world-class computational, theoretical and experimental research in the disciplines that are important to NASA. Editors gratefully acknowledge help of Ms. E. Todd (ICASE, NASA LaRC), the ICASE Director M. D. Salas and all reviewers, in particular, Dr. B. Diskin (ICASE/NIA, NASA LaRC), Prof. R. Haftka (University of Florida), Dr. V. M. Harik (ICASE/Swales Aerospace, NASA LaRC), Prof.

Mechanics of Microsystems

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Publisher : John Wiley & Sons
ISBN 13 : 1119053838
Total Pages : 332 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Mechanics of Microsystems by : Alberto Corigliano

Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

Mechanics of Microelectromechanical Systems

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Publisher : Springer Science & Business Media
ISBN 13 : 0387230378
Total Pages : 415 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Mechanics of Microelectromechanical Systems by : Nicolae Lobontiu

Download or read book Mechanics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

Smart Sensors and MEMS

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Publisher : Woodhead Publishing
ISBN 13 : 0081020562
Total Pages : 606 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Smart Sensors and MEMS by : S Nihtianov

Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications

Neural Networks and Micromechanics

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Publisher : Springer Science & Business Media
ISBN 13 : 3642025358
Total Pages : 225 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Neural Networks and Micromechanics by : Ernst Kussul

Download or read book Neural Networks and Micromechanics written by Ernst Kussul and published by Springer Science & Business Media. This book was released on 2009-12-01 with total page 225 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromechanical manufacturing based on microequipment creates new possibi- ties in goods production. If microequipment sizes are comparable to the sizes of the microdevices to be produced, it is possible to decrease the cost of production drastically. The main components of the production cost - material, energy, space consumption, equipment, and maintenance - decrease with the scaling down of equipment sizes. To obtain really inexpensive production, labor costs must be reduced to almost zero. For this purpose, fully automated microfactories will be developed. To create fully automated microfactories, we propose using arti?cial neural networks having different structures. The simplest perceptron-like neural network can be used at the lowest levels of microfactory control systems. Adaptive Critic Design, based on neural network models of the microfactory objects, can be used for manufacturing process optimization, while associative-projective neural n- works and networks like ART could be used for the highest levels of control systems. We have examined the performance of different neural networks in traditional image recognition tasks and in problems that appear in micromechanical manufacturing. We and our colleagues also have developed an approach to mic- equipment creation in the form of sequential generations. Each subsequent gene- tion must be of a smaller size than the previous ones and must be made by previous generations. Prototypes of ?rst-generation microequipment have been developed and assessed.

MEMS and Nanotechnology, Volume 2

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Publisher : Springer Science & Business Media
ISBN 13 : 1441988254
Total Pages : 272 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis MEMS and Nanotechnology, Volume 2 by : Tom Proulx

Download or read book MEMS and Nanotechnology, Volume 2 written by Tom Proulx and published by Springer Science & Business Media. This book was released on 2011-03-24 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.

Self-Powered and Soft Polymer MEMS/NEMS Devices

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Publisher : Springer
ISBN 13 : 303005554X
Total Pages : 85 pages
Book Rating : 4.0/5 (3 download)

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Book Synopsis Self-Powered and Soft Polymer MEMS/NEMS Devices by : Ajay Giri Prakash Kottapalli

Download or read book Self-Powered and Soft Polymer MEMS/NEMS Devices written by Ajay Giri Prakash Kottapalli and published by Springer. This book was released on 2019-02-28 with total page 85 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. This multidisciplinary book is appropriate for students and professionals in the fields of material science, mechanical engineering, electrical engineering, and bioengineering.

Special Issue of the Section of the Micromechanics Section of Sensors and Actuators (SAMM) Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005), Miami, FL, USA, 30 January - 3 February 2005

Download Special Issue of the Section of the Micromechanics Section of Sensors and Actuators (SAMM) Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005), Miami, FL, USA, 30 January - 3 February 2005 PDF Online Free

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Publisher :
ISBN 13 :
Total Pages : 4 pages
Book Rating : 4.:/5 (254 download)

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Book Synopsis Special Issue of the Section of the Micromechanics Section of Sensors and Actuators (SAMM) Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005), Miami, FL, USA, 30 January - 3 February 2005 by : MEMS

Download or read book Special Issue of the Section of the Micromechanics Section of Sensors and Actuators (SAMM) Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005), Miami, FL, USA, 30 January - 3 February 2005 written by MEMS and published by . This book was released on 2006 with total page 4 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microfabricated Systems and MEMS VI

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Publisher : The Electrochemical Society
ISBN 13 : 9781566773720
Total Pages : 268 pages
Book Rating : 4.7/5 (737 download)

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Book Synopsis Microfabricated Systems and MEMS VI by : Peter J. Hesketh

Download or read book Microfabricated Systems and MEMS VI written by Peter J. Hesketh and published by The Electrochemical Society. This book was released on 2002 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM), Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005)

Download Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM), Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005) PDF Online Free

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Publisher :
ISBN 13 :
Total Pages : 397 pages
Book Rating : 4.:/5 (314 download)

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Book Synopsis Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM), Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005) by : MEMS. 18, 2005, Miami, Fla..

Download or read book Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM), Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005) written by MEMS. 18, 2005, Miami, Fla.. and published by . This book was released on 2006 with total page 397 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Mems Packaging

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Publisher : World Scientific
ISBN 13 : 9813229373
Total Pages : 363 pages
Book Rating : 4.8/5 (132 download)

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Book Synopsis Mems Packaging by : Yung-cheng Lee

Download or read book Mems Packaging written by Yung-cheng Lee and published by World Scientific. This book was released on 2018-01-03 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical activities to design and manufacture reliable MEMS. A unique challenge to MEMS packaging is how to protect moving MEMS devices during manufacturing and operation. With the introduction of wafer level capping and encapsulation processes, this barrier is removed successfully. In addition, MEMS devices should be integrated with their electronic chips with the smallest footprint possible. As a result, 3D packaging is applied to connect the devices vertically for the most effective integration. Such 3D packaging also paves the way for further heterogenous integration of MEMS devices, electronics, and other functional devices.This book consists of chapters written by leaders developing products in a MEMS industrial setting and faculty members conducting research in an academic setting. After an introduction chapter, the practical issues are covered: through-silicon vias (TSVs), vertical interconnects, wafer level packaging, motion sensor-to-CMOS bonding, and use of printed circuit board technology to fabricate MEMS. These chapters are written by leaders developing MEMS products. Then, fundamental issues are discussed, topics including encapsulation of MEMS, heterogenous integration, microfluidics, solder bonding, localized sealing, microsprings, and reliability.

Microfabricated Systems and MEMS VII

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Publisher : The Electrochemical Society
ISBN 13 : 9781566774222
Total Pages : 352 pages
Book Rating : 4.7/5 (742 download)

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Book Synopsis Microfabricated Systems and MEMS VII by :

Download or read book Microfabricated Systems and MEMS VII written by and published by The Electrochemical Society. This book was released on 2004 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS Linear and Nonlinear Statics and Dynamics

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Publisher : Springer Science & Business Media
ISBN 13 : 1441960201
Total Pages : 463 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis MEMS Linear and Nonlinear Statics and Dynamics by : Mohammad I. Younis

Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Dynamics of Microelectromechanical Systems

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Publisher : Springer Science & Business Media
ISBN 13 : 0387681957
Total Pages : 411 pages
Book Rating : 4.3/5 (876 download)

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Book Synopsis Dynamics of Microelectromechanical Systems by : Nicolae Lobontiu

Download or read book Dynamics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2014-07-08 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.

Micromechanics and Microactuators

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Publisher : Springer Science & Business Media
ISBN 13 : 9400727216
Total Pages : 149 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Micromechanics and Microactuators by : Gondi Kondaiah Ananthasuresh

Download or read book Micromechanics and Microactuators written by Gondi Kondaiah Ananthasuresh and published by Springer Science & Business Media. This book was released on 2011-11-11 with total page 149 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains selected papers presented at MAMM 2010, the First Workshop on Microactuators and Micromechanisms. This workshop has brought together scientists, industry experts and students and has provided a special opportunity for know-how exchange and collaboration in various disciplines referring to microsystems technology. The conference was organized by the Technical Committees of Mechanical Transmissions and Micromachines under the patronage of IFToMM, the International Federation for the Promotion of Mechanism and Machine Science.

Mems for Biomedical Applications

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Publisher : Elsevier
ISBN 13 : 0857096273
Total Pages : 511 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Mems for Biomedical Applications by : Shekhar Bhansali

Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy