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Investigation Of Anomalies In An Industrial Copper Electrochemical Deposition Process
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Book Synopsis Investigation of Anomalies in an Industrial Copper Electrochemical Deposition Process by : Evan G. Lewis
Download or read book Investigation of Anomalies in an Industrial Copper Electrochemical Deposition Process written by Evan G. Lewis and published by . This book was released on 2002 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Copper Electrodeposition for Nanofabrication of Electronics Devices by : Kazuo Kondo
Download or read book Copper Electrodeposition for Nanofabrication of Electronics Devices written by Kazuo Kondo and published by Springer Science & Business Media. This book was released on 2013-11-20 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the scientific mechanism of copper electrodeposition and it's wide range of applications. The book will cover everything from the basic fundamentals to practical applications. In addition, the book will also cover important topics such as: • ULSI wiring material based upon copper nanowiring • Printed circuit boards • Stacked semiconductors • Through Silicon Via • Smooth copper foil for Lithium-Ion battery electrodes. This book is ideal for nanotechnologists, industry professionals, and practitioners.
Book Synopsis The Investigation of Submicron Copper Electrochemical Deposition Bath Chemistries and Ageing Process by : Hung-Ming Chen
Download or read book The Investigation of Submicron Copper Electrochemical Deposition Bath Chemistries and Ageing Process written by Hung-Ming Chen and published by . This book was released on 2005 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Master's Theses Directories written by and published by . This book was released on 2003 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Education, arts and social sciences, natural and technical sciences in the United States and Canada".
Book Synopsis An in Situ Surface Stress Study of Electrochemical Phenomena by : Thomas Heaton
Download or read book An in Situ Surface Stress Study of Electrochemical Phenomena written by Thomas Heaton and published by . This book was released on 2011 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last decade copper electrodeposition has become the dominant process by which microelectronic interconnects are made. Replacing ultra-high vacuum evaporative film growth, the technology known as the Cu damascene process has been widely implemented in the microelectronics industry since the early 2000s. The transition from vacuum film growth to electrodeposition was enabled by solution chemistries that provide "bottom-up" or superfilling capability of vias and trenches. While the process has been and is used widely, the actual mechanisms responsible for superfilling remain relatively unknown. This dissertation presents and discusses the background and results of experimental investigations that have been done using in situ electrochemical surface stress monitoring techniques to study the evolution of stress on Cu{111} thin film electrodes. Because of its extreme sensitivity to the structure on both the electrode and solution sides of the interface, surface stress monitoring as analytical technique is well suited for the study of electrodeposition. These ultra-high resolution stress measurements reveal the dynamic response of copper electrodes to a number of electrochemical and chemical experimental variables. In the case of constant current pulsed deposition and stripping, the surface stress evolution depends not only on the magnitude of the current pulse, but also shows a marked response to plating bath composition. The plating bath chemistries used in this work include (1) additive free, (2) deposition suppressing solutions that include polyethylene glycol (PEG) and sodium chloride (NaCl) as well as (3) full additive solution combinations which contain PEG, NaCl, and a one of two deposition accelerating species (bis-(sodiumsulfopropyl)disulfide (SPS) or mercaptopropane sulfonic acid (MPS)). The development of thin film stress is further investigated through a series of solution exchange experiments that correlate the magnitude of electrode exchange current density and the stress state of the film. Remarkably, stress changes as large as ~8.5 N/m are observed during solution exchanges at the open circuit potential. Overall, this research demonstrates that solution chemistry can have a large impact on thin film stress evolution, even for very small deposition thicknesses (e.g.
Book Synopsis Experimental and Mechanistic Study of Copper Electrodeposition in the Absence and Presence of Chloride Ions and Polyethylene Glycol by : Maria Eugenia Huerta Garrido
Download or read book Experimental and Mechanistic Study of Copper Electrodeposition in the Absence and Presence of Chloride Ions and Polyethylene Glycol written by Maria Eugenia Huerta Garrido and published by . This book was released on 2007 with total page 163 pages. Available in PDF, EPUB and Kindle. Book excerpt: The trend to miniaturize electronic devices has led to the development of new fabrication processes. Copper electrodeposition has been used extensively in the fabrication of microelectronic circuits due to the excellent conducting properties of this metal. Control of the operating conditions and understanding of the mechanism of metal deposition is necessary in order to successfully produce the micron-scale features required in these new devices. The implementation of new processes and operating conditions in the fabrication of microelectronic devices has spurred a considerable amount of research into their understanding and improvement. An approach to achieve the desired electrodeposits is the incorporation of mixtures of chemical additives into the electroplating solutions. Many modeling and experimental studies have been devoted to exploring the mechanisms by which additives operate. However, details of these mechanisms are not completely understood. A part of this study focuses on the investigation of the conditions and dynamics of the adsorption and desorption of the additives chloride ions and polyethylene glycol (PEG) on copper substrates in voltammetry and multi-step voltammetry-chronoamperometry experiments. Voltammetry scans are classified into three categories according to the range of potentials where the inhibition of Cu2+ reduction in the presence of various concentrations of Cl- and PEG is observed. Each type is explained based on the results of this study and the ideas presented in the literature on how the conformation of adsorbed PEG on the substrate can change during the course of deposition. One of the techniques that is widely used to study electrochemical processes is electrochemical impedance spectroscopy (EIS). Insight into these processes gained from measured EIS data is better when it is combined with the use of a physicochemical model. However, the models typically used involve a number of simplifying assumptions, partly due to mathematical complications. One of the purposes of this study is to relax some of these assumptions such as the neglect of convection, migration and homogeneous reactions and investigate their effect by comparing the model results to experimental data. This approach is applied to Cu2+ reduction onto a rotating disk electrode in acidic additive-free solutions. Estimates of the kinetic parameters are obtained with the non-linear least squares method. A statistical analysis reveals that the model is further improved by accounting for the correlation between consecutive residuals. The experimental data are found to be poorly predicted when the parameters estimated from the full model are used in simpler models that do not include convection and/or homogeneous reactions. The model of Cu2+ reduction in additive-free solutions is extended to account for the presence of Cl- and PEG under transient conditions. The model accounts for the formation of the inhibiting film, blockage of adsorption sites on the electrode surface and displacement of the inhibiting film by depositing copper. A distinction is made between the condition when the electrode is completely covered with the inhibiting film and when it is only partially covered. Estimates of the kinetic parameters are obtained from fitting the model to electrode responses of linear potential scans obtained at various Cl- and PEG concentrations. The model is able to predict both the sudden loss of inhibition that occurs at intermediate Cl- and PEG concentrations and the more gradual increases in current at low and high additive levels. EIS spectra are also predicted and compared to measured ones.
Book Synopsis Journal of the Electrochemical Society by : Electrochemical Society
Download or read book Journal of the Electrochemical Society written by Electrochemical Society and published by . This book was released on 1954 with total page 946 pages. Available in PDF, EPUB and Kindle. Book excerpt: Issues for 19 - contain separately paged section consisting of editorials and various special features.
Book Synopsis Journal of the Society of Chemical Industry by : Society of Chemical Industry (Great Britain)
Download or read book Journal of the Society of Chemical Industry written by Society of Chemical Industry (Great Britain) and published by . This book was released on 1921 with total page 1472 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Journal of Scientific & Industrial Research by :
Download or read book Journal of Scientific & Industrial Research written by and published by . This book was released on 1962 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1988 with total page 872 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electrochemical Industry by : Eugene Franz Roeber
Download or read book Electrochemical Industry written by Eugene Franz Roeber and published by . This book was released on 1903 with total page 626 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electrochemical and Metallurgical Industry by :
Download or read book Electrochemical and Metallurgical Industry written by and published by . This book was released on 1902 with total page 622 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Copper and Bronze in Art by : David A. Scott
Download or read book Copper and Bronze in Art written by David A. Scott and published by Getty Publications. This book was released on 2002 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a review of 190 years of literature on copper and its alloys. It integrates information on pigments, corrosion and minerals, and discusses environmental conditions, conservation methods, ancient and historical technologies.
Book Synopsis Report of the Committee of the Privy Council for Scentific and Industrial Research by : Great Britain. Department of Scientific and Industrial Research
Download or read book Report of the Committee of the Privy Council for Scentific and Industrial Research written by Great Britain. Department of Scientific and Industrial Research and published by . This book was released on 1939 with total page 810 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes the annual report of the Advisory Council to the Committee.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1987 with total page 850 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes all works deriving from DOE, other related government-sponsored information and foreign nonnuclear information.
Book Synopsis Report of the Research Council by : Great Britain. Dept. of Scientific and Industrial Research
Download or read book Report of the Research Council written by Great Britain. Dept. of Scientific and Industrial Research and published by . This book was released on 1936 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt: