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Author : Navid Yazdi
Publisher :
ISBN 13 :
Total Pages : 320 pages
Book Rating : 4.3/5 (91 download)
Download or read book Micro-g Silicon Accelerometers with High Performance CMOS Interface Circuitry written by Navid Yazdi and published by . This book was released on 1999 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Xu, Yong Ping
Publisher : River Publishers
ISBN 13 : 877022045X
Total Pages : 312 pages
Book Rating : 4.7/5 (72 download)
Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Xu, Yong Ping and published by River Publishers. This book was released on 2019-02-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
Author : Mahmoud Rasras
Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)
Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 352767506X
Total Pages : 610 pages
Book Rating : 4.5/5 (276 download)
Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Author : Dongning Zhao
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (642 download)
Download or read book A Low-noise Cmos Interface for Capacitive Microaccelerometers written by Dongning Zhao and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The high-performance accelerometers with micro-gravity resolution and large dynamic range at very low frequencies are not only used in GPS-augmented inertial navigation, monitoring of aircrafts and space station, but also used in monitoring wind turbines for green energy. This dissertation presents the design and development of a mixed-signal, low-noise, and fourth-order sigma-delta interface circuit for the MEMS capacitive micro-gravity accelerometer. A fully-differential switched-capacitor (SC) amplifier architecture is developed with the low-frequency noise reduction through the integration of chopper-stabilization technique with lateral BJT at input stage. The effectiveness of different noise reduction techniques is also compared and verified. The application of fourth-order SC sigma-delta modulation concept to the inertial-grade accelerometer is to achieve the benefits of the digitization of the accelerometer output without compromising the resolution of the analog front-end. This open-loop interface provides 1-bit digital output stream and has the versatility of interfacing sensors with different sensitivities while maintaining minimum power dissipation and maximum dynamic range. The micromechanical accelerometers are fabricated in thick silicon-on-insulator (SOI) substrates. The accelerometer operates in air and is designed for non-peaking response with a bandwidth of 500 Hz.
Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author : Haluk Kulah
Publisher :
ISBN 13 :
Total Pages : 328 pages
Book Rating : 4.3/5 (91 download)
Download or read book Closed-loop Electromechanical Sigma-delta Microgravity Accelerometers written by Haluk Kulah and published by . This book was released on 2003 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chingwen Yeh
Publisher :
ISBN 13 :
Total Pages : 330 pages
Book Rating : 4.3/5 (91 download)
Download or read book A Low-voltage Bulk-silicon Tunneling-based Microaccelerometer with CMOS Interface Circuitry written by Chingwen Yeh and published by . This book was released on 1996 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Giuseppe Ferri
Publisher : MDPI
ISBN 13 : 3038973769
Total Pages : 171 pages
Book Rating : 4.0/5 (389 download)
Download or read book Interface Circuits for Microsensor Integrated Systems written by Giuseppe Ferri and published by MDPI. This book was released on 2018-12-07 with total page 171 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Interface Circuits for Microsensor Integrated Systems" that was published in Micromachines
Author : Yong Ping Xu
Publisher : CRC Press
ISBN 13 : 1000793737
Total Pages : 312 pages
Book Rating : 4.0/5 (7 download)
Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Yong Ping Xu and published by CRC Press. This book was released on 2022-09-01 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
Author : Junseok Chae
Publisher :
ISBN 13 :
Total Pages : 356 pages
Book Rating : 4.3/5 (91 download)
Download or read book High-sensitivity, Low-noise, Multi-axis Capacitive Micro-accelerometers written by Junseok Chae and published by . This book was released on 2003 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Weijie Yun
Publisher :
ISBN 13 :
Total Pages : 338 pages
Book Rating : 4.:/5 (33 download)
Download or read book A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry written by Weijie Yun and published by . This book was released on 1992 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Shamus McNamara
Publisher :
ISBN 13 :
Total Pages : 166 pages
Book Rating : 4.:/5 (89 download)
Download or read book A Wide Range Threshold Accelerometer Array Fabricated by a Modified LIGA Technique written by Shamus McNamara and published by . This book was released on 2002 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : David Frederick Lemmerhirt
Publisher :
ISBN 13 :
Total Pages : 412 pages
Book Rating : 4.3/5 (91 download)
Download or read book A Multi-sensor Microsystem for Autonomous Data Gathering written by David Frederick Lemmerhirt and published by . This book was released on 2005 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Jaume Verd
Publisher : MDPI
ISBN 13 : 3039210688
Total Pages : 166 pages
Book Rating : 4.0/5 (392 download)
Download or read book Development of CMOS-MEMS/NEMS Devices written by Jaume Verd and published by MDPI. This book was released on 2019-06-25 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]
Author : Arvind Sanjiva Salian
Publisher :
ISBN 13 :
Total Pages : 406 pages
Book Rating : 4.3/5 (91 download)
Download or read book Design, Fabrication and Testing of High-performance Capacitive Microaccelerometers written by Arvind Sanjiva Salian and published by . This book was released on 2001 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ark-Chew Wong
Publisher :
ISBN 13 :
Total Pages : 524 pages
Book Rating : 4.3/5 (91 download)
Download or read book VHF Microelectromechanical Mixer-filters written by Ark-Chew Wong and published by . This book was released on 2001 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt:
