Introduction to Microsystem Design

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Author :
Publisher : Springer
ISBN 13 : 3662470233
Total Pages : 384 pages
Book Rating : 4.6/5 (624 download)

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Book Synopsis Introduction to Microsystem Design by : Werner Karl Schomburg

Download or read book Introduction to Microsystem Design written by Werner Karl Schomburg and published by Springer. This book was released on 2015-06-25 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

Microsystem Design

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 0306476010
Total Pages : 699 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Microsystem Design by : Stephen D. Senturia

Download or read book Microsystem Design written by Stephen D. Senturia and published by Springer Science & Business Media. This book was released on 2005-12-20 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Introduction to Microsystem Packaging Technology

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Author :
Publisher : CRC Press
ISBN 13 : 1439865973
Total Pages : 232 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Introduction to Microsystem Packaging Technology by : Yufeng Jin

Download or read book Introduction to Microsystem Packaging Technology written by Yufeng Jin and published by CRC Press. This book was released on 2017-12-19 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packaging process—including design and manufacturing technologies—is the technical foundation upon which function chips are updated for use in application systems, and it is an important guarantee of the continued growth of technical content and value of information systems. Introduction to Microsystem Packaging Technology details the latest advances in this vital area, which involves microelectronics, optoelectronics, RF and wireless, MEMS, and related packaging and assembling technologies. It is purposefully written so that each chapter is relatively independent and the book systematically presents the widest possible overview of packaging knowledge. Elucidates the evolving world of packaging technologies for manufacturing The authors begin by introducing the fundamentals, history, and technical challenges of microsystems. Addressing an array of design techniques for packaging and integration, they cover substrate and interconnection technologies, examples of device- and system-level packaging, and various MEMS packaging techniques. The book also discusses module assembly and optoelectronic packaging, reliability methodologies and analysis, and prospects for the evolution and future applications of microsystems packaging and associated environmental protection. With its research examples and targeted reference questions and answers to reinforce understanding, this text is ideal for researchers, engineers, and students involved in microelectronics and MEMS. It is also useful to those who are not directly engaged in packaging but require a solid understanding of the field and its associated technologies.

Introduction to Microsystem Technology

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 0470770929
Total Pages : 376 pages
Book Rating : 4.4/5 (77 download)

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Book Synopsis Introduction to Microsystem Technology by : Gerald Gerlach

Download or read book Introduction to Microsystem Technology written by Gerald Gerlach and published by John Wiley & Sons. This book was released on 2008-04-30 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.

Microsystem Design

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Author :
Publisher : Springer
ISBN 13 : 9781475774580
Total Pages : 0 pages
Book Rating : 4.7/5 (745 download)

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Book Synopsis Microsystem Design by : Stephen D. Senturia

Download or read book Microsystem Design written by Stephen D. Senturia and published by Springer. This book was released on 2013-04-26 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Value by Design

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 0470901357
Total Pages : 384 pages
Book Rating : 4.4/5 (79 download)

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Book Synopsis Value by Design by : Eugene C. Nelson

Download or read book Value by Design written by Eugene C. Nelson and published by John Wiley & Sons. This book was released on 2011-02-23 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Value by Design is a practical guide for real-world improvement in clinical microsystems. Clinical microsystem theory, as implemented by the Institute for Healthcare Improvement and health care organizations nationally and internationally, is the foundation of high-performing front line health care teams who achieve exceptional quality and value. These authors combine theory and principles to create a strategic framework and field-tested tools to assess and improve systems of care. Their approach links patients, families, health care professionals and strategic organizational goals at all levels of the organization: micro, meso and macrosystem levels to achieve the ultimate quality and value a health care system is capable of offering.

An Introduction to Microelectromechanical Systems Engineering

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Author :
Publisher : Artech House
ISBN 13 : 9781580535915
Total Pages : 312 pages
Book Rating : 4.5/5 (359 download)

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Book Synopsis An Introduction to Microelectromechanical Systems Engineering by : Nadim Maluf

Download or read book An Introduction to Microelectromechanical Systems Engineering written by Nadim Maluf and published by Artech House. This book was released on 2004 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Fundamentals of Microsystems Packaging

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Publisher : McGraw Hill Professional
ISBN 13 : 0071500596
Total Pages : 979 pages
Book Rating : 4.0/5 (715 download)

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Book Synopsis Fundamentals of Microsystems Packaging by : Rao Tummala

Download or read book Fundamentals of Microsystems Packaging written by Rao Tummala and published by McGraw Hill Professional. This book was released on 2001-05-08 with total page 979 pages. Available in PDF, EPUB and Kindle. Book excerpt: LEARN ABOUT MICROSYSTEMS PACKAGING FROM THE GROUND UP Written by Rao Tummala, the field’s leading author, Fundamentals of Microsystems Packaging is the only book to cover the field from wafer to systems, including every major contributing technology. This rigorous and thorough introduction to electronic packaging technologies gives you a solid grounding in microelectronics, photonics, RF, packaging design, assembly, reliability, testing, and manufacturing and its relevance to both semiconductors and systems. You’ll find: *Full coverage of electrical, mechanical, chemical, and materials aspects of each technology *Easy-to-read schematics and block diagrams *Fundamental approaches to all system issues *Examples of all common configurations and technologies—wafer level packaging, single chip, multichip, RF, opto-electronic, microvia boards, thermal and others *Details on chip-to-board connections, sealing and encapsulation, and manufacturing processes *Basics of electrical and reliability testing

MEMS and Microsystems

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 1119771161
Total Pages : 576 pages
Book Rating : 4.1/5 (197 download)

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Book Synopsis MEMS and Microsystems by : Tai-Ran Hsu

Download or read book MEMS and Microsystems written by Tai-Ran Hsu and published by John Wiley & Sons. This book was released on 2020-07-16 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: * Expanded coverage of microfabrication plus assembly and packaging technologies * The introduction of microgyroscopes, miniature microphones, and heat pipes * Design methodologies for thermally actuated multilayered device components * The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.

Mechanics of Microsystems

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Publisher : John Wiley & Sons
ISBN 13 : 1119053838
Total Pages : 332 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Mechanics of Microsystems by : Alberto Corigliano

Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

Quality By Design

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Publisher : John Wiley & Sons
ISBN 13 : 1118046838
Total Pages : 507 pages
Book Rating : 4.1/5 (18 download)

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Book Synopsis Quality By Design by : Eugene C. Nelson

Download or read book Quality By Design written by Eugene C. Nelson and published by John Wiley & Sons. This book was released on 2011-01-14 with total page 507 pages. Available in PDF, EPUB and Kindle. Book excerpt: Quality by Design reflects the research and applied training conducted at Dartmouth Medical School under the leadership of Gene Nelson, Paul Batalden, and Marjorie Godfrey. The book includes the research results of high-performing clinical microsystems, illustrative case studies that highlight individual clinical programs, guiding principles that are easily applied, and tools, techniques, and methods that can be adapted by clinical practices and interdisciplinary clinical teams. The authors describe how to develop microsystems that can attain peak performance through active engagement of interdisciplinary teams in learning and applying improvement science and measurement; explore the essence of leadership for clinical Microsystems; show what mid-level leaders can do to enable peak performance at the front lines of care; outline the design and redesign of services and planning care to match patient needs with services offered; examine the issue of safety; describe the vital role of data in creating a rich and useful information environment; provide a core curriculum that can build microsystems’ capability, provide excellent care, promote a positive work environment, and contribute to the larger organization. Ancillary materials for use in classroom teaching, training, or coaching are available at https://clinicalmicrosystem.org/

MEMS and Microsystems

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Author :
Publisher : McGraw-Hill Science, Engineering & Mathematics
ISBN 13 :
Total Pages : 456 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis MEMS and Microsystems by : Tai-Ran Hsu

Download or read book MEMS and Microsystems written by Tai-Ran Hsu and published by McGraw-Hill Science, Engineering & Mathematics. This book was released on 2002 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere.

Introduction to Microsystem Packaging Technology

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Author :
Publisher : CRC Press
ISBN 13 : 1351832972
Total Pages : 233 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Introduction to Microsystem Packaging Technology by : Yufeng Jin

Download or read book Introduction to Microsystem Packaging Technology written by Yufeng Jin and published by CRC Press. This book was released on 2017-12-19 with total page 233 pages. Available in PDF, EPUB and Kindle. Book excerpt: The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packaging process—including design and manufacturing technologies—is the technical foundation upon which function chips are updated for use in application systems, and it is an important guarantee of the continued growth of technical content and value of information systems. Introduction to Microsystem Packaging Technology details the latest advances in this vital area, which involves microelectronics, optoelectronics, RF and wireless, MEMS, and related packaging and assembling technologies. It is purposefully written so that each chapter is relatively independent and the book systematically presents the widest possible overview of packaging knowledge. Elucidates the evolving world of packaging technologies for manufacturing The authors begin by introducing the fundamentals, history, and technical challenges of microsystems. Addressing an array of design techniques for packaging and integration, they cover substrate and interconnection technologies, examples of device- and system-level packaging, and various MEMS packaging techniques. The book also discusses module assembly and optoelectronic packaging, reliability methodologies and analysis, and prospects for the evolution and future applications of microsystems packaging and associated environmental protection. With its research examples and targeted reference questions and answers to reinforce understanding, this text is ideal for researchers, engineers, and students involved in microelectronics and MEMS. It is also useful to those who are not directly engaged in packaging but require a solid understanding of the field and its associated technologies.

MEMS and MOEMS Technology and Applications

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Publisher : SPIE Press
ISBN 13 : 9780819437167
Total Pages : 544 pages
Book Rating : 4.4/5 (371 download)

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Book Synopsis MEMS and MOEMS Technology and Applications by : P. Rai-Choudhury

Download or read book MEMS and MOEMS Technology and Applications written by P. Rai-Choudhury and published by SPIE Press. This book was released on 2000 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Design and Manufacturing of Active Microsystems

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Publisher : Springer Science & Business Media
ISBN 13 : 364212903X
Total Pages : 447 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Design and Manufacturing of Active Microsystems by : Stephanus Büttgenbach

Download or read book Design and Manufacturing of Active Microsystems written by Stephanus Büttgenbach and published by Springer Science & Business Media. This book was released on 2011-03-04 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Optimal Synthesis Methods for MEMS

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Publisher : Springer Science & Business Media
ISBN 13 : 1461504872
Total Pages : 326 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Optimal Synthesis Methods for MEMS by : S.G.K. Ananthasuresh

Download or read book Optimal Synthesis Methods for MEMS written by S.G.K. Ananthasuresh and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

Practical MEMS

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Publisher :
ISBN 13 : 9780982299104
Total Pages : 478 pages
Book Rating : 4.2/5 (991 download)

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Book Synopsis Practical MEMS by : Ville Kaajakari

Download or read book Practical MEMS written by Ville Kaajakari and published by . This book was released on 2009 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.