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EUV Lithography

Author : Vivek Bakshi
Publisher : SPIE Press
ISBN 13 : 0819469645
Total Pages : 704 pages
Book Rating : 4.8/5 (194 download)

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Book Synopsis EUV Lithography by : Vivek Bakshi

Download or read book EUV Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2009 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.

Official Gazette of the United States Patent and Trademark Office

Author : United States. Patent and Trademark Office
Publisher :
ISBN 13 :
Total Pages : 1478 pages
Book Rating : 4.0/5 ( download)

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Book Synopsis Official Gazette of the United States Patent and Trademark Office by : United States. Patent and Trademark Office

Download or read book Official Gazette of the United States Patent and Trademark Office written by United States. Patent and Trademark Office and published by . This book was released on 2001 with total page 1478 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Japanese Journal of Applied Physics

Author :
Publisher :
ISBN 13 :
Total Pages : 862 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Japanese Journal of Applied Physics by :

Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2002 with total page 862 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Science & Technology Review

Author :
Publisher :
ISBN 13 :
Total Pages : 304 pages
Book Rating : 4.3/5 (121 download)

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Book Synopsis Science & Technology Review by :

Download or read book Science & Technology Review written by and published by . This book was released on 1995 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Soft X-ray and EUV Imaging Systems

Author :
Publisher :
ISBN 13 :
Total Pages : 194 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Soft X-ray and EUV Imaging Systems by :

Download or read book Soft X-ray and EUV Imaging Systems written by and published by . This book was released on 2001 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Emerging Lithographic Technologies

Author :
Publisher :
ISBN 13 :
Total Pages : 854 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Emerging Lithographic Technologies by :

Download or read book Emerging Lithographic Technologies written by and published by . This book was released on 2001 with total page 854 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Index of Patents Issued from the United States Patent and Trademark Office

Author :
Publisher :
ISBN 13 :
Total Pages : 4160 pages
Book Rating : 4.3/5 (129 download)

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Book Synopsis Index of Patents Issued from the United States Patent and Trademark Office by :

Download or read book Index of Patents Issued from the United States Patent and Trademark Office written by and published by . This book was released on with total page 4160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Soft X-ray Optics

Author : Eberhard Spiller
Publisher : SPIE Press
ISBN 13 : 9780819416544
Total Pages : 296 pages
Book Rating : 4.4/5 (165 download)

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Book Synopsis Soft X-ray Optics by : Eberhard Spiller

Download or read book Soft X-ray Optics written by Eberhard Spiller and published by SPIE Press. This book was released on 1994 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text describes optics mainly in the 10 to 500 angstrom wavelength region. These wavelengths are 50 to 100 times shorter than those for visible light and 50 to 100 times longer than the wavelengths of medical x rays or x-ray diffraction from natural crystals. There have been substantial advances during the last 20 years, which one can see as an extension of optical technology to shorter wavelengths or as an extension of x-ray diffraction to longer wavelengths. Artificial diffracting structures like zone plates and multilayer mirrors are replacing the natural crystals of x-ray diffraction. Some of these structures can now be fabricated to have diffraction-limited resolution. The new possibilities are described in a simple, tutorial way.

Metallurgical and Ceramic Protective Coatings

Author : K.H. Stern
Publisher : Springer Science & Business Media
ISBN 13 : 9400915012
Total Pages : 353 pages
Book Rating : 4.4/5 (9 download)

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Book Synopsis Metallurgical and Ceramic Protective Coatings by : K.H. Stern

Download or read book Metallurgical and Ceramic Protective Coatings written by K.H. Stern and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface engineering is an increasingly important field and consequently those involved need to be aware of the vast range of technologies available to modify surfaces. This text provides an up-to-date, authoritative exposition of the major condensed phase methods used for producing metallurgical and ceramic coatings. Each method is discussed thoroughly by an expert in that field. In each chapter the principle of the method, its range of applications and technical aspects involved are described. The book not only informs the reader about established technologies familiar only to specialists, but also details activity on the frontier of coating technology providing an insight into those potential technologies not yet fully developed but which should emerge in the near future.

Electrospun Nanofibers

Author : Mehdi Afshari
Publisher : Woodhead Publishing
ISBN 13 : 0081009119
Total Pages : 650 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Electrospun Nanofibers by : Mehdi Afshari

Download or read book Electrospun Nanofibers written by Mehdi Afshari and published by Woodhead Publishing. This book was released on 2016-09-13 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrospun Nanofibers covers advances in the electrospinning process including characterization, testing and modeling of electrospun nanofibers, and electrospinning for particular fiber types and applications. Electrospun Nanofibers offers systematic and comprehensive coverage for academic researchers, industry professionals, and postgraduate students working in the field of fiber science. Electrospinning is the most commercially successful process for the production of nanofibers and rising demand is driving research and development in this field. Rapid progress is being made both in terms of the electrospinning process and in the production of nanofibers with superior chemical and physical properties. Electrospinning is becoming more efficient and more specialized in order to produce particular fiber types such as bicomponent and composite fibers, patterned and 3D nanofibers, carbon nanofibers and nanotubes, and nanofibers derived from chitosan. - Provides systematic and comprehensive coverage of the manufacture, properties, and applications of nanofibers - Covers recent developments in nanofibers materials including electrospinning of bicomponent, chitosan, carbon, and conductive fibers - Brings together expertise from academia and industry to provide comprehensive, up-to-date information on nanofiber research and development - Offers systematic and comprehensive coverage for academic researchers, industry professionals, and postgraduate students working in the field of fiber science

2D Metal Carbides and Nitrides (MXenes)

Author : Babak Anasori
Publisher : Springer Nature
ISBN 13 : 3030190269
Total Pages : 530 pages
Book Rating : 4.0/5 (31 download)

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Book Synopsis 2D Metal Carbides and Nitrides (MXenes) by : Babak Anasori

Download or read book 2D Metal Carbides and Nitrides (MXenes) written by Babak Anasori and published by Springer Nature. This book was released on 2019-10-30 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the rapidly expanding field of two-dimensional (2D) transition metal carbides and nitrides (MXenes). It covers fundamental knowledge on synthesis, structure, and properties of these new materials, and a description of their processing, scale-up and emerging applications. The ways in which the quickly expanding family of MXenes can outperform other novel nanomaterials in a variety of applications, spanning from energy storage and conversion to electronics; from water science to transportation; and in defense and medical applications, are discussed in detail.

MAX Phases

Author : Michel W. Barsoum
Publisher : John Wiley & Sons
ISBN 13 : 3527654607
Total Pages : 436 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis MAX Phases by : Michel W. Barsoum

Download or read book MAX Phases written by Michel W. Barsoum and published by John Wiley & Sons. This book was released on 2013-11-13 with total page 436 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this comprehensive yet compact monograph, Michel W. Barsoum, one of the pioneers in the field and the leading figure in MAX phase research, summarizes and explains, from both an experimental and a theoretical viewpoint, all the features that are necessary to understand and apply these new materials. The book covers elastic, electrical, thermal, chemical and mechanical properties in different temperature regimes. By bringing together, in a unifi ed, self-contained manner, all the information on MAX phases hitherto only found scattered in the journal literature, this one-stop resource offers researchers and developers alike an insight into these fascinating materials.

Geometrical And Physical Optics

Author : R.S. Longhurst
Publisher : Orient Blackswan
ISBN 13 : 9788125016236
Total Pages : 704 pages
Book Rating : 4.0/5 (162 download)

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Book Synopsis Geometrical And Physical Optics by : R.S. Longhurst

Download or read book Geometrical And Physical Optics written by R.S. Longhurst and published by Orient Blackswan. This book was released on 1986 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: First Published In India In 1986, This Book Is Intended Primarily For Undergraduate Students Of Physics. It Will Also Be Useful For Postgraduate Students Specialising In Optics. This Revised Edition Incorporates New Material, Including The Techniques Of Matrix Algebra And Fourier Methods In Solving Problems In Optics. The Chapter On Photometry Has Been Revised. Important Problems Have Been Outlined Along With Comments, At The End Of The Book.

Materials Chemistry

Author : Bradley D. Fahlman
Publisher : Springer
ISBN 13 : 9402412557
Total Pages : 817 pages
Book Rating : 4.4/5 (24 download)

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Book Synopsis Materials Chemistry by : Bradley D. Fahlman

Download or read book Materials Chemistry written by Bradley D. Fahlman and published by Springer. This book was released on 2018-08-28 with total page 817 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 3rd edition of this successful textbook continues to build on the strengths that were recognized by a 2008 Textbook Excellence Award from the Text and Academic Authors Association (TAA). Materials Chemistry addresses inorganic-, organic-, and nano-based materials from a structure vs. property treatment, providing a suitable breadth and depth coverage of the rapidly evolving materials field — in a concise format. The 3rd edition offers significant updates throughout, with expanded sections on sustainability, energy storage, metal-organic frameworks, solid electrolytes, solvothermal/microwave syntheses, integrated circuits, and nanotoxicity. Most appropriate for Junior/Senior undergraduate students, as well as first-year graduate students in chemistry, physics, or engineering fields, Materials Chemistry may also serve as a valuable reference to industrial researchers. Each chapter concludes with a section that describes important materials applications, and an updated list of thought-provoking questions.

Ultra-High Temperature Materials II

Author : Igor L. Shabalin
Publisher : Springer
ISBN 13 : 9402413022
Total Pages : 764 pages
Book Rating : 4.4/5 (24 download)

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Book Synopsis Ultra-High Temperature Materials II by : Igor L. Shabalin

Download or read book Ultra-High Temperature Materials II written by Igor L. Shabalin and published by Springer. This book was released on 2019-04-24 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: This exhaustive work in three volumes and over 1300 pages provides a thorough treatment of ultra-high temperature materials with melting points over 2500 °C. The first volume focuses on Carbon and Refractory Metals, whilst the second and third are dedicated solely to Refractory compounds and the third to Refractory Alloys and Composites respectively. Topics included are physical (crystallographic, thermodynamic, thermo physical, electrical, optical, physico-mechanical, nuclear) and chemical (solid-state diffusion, interaction with chemical elements and compounds, interaction with gases, vapours and aqueous solutions) properties of the individual physico-chemical phases of carbon (graphite/graphene), refractory metals (W, Re, Os, Ta, Mo, Nb, Ir) and compounds (oxides, nitrides, carbides, borides, silicides) with melting points in this range. It will be of interest to researchers, engineers, postgraduate, graduate and undergraduate students alike. The reader is provided with the full qualitative and quantitative assessment for the materials, which could be applied in various engineering devices and environmental conditions at ultra-high temperatures, on the basis of the latest updates in the field of physics, chemistry, materials science and engineering.

Photoelectrocatalysis

Author : Leonardo Palmisano
Publisher : Elsevier
ISBN 13 : 0128242426
Total Pages : 488 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Photoelectrocatalysis by : Leonardo Palmisano

Download or read book Photoelectrocatalysis written by Leonardo Palmisano and published by Elsevier. This book was released on 2022-10-21 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photoelectrocatalysis: Fundamentals and Applications presents an in-depth review of the topic for students and researchersworking on photoelectrocatalysis-related subjects from pure chemistry to materials and environmental chemistry inorder to propose applications and new perspectives. The main advantage of a photoelectrocatalytic process is the mildexperimental conditions under which the reactions are carried out, which are often possible at atmospheric pressure androom temperature using cheap and nontoxic solvents (e.g., water), oxidants (e.g., O2 from the air), catalytic materials (e.g.,TiO2 on Ti layer), and the potential exploitation of solar light. This book presents the fundamentals and the applications of photoelectrocatalysis, such as hydrogen production fromwater splitting, the remediation of harmful compounds, and CO2 reduction. Photoelectrocatalytic reactors and lightsources, in addition to kinetic aspects, are presented along with an exploration of the relationship between photocatalysisand electrocatalysis. In addition, photocorrosion issues and the application of selective photoelectrocatalytic organictransformations, which is now a growing field of research, are also reported. Finally, the advantages/disadvantages andfuture perspectives of photoelectrocatalysis are highlighted through the possibility of working at a pilot/industrial scale inenvironmentally friendly conditions. - Presents the fundamentals of photoelectrocatalysis - Outlines photoelectrocatalytic green chemistry - Reviews photoelectrocatalytic remediation of harmful compounds, hydrogen production, and CO2 reduction - Includes photocorrosion, photoelectrocatalytic reactors, and modeling along with kinetic aspects

Metal Machining

Author : P.R.N. Childs
Publisher : Butterworth-Heinemann
ISBN 13 : 0080524028
Total Pages : 420 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Metal Machining by : P.R.N. Childs

Download or read book Metal Machining written by P.R.N. Childs and published by Butterworth-Heinemann. This book was released on 2013-10-22 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metal machining is the most widespread metal-shaping process in the mechanical manufacturing industry. World-wide investment in metal machining tools increases year on year - and the wealth of nations can be judged by it. This text - the most up-to-date in the field - provides in-depth discussion of the theory and application of metal machining at an advanced level. It begins with an overview of the development of metal machining and its role in the current industrial environment and continues with a discussion of the theory and practice of machining. The underlying mechanics are analysed in detail and there are extensive chapters examining applications through a discussion of simulation and process control. "Metal Machining: Theory and Applications" is essential reading for senior undergraduates and postgraduates specialising in cutting technology. It is also an invaluable reference tool for professional engineers. Professors Childs, Maekawa, Obikawa and Yamane are four of the leading authorities on metal machining and have worked together for many years.Of interest to all mechanical, manufacturing and materials engineersTheoretical and practical problems addressed