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Download or read book Device and Process Technologies for Microelectronics, MEMS, and Photonics IV written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Jung-Chih Chiao
Publisher : Society of Photo Optical
ISBN 13 : 9780819460684
Total Pages : 568 pages
Book Rating : 4.4/5 (66 download)
Download or read book Device and Process Technologies for Microelectronics, MEMS, and Photonics IV written by Jung-Chih Chiao and published by Society of Photo Optical. This book was released on 2006-01-01 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes Proceedings Vol. 7821
Author : Hark Hoe Tan
Publisher : Society of Photo Optical
ISBN 13 : 9780819469717
Total Pages : 478 pages
Book Rating : 4.4/5 (697 download)
Download or read book Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV written by Hark Hoe Tan and published by Society of Photo Optical. This book was released on 2008 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes Proceedings Vol. 7821
Download or read book Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV written by and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 574 pages
Book Rating : 4.3/5 (91 download)
Download or read book Device and Process Technologies for MEMS and Microelectronics written by and published by . This book was released on 2005 with total page 574 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Anis Zribi
Publisher : Springer Science & Business Media
ISBN 13 : 0387686096
Total Pages : 224 pages
Book Rating : 4.3/5 (876 download)
Download or read book Functional Thin Films and Nanostructures for Sensors written by Anis Zribi and published by Springer Science & Business Media. This book was released on 2009-04-05 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.
Author : Ai-Qun Liu
Publisher : CRC Press
ISBN 13 : 1420045717
Total Pages : 502 pages
Book Rating : 4.4/5 (2 download)
Download or read book Photonic MEMS Devices written by Ai-Qun Liu and published by CRC Press. This book was released on 2018-10-08 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.
Author : Lukas Chrostowski
Publisher : Cambridge University Press
ISBN 13 : 1316240894
Total Pages : 439 pages
Book Rating : 4.3/5 (162 download)
Download or read book Silicon Photonics Design written by Lukas Chrostowski and published by Cambridge University Press. This book was released on 2015-03-12 with total page 439 pages. Available in PDF, EPUB and Kindle. Book excerpt: From design and simulation through to testing and fabrication, this hands-on introduction to silicon photonics engineering equips students with everything they need to begin creating foundry-ready designs. In-depth discussion of real-world issues and fabrication challenges ensures that students are fully equipped for careers in industry. Step-by-step tutorials, straightforward examples, and illustrative source code fragments guide students through every aspect of the design process, providing a practical framework for developing and refining key skills. Offering industry-ready expertise, the text supports existing PDKs for CMOS UV-lithography foundry services (OpSIS, ePIXfab, imec, LETI, IME and CMC) and the development of new kits for proprietary processes and clean-room based research. Accompanied by additional online resources to support students, this is the perfect learning package for senior undergraduate and graduate students studying silicon photonics design, and academic and industrial researchers involved in the development and manufacture of new silicon photonics systems.
Author : P. Rai-Choudhury
Publisher : SPIE Press
ISBN 13 : 9780819437167
Total Pages : 544 pages
Book Rating : 4.4/5 (371 download)
Download or read book MEMS and MOEMS Technology and Applications written by P. Rai-Choudhury and published by SPIE Press. This book was released on 2000 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Author : Kevin Chau
Publisher : Society of Photo Optical
ISBN 13 : 9780819434937
Total Pages : 394 pages
Book Rating : 4.4/5 (349 download)
Download or read book Device and Process Technologies for MEMS and Microelectronics written by Kevin Chau and published by Society of Photo Optical. This book was released on 1999 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt: This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309059801
Total Pages : 76 pages
Book Rating : 4.3/5 (9 download)
Download or read book Microelectromechanical Systems written by National Research Council and published by National Academies Press. This book was released on 1998-01-01 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Author : Shiban Kishen Koul
Publisher : Springer Nature
ISBN 13 : 9811694435
Total Pages : 386 pages
Book Rating : 4.8/5 (116 download)
Download or read book Micromachined Circuits and Devices written by Shiban Kishen Koul and published by Springer Nature. This book was released on 2022-02-07 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.
Author : Cornelius T. Leondes
Publisher : Springer
ISBN 13 : 9780387245201
Total Pages : 2094 pages
Book Rating : 4.2/5 (452 download)
Download or read book Mems/Nems written by Cornelius T. Leondes and published by Springer. This book was released on 2006-09-06 with total page 2094 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author : D. Harame
Publisher : The Electrochemical Society
ISBN 13 : 1566778255
Total Pages : 1066 pages
Book Rating : 4.5/5 (667 download)
Download or read book SiGe, Ge, and Related Compounds 4: Materials, Processing, and Devices written by D. Harame and published by The Electrochemical Society. This book was released on 2010-10 with total page 1066 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced semiconductor technology is depending on innovation and less on "classical" scaling. SiGe, Ge, and Related Compounds has become a key component in the arsenal in improving semiconductor performance. This symposium discusses the technology to form these materials, process them, FET devices incorporating them, Surfaces and Interfaces, Optoelectronic devices, and HBT devices.
Author : Rajiv Kohli
Publisher : William Andrew
ISBN 13 : 0323431739
Total Pages : 193 pages
Book Rating : 4.3/5 (234 download)
Download or read book Developments in Surface Contamination and Cleaning: Types of Contamination and Contamination Resources written by Rajiv Kohli and published by William Andrew. This book was released on 2016-11-21 with total page 193 pages. Available in PDF, EPUB and Kindle. Book excerpt: Developments in Surface Contamination and Cleaning, Volume Ten, provides a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their cleaning methods. This newest volume in the series discusses mechanisms of particle adhesion, particle behavior in liquid systems, and metallic contamination and its impact. In addition, the book includes a discussion of the types of contaminants, with resources to deal with them and information on environmental issues related to surface contamination and cleaning. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning that also includes information on cleaning at the micro and nano scales. Written by established experts in the contamination field that provide an authoritative resource Presents a comprehensive review of new trends in contaminants and resources for dealing with those contaminants Contains detailed case studies to illustrate various scenarios
Author : David J. Lockwood
Publisher : Springer Nature
ISBN 13 : 3030682226
Total Pages : 512 pages
Book Rating : 4.0/5 (36 download)
Download or read book Silicon Photonics IV written by David J. Lockwood and published by Springer Nature. This book was released on 2021-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: This fourth book in the series Silicon Photonics gathers together reviews of recent advances in the field of silicon photonics that go beyond already established and applied concepts in this technology. The field of research and development in silicon photonics has moved beyond improvements of integrated circuits fabricated with complementary metal–oxide–semiconductor (CMOS) technology to applications in engineering, physics, chemistry, materials science, biology, and medicine. The chapters provided in this book by experts in their fields thus cover not only new research into the highly desired goal of light production in Group IV materials, but also new measurement regimes and novel technologies, particularly in information processing and telecommunication. The book is suited for graduate students, established scientists, and research engineers who want to update their knowledge in these new topics.
Author : Jami Lyn McLaren
Publisher :
ISBN 13 :
Total Pages : 354 pages
Book Rating : 4.:/5 (319 download)
Download or read book Cubic Boron Nitride Film Deposition and Process Diagnostics in a Supersonic Plasma Jet Chemical Vapor Deposition System with Substrate Bias written by Jami Lyn McLaren and published by . This book was released on 2006 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt:
