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Method For Producing Silicon Thin Film Transistors With Enhanced Forward Current Drive
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Book Synopsis Method for Producing Silicon Thin-film Transistors with Enhanced Forward Current Drive by :
Download or read book Method for Producing Silicon Thin-film Transistors with Enhanced Forward Current Drive written by and published by . This book was released on 1998 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A method for fabricating amorphous silicon thin film transistors (TFTs) with a polycrystalline silicon surface channel region for enhanced forward current drive. The method is particularly adapted for producing top-gate silicon TFTs which have the advantages of both amorphous and polycrystalline silicon TFTs, but without problem of leakage current of polycrystalline silicon TFTs. This is accomplished by selectively crystallizing a selected region of the amorphous silicon, using a pulsed excimer laser, to create a thin polycrystalline silicon layer at the silicon/gate-insulator surface. The thus created polysilicon layer has an increased mobility compared to the amorphous silicon during forward device operation so that increased drive currents are achieved. In reverse operation the polysilicon layer is relatively thin compared to the amorphous silicon, so that the transistor exhibits the low leakage currents inherent to amorphous silicon. A device made by this method can be used, for example, as a pixel switch in an active-matrix liquid crystal display to improve display refresh rates.
Book Synopsis Official Gazette of the United States Patent and Trademark Office by : United States. Patent and Trademark Office
Download or read book Official Gazette of the United States Patent and Trademark Office written by United States. Patent and Trademark Office and published by . This book was released on 1998 with total page 1352 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Science & Technology Review written by and published by . This book was released on 1998 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Transistors: Polycrystalline silicon thin film transistors by : Yue Kuo
Download or read book Thin Film Transistors: Polycrystalline silicon thin film transistors written by Yue Kuo and published by Kluwer Academic Pub. This book was released on 2004 with total page 505 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2692 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Materials Integration and Device Fabrication of Active Matrix Thin Film Transistor Arrays for Intracellular Gene Delivery by :
Download or read book Materials Integration and Device Fabrication of Active Matrix Thin Film Transistor Arrays for Intracellular Gene Delivery written by and published by . This book was released on 2006 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials and process integration of a thin film transistor array for intra/extracellular probing are described in this study. A combinatorial rf magnetron sputter deposition technique was employed to investigate the electrical characteristics and micro-structural properties of molybdenum tungsten (MoW) high temperature electrodes as a function of the binary composition. In addition to the composition, the effect of substrate bias and temperature was investigated. The electrical resistivity of MoW samples deposited at room temperature with zero bias followed the typical Nordheim's rule as a function of composition. The resistivity of samples deposited with substrate bias is uniformly lower and obeyed the rule of mixtures as a function of composition. The metastable [beta]-W phase was not observed in the biased films even when deposited at room temperature. High resolution scanning electron microscopy revealed a more dense structure for the biased films, which correlated to the significantly lower film resistivity. In order to overcome deficiencies in sputtered silicon dioxide (SiO2) films the rf magnetron sputtering process was optimized by using a full factorial design of experiment (DOE). The optimized SiO2 film has a 5.7 MV/cm breakdown field and a 6.2 nm/min deposition rate at 10 W/cm2 RF power, 3 mTorr pressure, 300° C substrate temperature, and 56 V substrate bias. Thin film transistors (TFTs) were also fabricated and characterized to show the prospective applications of the optimized SiO2 films. The effect that direct current (DC) substrate bias has on radio frequency (RF)-sputter-deposited amorphous silicon (a-Si) films was also investigated. The substrate bias produces a denser a-Si film with fewer defects compared to unbiased films. The reduced number of defects results in a higher resistivity because defect-mediated conduction paths are reduced. Thin film transistors (TFT) that were completely sputterdeposited were fabricated and characterized. The TFT with the biased a-Si film showed lower leakage (off-state) current, higher on/off current ratio, and higher transconductance (field effect mobility) than the TFT with the unbiased a-Si film. The crystallization properties of amorphous silicon (a-i) thin film deposited by rf magnetron sputter deposition with substrate bias have been thoroughly characterized. The crystallization speed can be increased and the crystallization temperature can be drastically lowered relative to unbiased a-Si even though the stress state of biased a-Si film is highly compressive. The substrate bias enhances defect formation (vacancies, dislocations, stacking faults) via ion bombardment during the film growth, which effectively increases the driving force for crystallization of the films. The electrical and optical properties of sputter-deposited silicon nitride (SiNx) and n+ amorphous silicon (n+ a-i) films as a function of substrate bias during sputter deposition were investigated. The breakdown voltage of sputter-deposited SiNx with 20 W (125 V) substrate bias is 7.65 MV/cm which is equivalent to that of plasma enhanced chemical vapor deposition (PECVD) SiNx films. The conductivity of n+ a-Si films are also enhanced by applying substrate bias during the sputter deposition. To verify the effect of substrate bias, amorphous silicon thin film transistors (TFTs) were fabricated with substrate biased thin films and compared their electrical properties with conventional sputter deposited TFTs. Lastly, electrochemical measurements were analyzed using gold and pyrrole solution to verify the active addressability of the TFT array fabricated by entirely by sputter deposited thin films below 200°C temperature.
Book Synopsis Introduction to Thin Film Transistors by : S.D. Brotherton
Download or read book Introduction to Thin Film Transistors written by S.D. Brotherton and published by Springer Science & Business Media. This book was released on 2013-04-16 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Thin Film Transistors reviews the operation, application and technology of the main classes of thin film transistor (TFT) of current interest for large area electronics. The TFT materials covered include hydrogenated amorphous silicon (a-Si:H), poly-crystalline silicon (poly-Si), transparent amorphous oxide semiconductors (AOS), and organic semiconductors. The large scale manufacturing of a-Si:H TFTs forms the basis of the active matrix flat panel display industry. Poly-Si TFTs facilitate the integration of electronic circuits into portable active matrix liquid crystal displays, and are increasingly used in active matrix organic light emitting diode (AMOLED) displays for smart phones. The recently developed AOS TFTs are seen as an alternative option to poly-Si and a-Si:H for AMOLED TV and large AMLCD TV applications, respectively. The organic TFTs are regarded as a cost effective route into flexible electronics. As well as treating the highly divergent preparation and properties of these materials, the physics of the devices fabricated from them is also covered, with emphasis on performance features such as carrier mobility limitations, leakage currents and instability mechanisms. The thin film transistors implemented with these materials are the conventional, insulated gate field effect transistors, and a further chapter describes a new thin film transistor structure: the source gated transistor, SGT. The driving force behind much of the development of TFTs has been their application to AMLCDs, and there is a chapter dealing with the operation of these displays, as well as of AMOLED and electrophoretic displays. A discussion of TFT and pixel layout issues is also included. For students and new-comers to the field, introductory chapters deal with basic semiconductor surface physics, and with classical MOSFET operation. These topics are handled analytically, so that the underlying device physics is clearly revealed. These treatments are then used as a reference point, from which the impact of additional band-gap states on TFT behaviour can be readily appreciated. This reference book, covering all the major TFT technologies, will be of interest to a wide range of scientists and engineers in the large area electronics industry. It will also be a broad introduction for research students and other scientists entering the field, as well as providing an accessible and comprehensive overview for undergraduate and postgraduate teaching programmes.
Author :Apostolos T. Voutsas Publisher :SPIE-International Society for Optical Engineering ISBN 13 : Total Pages :214 pages Book Rating :4.3/5 (91 download)
Book Synopsis Poly-silicon Thin Film Transistor Technology and Applications in Display and Other Novel Technology Areas by : Apostolos T. Voutsas
Download or read book Poly-silicon Thin Film Transistor Technology and Applications in Display and Other Novel Technology Areas written by Apostolos T. Voutsas and published by SPIE-International Society for Optical Engineering. This book was released on 2003 with total page 214 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Download or read book JJAP Letters written by and published by . This book was released on 2003 with total page 1042 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electrical & Electronics Abstracts by :
Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 1860 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Japanese Journal of Applied Physics by :
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2003 with total page 712 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin-Film Silicon Solar Cells by : Arvind Victor Shah
Download or read book Thin-Film Silicon Solar Cells written by Arvind Victor Shah and published by CRC Press. This book was released on 2010-08-19 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photovoltaic technology has now developed to the extent that it is close to fulfilling the vision of a "solar-energy world," as devices based on this technology are becoming efficient, low-cost and durable. This book provides a comprehensive treatment of thin-film silicon, a prevalent PV material, in terms of its semiconductor nature, startin
Download or read book JJAP written by and published by . This book was released on 1987 with total page 794 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EDN written by and published by . This book was released on 1964 with total page 1032 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advanced Industrial Control Technology by : Peng Zhang
Download or read book Advanced Industrial Control Technology written by Peng Zhang and published by William Andrew. This book was released on 2010-08-26 with total page 866 pages. Available in PDF, EPUB and Kindle. Book excerpt: Control engineering seeks to understand physical systems, using mathematical modeling, in terms of inputs, outputs and various components with different behaviors. It has an essential role in a wide range of control systems, from household appliances to space flight. This book provides an in-depth view of the technologies that are implemented in most varieties of modern industrial control engineering. A solid grounding is provided in traditional control techniques, followed by detailed examination of modern control techniques such as real-time, distributed, robotic, embedded, computer and wireless control technologies. For each technology, the book discusses its full profile, from the field layer and the control layer to the operator layer. It also includes all the interfaces in industrial control systems: between controllers and systems; between different layers; and between operators and systems. It not only describes the details of both real-time operating systems and distributed operating systems, but also provides coverage of the microprocessor boot code, which other books lack. In addition to working principles and operation mechanisms, this book emphasizes the practical issues of components, devices and hardware circuits, giving the specification parameters, install procedures, calibration and configuration methodologies needed for engineers to put the theory into practice. Documents all the key technologies of a wide range of industrial control systems Emphasizes practical application and methods alongside theory and principles An ideal reference for practicing engineers needing to further their understanding of the latest industrial control concepts and techniques
Book Synopsis International Aerospace Abstracts by :
Download or read book International Aerospace Abstracts written by and published by . This book was released on 1999 with total page 1044 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Index to Theses with Abstracts Accepted for Higher Degrees by the Universities of Great Britain and Ireland and the Council for National Academic Awards by :
Download or read book Index to Theses with Abstracts Accepted for Higher Degrees by the Universities of Great Britain and Ireland and the Council for National Academic Awards written by and published by . This book was released on 2006 with total page 660 pages. Available in PDF, EPUB and Kindle. Book excerpt:
