Design Of Surface Acoustic Wave Sensors With Nanomaterial Sensing Layers

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Design of Surface Acoustic Wave Sensors with Nanomaterial Sensing Layers

Author : Subramanian K. R. S. Sankaranarayanan
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (271 download)

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Book Synopsis Design of Surface Acoustic Wave Sensors with Nanomaterial Sensing Layers by : Subramanian K. R. S. Sankaranarayanan

Download or read book Design of Surface Acoustic Wave Sensors with Nanomaterial Sensing Layers written by Subramanian K. R. S. Sankaranarayanan and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: Surface acoustic wave (SAW) sensors detect chemical and biological species by monitoring the shifts in frequency of surface acoustic waves generated on piezoelectric substrates. Incorporation of nanomaterials having increased surface area as sensing layer have been effective in improving the sensitivity as well as miniaturization of SAW sensors. Selectivity, sensitivity and speed of response are the three primary aspects for any type of sensor. This dissertation focuses on design and development of SAW devices with novel transducer configurations employing nanomaterial sensing layers for enhanced sensing, improved selectivity, and speed of response. The sensing mechanism in these SAW sensors is a complex phenomenon involving interactions across several different length and time scales. Surface acoustic wave propagation at the macro-scale is influenced by several kinetic phenomena occurring at the molecular scale such as adsorption, diffusion, reaction, and desorption which in turn depend on the properties of nanomaterials. This suggests the requirement of a multi-scale model to effectively understand and manipulate the interactions occurring at different length scales, thereby improving sensor design. Sensor response modeling at multiple time and length scales forms part of this research, which includes perturbation theories, and simulation techniques from finite element methods to molecular-level simulations for interpreting the response of these surface acoustic wave chemical and biosensors utilizing alloy nanostructures as sensing layers. Molecular modeling of sensing layers such as transition metal alloy nanoclusters and nanowires is carried out to gain insights into their thermodynamic, structural, mechanical and dynamic properties. Finite element technique is used to understand the acoustic wave propagation at the macroscale for sensing devices operating at MHz frequencies and with novel transducer designs. The findings of this research provide insights into the design of efficient surface acoustic wave sensors. It is expected that this work will lead to a better understanding of surface acoustic wave devices with novel transducer configurations and employing nanomaterial sensing layers.

Nanomaterial Sensing Layer Based Surface Acoustic Wave Hydrogen Sensors

Author : krishnan Srinivasan
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (693 download)

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Book Synopsis Nanomaterial Sensing Layer Based Surface Acoustic Wave Hydrogen Sensors by : krishnan Srinivasan

Download or read book Nanomaterial Sensing Layer Based Surface Acoustic Wave Hydrogen Sensors written by krishnan Srinivasan and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: When the Pd film was exposed to hydrogen it was observed that it produced decreases in frequency to hydrogen challenges, conforming to mass loading effect. It was also observed that the Pd film started degrading with repeated exposure to hydrogen, with shifts after each exposure going smaller and smaller.

Acoustic Wave Sensors

Author : D. S. Ballantine Jr.
Publisher : Elsevier
ISBN 13 : 0080523331
Total Pages : 451 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Acoustic Wave Sensors by : D. S. Ballantine Jr.

Download or read book Acoustic Wave Sensors written by D. S. Ballantine Jr. and published by Elsevier. This book was released on 1996-10-21 with total page 451 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by an interdisciplinary group of experts from both industry and academia, Acoustic Wave Sensors provides an in-depth look at the current state of acoustic wave devices and the scope of their use in chemical, biochemical, and physical measurements, as well as in engineering applications. Because of the inherent interdisciplinary applications of these devices, this book will be useful for the chemist and biochemist interested in the use and development ofthese sensors for specific applications; the electrical engineer involved in the design and improvement of these devices; the chemical engineer and the biotechnologist interested in using these devices for process monitoring and control; and the sensor community at large. Provides in-depth comparison and analyses of different types of acoustic wave devices Discusses operating principles and design considerations Includes table of relevant material constants for quick reference Presents an extensive review of current uses of these devices for chemical, biochemical, and physical measurements, and engineering applications

Nanomanufacturing and Nanomaterials Design

Author : Subhash Singh
Publisher : CRC Press
ISBN 13 : 1000804208
Total Pages : 293 pages
Book Rating : 4.0/5 (8 download)

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Book Synopsis Nanomanufacturing and Nanomaterials Design by : Subhash Singh

Download or read book Nanomanufacturing and Nanomaterials Design written by Subhash Singh and published by CRC Press. This book was released on 2022-12-12 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanomanufacturing includes bottom-up or top-down techniques, each of which gives an advanced, reliable, scaled-up, and economical methods in the production of nanomaterials. The text discusses fundamental concepts, advanced topics, and applications of nanomanufacturing in a comprehensive manner. Features Discussion of the design and fabrication of nano- and micro-devices in a comprehensive manner. Covers nanofabrication techniques for photovoltaics applications. Lists constitutive modelling and simulation of multifunctional nanomaterials. Introduces nanomanufacturing of nanorobots and their industrial applications. Presents nanomanufacturing of a high-performance piezoelectric nanogenerator for energy harvesting. Important topics include nanomanufacturing of high-performance piezoelectric nanogenerators for energy harvesting, nanosensor, nanorobots, nanomedicine, nano diagnostic tools, 3D nano printing, additive nanomanufacturing of functional materials for human‐integrated smart wearables, and nanofabrication techniques. Nanomanufacturing and Nanomaterials Design covers the latest applications of nanomanufacturing for a better understanding of the concepts. The text provides scientific and technological insights on novel routes of design and fabrication of few-layered nanostructures and their heterostructures based on a variety of advanced materials. It will be a valuable resource for senior undergraduate, graduate students and researchers in the fields of mechanical, manufacturing, industrial, production engineering and materials science.

Surface-Launched Acoustic Wave Sensors

Author : Michael Thompson
Publisher : Wiley-Interscience
ISBN 13 :
Total Pages : 224 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Surface-Launched Acoustic Wave Sensors by : Michael Thompson

Download or read book Surface-Launched Acoustic Wave Sensors written by Michael Thompson and published by Wiley-Interscience. This book was released on 1997-04-11 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book concerns the design, operation and application of devices capable of generating acoustic waves in the ultrasonic frequency range. It emphasizes the study of chemical and/or biochemical systems imposed on the surface of such devices, whether operated in the gas- or liquid-phase, i.e. on acoustic wave chemical and biological sensors. It focuses on devices that employ acoustic waves launched and received on the same surface. It touches upon such diverse areas as acoustic wave physics, applied mathematics, chemistry, electronics, fluid mechanics, materials science and polymer science.

Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices

Author : Marco G. Beghi
Publisher : BoD – Books on Demand
ISBN 13 : 9535111892
Total Pages : 616 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices by : Marco G. Beghi

Download or read book Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices written by Marco G. Beghi and published by BoD – Books on Demand. This book was released on 2013-08-28 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.

Gas Sensing Fundamentals

Author : Claus-Dieter Kohl
Publisher : Springer
ISBN 13 : 364254519X
Total Pages : 348 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Gas Sensing Fundamentals by : Claus-Dieter Kohl

Download or read book Gas Sensing Fundamentals written by Claus-Dieter Kohl and published by Springer. This book was released on 2014-08-18 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume, which addresses various basic sensor principles, covers micro gravimetric sensors, semiconducting and nano tube sensors, calorimetric sensors and optical sensors. Furthermore, the authors discuss recent developments in the related sensitive layers including new properties of nano structured metal oxide layers. They provide in-depth insights into the unique chemistry and signal generation of copper oxide in percolating sensors and present a variety of applications of functional polymers made possible by proper imprinting. Highlights of the subjects covered include: • requirements for high-temperature sensors • carbon nano tube sensors • new sensing model for nanostructured In2O3 • bio mimetic approach for semiconductor sensor-based systems • optical readout for inorganic and organic semiconductor sensors • concept of virtual multisensors to improve specificity and selectivity • calorimetric sensors for hydrogen peroxide detection • percolation effect-based sensors to implement dosimeters • imprinted polymer layers for bulk and surface acoustic wave sensors

Innovative Multifunctional Nanomaterial for Photocatalysis, Sensing, and Imaging

Author : Kumar, Azad
Publisher : IGI Global
ISBN 13 : 1668487454
Total Pages : 302 pages
Book Rating : 4.6/5 (684 download)

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Book Synopsis Innovative Multifunctional Nanomaterial for Photocatalysis, Sensing, and Imaging by : Kumar, Azad

Download or read book Innovative Multifunctional Nanomaterial for Photocatalysis, Sensing, and Imaging written by Kumar, Azad and published by IGI Global. This book was released on 2023-10-16 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technology is significantly affected by a material’s ability to adapt to its environment in a beneficial way. These smart systems, in which material qualities react to outside stimuli, are currently being developed. These materials have the potential to significantly improve the performance of new systems by lowering size, weight, cost, power consumption, and complexity while enhancing effectiveness, safety, and adaptability. Materials can be multifunctional on a variety of temporal and compositional levels and at dimensions ranging from nano to macro. Innovative Multifunctional Nanomaterial for Photocatalysis, Sensing, and Imaging clarifies the type, chemical composition, and applications of multifunctional nanomaterials in photocatalysis, sensing, and imaging. This book discusses the most current advances in multifunctional materials for photocatalysis, sensing, and imaging in biological systems. Covering topics such as drug development, nanoparticles, and sensing, this premier reference source is an excellent resource for chemists, engineers, professionals, students and educators of higher education, researchers, and academicians.

Chemical Sensors

Author : Ghenadii Korotcenkov
Publisher : Momentum Press
ISBN 13 : 1606503170
Total Pages : 585 pages
Book Rating : 4.6/5 (65 download)

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Book Synopsis Chemical Sensors by : Ghenadii Korotcenkov

Download or read book Chemical Sensors written by Ghenadii Korotcenkov and published by Momentum Press. This book was released on 2012-08-15 with total page 585 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical sensors are integral to the automation of myriad industrial processes and everyday monitoring of such activities as public safety, engine performance, medical therapeutics, and many more. This 4 volume reference work covering simulation and modeling will serve as the perfect complement to Momentum Press's 6 volume reference works "Chemical Sensors: Fundamentals of Sensing Materials" and "Chemical Sensors: Comprehensive Sensor Technologies", which present detailed information related to materials, technologies, construction and application of various devices for chemical sensing. This 4 volume comprehensive reference work analyzes approaches used for computer simulation and modeling in various fields of chemical sensing and discusses various phenomena important for chemical sensing such as bulk and surface diffusion, adsorption, surface reactions, sintering, conductivity, mass transport, interphase interactions, etc. In this work it will be shown that theoretical modeling and simulation of the processes, being a basic for chemical sensors operation, could provide considerable progress in choosing both optimal materials and optimal configurations of sensing elements for using in chemical sensors. Each simulation and modeling volume in the present series reviews modeling principles and approaches peculiar to specific groups of materials and devices applied for chemical sensing. Volume 3: Solid State Devices covers phenomenological and molecular modelling of processes which control sensing characteristics and parameters of various solid state chemical sensors including surface acoustic wave, MIS, microcantilever, thermoelectric-based devices and sensor array aimed for electronic nose design. Modeling of nanomaterials and nanosystems promising for solid state chemical sensors design is analyzed as well.

Simulation and Characterization of Multi-layered Surface Acoustic Wave Devices for Filtering and Sensing Applications

Author : Hugo Chambon
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (116 download)

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Book Synopsis Simulation and Characterization of Multi-layered Surface Acoustic Wave Devices for Filtering and Sensing Applications by : Hugo Chambon

Download or read book Simulation and Characterization of Multi-layered Surface Acoustic Wave Devices for Filtering and Sensing Applications written by Hugo Chambon and published by . This book was released on 2019 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis deals with the design and characterization of multilayer acoustic wave micro-devices. The fifth generation of communication (5G) requires more efficient acoustic resonators (frequencies > 3GHz, wider bandwidth). In this context, we have designed and optimized using FEM simulation, the geometry of Lamb wave resonator based on AlScN. The final device, consisting of a layer composed of 30% Sc and deposited on a Bragg W/SiO2 mirror, shows excellent performance (coupling coefficient of 5% and quality factor of 768) as well as a good agreement with the simulation. To characterize the surface of BAW and SAW over the 5G frequency range, we also designed and developed a heterodyne interferometer. The latter has been used successfully to characterize surface vibrations with amplitudes between 1 and 10 pm at 5.95 GHz. Furthermore, thanks to their robustness and ability to be wirelessly interrogated,SAW sensors are used in harsh environments and are of great interest for medical applications and structural health monitoring. Recently, the introduction of multi-material stacks offers new development opportunities. We thus studied a pressure sensor composed of two complementary layers, as well as a so-called package- less sensor using different acoustic impedance layers. To design these new sensors, we have developed a simulation tool based on the extraction of mode coupling parameters and taking into account the effects of temperature, stresses and strains to estimate their sensitivity.

Surface Acoustic Wave Devices as Chemical Vapor Sensors

Author : Daniel Gallagher
Publisher :
ISBN 13 :
Total Pages : 288 pages
Book Rating : 4.:/5 (468 download)

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Book Synopsis Surface Acoustic Wave Devices as Chemical Vapor Sensors by : Daniel Gallagher

Download or read book Surface Acoustic Wave Devices as Chemical Vapor Sensors written by Daniel Gallagher and published by . This book was released on 2009 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Surface Acoustic Wave Devices in Telecommunications

Author : Ken-Ya Hashimoto
Publisher : Springer Science & Business Media
ISBN 13 : 9783540672326
Total Pages : 352 pages
Book Rating : 4.6/5 (723 download)

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Book Synopsis Surface Acoustic Wave Devices in Telecommunications by : Ken-Ya Hashimoto

Download or read book Surface Acoustic Wave Devices in Telecommunications written by Ken-Ya Hashimoto and published by Springer Science & Business Media. This book was released on 2000-06-21 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface acoustic wave (SAW) devices are widely used in mobile communications, a rapidly evolving market. This book gives an overview on the latest SAW technologies with an emphasis on the design and simulation of devices, such as resonator-based devices employing the SH-type leaky SAW.

IUTAM Symposium on Recent Advances of Acoustic Waves in Solids

Author : Tsung-Tsong Wu
Publisher : Springer Science & Business Media
ISBN 13 : 9048198933
Total Pages : 441 pages
Book Rating : 4.0/5 (481 download)

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Book Synopsis IUTAM Symposium on Recent Advances of Acoustic Waves in Solids by : Tsung-Tsong Wu

Download or read book IUTAM Symposium on Recent Advances of Acoustic Waves in Solids written by Tsung-Tsong Wu and published by Springer Science & Business Media. This book was released on 2010-09-08 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid growth of the mobile communication market has triggered extensive research on the bulk as well as surface acoustic wave devices in the last decade. Quite a few important results on the modeling and simulation of Film Bulk Acoustic Resonator (FBAR) and Layered SAW devices were reported recently. The other recent advance of acoustic waves in solids is the so-called phononic crystals or phononic band-gap materials. Analogous to the band-gap of light in photonic crystals, acoustic waves in periodic elastic structures also exhibit band-gap. Important applications of phononic band gap materials can potentially be found with creating a vibration free environment in microstructures, and design of advanced acoustic frequency filter, etc. In addition to the wave electronics and phononic crystals, to facilitate the emerging needs in the quantitative nondestructive evaluation of materials, waves in anisotropic solids and/or electro-, magneto- interaction problems also regained much attention recently. Topics treated include: Waves in piezoelectric crystals; Simulation of advanced BAW and SAW devices; Analysis of band gaps in phononic structures; Experimental investigation of phononic structures; Waves in multilayered media;Waves in anisotropic solids and/or electro-, magneto- interaction problems.

Designs and Applications of Surface Acoustic Wave Sensors for Biological and Chemical Sensing and Sample Handling

Author : Stefan Cular
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (294 download)

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Book Synopsis Designs and Applications of Surface Acoustic Wave Sensors for Biological and Chemical Sensing and Sample Handling by : Stefan Cular

Download or read book Designs and Applications of Surface Acoustic Wave Sensors for Biological and Chemical Sensing and Sample Handling written by Stefan Cular and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: Acoustic wave sensors have proven useful in many fields as primarily mass sensitive devices capable of responding to small environmental perturbations. The focus of this dissertation is the development of a new type of surface acoustic wave device with application to material property measurement, and biological and chemical sensing. This device is a combination of three independent acoustic wave devices with these waves propagated across the same area, while retaining independence of actuation and sensor function. The development of a complete sensor system, and its use and operation are presented for several example cases of chemical and biomarker sensing, and sample manipulation. These include experimental and theoretical studies for organic vapor sensing, biological moiety sensing, acoustic streaming to remove loosely bound material, and optimization of designs for these applications.

Layered Surface Acoustic Wave Devices for Film Characterization and Sensor Applications

Author : Michael K. Pedrick
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (476 download)

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Book Synopsis Layered Surface Acoustic Wave Devices for Film Characterization and Sensor Applications by : Michael K. Pedrick

Download or read book Layered Surface Acoustic Wave Devices for Film Characterization and Sensor Applications written by Michael K. Pedrick and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Progresses in Chemical Sensor

Author : Wen Wang
Publisher : BoD – Books on Demand
ISBN 13 : 953512532X
Total Pages : 192 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Progresses in Chemical Sensor by : Wen Wang

Download or read book Progresses in Chemical Sensor written by Wen Wang and published by BoD – Books on Demand. This book was released on 2016-08-24 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: Although the history of chemical sensor dates back not long ago, it has attracted great research interest owing to its many excellent properties such as small size, satisfactory sensitivity, larger dynamic range, low cost, and easy-to-realize automatic measurement and on-line or in situ and continuous detection. With decades of vigorous research works, various sophisticated chemical sensors have been widely used in environmental conservation and monitoring, industrial process monitoring, gas composition analysis, medicine, national defense and public security, and on-site emergency disposal. Hence, the chemical sensor becomes one of the most active and effective directions of modern sensor technology. A typical chemical sensor is the analyzer that responds to a particular analyte in a selective and reversible way and transforms input chemical quantity, ranging from the concentration of a specific sample component to total composition analysis, into an analytically electrical signal. This book is an attempt to highlight recent progresses in the chemical sensors. It is composed of seven chapters and divided into four sections categorized by the working principle of the chemical sensor. This collection of up-to-date information and the latest research progress on chemical sensor will provide valuable references and learning materials for all those working in the field of chemical sensors.

Theoretical and Experimental Investigation on the Use of Surface Acoustic Wave Sensors for Evaluating the Adhesion of SU-8 Thin Films

Download Theoretical and Experimental Investigation on the Use of Surface Acoustic Wave Sensors for Evaluating the Adhesion of SU-8 Thin Films PDF Online Free

Author : Mohamed M. T. E. L. Gowini
Publisher :
ISBN 13 :
Total Pages : 207 pages
Book Rating : 4.:/5 (959 download)

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Book Synopsis Theoretical and Experimental Investigation on the Use of Surface Acoustic Wave Sensors for Evaluating the Adhesion of SU-8 Thin Films by : Mohamed M. T. E. L. Gowini

Download or read book Theoretical and Experimental Investigation on the Use of Surface Acoustic Wave Sensors for Evaluating the Adhesion of SU-8 Thin Films written by Mohamed M. T. E. L. Gowini and published by . This book was released on 2015 with total page 207 pages. Available in PDF, EPUB and Kindle. Book excerpt: This research investigates the use of a SU-8/AlN/Si SAW sensor for evaluating the adhesion of SU-8 thin films. A theoretical model is developed to plot the wave dispersion profile for the SU-8/AlN/Si configuration. A spring interface model is utilized to represent the SU-8/AlN interface using a series of massless springs with stiffness K (N/m^3). The value of the interface spring stiffness K is changed to represent different levels of SU-8 adhesion. The wave dispersion profiles for the intermediate adhesion levels are plotted using the theoretical model. The change in wave velocity due to the change in adhesion of the SU-8 thin film is evaluated. The sensitivities of different configurations of the SU-8/AlN/Si SAW sensors are investigated. Four SAW sensor designs are selected to evaluate the adhesion of the SU-8 thin film. The four SAW sensors operate in the frequency range of 84-208MHz. A process flow for fabricating the SAW sensors at the University of Alberta micro-and nanofabrication facility "nanofab" is developed. The fabricated sensors are packaged using wire bonding to allow measurement of their frequency responses using a Vector Network Analyzer. For each of the four SAW sensor designs two sensor configurations will be developed. In one configuration the SU-8 film will be patterned on top of a thin gold film on the surface of the AlN/Si layers and in the second configuration the gold film will be coated with an Omnicoat layer prior to patterning the SU-8 film. Omnicoat is an adhesion promoter that is widely used to improve the adhesion of SU-8 to gold. The frequency responses from both sensor configurations are measured for each of the four SAW sensor designs and the frequency shift is evaluated. The frequency shift illustrates the change in adhesion of the SU-8 film with and without omnicoat. The phase velocity values also shift to a higher value for the sensor configurations without omnicoat. As the adhesion of the SU-8 film drops in the absence of omnicoat the stresses transferred to the SU-8 layer drop and accordingly the wave propagation is concentrated in the AlN/Si layers, which have a higher wave velocity than SU-8. However, in the presence of omnicoat the adhesion of the SU-8 layer improves and the surface acoustic wave propagates in the SU-8 layer, which leads to a drop in the phase velocity. The theoretical model is used to find the equivalent interface spring stiffness values for the two cases of SU-8 adhesion i.e. with and without omnicoat. This is accomplished by curve fitting the dispersion curves to the phase velocity values for from both sensor configurations. The equivalent interface spring stiffness values are found to be 8.0992 x10^9 N/m^3 and 7.9492x10^9 N/m3 for the SAW sensors with omnicoat and without omnicoat, respectively. These values indicate that when omnicoat is used as an adhesion promoter for SU-8 the interface spring stiffness increases due to the improved adhesion. However, without omnicoat the adhesion of the SU-8 layer drops, which corresponds to the lower interface spring stiffness value.