Low Temperature Plasma Physics

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Theory of Low-Temperature Plasma Physics

Author : Shi Nguyen-Kuok
Publisher : Springer
ISBN 13 : 3319437216
Total Pages : 508 pages
Book Rating : 4.3/5 (194 download)

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Book Synopsis Theory of Low-Temperature Plasma Physics by : Shi Nguyen-Kuok

Download or read book Theory of Low-Temperature Plasma Physics written by Shi Nguyen-Kuok and published by Springer. This book was released on 2016-11-11 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers the reader an overview of the basic approaches to the theoretical description of low-temperature plasmas, covering numerical methods, mathematical models and modeling techniques. The main methods of calculating the cross sections of plasma particle interaction and the solution of the kinetic Boltzmann equation for determining the transport coefficients of the plasma are also presented. The results of calculations of thermodynamic properties, transport coefficients, the equilibrium particle-interaction cross sections and two-temperature plasmas are also discussed. Later chapters consider applications, and the results of simulation and calculation of plasma parameters in induction and arc plasma torches are presented. The complex physical processes in high-frequency plasmas and arc plasmas, the internal and external parameters of plasma torches, near-electrode processes, heat transfer, the flow of solid particles in plasmas and other phenomena are considered. The book is intended for professionals involved in the theoretical study of low-temperature plasmas and the design of plasma torches, and will be useful for advanced students in related areas.

Low Temperature Plasma Technology

Author : Paul K. Chu
Publisher : CRC Press
ISBN 13 : 1466509902
Total Pages : 497 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Low Temperature Plasma Technology by : Paul K. Chu

Download or read book Low Temperature Plasma Technology written by Paul K. Chu and published by CRC Press. This book was released on 2013-07-15 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.

Low Temperature Plasma Technology

Author : Paul K. Chu
Publisher : CRC Press
ISBN 13 : 1466509910
Total Pages : 488 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Low Temperature Plasma Technology by : Paul K. Chu

Download or read book Low Temperature Plasma Technology written by Paul K. Chu and published by CRC Press. This book was released on 2013-07-15 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration i

Physics and Technology of Low-temperature Plasmas

Author : S. V. Dresvin
Publisher : Wiley-Blackwell
ISBN 13 :
Total Pages : 1104 pages
Book Rating : 4.:/5 (45 download)

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Book Synopsis Physics and Technology of Low-temperature Plasmas by : S. V. Dresvin

Download or read book Physics and Technology of Low-temperature Plasmas written by S. V. Dresvin and published by Wiley-Blackwell. This book was released on 1977 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Emerging Developments and Applications of Low Temperature Plasma

Author : Shahzad, Aamir
Publisher : IGI Global
ISBN 13 : 1799884007
Total Pages : 239 pages
Book Rating : 4.7/5 (998 download)

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Book Synopsis Emerging Developments and Applications of Low Temperature Plasma by : Shahzad, Aamir

Download or read book Emerging Developments and Applications of Low Temperature Plasma written by Shahzad, Aamir and published by IGI Global. This book was released on 2021-12-17 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low temperature plasma in medicine is a new field that rose from the research in the application of cold plasmas in bioengineering. Plasma medicine is an innovative and promising multidisciplinary novel field of research covering plasma physics, life sciences, and clinical medicine to apply physical plasma for therapeutic applications. Emerging Developments and Applications of Low Temperature Plasma explores all areas of experimental, computational, and theoretical study of low temperature and atmospheric plasmas and provides a collection of exciting new research on the fundamental aspects of low temperature and pressure plasmas and their applications. Covering topics such as carbon nanotubes, foodborne pathogens, and plasma formation, this book is an essential resource for research groups, plasma-based industries, plasma aerodynamics industries, metal and cutlery industries, medical institutions, researchers, and academicians.

Emerging Developments and Applications of Low Temperature Plasma

Author : Shahzad, Aamir
Publisher : IGI Global
ISBN 13 : 1799884007
Total Pages : 239 pages
Book Rating : 4.7/5 (998 download)

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Book Synopsis Emerging Developments and Applications of Low Temperature Plasma by : Shahzad, Aamir

Plasma Processing of Semiconductors

Author : Paul Williams
Publisher : Springer Science & Business Media
ISBN 13 : 9780792345671
Total Pages : 634 pages
Book Rating : 4.3/5 (456 download)

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Book Synopsis Plasma Processing of Semiconductors by : Paul Williams

Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Introduction to Plasma Physics and Controlled Fusion

Author : Francis F. Chen
Publisher : Springer Science & Business Media
ISBN 13 : 1475755953
Total Pages : 427 pages
Book Rating : 4.4/5 (757 download)

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Book Synopsis Introduction to Plasma Physics and Controlled Fusion by : Francis F. Chen

Download or read book Introduction to Plasma Physics and Controlled Fusion written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT; neutral-beam heating of the PL T tokamak at Princeton to KTi = 6. 5 keV; increase of average ß to 3%-5% in tokamaks at Oak Ridge and General Atomic; and the stabilization of mirror-confined plasmas at Livermore, together with injection of ion current to near field-reversal conditions in the 2XIIß device. Invention of the tandem mirror has given magnetic confinement a new and exciting dimension. New ideas have emerged, such as the compact torus, surface-field devices, and the EßT mirror-torus hybrid, and some old ideas, such as the stellarator and the reversed-field pinch, have been revived. Radiofrequency heat ing has become a new star with its promise of dc current drive. Perhaps most importantly, great progress has been made in the understanding of the MHD behavior of toroidal plasmas: tearing modes, magnetic Vll Vlll islands, and disruptions.

Plasma Medicine

Author : M. Laroussi
Publisher : Cambridge University Press
ISBN 13 : 1107006430
Total Pages : 363 pages
Book Rating : 4.1/5 (7 download)

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Book Synopsis Plasma Medicine by : M. Laroussi

Download or read book Plasma Medicine written by M. Laroussi and published by Cambridge University Press. This book was released on 2012-05-24 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book dedicated exclusively to plasma medicine for graduate students and researchers in physics, engineering, biology, medicine and biochemistry.

Plasma Physics

Author : Alexander Piel
Publisher : Springer
ISBN 13 : 3319634275
Total Pages : 473 pages
Book Rating : 4.3/5 (196 download)

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Book Synopsis Plasma Physics by : Alexander Piel

Download or read book Plasma Physics written by Alexander Piel and published by Springer. This book was released on 2017-09-07 with total page 473 pages. Available in PDF, EPUB and Kindle. Book excerpt: The enlarged new edition of this textbook provides a comprehensive introduction to the basic processes in plasmas and demonstrates that the same fundamental concepts describe cold gas-discharge plasmas, space plasmas, and hot fusion plasmas. Starting from particle drifts in magnetic fields, the principles of magnetic confinement fusion are explained and compared with laser fusion. Collective processes are discussed in terms of plasma waves and instabilities. The concepts of plasma description by magnetohydrodynamics, kinetic theory, and particle simulation are stepwise introduced. Space charge effects in sheath regions, double layers and plasma diodes are given the necessary attention. The novel fundamental mechanisms of dusty plasmas are explored and integrated into the framework of conventional plasmas. The book concludes with a concise description of modern plasma discharges. Written by an internationally renowned researcher in experimental plasma physics, the text keeps the mathematical apparatus simple and emphasizes the underlying concepts. The guidelines of plasma physics are illustrated by a host of practical examples, preferentially from plasma diagnostics. There, Langmuir probe methods, laser interferometry, ionospheric sounding, Faraday rotation, and diagnostics of dusty plasmas are discussed. Though primarily addressing students in plasma physics, the book is easily accessible for researchers in neighboring disciplines, such as space science, astrophysics, material science, applied physics, and electrical engineering. This second edition has been thoroughly revised and contains substantially enlarged chapters on plasma diagnostics, dusty plasmas and plasma discharges. Probe techniques have been rearranged into basic theory and a host of practical examples for probe techniques in dc, rf, and space plasmas. New topics in dusty plasmas, such as plasma crystals, Yukawa balls, phase transitions and attractive forces have been adopted. The chapter on plasma discharges now contains a new section on conventional and high-power impulse magnetron sputtering. The recently discovered electrical asymmetry effect in capacitive rf-discharges is described. The text is based on an introductory course to plasma physics and advanced courses in plasma diagnostics, dusty plasmas, and plasma waves, which the author has taught at Kiel University for three decades. The pedagogical approach combines detailed explanations, a large number of illustrative figures, short summaries of the basics at the end of each chapter, and a selection of problems with detailed solutions.

Kinetics of Nonequilibrium Low-Temperature Plasmas

Author : Leon Mikhaĭlovich Biberman
Publisher : Springer
ISBN 13 :
Total Pages : 512 pages
Book Rating : 4.:/5 (44 download)

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Book Synopsis Kinetics of Nonequilibrium Low-Temperature Plasmas by : Leon Mikhaĭlovich Biberman

Download or read book Kinetics of Nonequilibrium Low-Temperature Plasmas written by Leon Mikhaĭlovich Biberman and published by Springer. This book was released on 1987-09-30 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first research on plasma was done in connection with the study of electrical discharges in gases. The focus of attention for physicists was the partially ionized plasma, the kinetics of which is governed by various collisional and radiative processes. The choice of this area of research was motivated largely by the practical problems of that time the creation of gas-discharge light sources, rectifiers, and inverters. Since the early 1950s interest in plasma physics has risen sharply, particularly in the study of the completely ionized plasma with its various collective phenomena, insta bilities, and the interesting and sometimes unexpected effects attending the propagation of electromagnetic waves in such a plasma and the action on it of external electric and magnetic fields. Interest in hot plasmas has been stimulated not only by the diverse and novel physical phenomena, but also by the problems arising in connection with controlled nuclear fusion. The advent, in the early 1960s, of new technical fields such as gas-discharge lasers, magnetohydrodynamic generators, thermoemission converters, plasma chemistry, plasma propul sion devices, various methods in plasma technology, etc. , has led to increased interest in weakly ionized low-tempera ture plasmas. This is particularly true of nonequilibrium plasmas, which are characterized by an extraordinary diver sity of states and properties.

Plasma Processing of Materials

Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309045975
Total Pages : 88 pages
Book Rating : 4.3/5 (9 download)

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Book Synopsis Plasma Processing of Materials by : National Research Council

Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Advances in Low Temperature Rf Plasmas

Author : Toshiaki Makabe
Publisher : Elsevier Publishing Company
ISBN 13 : 9780444510952
Total Pages : 0 pages
Book Rating : 4.5/5 (19 download)

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Book Synopsis Advances in Low Temperature Rf Plasmas by : Toshiaki Makabe

Download or read book Advances in Low Temperature Rf Plasmas written by Toshiaki Makabe and published by Elsevier Publishing Company. This book was released on 2002 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low temperature plasmas have had a very broad range of applications ever since their discovery. However, recent developments in the dextrous handling of dry etching non-equilibrium plasma have attracted a great common interest that has driving force behind the major developments in diagnostic, theoretical and numerical techniques since the 1980s. A greater fundamental understanding of the kinetics of radio-frequency (rf) plasmas and their interaction with surfaces in regard to the process of large scale integrated circuits has been achieved through the cooperation between academia and industry. At the same time, new applications have become possible, and the basic understanding of low temperature rf plasmas has diffused to other areas of plasma physics. in the special issue of Applied Surface Science, which is published in memory of the International Workshop on Basis for Low Temperature Plasma Applications at Hakone in Japan on July 24 - 25 of 2001. The basic goal in the selection of topics was to cover the range of issues that represent the building blocks of the complex, vertically integrated plasma simulation schemes including surface processes. The text also shows examples of integrated codes and how they are implemented in the development of new strategies of plasma processing. Such codes may be used both in modern experiments and in the computer aided design and control of the plasma devices of the next generation. These are based on the transport theory of electrons, ions and neutrals, as well as on numerical modellings and on the available collision and transport data describing gas and surface phases. density plasmas. All the chapters present a relatively complete review of the developments in these fields since the 1980s as well as a review of their status of development in 2002, and there is a blend of research reviews from both academia and industry.

Low Temperature Plasmas

Author : Rainer Hippler
Publisher : Wiley-VCH
ISBN 13 : 9783527406739
Total Pages : 0 pages
Book Rating : 4.4/5 (67 download)

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Book Synopsis Low Temperature Plasmas by : Rainer Hippler

Download or read book Low Temperature Plasmas written by Rainer Hippler and published by Wiley-VCH. This book was released on 2008-03-03 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: With its strong focus on the links between theory and experiment or technological process, this book presents the latest advances in our understanding of how plasmas behave. New contributions to this second edition cover dusty plasmas, cross-correlation spectroscopy, atmospheric pressure glow discharges, as well as applications in lightening, microelectronics, polymer surface modification, sterilization, biology and medicine. Straddling the boundaries between physics, chemistry and materials science, this is of interest to a wide community. From reviews of the first edition: "... it makes a highly valuable contribution to the subject area and will be accessible to scientists and engineers working in the field." ChemPhysChem

Kinetics and Spectroscopy of Low Temperature Plasmas

Author : Jorge Loureiro
Publisher : Springer
ISBN 13 : 3319092537
Total Pages : 460 pages
Book Rating : 4.3/5 (19 download)

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Book Synopsis Kinetics and Spectroscopy of Low Temperature Plasmas by : Jorge Loureiro

Download or read book Kinetics and Spectroscopy of Low Temperature Plasmas written by Jorge Loureiro and published by Springer. This book was released on 2016-06-22 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a comprehensive textbook designed for graduate and advanced undergraduate students. Both authors rely on more than 20 years of teaching experience in renowned Physics Engineering courses to write this book addressing the students’ needs. Kinetics and Spectroscopy of Low Temperature Plasmas derives in a full self-consistent way the electron kinetic theory used to describe low temperature plasmas created in the laboratory with an electrical discharge, and presents the main optical spectroscopic diagnostics used to characterize such plasmas. The chapters with the theoretical contents make use of a deductive approach in which the electron kinetic theory applied to plasmas with basis on the electron Boltzmann equation is derived from the basic concepts of Statistical and Plasma Physics. On the other hand, the main optical spectroscopy diagnostics used to characterize experimentally such plasmas are presented and justified from the point of view of the Atomic and Molecular Physics. Low temperature plasmas (LTP) are partially ionized gases with a broad use in many technological applications such as microelectronics, light sources, lasers, biology and medicine. LTPs lead to the production of atomic and molecular excited states, chemically reactive radicals, and activated surface sites, which are in the origin, among others, of the deposition of thin films, advanced nanotechnology products, solar cells, highly efficient combustion motors, and treatment of cancer cells.

Plasma Science

Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309052319
Total Pages : 231 pages
Book Rating : 4.3/5 (9 download)

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Book Synopsis Plasma Science by : National Research Council

Download or read book Plasma Science written by National Research Council and published by National Academies Press. This book was released on 1995-02-01 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma science is the study of ionized states of matter. This book discusses the field's potential contributions to society and recommends actions that would optimize those contributions. It includes an assessment of the field's scientific and technological status as well as a discussion of broad themes such as fundamental plasma experiments, theoretical and computational plasma research, and plasma science education.

Lecture Notes on Principles of Plasma Processing

Author : Francis F. Chen
Publisher : Springer Science & Business Media
ISBN 13 : 1461501814
Total Pages : 213 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Lecture Notes on Principles of Plasma Processing by : Francis F. Chen

Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.