Resonant MEMS

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Publisher : John Wiley & Sons
ISBN 13 : 3527335455
Total Pages : 512 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Resonant MEMS by : Oliver Brand

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Smart Sensors and MEMS

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Publisher : Woodhead Publishing
ISBN 13 : 0081020562
Total Pages : 606 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Smart Sensors and MEMS by : S Nihtianov

Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

Handbook of Silicon Based MEMS Materials and Technologies

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Author :
Publisher : William Andrew
ISBN 13 : 0323312233
Total Pages : 827 pages
Book Rating : 4.3/5 (233 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by William Andrew. This book was released on 2015-09-02 with total page 827 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Advanced Packaging and Manufacturing Technology Based on Adhesion Engineering

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Author :
Publisher : Springer
ISBN 13 : 3319778722
Total Pages : 119 pages
Book Rating : 4.3/5 (197 download)

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Book Synopsis Advanced Packaging and Manufacturing Technology Based on Adhesion Engineering by : Seonho Seok

Download or read book Advanced Packaging and Manufacturing Technology Based on Adhesion Engineering written by Seonho Seok and published by Springer. This book was released on 2018-04-27 with total page 119 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces microelectromechanical systems (MEMS) packaging utilizing polymers or thin films – a new and unique packaging technology. It first investigates the relationship between applied load and opening displacement as a function of benzocyclobutene (BCB) cap size to find the debonding behavior, and then presents BCB cap deformation and stress development at different opening displacements as a function of BCB thickness, which is a criterion for BCB cap transfer failure. Transfer packaging techniques are attracting increasing interest because they deliver packaging caps, from carrier wafers to device wafers, and minimize the fabrication issues frequently encountered in thin-film or polymer cap encapsulation. The book describes very-low-loss polymer cap or thin-film-transfer techniques based on anti-adhesion coating methods for radio frequency (RF) (-MEMS) device packaging. Since the polymer caps are susceptible to deformation due to their relatively low mechanical stiffness during debonding of the carrier wafer, the book develops an appropriate finite element model (FEM) to simulate the debonding process occurring in the interface between Si carrier wafer and BCB cap. Lastly, it includes the load–displacement curve of different materials and presents a flexible polymer filter and a tunable filter as examples of the applications of the proposed technology.

3D and Circuit Integration of MEMS

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Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)

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Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi

Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

MEMS 2011 Cancun Mexico

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Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (769 download)

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Book Synopsis MEMS 2011 Cancun Mexico by :

Download or read book MEMS 2011 Cancun Mexico written by and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Mems for Automotive and Aerospace Applications

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Publisher : Elsevier
ISBN 13 : 0857096486
Total Pages : 358 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Mems for Automotive and Aerospace Applications by : Michael Kraft

Download or read book Mems for Automotive and Aerospace Applications written by Michael Kraft and published by Elsevier. This book was released on 2013-01-02 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries. Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for aerospace applications, including devices for active drag reduction in aerospace applications, inertial navigation and structural health monitoring systems, and thrusters for nano- and pico-satellites. A selection of case studies are used to explore MEMS for harsh environment sensors in aerospace applications, before the book concludes by considering the use of MEMS in space exploration and exploitation. With its distinguished editors and international team of expert contributors, MEMS for automotive and aerospace applications is a key tool for MEMS manufacturers and all scientists, engineers and academics working on MEMS and intelligent systems for transportation. Chapters consider the role of MEMS in a number of automotive applications, including passenger safety and comfort, vehicle stability and control MEMS for aerospace applications are also discussed, including active drag reduction, inertial navigation and structural health monitoring systems Presents a number of case studies exploring MEMS for harsh environment sensors in aerospace

Whole-Angle MEMS Gyroscopes

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 1119441927
Total Pages : 204 pages
Book Rating : 4.1/5 (194 download)

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Book Synopsis Whole-Angle MEMS Gyroscopes by : Doruk Senkal

Download or read book Whole-Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 204 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Biomimetic Technologies

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Publisher : Woodhead Publishing
ISBN 13 : 0081002602
Total Pages : 394 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Biomimetic Technologies by : Trung Dung Ngo

Download or read book Biomimetic Technologies written by Trung Dung Ngo and published by Woodhead Publishing. This book was released on 2015-07-24 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt: Biomimetic engineering takes the principles of biological organisms and copies, mimics or adapts these in the design and development of new materials and technologies. Biomimetic Technologies reviews the key materials and processes involved in this groundbreaking field, supporting theoretical background by outlining a range of applications. Beginning with an overview of the key principles and materials associated with biomimetic technologies in Part One, the book goes on to explore biomimetic sensors in more detail in Part Two, with bio-inspired tactile, hair-based, gas-sensing and sonar systems all reviewed. Biomimetic actuators are then the focus of Part Three, with vision systems, tissue growth and muscles all discussed. Finally, a wide range of applications are investigated in Part Four, where biomimetic technology and artificial intelligence are reviewed for such uses as bio-inspired climbing robots and multi-robot systems, microrobots with CMOS IC neural networks locomotion control, central pattern generators (CPG’s) and biologically inspired antenna arrays. Includes a solid overview of modern artificial intelligence as background to the principles of biomimetic engineering Reviews a selection of key bio-inspired materials and sensors, highlighting their current strengths and future potential Features cutting-edge examples of biomimetic technologies employed for a broad range of applications

Frequency References, Power Management for SoC, and Smart Wireless Interfaces

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3319010808
Total Pages : 334 pages
Book Rating : 4.3/5 (19 download)

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Book Synopsis Frequency References, Power Management for SoC, and Smart Wireless Interfaces by : Andrea Baschirotto

Download or read book Frequency References, Power Management for SoC, and Smart Wireless Interfaces written by Andrea Baschirotto and published by Springer Science & Business Media. This book was released on 2013-09-26 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is based on the 18 tutorials presented during the 22nd workshop on Advances in Analog Circuit Design. Expert designers present readers with information about a variety of topics at the frontier of analog circuit design, including frequency reference, power management for systems-on-chip, and smart wireless interfaces. This book serves as a valuable reference to the state-of-the-art, for anyone involved in analog circuit research and development.

Physics and Technology of Silicon Carbide Devices

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Author :
Publisher : BoD – Books on Demand
ISBN 13 : 9535109170
Total Pages : 416 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Physics and Technology of Silicon Carbide Devices by : Yasuto Hijikata

Download or read book Physics and Technology of Silicon Carbide Devices written by Yasuto Hijikata and published by BoD – Books on Demand. This book was released on 2012-10-16 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recently, some SiC power devices such as Schottky-barrier diodes (SBDs), metal-oxide-semiconductor field-effect-transistors (MOSFETs), junction FETs (JFETs), and their integrated modules have come onto the market. However, to stably supply them and reduce their cost, further improvements for material characterizations and those for device processing are still necessary. This book abundantly describes recent technologies on manufacturing, processing, characterization, modeling, and so on for SiC devices. In particular, for explanation of technologies, I was always careful to argue physics underlying the technologies as much as possible. If this book could be a little helpful to progress of SiC devices, it will be my unexpected happiness.

Interface Circuits for Microsensor Integrated Systems

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Publisher : MDPI
ISBN 13 : 3038973769
Total Pages : 171 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis Interface Circuits for Microsensor Integrated Systems by : Giuseppe Ferri

Download or read book Interface Circuits for Microsensor Integrated Systems written by Giuseppe Ferri and published by MDPI. This book was released on 2018-12-07 with total page 171 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Interface Circuits for Microsensor Integrated Systems" that was published in Micromachines

Sensors, Measurement and Intelligent Materials

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Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038260339
Total Pages : 3310 pages
Book Rating : 4.0/5 (382 download)

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Book Synopsis Sensors, Measurement and Intelligent Materials by : Yun Hae Kim

Download or read book Sensors, Measurement and Intelligent Materials written by Yun Hae Kim and published by Trans Tech Publications Ltd. This book was released on 2013-02-13 with total page 3310 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). The papers of this 4 volumes set on "Sensors, Measurement and Intelligent Materials" are grouped as follows: Chapter 1: Intelligent Materials and Structures; Chapter 2: Sensors; Chapter 3: Techniques for Measurement, Detection and Monitoring; Chapter 4: Data Acquisition, Data Mining and Data Processing; Chapter 5: Automation and Control. Technologies and Engineering; Chapter 6: Intelligent System; Chapter 7: Mechatronics; Chapter 8: Microelectronics, Electronics and Electrical. Circuits and Devices; Chapter 9: Network Engineering and Communication Technology; Chapter 10: Applied Computing and Information Technologies; Chapter 11: Materials and Processing Technologies; Chapter 12: Applied Mechanics in General Mechanical Engineering and Construction.

Instrumentation in Earthquake Seismology

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Publisher : Springer
ISBN 13 : 3319213148
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Instrumentation in Earthquake Seismology by : Jens Havskov

Download or read book Instrumentation in Earthquake Seismology written by Jens Havskov and published by Springer. This book was released on 2015-11-16 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work provides an up-to-date overview of modern instruments used in earthquake seismology as well as a description of theoretical and practical aspects of seismic instrumentation. The main topics are: • Choosing and installing equipment for seismic stations • Designing and setting up seismic networks and arrays • Maintaining and calibrating seismic instruments It also provides detailed descriptions of the following: • Seismic sensors • Digitizers • Seismic recorders • Communication systems • Software used for seismic station and networks In this second edition, new seismic equipment is presented and more comprehensive sections on topics like MEMS accelerometers, sigma-delta AD converters, dynamic range discussion and virtual networks have been included. This book is primarily intended for seismologists, engineers and technicians working with seismological instruments. It combines practical “know-how” with sufficient theory to explain the basic principles, making it also suitable for teaching students the most important aspects of seismic instrumentation. The book also gives a current overview of the majority of instruments and instrument manufacturers on the market, making it easy to compare the capability of instruments from different sources. SEISAN software was used for several examples in the book. This widely extended seismic analysis software is freely available from the University of Bergen website. The content of this book draws on the authors’ (a seismologist and a physicist) combined experience of working in this field for more than 35 years.

Handbook of Mems for Wireless and Mobile Applications

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Author :
Publisher : Elsevier
ISBN 13 : 0857098616
Total Pages : 640 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Handbook of Mems for Wireless and Mobile Applications by : Deepak Uttamchandani

Download or read book Handbook of Mems for Wireless and Mobile Applications written by Deepak Uttamchandani and published by Elsevier. This book was released on 2013-08-31 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt: The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications Discusses wireless techniques and applications of wireless MEMS, including biomedical applications Describes monitoring structures and the environment with wireless MEMS

Silicon Carbide Biotechnology

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Author :
Publisher : Elsevier
ISBN 13 : 0123859069
Total Pages : 496 pages
Book Rating : 4.1/5 (238 download)

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Book Synopsis Silicon Carbide Biotechnology by : Stephen E. Saddow

Download or read book Silicon Carbide Biotechnology written by Stephen E. Saddow and published by Elsevier. This book was released on 2011-11-28 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide (SiC) is a wide-band-gap semiconductor biocompatible material that has the potential to advance advanced biomedical applications. SiC devices offer higher power densities and lower energy losses, enabling lighter, more compact and higher efficiency products for biocompatible and long-term in vivo applications ranging from heart stent coatings and bone implant scaffolds to neurological implants and sensors. The main problem facing the medical community today is the lack of biocompatible materials that are also capable of electronic operation. Such devices are currently implemented using silicon technology, which either has to be hermetically sealed so it cannot interact with the body or the material is only stable in vivo for short periods of time. For long term use (permanent implanted devices such as glucose sensors, brain-machine-interface devices, smart bone and organ implants) a more robust material that the body does not recognize and reject as a foreign (i.e., not organic) material is needed. Silicon Carbide has been proven to be just such a material and will open up a whole new host of fields by allowing the development of advanced biomedical devices never before possible for long-term use in vivo. This book not only provides the materials and biomedical engineering communities with a seminal reference book on SiC that they can use to further develop the technology, it also provides a technology resource for medical doctors and practitioners who are hungry to identify and implement advanced engineering solutions to their everyday medical problems that currently lack long term, cost effective solutions. Discusses Silicon Carbide biomedical materials and technology in terms of their properties, processing, characterization, and application, in one book, from leading professionals and scientists Critical assesses existing literature, patents and FDA approvals for clinical trials, enabling the rapid assimilation of important data from the current disparate sources and promoting the transition from technology research and development to clinical trials Explores long-term use and applications in vivo in devices and applications with advanced sensing and semiconducting properties, pointing to new product devekipment particularly within brain trauma, bone implants, sub-cutaneous sensors and advanced kidney dialysis devices

Flow Sensing in Air and Water

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 364241446X
Total Pages : 558 pages
Book Rating : 4.6/5 (424 download)

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Book Synopsis Flow Sensing in Air and Water by : Horst Bleckmann

Download or read book Flow Sensing in Air and Water written by Horst Bleckmann and published by Springer Science & Business Media. This book was released on 2014-01-22 with total page 558 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, leading scientists in the fields of sensory biology, neuroscience, physics and engineering explore the basic operational principles and behavioral uses of flow sensing in animals and how they might be applied to engineering applications such as autonomous control of underwater or aerial vehicles. Although humans possess no flow-sensing abilities, countless aquatic (e.g. fish, cephalopods and seals), terrestrial (e.g. crickets and spiders) and aerial (e.g. bats) animals have flow sensing abilities that underlie remarkable behavioral feats. These include the ability to follow silent hydrodynamic trails long after the trailblazer has left the scene, to form hydrodynamic images of their environment in total darkness, and to swim or fly efficiently and effortlessly in the face of destabilizing currents and winds.