Author : Janina Crocker
Publisher :
ISBN 13 :
Total Pages : 66 pages
Book Rating : 4.:/5 (316 download)
Book Synopsis Measurement of the Young's Modulus of Hexoloy Silicon Carbide Thin Films Using Nanoindentation by : Janina Crocker
Download or read book Measurement of the Young's Modulus of Hexoloy Silicon Carbide Thin Films Using Nanoindentation written by Janina Crocker and published by . This book was released on 2007 with total page 66 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Thin films of metals and ceramics are commonly used as the structural materials for microelectromechanical systems (MEMS). These systems are used for a wide range of applications that include sensors, displays, and portable power generators. Accurate measurement of the mechanical properties of these thin films is essential for the robust design of high-performance and reliable MEMS. In this thesis, the method of nanoindentation is used to characterize the elastic properties of thin films of Hexoloy-SG silicon carbide. This material is of particular interest for MEMS operating in harsh, hightemperature environments. Nanoindentation was performed using a commercial Hysitron TriboIndenter℗ʼ equipped with a diamond Berkovich nanoindenter tip. During each nanoindentation test, the indenter was forced into the specimen by a calibrated load, while the indentation depth was recorded continuously with nanometer resolution. The first part of this thesis describes a detailed protocol for nanoindentation testing using the TriboIndenter℗ʼ and discusses the calibration of the instrument using a quartz standard. The identification of errors due to drift, vibrations, and surface inhomogeneities is described in detail. This protocol was then used to test a 2.1 ℗æm thick film of Hexoloy-SG silicon carbide film deposited on a 500 ℗æm thick single-crystal silicon substrate. The film was tested with loads varying from 1,000 ℗æN to 13,000 ℗æN, such that the maximum indentation was always less than 10% of the film thickness. The nanoindentation load-displacement curves from a total of 155 individual indents were analyzed using three different methods to extract the value of the Young's modulus of the Hexoloy film. The first method, developed by Oliver and Pharr, is widely used in nanoindentation analysis, but does not account explicitly for the effects of the underlying substrate. It is valid strictly for monolithic materials. Therefore, refinements of the Oliver-Pharr method by King a" --