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Machining Of Novel Devices With 3d Microstructures In Bulk Materials By Femtosecond Pulsed Laser Ablation
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Book Synopsis Machining of Novel Devices with 3D Microstructures in Bulk Materials by Femtosecond Pulsed Laser Ablation by : Yinggang Huang
Download or read book Machining of Novel Devices with 3D Microstructures in Bulk Materials by Femtosecond Pulsed Laser Ablation written by Yinggang Huang and published by . This book was released on 2017 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: The advent of femtosecond (fs) lasers brought remarkable advances in the field of material processing due to the characteristics of ultrashort pulse duration and extremely high peak intensity which are linked to two main features of the emerging fs laser micromachining. The sub-picosecond pulse width is smaller than the energy transfer time from electrons to the lattice resulting in minimal thermal damage which is vital for ultrahigh precision manufacturing, while high peak intensity allows nonlinear phenomenon such as multiphoton absorption and tunneling ionization making it insusceptible to selection of materials for micromachining. Moreover, the inherently maskless and direct-writing capabilities of fs laser micromachining opens opportunities for rapid and complex 3D micro-structure fabrication paving a new way to realize a plethora of novel devices with unprecedented functionalities and performance. In this body of research, three distinct microstructures fabricated by fs laser micromachining technique in disparate applications are demonstrated which are not readily achievable with other manufacturing methods. The presented devices find their merits and great potential in the fields of microfluidics, photovoltaics and imaging science, respectively. Firstly, a through-wafer all-SiC fluidic microstructure is demonstrated. Due to the unusual material property of silicon carbide, the proposed microfluidic structure could be used in the harsh environment with elevated temperature, intense radiation and corrosive surroundings. Furthermore, through-wafer design opens the possibility of SiC wafer bonding that has a foreseeable potential for more novel microelectromechanical devices. Then we present a type of novel lateral dye-sensitized solar cells (DSSC's). The fill factor is more than double and the efficiency is improved tremendously compared with the lateral solar cells previously reported. The fs pulsed laser is used to cut through TiO2 film to create an interdigital pattern thereby forming two electrodes. The compact design of such lateral structure considerably simplifies the solar cell modules that enables hybrid solar energy harvesting/storage devices. Finally, a biologically inspired artificial eye consisting of an array of micro-photo-collectors with high photo-sensitivity is reported. Furthermore, the software approach based on iterative-back-projection (IBP) super-resolution image reconstruction algorithm is adopted to greatly increase resolution of the images obtained from the artificial eye.
Book Synopsis 3D Laser Microfabrication by : Hiroaki Misawa
Download or read book 3D Laser Microfabrication written by Hiroaki Misawa and published by John Wiley & Sons. This book was released on 2006-08-21 with total page 403 pages. Available in PDF, EPUB and Kindle. Book excerpt: A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.
Book Synopsis Laser Micro-Nano-Manufacturing and 3D Microprinting by : Anming Hu
Download or read book Laser Micro-Nano-Manufacturing and 3D Microprinting written by Anming Hu and published by Springer Nature. This book was released on 2020-11-28 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.
Book Synopsis Femtosecond Laser Micromachining of Advanced Materials by : Qiumei Bian
Download or read book Femtosecond Laser Micromachining of Advanced Materials written by Qiumei Bian and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond (fs) laser ablation possesses unique characteristics for micromachining, notably non-thermal interaction with materials, high peak intensity, precision and flexibility. In this dissertation, the potential of fs laser ablation for machining polyurea aerogel and scribing thin film solar cell interconnection grooves is studied. In a preliminary background discussion, some key literature regarding the basic physics and mechanisms that govern ultrafast laser pulse interaction with materials and laser micromachining are summarized. First, the fs laser pulses are used to micromachine polyurea aerogel. The experimental results demonstrate that high quality machining surface can be obtained by tuning the laser fluence and beam scanning speed, which provides insights for micromachining polymers with porous structures. Second, a new fs laser micro-drilling technique is developed to drill micro-holes in stainless steel, in which a hollow core fiber is employed to transmit laser pulses to the target position. The coupling efficiency between the laser and the fiber is investigated and found to be strongly related to pulse energy and pulse duration. Third, the fs laser with various energy, pulse durations, and scanning speeds has been utilized to pattern Indium Tin Oxide (ITO) glass for thin film solar cells. The groove width decreases with increasing pulse duration due to the shorter the pulse duration the more effective of the energy used to material removal. In order to fully remove ITO without damaging the glass, the beam scanning speed need to precisely be controlled. Fourth, fs laser has been utilized to scribe Molybdenum thin film on Polyimide (PI) flexible substrate for Copper Indium Gallium Selenide (CIGS) thin film solar cells. The experimental parameters and results including ablation threshold, single- and multiple-pulse ablation shapes and ablation efficiency were discussed in details. In order to utilize the advantages of the fs lasers, the fabrication process has to be optimized for thin film patterning and structuring applications concerning both efficiency and quality. A predictive 3D Two Temperature Model (TTM) was proposed to predict ablation characteristics and help to understand the fs laser metal ablation mechanisms. 3D temperature field evolution for both electrons and lattice were demonstrated. The ablation model provides an insight to the physical processes occurring during fs laser excitation of metals. Desired processing fluence and process speed regime can be predicted by calculating the ablation threshold, ablation rate and ablation crater geometry using the developed model.
Book Synopsis Laser Machining of Advanced Materials by : Narendra B Dahotre
Download or read book Laser Machining of Advanced Materials written by Narendra B Dahotre and published by CRC Press. This book was released on 2011-03-11 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced materials are becoming increasingly important as substitutes for traditional materials and as facilitators for new and unique products. They have had a considerable impact on the development of a wide range of strategic technologies. Structural ceramics, biomaterials, composites and intermetallics fall under this category of advanced materials. There may be several additional materials in this category, but this book will only focus on these four types of materials. Even though some of these materials can be machined by conventional methods, material processing with lasers is an expanding field which is drawing attention of everyone in the industry as well as academics. As laser machining offers several advantages such as capabilities for machining the materials that are difficult to machine otherwise and flexibility and automation, the scope for applications of these advanced materials is further extended. Laser Machining of Advanced Materials focuses on the fundamental principles and physical phenomena involved in the laser machining of the above mentioned advanced materials. The book begins with an overview of the various conventional and non-conventional techniques employed in machining followed by a fundamental understanding of the material removal mechanisms involved in laser machining. It then covers the specific topic of laser machining of advanced materials. Understanding of the physics behind laser machining of advanced materials and associated thermodynamics, heat and mass transfer and microstructure evolution is provided. This book also covers the modeling efforts made in this field which enables a better and efficient control of the process for a desired application. The principal audience for this book is undergraduate and graduate students with majors in a variety of disciplines, computational modelers, experimentalists, microscopists and research scientists/associates in national and private research labs and universities worldwide conducting research on laser material interaction and people directly working in laser related industries.
Book Synopsis Micro- and Nano-Structuring of Materials Via Ultrashort Pulsed Laser Ablation by : Chung-Wei Cheng
Download or read book Micro- and Nano-Structuring of Materials Via Ultrashort Pulsed Laser Ablation written by Chung-Wei Cheng and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser material processing has been demonstrated as an effective means for machining almost every solid material. The quality of laser machining depends on the processing parameters that dictate material ablation mechanisms. The understanding of the complex physics associated with ultrashort pulsed laser (USPL) material interaction and ablation has advanced significantly owing to a great many theoretical and experimental studies in the past 20 years. To date, USPLs have been considered as a novel tool for micro- and nano-machining of bulk or thin film materials and for internal modification of transparent materials via multi-photon absorption in a tiny focal volume. Moreover, USPL material processing is now gaining interest in other applications, such as in sensors, electronics and medical device industries.
Book Synopsis Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications by : Koji Sugioka
Download or read book Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications written by Koji Sugioka and published by Springer. This book was released on 2013-11-27 with total page 129 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfluidics, micromechanics, microelectronics and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfluidic, optofludic and lab-on-a-chip devices and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfluidics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent and practical applications to biochemical analysis.
Book Synopsis Femtosecond Pulsed Laser Ablation and Patterning of 3C-SiC Films on Si Substrates for MEMS Fabrication by : Yuanyuan Dong
Download or read book Femtosecond Pulsed Laser Ablation and Patterning of 3C-SiC Films on Si Substrates for MEMS Fabrication written by Yuanyuan Dong and published by . This book was released on 2004 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond pulsed laser (FPL) micromachining is a direct-writing technique in which an ultrashort pulse laser beam is focused to dimensions of a few microns inside or on the surface of the substrate and then moved around using a X-Y positioning table, thereby creating either features or patterns as required. It outperforms conventional micromachining technologies due to advantages such as precise resolution, minimal thermal or shock damage, and absence of discrimination among materials. 3C-SiC is a very important semiconductor in electronics and opto-electronics and more recently regarded as an optimal candidate for structural or coating applications in microelectromechanical systems (MEMS) used under harsh and high-temperature environments; however, it is a very difficult material to be machined or etched by mechanical or chemical methods. In this work, fundamental studies on the interaction of femtosecond pulsed beam with 3C-SiC films were performed. The influence of laser parameters such as pulsed energy on the ablation and calculations of damage thresholds and ablation rates were determined. Based on these results, MEMS structures including micromotors, microturbine rotors, and lateral resonators were patterned with good quality and repeatability. Research demonstrates that FPL micromachining is capable of offering a unique solution to overcome the traditional barriers in SiC machining method, opening up opportunities for SiC materials to be used in industrial environment. As a spinoff of femtosecond pulse micromachining, nanostructuring of 3C-SiC films on Si was observed. Nanoparticle surfaces were further studied in terms of formation conditions and characterizations of crystal structure and related properties. "Incubation" effects were identified and Coulomb explosion mechanism was proposed to be responsible for the generation of nanoparticles. Results of research enhance our current understanding of ultrashort pulse-matter interactions and offer potential applications for SiC-MEMS.
Book Synopsis Femtosecond Laser Micromachining by : Roberto Osellame
Download or read book Femtosecond Laser Micromachining written by Roberto Osellame and published by Springer Science & Business Media. This book was released on 2012-03-05 with total page 485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.
Book Synopsis Femtosecond Micro/nano-machining of Dielectric Materials for the Fabrication of 3D Photonic Devices by : Wenjian Cai
Download or read book Femtosecond Micro/nano-machining of Dielectric Materials for the Fabrication of 3D Photonic Devices written by Wenjian Cai and published by . This book was released on 2006 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Applications of Femtosecond Laser Micro-machining for Fabrication of Novel Optical Sensing Devices by : Andrei Laszlo Donko
Download or read book Applications of Femtosecond Laser Micro-machining for Fabrication of Novel Optical Sensing Devices written by Andrei Laszlo Donko and published by . This book was released on 2020 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Development of Precise Femtosecond Laser Micromachining Processes for Metals and Electrospun Nanofibers by : ChangKyoo Park
Download or read book Development of Precise Femtosecond Laser Micromachining Processes for Metals and Electrospun Nanofibers written by ChangKyoo Park and published by . This book was released on 2015 with total page 147 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond pulse lasers have proven to be versatile for micro-scale ablation of a variety of materials with high quality machining due to minimal residual stress, heat affected zone, and melting. In addition, femtosecond laser is one of the non-cleanroom techniques that does not require masking, chemical reagents, and multiple steps. This simple and convenient micromachining technique enables machining of various materials in 3-dimensional geometry. However, some factors such as optical scattering, beam shape, and debris accumulation hinder the high quality of ablation. In this dissertation, femtosecond laser was employed for the micromachining of electrospun nanofibers and metals. Optimization of a process for the high quality femtosecond laser machining was investigated. Femtosecond laser and electrospun poly(e-caprolactone) (PCL) nanofibers mesh interaction was analyzed by optical property measurements and the optical absorption and scattering coefficients were estimated. The specific energy required for ablating a unit volume of pure PCL nanofibers and polydimethylsiloxane-poly(e-caprolactone) (PDMS-PCL) core-shell nanofibers was measured. Material inherent optical properties including the ablation threshold fluence and the incubation coefficient of PDMS and PCL were estimated. Circular grooves were fabricated on aluminum, stainless steel 316, and Stellite 6 and circular disks were successfully machined from a thick section of Stellite. The tapered cross-section was detected from the Stellite disk and the tapering was minimized by varying pulse energy during ablation process. Moreover, a novel debris removal technique based on DC-dielectrophoresis (DEP) force was used to machine the linear and circular grooves on aluminum and the ablation depth and precision were compared with the gas jet debris removal technique.
Download or read book 日本のリーダー written by and published by . This book was released on 1983 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Femtosecond Pulsed Laser Deposition and Patterning of Thin Films for MEMS by : Michael Joseph Stock
Download or read book Femtosecond Pulsed Laser Deposition and Patterning of Thin Films for MEMS written by Michael Joseph Stock and published by . This book was released on 2003 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt: Procedural variables such as fluence, polarization, pulse width, machining speed, and material properties are investigated to determine their effects on the PLD and laser micromachining of aluminum magnesium boride. In this work, a 120-fs pulsed, 800-nm wavelength Ti: Sapphire laser was used for micromachining thin films of ultra-hard AlMgB14 and polysilicon thin films on silicon substrate. Polysilicon was first deposited by low-pressure chemical vapor deposition followed by boride using femtosecond pulsed laser deposition. Channels were then machined in thin films to pattern a device that would produce a linear resistance/deflection curve. Results show that the ultrafast laser has precisely ablated the thin films. However, the high-energy fluence used in single-pass surface micromachining enabled the formation of recast layer of molten silicon substrate ejected by vapor pressure, and conglomerates of re-condensed material at a distance from the feature. Multi-pass surface micromachining at low energy fluences eliminated the recast layers and produced clean features. Ultrafast laser micromachining is certainly beneficial over wet and dry etching in reproducibility, material choice, and minimal number of processing steps. Thin films of ultra-hard AlMgB14 were grown on Si (100) substrates at 300 K using femtosecond pulsed Ti:sapphire laser and subsequently annealed in argon gas up to 1373 K for two hours. X-ray photoelectron spectroscopy, X-ray diffraction, atomic force microscope, and nanoindentation were employed to study the composition, microstructure and hardness of thin films. Results were compared with nanosecond pulsed KrF excimer laser-deposited films. The as-deposited and post-annealed films (up to 1173 K), independent of the pulse width, exhibited amorphous structures with a hardness of 40 GPa. However, post-annealing at higher temperatures has varied effects on crystallization depending on the pulse width. The effect of pulse width on the microstructure and quality of thin films is discussed.
Book Synopsis Servo Scanning 3D Micro Electro Discharge Machining by : Hao Tong
Download or read book Servo Scanning 3D Micro Electro Discharge Machining written by Hao Tong and published by Springer. This book was released on 2023-06-23 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the systematic knowledge of a novel process of servo scanning 3D micro-electro-discharge machining (SS-3D micro-EDM), covering principles, methods, technologies, and optimization for machining 3D microstructures of conductive materials. The content emphasizes the systematic knowledge as well as the frontier research progress of SS-3D micro-EDM, allowing it to be used as a reference handbook for planning the whole machining process of 3D microstructures, for designing machining systems or machine tools, and even for understanding the ideas of innovative processes. The processes and the machine tools of SS-3D micro-EDM have promising applications in multi-fields for machining micro-devices or microstructures made of melt and metal alloy materials. The included methods and technologies are verified by testing and machining experiments. Thus, this book presents many machining examples, including the experimental parameters, conditions, and systems. These help the readers understand the concepts, theories, and methods easily and provide practical operation guidance for engineering applications in industrial machining processes and machine tools.
Book Synopsis Femtosecond Laser Material Processing for Micro-/nano-scale Fabrication and Biomedical Applications by : Hae Woon Choi
Download or read book Femtosecond Laser Material Processing for Micro-/nano-scale Fabrication and Biomedical Applications written by Hae Woon Choi and published by . This book was released on 2007 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser ablation has interesting characteristics for micromachining, notably non-thermal interaction with materials, high peak intensity, precision and flexibility. In this dissertation, the potential of femtosecond laser ablation for fabrication of biomedical and electronic devices is studied. In a preliminary background discussion, some key literature regarding the basic physics and mechanisms that govern ultrafast laser pulse interaction with conductive materials and dielectric materials are summarized. In the dissertation work, results from systematic experiments were used characterize laser ablation of ITO (Indium Tin Oxide), stainless steel (hot embossing applications), polymers (PMMA, PDMS, PET, and PCL), glass, and fused quartz. Measured parameters and results include ablation threshold, damage threshold, surface roughness, single- and multiple-pulse ablation shapes and ablation efficiency. In addition to solid material, femtosecond laser light interaction with electrospun nano-fiber fiber mesh was analyzed and studied by optical property measurements. Ablation of channels in nano-fiber mesh was studied experimentally. Internal channel fabrication in glass and PMMA polymers was also demonstrated and studied experimentally. In summary, it is concluded that femtosecond laser ablation is a useful process for micromachining of materials to produce microfluidic channels commonly needed in biomedical devices such as micro-molecular magnetic separators and DNA stretching micro arrays. The surface roughness of ablated materials was found to be the primary issue for femtosecond laser fabrication of microfluid channels. Improved surface quality of channels by surface coating with HEMA polymer was demonstrated.
Book Synopsis Femtosecond Laser Micromachining of Polymer Surfaces by : Youssef Assaf
Download or read book Femtosecond Laser Micromachining of Polymer Surfaces written by Youssef Assaf and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: "Femtosecond (fs) laser micromachining is a single-step, contactless surface texturing method which can create hierarchical structures that present both micro- and nanoscale roughness. While fs laser-induced structures have been extensively studied on metals, very few publications have investigated their formation on polymer surfaces. It has recently been shown that homogeneous fs irradiation of a poly(tetrafluoroethylene) surface leads to the formation of a high surface area porous structure. Such a structure could be highly beneficial for several applications such as self-cleaning materials and biomedical implants. However, as of yet, no basis for the optimization of this novel topology exists since its optical and chemical properties and the mechanism behind its formation have not been investigated. Thus, in this thesis, a detailed investigation and characterization of femtosecond laser-induced structures on polymer surfaces was performed.By fitting several absorption models to ablation data, porous structure formation was determined to form as a consequence of explosive boiling and was observed to depend on the threshold fluence at machining conditions. For polymers with a sufficiently high threshold fluence, a minority of the incoming energy is converted into material ionization. Thus, the surface melt layer heats above the critical temperature for phase explosion and homogeneous bubble formation occurs. The quenching of the melt layer in between consecutive pulses leads to the formation of pores which are a remnant of the volume occupied by the bubbles during explosive boiling. Spectroscopy and X-ray photoelectron spectroscopy characterization at different wavelengths helped identify the parameters that affect the threshold fluence through incubation effects. Higher threshold fluences and lower incubation coefficients were observed during near-infrared irradiation as opposed to ultraviolet irradiation. This behavior at longer wavelengths was attributed to a shift from a multiphoton absorption mechanism at low pulse numbers to a linear absorption mechanism at higher pulse numbers. This effect was observed to be more significant for polymers that are susceptible to photooxidation.Crystallographic evidence of explosive boiling was measured by grazing incidence X-ray diffractometry. For high density poly(ethylene), laser micromachining was observed to induce a local decrease in crystallinity and the appearance of a monoclinic phase that is typically only stable at high temperatures and pressure. This confirmed that fs laser-induced polymer structures form from a quenched melt layer. In addition, the effect of viscoelastic melt properties on pore size was investigated. It was observed that for higher molecular weights (and thus higher viscosities), smaller pore sizes are achieved due to a decreased bubble growth rate during explosive boiling.Finally, a novel atmospheric pulsed laser deposition setup for the incorporation of nanoparticles into laser induced porous structures was developed. Through this technique, hydrophilic titanium oxide nanoclusters were incorporated into porous poly(ethylene terephthalate). By controlling the extent of nanoparticle coverage through the operating fluence, tunable wettability was achieved. Thus, this technique allows the optimization of fs laser induced structures for specific applications without compromising the porous topology." --
