Micro Nanofabrication

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Micro and Nano Fabrication

Author : Hans H. Gatzen
Publisher : Springer
ISBN 13 : 3662443953
Total Pages : 537 pages
Book Rating : 4.6/5 (624 download)

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Book Synopsis Micro and Nano Fabrication by : Hans H. Gatzen

Download or read book Micro and Nano Fabrication written by Hans H. Gatzen and published by Springer. This book was released on 2015-01-02 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Micro and Nano Fabrication Technology

Author : Jiwang Yan
Publisher : Springer
ISBN 13 : 9789811300974
Total Pages : 0 pages
Book Rating : 4.3/5 (9 download)

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Book Synopsis Micro and Nano Fabrication Technology by : Jiwang Yan

Download or read book Micro and Nano Fabrication Technology written by Jiwang Yan and published by Springer. This book was released on 2018-07-16 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.

Micro-Nanofabrication

Author : Zheng Cui
Publisher : Springer
ISBN 13 : 9783642066979
Total Pages : 0 pages
Book Rating : 4.0/5 (669 download)

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Book Synopsis Micro-Nanofabrication by : Zheng Cui

Download or read book Micro-Nanofabrication written by Zheng Cui and published by Springer. This book was released on 2010-10-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book is a collection of the author’s years of experience and research findings, as well as the latest development, in micro-nanofabrication technologies. It gives a detailed introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. For each of the fabrication technology it introduces, the emphasis is on clear explanation of the basic principle, the essential steps in the processes, various process conditions and typical process parameters. The advantages and disadvantages of each technique are also analysed. The applications of micro-nanofabrication technologies focus on manufacturing of very large scale integrated circuits (VLSI), nanoelectronics, optoelectronics, high density magnetic storage, micro-electro-mechanical system or MEMS, biochip or lab-on-chip and nanotechnology. Each of the applications is accompanied by practical examples to demonstrate how particular fabrication techniques are applied. There is an extensive list of references following each chapter for readers to explore further. The book is not only a good supplementary reading material for university undergraduates or postgraduates who are novices in this field, but also a good reference book for experienced engineering professionals who wish to know other fabrication techniques outside their own field.

Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies

Author : Guoqiang Li
Publisher : Springer
ISBN 13 : 9811303592
Total Pages : 128 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies by : Guoqiang Li

Download or read book Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies written by Guoqiang Li and published by Springer. This book was released on 2018-05-15 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis combines advanced femtosecond laser micro/nanofabrication technologies and frontier bionic design principles to prepare diverse biomimetic micro/nanostructures to realize their functions. By studying the formation mechanism of the micro/nanostructures, the author identifies various artificial structural colors, three-dimensional micro/nanocage arrays, and fish-scale inspired microcone arrays in different processing environments. Multiple functions such as enhanced antireflection, hydrophobicity, and underwater superoleophobicity are achieved by precisely adjusting laser-machining parameters. This novel design and method have extensive potential applications in the context of new colorizing technologies, microfluidics, microsensors, and biomedicine.

Micro- and Nanofabrication for Beginners

Author : Eiichi Kondoh
Publisher : CRC Press
ISBN 13 : 100024640X
Total Pages : 239 pages
Book Rating : 4.0/5 (2 download)

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Book Synopsis Micro- and Nanofabrication for Beginners by : Eiichi Kondoh

Download or read book Micro- and Nanofabrication for Beginners written by Eiichi Kondoh and published by CRC Press. This book was released on 2022-06-13 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject, this volume assumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses. Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyone getting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.

Micro and Nanomanufacturing

Author : Mark J. Jackson
Publisher : Springer Science & Business Media
ISBN 13 : 038726132X
Total Pages : 708 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Micro and Nanomanufacturing by : Mark J. Jackson

Download or read book Micro and Nanomanufacturing written by Mark J. Jackson and published by Springer Science & Business Media. This book was released on 2007-06-19 with total page 708 pages. Available in PDF, EPUB and Kindle. Book excerpt: This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.

Laser Micro-Nano-Manufacturing and 3D Microprinting

Author : Anming Hu
Publisher : Springer Nature
ISBN 13 : 3030593134
Total Pages : 360 pages
Book Rating : 4.0/5 (35 download)

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Book Synopsis Laser Micro-Nano-Manufacturing and 3D Microprinting by : Anming Hu

Download or read book Laser Micro-Nano-Manufacturing and 3D Microprinting written by Anming Hu and published by Springer Nature. This book was released on 2020-11-28 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.

Nano- and Microfabrication for Industrial and Biomedical Applications

Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 0323389287
Total Pages : 278 pages
Book Rating : 4.3/5 (233 download)

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Book Synopsis Nano- and Microfabrication for Industrial and Biomedical Applications by : Regina Luttge

Download or read book Nano- and Microfabrication for Industrial and Biomedical Applications written by Regina Luttge and published by William Andrew. This book was released on 2016-06-12 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Micro / Nano Replication

Author : Shinill Kang
Publisher : John Wiley & Sons
ISBN 13 : 0470392134
Total Pages : 384 pages
Book Rating : 4.4/5 (73 download)

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Book Synopsis Micro / Nano Replication by : Shinill Kang

Download or read book Micro / Nano Replication written by Shinill Kang and published by John Wiley & Sons. This book was released on 2012-04-03 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: An introduction to micro and nano replication processes and applications Micro/Nano Replication: Processes and Applications provides an overview of the fundamentals, processes, and applications involved in micro and nano replication in the manufacturing of product parts. A major field of nanotechnology, the study of micro/nano replication is sure to become one of increasing importance as the construction of completely new devices based on innovative concepts and crafted at the molecular level increases. Designed to help the reader understand and learn to work with the growing number of tools for molding plastic components, the book covers the key topics related to replication, including patterning technology, the modification of mold surface properties, and much more. In addition, it addresses the strengths and weaknesses of different molding processes. With a strong focus not only on how micro/nano replication works, but also the broader implications for the industry, the book is packed with examples of real world applications. These are drawn from a variety of fields, including information storage devices, optoelectronic elements, optical communication, and biosensors, in order to provide a complete view of the importance of micro and nano processes. A valuable introduction to a new but fast-growing field, Micro/Nano Replication is an essential resource for anyone looking to get a head start on understanding this emerging discipline.

Engineering of Micro/Nano Biosystems

Author : Gregory Barbillon
Publisher : Springer
ISBN 13 : 9811365490
Total Pages : 368 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis Engineering of Micro/Nano Biosystems by : Gregory Barbillon

Download or read book Engineering of Micro/Nano Biosystems written by Gregory Barbillon and published by Springer. This book was released on 2019-08-02 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems. Research in the MEMS/NEMS and lab-on-chip fields has seen rapid growth in both academic and industrial domains, as these biodevices and systems are increasingly replacing traditional large size diagnostic tools. This book is unique in describing not only the devices and technologies but also the basic principles of their operation. The comprehensive description of the fabrication, packaging and principles of micro/nano biosystems presented in this book offers guidance for researchers designing and implementing these biosystems across diverse fields including medical, pharmaceutical and biological sciences. The book provides a detailed overview of the fundamental mechanical, optical, electrical and magnetic principles involved, together with the technologies required for the design, fabrication and characterization of micro/nano fluidic systems and bio-devices. Written by a collaborative team from France and Korea, the book is suitable for academics, researchers, advanced level students and industrial manufacturers.

Optical Nano and Micro Actuator Technology

Author : George K. Knopf
Publisher : CRC Press
ISBN 13 : 1439840547
Total Pages : 666 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Optical Nano and Micro Actuator Technology by : George K. Knopf

Download or read book Optical Nano and Micro Actuator Technology written by George K. Knopf and published by CRC Press. This book was released on 2017-12-19 with total page 666 pages. Available in PDF, EPUB and Kindle. Book excerpt: In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many applications. The book examines photoresponsive materials that enable the design of optically driven structures and mechanisms and describes specific light-driven technologies that permit the manipulation of micro- and nanoscale objects. It also explores applications in optofluidics, bioMEMS and biophotonics, medical device design, and micromachine control. Inspiring the next generation of scientists and engineers to advance light-driven technologies, this book gives readers a solid grounding in this emerging interdisciplinary area. It thoroughly explains the scientific language and fundamental principles, provides a holistic view of optical nano and micro actuator systems, and illustrates current and potential applications of light-driven systems.

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Author : Kenichi Takahata
Publisher : BoD – Books on Demand
ISBN 13 : 9535110853
Total Pages : 238 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies by : Kenichi Takahata

Download or read book Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies written by Kenichi Takahata and published by BoD – Books on Demand. This book was released on 2013-05-29 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

Microfabrication and Nanofabrication

Author : Kanak Kalita
Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3111335534
Total Pages : 184 pages
Book Rating : 4.1/5 (113 download)

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Book Synopsis Microfabrication and Nanofabrication by : Kanak Kalita

Download or read book Microfabrication and Nanofabrication written by Kanak Kalita and published by Walter de Gruyter GmbH & Co KG. This book was released on 2024-06-04 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book unravels the intriguing interplay between macroscopic manufacturing processes and microscopic fabrication techniques. It dives into the sophisticated world of precision manufacturing, where high accuracy, controlled processes enable the production of complex components and products. It covers micro and nano fabrication, which revolutionizes conventional manufacturing by creating minuscule yet highly functional parts, some even smaller than the width of a human hair. This book explores various topics, from precise machining techniques to nanoimprint technology, reflecting the vast breadth and depth of this field. The aim is to provide readers with a comprehensive understanding of how these micro and macro scales intertwine, opening new frontiers in manufacturing. By showcasing the latest research findings and their practical applications, this book elucidates the enormous potential and implications of this burgeoning field. The contents are laid out in a user-friendly manner to communicate complex ideas in an accessible, engaging way, making it a valuable resource for anyone curious about the next big leap in manufacturing technology.

Carbon for Micro and Nano Devices

Author : Swati Sharma
Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3110620707
Total Pages : 315 pages
Book Rating : 4.1/5 (16 download)

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Book Synopsis Carbon for Micro and Nano Devices by : Swati Sharma

Download or read book Carbon for Micro and Nano Devices written by Swati Sharma and published by Walter de Gruyter GmbH & Co KG. This book was released on 2024-03-18 with total page 315 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro and nano devices are an integral part of modern technology. To address the requirements of the state-of-the-art technology, topics are selected from both chip-based and flexible electronics. A wide range of carbon materials including graphene, carbon nanotube, glass-like carbon, porous carbon, carbon black, graphite, carbon nanofiber, laser-patterned carbon and heteroatom containing carbon are covered. This goal is to elucidate fundamental carbon material science along with compatible micro- and nanofabrication techniques. Real-life example of sensors, energy storage and generation devices, MEMS, NEMS and implantable bioelectronics enable visualization of the outcome of described processes. Students will also benefit from the attractive aspects of carbon science explained in simple terms. Hybridization, allotrope classification and microstructural models are presented with a whole new outlook. Discussions on less-studied, hypothetical and undiscovered carbon forms render the contents futuristic and highly appealing.

Advanced Micro- and Nano-manufacturing Technologies

Author : Shrikrishna Nandkishor Joshi
Publisher : Springer Nature
ISBN 13 : 9811636451
Total Pages : 404 pages
Book Rating : 4.8/5 (116 download)

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Book Synopsis Advanced Micro- and Nano-manufacturing Technologies by : Shrikrishna Nandkishor Joshi

Download or read book Advanced Micro- and Nano-manufacturing Technologies written by Shrikrishna Nandkishor Joshi and published by Springer Nature. This book was released on 2021-10-01 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.

Introduction to Microfabrication

Author : Sami Franssila
Publisher : John Wiley & Sons
ISBN 13 : 0470020563
Total Pages : 424 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Introduction to Microfabrication by : Sami Franssila

Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2005-01-28 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Commercializing Micro-Nanotechnology Products

Author : David Tolfree
Publisher : CRC Press
ISBN 13 : 0849383161
Total Pages : 294 pages
Book Rating : 4.8/5 (493 download)

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Book Synopsis Commercializing Micro-Nanotechnology Products by : David Tolfree

Download or read book Commercializing Micro-Nanotechnology Products written by David Tolfree and published by CRC Press. This book was released on 2007-11-19 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-nanotechnologies (MNT) are already making a profound impact on our daily lives. New applications are well underway in the US, Asia, and Europe. However, their potentially disruptive nature, along with the public's concerns, has produced a number of challenges. Commercializing Micro-Nanotechnology Products provides a snapshot of the cur