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Experimental Characterization Of Femtosecond Laser Micromachining For Silicon Mold Fabrication And Hot Embossing For Polymer Microreplication
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Book Synopsis Experimental Characterization of Femtosecond Laser Micromachining for Silicon Mold Fabrication and Hot Embossing for Polymer Microreplication by : Sunil Ranganath Belligundu
Download or read book Experimental Characterization of Femtosecond Laser Micromachining for Silicon Mold Fabrication and Hot Embossing for Polymer Microreplication written by Sunil Ranganath Belligundu and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Hot embossing is a fabrication technique employed for replicating microfeatures on a polymer surface that was primarily developed to fabricate MEMS devices for microfluidic applications. This manuscript deals with characterization of the femtosecond laser micromachining (FLM) and hot embossing (HEMM) processes for master mold fabrication on silicon and polymer replication respectively. Given the required size of the features to be fabricated or replicated, process parameters for FLM can be determined using the derived empirical equations, process parameters for the HEMM process can be established using the characteristic plots. A novel two-stage embossing process is developed and introduced that employs polymer molds during the second stage. Validation experiments along with results focusing on mold quality with respect to the embossing cycles of the secondary polymer mold and the embossing quality of the substrate as compared to the primary silicon mold have been presented. Micromachining of a biodegradable polymer, PLLA, with potential drug delivery applications have been performed using hot embossing and laser micromachining. The comparison of flow rate of PLLA into the mold during single and two stage embossing has been studied. Threshold fluence values of different number of pulses for PLLA during femtosecond laser micromachining have been determined. Finally, process parameters for thermal bonding using the HEMM system of two PMMA substrates are established along with their effects on feature quality after bonding.
Book Synopsis Dissertation Abstracts International by :
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2006 with total page 884 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microelectromechanical Systems written by and published by . This book was released on 2007 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Hot Embossing written by Matthias Worgull and published by William Andrew. This book was released on 2009-09-28 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an overview of replication technology for micro- and nanostructures, focusing on the techniques and technology of hot embossing, a scaleable and multi-purpose technology for the manufacture of devices such as BioMEMS and microfluidic devices which are expected to revolutionize a wide range of medical and industrial processes over the coming decade.The hot embossing process for replicating microstructures was developed by the Forschungszentrum Karlsruhe (Karlsruhe Institute of Technology) where the author is head of the Nanoreplication Group. Worgull fills a gap in existing information by fully detailing the technology and techniques of hot embossing. He also covers nanoimprinting, a process related to hot embossing, with examples of actual research topics and new applications in nanoreplication. A practical and theoretical guide to selecting the materials, machinery and processes involved in microreplication using hot embossing techniques Compares different replication processes such as: micro injection molding, micro thermoforming, micro hot embossing, and nanoimprinting Details commercially available hot embossing machinery and components like tools and mold inserts
Download or read book Hot Embossing written by Matthias Worgull and published by Elsevier. This book was released on 2024-06-17 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt: The second edition of Hot Embossing: Theory of Microreplication will present the current state of the art in microreplication with a focus on hot embossing, nanoimprint, thermoforming, and roll-to-roll replication. Polymer processing, the theory of polymers and the processing of polymers are discussed in detail. Aspects of process simulation and the corresponding material models are also covered. The book contains in-depth analysis of processing processes and replication techniques including mold fabrication. Monitoring, data analysis and reliability of molded parts is also discussed. In the Second Edition new processes are included, including the process of micro- and nanothermoforming to generate 3D structures and the hot pulling processes to generate hierarchical structures with high aspect ratios. Based on hot pulling, “Nanofur for Oil-water-separation is a large-scale biomimetic application. Upscaling, especially the seamless roll-to-roll replication, is also explored. The book is designed to cover the entire workflow for a seamless lithographic sleeve.This new edition marks a substantial update of the previous edition, incorporating several new chapters. It is an important resource for materials scientists and engineers working in the areas of micro- and nanofabrication. Comprehensively updated to include new techniques, processes, and variables that have come to prominence in recent years Includes new chapters that address monitoring, properties of molded parts, 3D thermoforming, hot pulling, functional materials, smart surfaces, and upscaling by roll-2-roll Discusses the entire microreplication process, from theory and processes to technology and mold to surface-oriented applications
Book Synopsis Femtosecond Laser Material Processing for Micro-/nano-scale Fabrication and Biomedical Applications by : Hae Woon Choi
Download or read book Femtosecond Laser Material Processing for Micro-/nano-scale Fabrication and Biomedical Applications written by Hae Woon Choi and published by . This book was released on 2007 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser ablation has interesting characteristics for micromachining, notably non-thermal interaction with materials, high peak intensity, precision and flexibility. In this dissertation, the potential of femtosecond laser ablation for fabrication of biomedical and electronic devices is studied. In a preliminary background discussion, some key literature regarding the basic physics and mechanisms that govern ultrafast laser pulse interaction with conductive materials and dielectric materials are summarized. In the dissertation work, results from systematic experiments were used characterize laser ablation of ITO (Indium Tin Oxide), stainless steel (hot embossing applications), polymers (PMMA, PDMS, PET, and PCL), glass, and fused quartz. Measured parameters and results include ablation threshold, damage threshold, surface roughness, single- and multiple-pulse ablation shapes and ablation efficiency. In addition to solid material, femtosecond laser light interaction with electrospun nano-fiber fiber mesh was analyzed and studied by optical property measurements. Ablation of channels in nano-fiber mesh was studied experimentally. Internal channel fabrication in glass and PMMA polymers was also demonstrated and studied experimentally. In summary, it is concluded that femtosecond laser ablation is a useful process for micromachining of materials to produce microfluidic channels commonly needed in biomedical devices such as micro-molecular magnetic separators and DNA stretching micro arrays. The surface roughness of ablated materials was found to be the primary issue for femtosecond laser fabrication of microfluid channels. Improved surface quality of channels by surface coating with HEMA polymer was demonstrated.
Book Synopsis Femtosecond Laser Micromachining by : Roberto Osellame
Download or read book Femtosecond Laser Micromachining written by Roberto Osellame and published by Springer Science & Business Media. This book was released on 2012-03-05 with total page 485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.
Book Synopsis Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications by : Koji Sugioka
Download or read book Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications written by Koji Sugioka and published by Springer Science & Business Media. This book was released on 2013-09-24 with total page 131 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfluidics, micromechanics, microelectronics and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfluidic, optofludic and lab-on-a-chip devices and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfluidics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent and practical applications to biochemical analysis.
Book Synopsis Micromachining Techniques for Fabrication of Micro and Nano Structures by : Mojtaba Kahrizi
Download or read book Micromachining Techniques for Fabrication of Micro and Nano Structures written by Mojtaba Kahrizi and published by BoD – Books on Demand. This book was released on 2012-02-03 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
Book Synopsis Injection Molding with Laser-micromachined Molds to Fabricate Biomimetic Flow Enhancing Polymer Parts by : Breno Sequeira
Download or read book Injection Molding with Laser-micromachined Molds to Fabricate Biomimetic Flow Enhancing Polymer Parts written by Breno Sequeira and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: "Self-emptying, non-stick polymer containers are sought after to decrease food waste and avoid additional handling. In this study, we attempt to develop an injection molding procedure that results in superhydrophobic, self-emptying containers. The phenomenon of superhydrophobicity can be attributed to the functionality imparted by microstructures on the surface, which are often superimposed by nanostructures. So, on a stainless steel mold, femtosecond laser micromachining is applied to create hierarchical micro/nanostructures with the inverse of the desired pattern for both polypropylene (PP) and high density polyethylene (PE). The optimum laser settings to create well-shaped structures of square and hexagonal geometry with different dimensions, spacings and depths have been determined. Further, we evaluated the resulting polymer samples in terms of polymer flowability and shape definition, both in industrial injection molding and in a laboratory hot press. We have demonstrated that hot press experiments can be adjusted to reliably represent injection molding. We have figured out that for the current lasing settings, the minimum width and spacing between features that can be laser-micromachined is 50 μm in order to maintain the intended shape of the geometries. The injection molding results show an aspect ratio limitation of 1.8, and that the most faithful replication are from pillared structures on the mold translating into holes on the polymer, PP, and larger structures. Square and hexagonal geometry have similar replication. Finally, a computational model is developed to predict which variables - width, spacing between features, and depth - for the abovementioned geometries, provide the best results in terms of superhydrophobicity for PE while considering the laser and injection molding constraints"--
Book Synopsis Femtosecond Laser Micromachining of Polymer Surfaces by : Youssef Assaf
Download or read book Femtosecond Laser Micromachining of Polymer Surfaces written by Youssef Assaf and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: "Femtosecond (fs) laser micromachining is a single-step, contactless surface texturing method which can create hierarchical structures that present both micro- and nanoscale roughness. While fs laser-induced structures have been extensively studied on metals, very few publications have investigated their formation on polymer surfaces. It has recently been shown that homogeneous fs irradiation of a poly(tetrafluoroethylene) surface leads to the formation of a high surface area porous structure. Such a structure could be highly beneficial for several applications such as self-cleaning materials and biomedical implants. However, as of yet, no basis for the optimization of this novel topology exists since its optical and chemical properties and the mechanism behind its formation have not been investigated. Thus, in this thesis, a detailed investigation and characterization of femtosecond laser-induced structures on polymer surfaces was performed.By fitting several absorption models to ablation data, porous structure formation was determined to form as a consequence of explosive boiling and was observed to depend on the threshold fluence at machining conditions. For polymers with a sufficiently high threshold fluence, a minority of the incoming energy is converted into material ionization. Thus, the surface melt layer heats above the critical temperature for phase explosion and homogeneous bubble formation occurs. The quenching of the melt layer in between consecutive pulses leads to the formation of pores which are a remnant of the volume occupied by the bubbles during explosive boiling. Spectroscopy and X-ray photoelectron spectroscopy characterization at different wavelengths helped identify the parameters that affect the threshold fluence through incubation effects. Higher threshold fluences and lower incubation coefficients were observed during near-infrared irradiation as opposed to ultraviolet irradiation. This behavior at longer wavelengths was attributed to a shift from a multiphoton absorption mechanism at low pulse numbers to a linear absorption mechanism at higher pulse numbers. This effect was observed to be more significant for polymers that are susceptible to photooxidation.Crystallographic evidence of explosive boiling was measured by grazing incidence X-ray diffractometry. For high density poly(ethylene), laser micromachining was observed to induce a local decrease in crystallinity and the appearance of a monoclinic phase that is typically only stable at high temperatures and pressure. This confirmed that fs laser-induced polymer structures form from a quenched melt layer. In addition, the effect of viscoelastic melt properties on pore size was investigated. It was observed that for higher molecular weights (and thus higher viscosities), smaller pore sizes are achieved due to a decreased bubble growth rate during explosive boiling.Finally, a novel atmospheric pulsed laser deposition setup for the incorporation of nanoparticles into laser induced porous structures was developed. Through this technique, hydrophilic titanium oxide nanoclusters were incorporated into porous poly(ethylene terephthalate). By controlling the extent of nanoparticle coverage through the operating fluence, tunable wettability was achieved. Thus, this technique allows the optimization of fs laser induced structures for specific applications without compromising the porous topology." --
Book Synopsis Femtosecond Laser Micromachining of Advanced Materials by : Qiumei Bian
Download or read book Femtosecond Laser Micromachining of Advanced Materials written by Qiumei Bian and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond (fs) laser ablation possesses unique characteristics for micromachining, notably non-thermal interaction with materials, high peak intensity, precision and flexibility. In this dissertation, the potential of fs laser ablation for machining polyurea aerogel and scribing thin film solar cell interconnection grooves is studied. In a preliminary background discussion, some key literature regarding the basic physics and mechanisms that govern ultrafast laser pulse interaction with materials and laser micromachining are summarized. First, the fs laser pulses are used to micromachine polyurea aerogel. The experimental results demonstrate that high quality machining surface can be obtained by tuning the laser fluence and beam scanning speed, which provides insights for micromachining polymers with porous structures. Second, a new fs laser micro-drilling technique is developed to drill micro-holes in stainless steel, in which a hollow core fiber is employed to transmit laser pulses to the target position. The coupling efficiency between the laser and the fiber is investigated and found to be strongly related to pulse energy and pulse duration. Third, the fs laser with various energy, pulse durations, and scanning speeds has been utilized to pattern Indium Tin Oxide (ITO) glass for thin film solar cells. The groove width decreases with increasing pulse duration due to the shorter the pulse duration the more effective of the energy used to material removal. In order to fully remove ITO without damaging the glass, the beam scanning speed need to precisely be controlled. Fourth, fs laser has been utilized to scribe Molybdenum thin film on Polyimide (PI) flexible substrate for Copper Indium Gallium Selenide (CIGS) thin film solar cells. The experimental parameters and results including ablation threshold, single- and multiple-pulse ablation shapes and ablation efficiency were discussed in details. In order to utilize the advantages of the fs lasers, the fabrication process has to be optimized for thin film patterning and structuring applications concerning both efficiency and quality. A predictive 3D Two Temperature Model (TTM) was proposed to predict ablation characteristics and help to understand the fs laser metal ablation mechanisms. 3D temperature field evolution for both electrons and lattice were demonstrated. The ablation model provides an insight to the physical processes occurring during fs laser excitation of metals. Desired processing fluence and process speed regime can be predicted by calculating the ablation threshold, ablation rate and ablation crater geometry using the developed model.
Book Synopsis Femtosecond Laser Micromachining of Microstructures for Sensing and Detection by : Yukun Han
Download or read book Femtosecond Laser Micromachining of Microstructures for Sensing and Detection written by Yukun Han and published by . This book was released on 2011 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This thesis focuses on the fabrication and analysis of miniature functional devices that can be used for different sensing and detection applications. As the first step, the surface characteristics and morphology of the micro/nano structures on substrates (fused silica and silicon) fabricated in water and in air by femtosecond laser were investigated. Based on this study, three micro devices have been designed and fabricated by femtosecond laser, and they were analyzed for optical and chemical sensing and detections. The three micro devices are: 1) an optical Fabry-Perot interferometer in optical fiber (made from fused silica) with smooth cavity surfaces. The Fabry-Perot interferometer was used to measure accurately the refractive index of solution and, hence, is capable of identifying different solutions; 2) a fused silica glass substrate for surface enhanced Raman spectroscopy (SERS). The optimized morphology (in nano/micron scales) on the fused silica surface with post chemical silver planting which can achieve a cross-section enhancement factor (EF) of 2.5 x 106, evaluated by 10−7 M Rhodamine 6G solutions; 3) a nanostructured silicon substrate for the surface-enhanced Raman scattering application. A simple and efficient method was developed to fabricate a substrate that was pre-coated with silver nitrite film to generate silver nanoparticles over a large-area. This study demonstrates that an EF greater than 5 x105, measured by 10−6 M Rhodamine 6G solutions can be achieved. The proposed fabrication techniques and miniature devices can be used to integrate the SERS capability into a microchip (lab-on-a-chip) for biomedical and chemical analysis"--Abstract, leaf iv
Download or read book Molded Optics written by Michael Schaub and published by CRC Press. This book was released on 2016-04-19 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: While several available texts discuss molded plastic optics, none provide information on all classes of molded optics. Filling this gap, Molded Optics: Design and Manufacture presents detailed descriptions of molded plastic, glass, and infrared optics. Since an understanding of the manufacturing process is necessary to develop cost-effective, produ
Book Synopsis Nanofabrication by : Maria Stepanova
Download or read book Nanofabrication written by Maria Stepanova and published by Springer Science & Business Media. This book was released on 2011-11-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Book Synopsis Modern Manufacturing Processes by : Muammer Koç
Download or read book Modern Manufacturing Processes written by Muammer Koç and published by John Wiley & Sons. This book was released on 2019-09-04 with total page 549 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides an in-depth understanding of the fundamentals of a wide range of state-of-the-art materials manufacturing processes Modern manufacturing is at the core of industrial production from base materials to semi-finished goods and final products. Over the last decade, a variety of innovative methods have been developed that allow for manufacturing processes that are more versatile, less energy-consuming, and more environmentally friendly. This book provides readers with everything they need to know about the many manufacturing processes of today. Presented in three parts, Modern Manufacturing Processes starts by covering advanced manufacturing forming processes such as sheet forming, powder forming, and injection molding. The second part deals with thermal and energy-assisted manufacturing processes, including warm and hot hydrostamping. It also covers high speed forming (electromagnetic, electrohydraulic, and explosive forming). The third part reviews advanced material removal process like advanced grinding, electro-discharge machining, micro milling, and laser machining. It also looks at high speed and hard machining and examines advances in material modeling for manufacturing analysis and simulation. Offers a comprehensive overview of advanced materials manufacturing processes Provides practice-oriented information to help readers find the right manufacturing methods for the intended applications Highly relevant for material scientists and engineers in industry Modern Manufacturing Processes is an ideal book for practitioners and researchers in materials and mechanical engineering.
Book Synopsis Micromanufacturing Processes by : V.K. Jain
Download or read book Micromanufacturing Processes written by V.K. Jain and published by CRC Press. This book was released on 2016-04-19 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt: Increased demand for and developments in micromanufacturing have created a need for a resource that covers both the science and technology of this rapidly growing area. With contributions from eminent professors and researchers actively engaged in teaching, research, and development, Micromanufacturing Processes details the basic principles, tools,
