High Resolution Electron Beam Lithography For Exploratory Silicon Device Fabrication

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Nanostructure Engineering Using Electron Beam Lithography

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Author : Paul Bernard Fischer
Publisher :
ISBN 13 :
Total Pages : 260 pages
Book Rating : 4.:/5 (319 download)

Book Synopsis Nanostructure Engineering Using Electron Beam Lithography by : Paul Bernard Fischer

Download or read book Nanostructure Engineering Using Electron Beam Lithography written by Paul Bernard Fischer and published by . This book was released on 1993 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Ph. D. thesis addresses nanostructure fabrication techniques based on electron beam lithography and their application to: the creation of ultra-fast metal-semiconductor-metal photodetectors and quantum effect transistors, the investigation of light emission from silicon, and the enhancement of resolution in magnetic force microscopy. Specifically, this thesis covers the following topics. (1) The implementation and characterization of an ultra-high resolution electron beam lithography (EBL) system created by modifying a scanning electron microscope. (2) The exploration of minimum achievable feature sizes using ultra-high resolution EBL and a lift-off process with polymethyl-methacrylate resists. 10 nm features, which are among the smallest ever achieved using EBL, have been obtained using a double shadow evaporation technique, a ultra-high resolution EBL technique, and a technique utilizing EBL, reactive ion etching, and subsequent wet etching. (3) The application of ultra-high resolution EBL technology to the fabrication of ultra-fast metal-semiconductor-metal (MSM) photodetectors. The fastest response time reported to date has been achieved in this project. (4) The fabrication and characterization of modulation doped field effect transistors. Quantum effects have been observed in a point contact device. (5) The fabrication of sub-50 nm Si structures using EBL, reactive ion etching (RIE) and subsequent wet etching for the study of photoluminescence (PL) from Si. PL has been observed from an array of 20 nm diameter pillars. And finally, (6) the application of high resolution EBL to the study of magnetic materials. Single domain magnetic particles and novel MFM tips have been fabricated.

Silicon Photonics for High-Performance Computing and Beyond

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Author : Mahdi Nikdast
Publisher : CRC Press
ISBN 13 : 1000480119
Total Pages : 408 pages
Book Rating : 4.0/5 (4 download)

Book Synopsis Silicon Photonics for High-Performance Computing and Beyond by : Mahdi Nikdast

Download or read book Silicon Photonics for High-Performance Computing and Beyond written by Mahdi Nikdast and published by CRC Press. This book was released on 2021-11-17 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon photonics is beginning to play an important role in driving innovations in communication and computation for an increasing number of applications, from health care and biomedical sensors to autonomous driving, datacenter networking, and security. In recent years, there has been a significant amount of effort in industry and academia to innovate, design, develop, analyze, optimize, and fabricate systems employing silicon photonics, shaping the future of not only Datacom and telecom technology but also high-performance computing and emerging computing paradigms, such as optical computing and artificial intelligence. Different from existing books in this area, Silicon Photonics for High-Performance Computing and Beyond presents a comprehensive overview of the current state-of-the-art technology and research achievements in applying silicon photonics for communication and computation. It focuses on various design, development, and integration challenges, reviews the latest advances spanning materials, devices, circuits, systems, and applications. Technical topics discussed in the book include: • Requirements and the latest advances in high-performance computing systems • Device- and system-level challenges and latest improvements to deploy silicon photonics in computing systems • Novel design solutions and design automation techniques for silicon photonic integrated circuits • Novel materials, devices, and photonic integrated circuits on silicon • Emerging computing technologies and applications based on silicon photonics Silicon Photonics for High-Performance Computing and Beyond presents a compilation of 19 outstanding contributions from academic and industry pioneers in the field. The selected contributions present insightful discussions and innovative approaches to understand current and future bottlenecks in high-performance computing systems and traditional computing platforms, and the promise of silicon photonics to address those challenges. It is ideal for researchers and engineers working in the photonics, electrical, and computer engineering industries as well as academic researchers and graduate students (M.S. and Ph.D.) in computer science and engineering, electronic and electrical engineering, applied physics, photonics, and optics.

Beyond Si-Based CMOS Devices

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Author : Sangeeta Singh
Publisher : Springer Nature
ISBN 13 : 981974623X
Total Pages : 331 pages
Book Rating : 4.8/5 (197 download)

Book Synopsis Beyond Si-Based CMOS Devices by : Sangeeta Singh

Download or read book Beyond Si-Based CMOS Devices written by Sangeeta Singh and published by Springer Nature. This book was released on with total page 331 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Embedded Machine Learning for Cyber-Physical, IoT, and Edge Computing

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Author : Sudeep Pasricha
Publisher : Springer Nature
ISBN 13 : 3031399323
Total Pages : 481 pages
Book Rating : 4.0/5 (313 download)

Book Synopsis Embedded Machine Learning for Cyber-Physical, IoT, and Edge Computing by : Sudeep Pasricha

Download or read book Embedded Machine Learning for Cyber-Physical, IoT, and Edge Computing written by Sudeep Pasricha and published by Springer Nature. This book was released on 2023-10-09 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents recent advances towards the goal of enabling efficient implementation of machine learning models on resource-constrained systems, covering different application domains. The focus is on presenting interesting and new use cases of applying machine learning to innovative application domains, exploring the efficient hardware design of efficient machine learning accelerators, memory optimization techniques, illustrating model compression and neural architecture search techniques for energy-efficient and fast execution on resource-constrained hardware platforms, and understanding hardware-software codesign techniques for achieving even greater energy, reliability, and performance benefits. Discusses efficient implementation of machine learning in embedded, CPS, IoT, and edge computing; Offers comprehensive coverage of hardware design, software design, and hardware/software co-design and co-optimization; Describes real applications to demonstrate how embedded, CPS, IoT, and edge applications benefit from machine learning.

IBM Journal of Research and Development

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Author :
Publisher :
ISBN 13 :
Total Pages : 776 pages
Book Rating : 4.F/5 ( download)

Book Synopsis IBM Journal of Research and Development by :

Download or read book IBM Journal of Research and Development written by and published by . This book was released on 1995 with total page 776 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Surface Electromagnetics

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Author : Fan Yang
Publisher : Cambridge University Press
ISBN 13 : 1108654207
Total Pages : 489 pages
Book Rating : 4.1/5 (86 download)

Book Synopsis Surface Electromagnetics by : Fan Yang

Download or read book Surface Electromagnetics written by Fan Yang and published by Cambridge University Press. This book was released on 2019-06-20 with total page 489 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by the leading experts in the field, this text provides systematic coverage of the theory, physics, functional designs, and engineering applications of advanced engineered electromagnetic surfaces. All the essential topics are included, from the fundamental theorems of surface electromagnetics, to analytical models, general sheet transmission conditions (GSTC), metasurface synthesis, and quasi-periodic analysis. A plethora of examples throughout illustrate the practical applications of surface electromagnetics, including gap waveguides, modulated metasurface antennas, transmit arrays, microwave imaging, cloaking, and orbital angular momentum (OAM ) beam generation, allowing readers to develop their own surface electromagnetics-based devices and systems. Enabling a fully comprehensive understanding of surface electromagnetics, this is an invaluable text for researchers, practising engineers and students working in electromagnetics antennas, metasurfaces and optics.

Nanolithography

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Author : M. Gentili
Publisher : Springer Science & Business Media
ISBN 13 : 9401582610
Total Pages : 214 pages
Book Rating : 4.4/5 (15 download)

Book Synopsis Nanolithography by : M. Gentili

Download or read book Nanolithography written by M. Gentili and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 214 pages. Available in PDF, EPUB and Kindle. Book excerpt: Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).

Index to Theses with Abstracts Accepted for Higher Degrees by the Universities of Great Britain and Ireland and the Council for National Academic Awards

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Author :
Publisher :
ISBN 13 :
Total Pages : 314 pages
Book Rating : 4.3/5 (91 download)

Book Synopsis Index to Theses with Abstracts Accepted for Higher Degrees by the Universities of Great Britain and Ireland and the Council for National Academic Awards by :

Download or read book Index to Theses with Abstracts Accepted for Higher Degrees by the Universities of Great Britain and Ireland and the Council for National Academic Awards written by and published by . This book was released on 2005 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Physics Briefs

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Author :
Publisher :
ISBN 13 :
Total Pages : 1118 pages
Book Rating : 4.3/5 (91 download)

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Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 1118 pages. Available in PDF, EPUB and Kindle. Book excerpt:

FGCS '92

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Author :
Publisher : IOS Press
ISBN 13 : 9784274077241
Total Pages : 788 pages
Book Rating : 4.0/5 (772 download)

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Download or read book FGCS '92 written by and published by IOS Press. This book was released on 1992 with total page 788 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Program Solicitation

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Author :
Publisher :
ISBN 13 :
Total Pages : 424 pages
Book Rating : 4.E/5 ( download)

Book Synopsis Program Solicitation by :

Download or read book Program Solicitation written by and published by . This book was released on 1995 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Quantum Confinement VI

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Author : M. Cahay
Publisher : The Electrochemical Society
ISBN 13 : 9781566773522
Total Pages : 416 pages
Book Rating : 4.7/5 (735 download)

Book Synopsis Quantum Confinement VI by : M. Cahay

Download or read book Quantum Confinement VI written by M. Cahay and published by The Electrochemical Society. This book was released on 2001 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This book is a collection of some of the papers presented at the Sixth International Symposium on Quantum Confinement: Nanostructures Materials and Quantum Devices held September 5-6, 2001 in San Francisco, CA, as part of the 200th Meeting of the Electrochemical Society."

Microcircuit Reliability Bibliography

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Author :
Publisher :
ISBN 13 :
Total Pages : 412 pages
Book Rating : 4.3/5 (91 download)

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Download or read book Microcircuit Reliability Bibliography written by and published by . This book was released on 1978 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Scientific and Technical Aerospace Reports

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Author :
Publisher :
ISBN 13 :
Total Pages : 704 pages
Book Rating : 4.:/5 (31 download)

Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Electron-beam, X-ray, and Ion-beam Submicrometer Lithographies for Manufacturing

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Author :
Publisher :
ISBN 13 :
Total Pages : 488 pages
Book Rating : 4.3/5 (91 download)

Book Synopsis Electron-beam, X-ray, and Ion-beam Submicrometer Lithographies for Manufacturing by :

Download or read book Electron-beam, X-ray, and Ion-beam Submicrometer Lithographies for Manufacturing written by and published by . This book was released on 1993 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nano- and Microfabrication for Industrial and Biomedical Applications

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Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 0323389287
Total Pages : 280 pages
Book Rating : 4.3/5 (233 download)

Book Synopsis Nano- and Microfabrication for Industrial and Biomedical Applications by : Regina Luttge

Download or read book Nano- and Microfabrication for Industrial and Biomedical Applications written by Regina Luttge and published by William Andrew. This book was released on 2016-06-12 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. - Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D - Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk - Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Bell Laboratories Talks and Papers

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Author : Bell Telephone Laboratories. Libraries and Information Systems Center
Publisher :
ISBN 13 :
Total Pages : 500 pages
Book Rating : 4.F/5 ( download)

Book Synopsis Bell Laboratories Talks and Papers by : Bell Telephone Laboratories. Libraries and Information Systems Center

Download or read book Bell Laboratories Talks and Papers written by Bell Telephone Laboratories. Libraries and Information Systems Center and published by . This book was released on 1977 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt: