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Efficient Extreme Ultra Violet Mirror Design
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Book Synopsis Efficient Extreme Ultraviolet Mirror Design by : Yen-Min Lee
Download or read book Efficient Extreme Ultraviolet Mirror Design written by Yen-Min Lee and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Extreme ultraviolet (EUV) lithography is a next generation platform with the potential to extend Moore's Law. The EUV mirror is a fundamental component of this system. Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. The discussion is made timely by the opening of commercial avenues for the application of EUV as it begins to be implemented in the development of 5G, AI, edge computing, VR and the Internet of Things. This book explores the theory, function and fabrication of EUV mirrors, as well as the correlation between design by Fresnel's equations and design by photonic bands, and develops a rigorous and efficient FDTD method by applying these considerations to three simulation cases. Intended primarily for EUV industry professionals, Efficient Extreme Ultraviolet Mirror Design will be of particular use to researchers investigating large scale problems or near-field scattering problems in EUV lithography. It will serve as an excellent reference text for anyone working in or studying optical engineering, as well as a high-level introduction for researchers from other fields interested in photolithography and the FDTD method.
Book Synopsis Optical Design by : Greggory Scranton
Download or read book Optical Design written by Greggory Scranton and published by . This book was released on 2017 with total page 72 pages. Available in PDF, EPUB and Kindle. Book excerpt: As optics and photonics technologies advance, more energy efficient use of light will be necessary. This dissertation presents methods developed to enhance the efficiency of three different optical systems: extreme ultraviolet lithography, a hybrid solar photovoltaic/thermal collection system, and thermo-photovoltaics. Extreme ultraviolet (EUV) lithography is the leading contender to become the next industrial scale lithography technology in the semiconductor industry. Traditionally, aberration correction in extreme ultraviolet projection optics requires the use of multiple lossy mirrors, which results in prohibitively high source power requirements. This dissertation analyzes a single spherical mirror projection optical system where aberration correction is built into the mask itself through an adjoint-based optimization algorithm. This greatly reduces the power requirements for the source. Hybrid solar photovoltaic/thermal systems offer a way to convert sunlight into electricity and heat that efficiently uses different parts of the solar spectrum. Highly efficient hybrid solar photovoltaic/thermal systems are enabled by recent advances in photovoltaic technology. Record breaking photovoltaic cells have highly reflective rear mirrors to maximize luminescence efficiency. This reflectivity can also be used to create reflective optics to concentrate the reflected radiation onto a thermal absorber. This dissertation reports on a hybrid solar photovoltaic/thermal system with a thermal efficiency of 37% at a maximum absorber temperature of 365°C, and a direct solar to electric efficiency of 8%. Thermo-photovoltaics offers a method to use photovoltaic cells to efficiently convert heat to electricity. In a thermo-photovoltaic system, light is collected by photovoltaic cells from a local black body source. This dissertation reports on a thermo-photovoltaic device that recycles unused radiation from the photovoltaics with a highly reflective rear mirror. Theoretical efficiencies using this strategy are in excess of 50%. For an emitter temperature of 1207°C, this dissertation reports an experimental power conversion efficiency of 28.1%.
Book Synopsis Extreme Ultraviolet Astronomy by : Martin A. Barstow
Download or read book Extreme Ultraviolet Astronomy written by Martin A. Barstow and published by Cambridge University Press. This book was released on 2003-03-13 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the development of astronomy in the Extreme Ultraviolet wavelength range, from the first rocket-based experiments to later satellite missions. It will be of great value to graduate students and researchers.
Book Synopsis Design, Fabrication, and Characterization of Multilayer Mirrors for Extreme Ultra-Violet Lithography by :
Download or read book Design, Fabrication, and Characterization of Multilayer Mirrors for Extreme Ultra-Violet Lithography written by and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Extreme Ultraviolet Astronomy by : Roger F. Malina
Download or read book Extreme Ultraviolet Astronomy written by Roger F. Malina and published by Elsevier. This book was released on 2013-10-22 with total page 533 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of extreme ultraviolet astronomy will see two major satellite observatories to be launched in 1991, one by ESA (ROSAT mission), one by NASA (EUVE mission). These Proceedings discuss the potential for EUV Astronomy, results from recent missions, approved and possible future missions and new developments in EUV technology.
Book Synopsis Extreme Ultraviolet Explorer by : Stephen P. Maran
Download or read book Extreme Ultraviolet Explorer written by Stephen P. Maran and published by . This book was released on 1990 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Multifacet, Metal Mirror Design for Extreme-Ultraviolet and Soft X-Ray Free-Electron Laser Resonators by : BE. Newnam
Download or read book Multifacet, Metal Mirror Design for Extreme-Ultraviolet and Soft X-Ray Free-Electron Laser Resonators written by BE. Newnam and published by . This book was released on 1988 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: Resonator mirrors with reflectance greater than ~40% are required if free-electron laser (FEL) oscillators are to be extended to wavelengths below 100 nm. The principle of total-external reflection has been used to design multifacet mirrors of several metal films that surpass this requirement between 10 and 100 nm. These reflectors have high reflectance over a relatively broad band which suits well the inherent FEL wavelength tunability. The practical limitations to achieving and maintaining high reflectance include oxide- and carbon-contamination, scattering, and surface-plasmon absorption.
Book Synopsis Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources by : Federico Canova
Download or read book Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources written by Federico Canova and published by Springer. This book was released on 2015-08-17 with total page 205 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book reviews the most recent achievements in optical technologies for XUV and X-ray coherent sources. Particular attention is given to free-electron-laser facilities, but also to other sources available at present, such as synchrotrons, high-order laser harmonics and X-ray lasers. The optical technologies relevant to each type of source are discussed. In addition, the main technologies used for photon handling and conditioning, namely multilayer mirrors, adaptive optics, crystals and gratings are explained. Experiments using coherent light received during the last decades a lot of attention for the X-ray regime. Strong efforts were taken for the realization of almost fully coherent sources, e.g. the free-electron lasers, both as independent sources in the femtosecond and attosecond regimes and as seeding sources for free-electron-lasers and X-ray gas lasers. In parallel to the development of sources, optical technologies for photon handling and conditioning of such coherent and intense X-ray beams advanced. New problems were faced for the realization of optical components of beamlines demanding to manage coherent X-ray photons, e.g. the preservation of coherence and time structure of ultra short pulses.
Book Synopsis Ultraviolet, Visible, and Gravity Astrophysics by :
Download or read book Ultraviolet, Visible, and Gravity Astrophysics written by and published by . This book was released on 1992 with total page 84 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Multifacet, Metal Mirror Design for Extreme-ultraviolet and Soft X-ray Free-electron Laser Resonators by :
Download or read book Multifacet, Metal Mirror Design for Extreme-ultraviolet and Soft X-ray Free-electron Laser Resonators written by and published by . This book was released on 1986 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Resonator mirrors with reflectance greater than approx. 40% are required if free-electron laser (FEL) oscillators are to be extended to wavelengths below 100 nm. The principle of total-external reflection has been used to design multifacet mirrors of several metal films that surpass this requirement between 10 and 100 nm. These reflectors have high reflectance over a relatively broad band which suits well the inherent FEL wavelength tunability. The practical limitations to achieving and maintaining high reflectance include oxide- and carbon-contamination, scattering, and surface-plasmon absorption.
Book Synopsis Astrophysics in the Extreme Ultraviolet by : Stuart Bowyer
Download or read book Astrophysics in the Extreme Ultraviolet written by Stuart Bowyer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 603 pages. Available in PDF, EPUB and Kindle. Book excerpt: From the beginning of Space Astronomy, the Extreme Ultraviolet band of the spectrum (roughly defined as the decade in energy from 90-900 Å) was deemed to be the `unobservable ultraviolet'. Pioneering results from an EUV telescope on the Apollo-Soyuz Mission in 1975 forcibly demonstrated that this view was incorrect; but it required the all-sky surveys of the English Wide-Field Camera and the Extreme Ultraviolet Explorer to demonstrate the broad potential of this field. Over 700 EUV sources have now been detected. Over 150 researchers from 16 countries gathered to share results in this new field at the International Astronomical Union Colloquium No. 152. Papers were presented on a wide variety of topics including cool star coronae, white dwarf atmospheres and evolution, neutron stars, the Io torus, cataclysmic variable stars, active galactic nuclei, the interstellar medium, winds and atmospheres of early type stars, and EUV plasma diagnostics. Selected manuscripts from this meeting are provided in these Conference Proceedings.
Book Synopsis Soft X-Rays and Extreme Ultraviolet Radiation by : David Attwood
Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Book Synopsis Laser Techniques in Extreme Ultraviolet by : Stephen Ernest Harris
Download or read book Laser Techniques in Extreme Ultraviolet written by Stephen Ernest Harris and published by American Institute of Physics. This book was released on 1984 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis New Materials For Multilayer Mirrors in the Extreme Ultraviolet Region (PHD). by : Uli Hiller
Download or read book New Materials For Multilayer Mirrors in the Extreme Ultraviolet Region (PHD). written by Uli Hiller and published by . This book was released on 2002 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Vacuum Ultraviolet Spectroscopy I by :
Download or read book Vacuum Ultraviolet Spectroscopy I written by and published by Academic Press. This book was released on 1998-08-17 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is for practitioners, experimentalists, and graduate students in applied physics, particularly in the fields of atomic and molecular physics, who work with vacuum ultraviolet applications and are in need of choosing the best type of modern instrumentation. It provides first-hand knowledge of the state-of-the-art equipment sources and gives technical information on how to use it, along with a broad reference bibliography. Key Features * Aimed at experimentalists who are in need of choosing the best type of modern instrumentation in this applied field * Contains a detailed chapter on laboratory sources * Provides an up-to-date description of state-of-the-art equipment and techniques * Includes a broad reference bibliography
Book Synopsis Characteristics of Multilayer Mirrors in the X-ray and Extreme Ultraviolet Radiation Ranges by : Hui Jiang
Download or read book Characteristics of Multilayer Mirrors in the X-ray and Extreme Ultraviolet Radiation Ranges written by Hui Jiang and published by . This book was released on 2012 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis comprehensively describes the computational design, fabrication and characterisation of multilayer mirrors intended as key reflective elements for the X-ray and extreme ultraviolet radiation ranges. -- The first central theme was to present various designs for the requirements of soft X-ray microprobes, EUVL lithography systems and high harmonic generation sources, i.e. monochromator, broad-angle supermirror, broadband intensity and polarising beamsplitters and order-selecting mirror. The particle swarm optimisation method was successfully applied in a global search of materials for the structure of mirrors. The robust designs made possible are considered to alleviate fabrication difficulties, such as control of layer thickness errors. -- The second important theme was to analyse the interfacial and surface imperfections in multilayer mirrors. This work is crucial in improving the fabrication technology and in : understanding the basic growth status at the interfaces. Transmission electron microscopy, X-ray diffraction and atomic force microscopy were used in these experiments. The analyses are based on innovative methods, namely time series analysis and wavelet analysis. The evolution tendencies of the layer thicknesses, interfacial roughness and interdiffusion were determined, as were correlated growth, structural uniformity, surface stress damage and surface roughness. -- The final theme was to test a multilayer monochromator for use in a soft X-ray microprobe for radiobiological studies on pathological cells and tissue. The source spectrum was determined using different incidence angles on multilayer mirrors and some suggestions for improvement were presented.
